JP2011035123A - 光電変換部材 - Google Patents
光電変換部材 Download PDFInfo
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- JP2011035123A JP2011035123A JP2009179181A JP2009179181A JP2011035123A JP 2011035123 A JP2011035123 A JP 2011035123A JP 2009179181 A JP2009179181 A JP 2009179181A JP 2009179181 A JP2009179181 A JP 2009179181A JP 2011035123 A JP2011035123 A JP 2011035123A
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- 238000006243 chemical reaction Methods 0.000 title claims abstract description 80
- 229910021417 amorphous silicon Inorganic materials 0.000 claims abstract description 52
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 42
- 238000002161 passivation Methods 0.000 claims abstract description 27
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 20
- 239000000463 material Substances 0.000 claims abstract description 13
- 230000017525 heat dissipation Effects 0.000 claims abstract description 9
- 239000004065 semiconductor Substances 0.000 claims description 28
- 238000010248 power generation Methods 0.000 claims description 26
- 229910021419 crystalline silicon Inorganic materials 0.000 claims description 2
- 239000010410 layer Substances 0.000 abstract description 206
- 239000012790 adhesive layer Substances 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 111
- 239000011521 glass Substances 0.000 description 23
- 229920002120 photoresistant polymer Polymers 0.000 description 19
- 239000000758 substrate Substances 0.000 description 17
- 229910052739 hydrogen Inorganic materials 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 11
- 238000000034 method Methods 0.000 description 10
- 239000011734 sodium Substances 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 230000004888 barrier function Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 8
- 229910052708 sodium Inorganic materials 0.000 description 8
- 238000005530 etching Methods 0.000 description 7
- 229910004298 SiO 2 Inorganic materials 0.000 description 6
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 238000004380 ashing Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 230000035882 stress Effects 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000002041 carbon nanotube Substances 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910021424 microcrystalline silicon Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/052—Cooling means directly associated or integrated with the PV cell, e.g. integrated Peltier elements for active cooling or heat sinks directly associated with the PV cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
- H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/075—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PIN type
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/548—Amorphous silicon PV cells
Abstract
【解決手段】 光電変換部材1は、第1の電極層20、a−Si(非晶質シリコン)によって形成されたnip構造を備えた単一の発電積層体22、及び、当該発電積層体22上に、ニッケル層24を介して成膜されたAlの第2の電極層26を有している。
第2の電極層26上にはSiCNを含む材料で構成されたパッシベーション層28が形成される。パッシベーション層28上には、接着剤層29を介してヒートシンク30(例えばAlによって形成)が取り付けられている。
【選択図】 図1
Description
10 光電変換素子
12 ガードガラス
14 ガラス基板
16 ナトリウムバリア層
20 第1の電極層(n+型ZnO層)
22 発電積層体
100 基体
221 n+型a−Si層
222 i型a−Si層
223 p+型a−Si層
24 ニッケル層(Ni層)
26 第2の電極層(Al層)
28 パッシベーション層(SiCN層)
201 絶縁層(SiCN層)
224 ビアホール
224a SiO2層
30 ヒートシンク
Claims (7)
- 入射光のエネルギを電気エネルギに変換する光電変換素子と、
前記光電変換素子に設けられた放熱部と、
を有し、
前記光電変換素子は、
前記放熱部と接触する部分に設けられ、SiCNを含む材料で構成されたパッシベーション層を有することを特徴とする光電変換部材。 - 前記光電変換素子は、第1の電極層と、第2の電極層と、前記第1および第2の電極層の間に設けられた1つまたは複数の発電積層体とを含み、
前記発電積層体は、p型半導体層と、当該p型半導体層に接触して形成されたi型半導体層と、前記i型半導体層に接触して形成されたn型半導体層とを含み、
前記パッシベーション層は前記第2の電極層に設けられていることを特徴とする請求項1記載の光電変換部材。 - 前記第1の電極層は透明電極であることを特徴とする請求項2記載の光電変換部材。
- 前記発電積層体の前記i型半導体層は、結晶シリコン、微結晶非晶質シリコン、及び、非晶質シリコンのいずれかによって形成されていることを特徴とする請求項1〜3のいずれか一項に記載の光電変換部材。
- 前記第1の電極層は前記n型半導体層が接触する部分がn型のZnOを含み、前記第1の電極層に接触する前記n型半導体層は非晶質シリコンによって形成されていることを特徴とする請求項1〜4のいずれか一項に記載の光電変換部材。
- 前記第2の電極層に接触する前記p型半導体層は非晶質シリコンによって形成されており、前記第2の電極層のうち少なくとも前記p型半導体層が接触する部分には、ニッケル(Ni)を含む層が形成されていることを特徴とする請求項1〜5のいずれか一項に記載の光電変換部材。
- 前記放熱部は、Alを含む材料で構成されたヒートシンクであることを特徴とする請求項1〜6のいずれか一項に記載の光電変換部材。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009179181A JP5224470B2 (ja) | 2009-07-31 | 2009-07-31 | 光電変換部材 |
CN2010800323188A CN102473754A (zh) | 2009-07-31 | 2010-07-26 | 光电转换装置 |
DE112010003152T DE112010003152T5 (de) | 2009-07-31 | 2010-07-26 | Photoelektrische Umwandlungseinrichtung |
KR1020127000342A KR101286904B1 (ko) | 2009-07-31 | 2010-07-26 | 광전 변환 장치 |
PCT/JP2010/062488 WO2011013599A1 (ja) | 2009-07-31 | 2010-07-26 | 光電変換装置 |
US13/383,660 US8941005B2 (en) | 2009-07-31 | 2010-07-26 | Photoelectric conversion device |
TW099125476A TWI499068B (zh) | 2009-07-31 | 2010-07-30 | 光電轉換裝置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009179181A JP5224470B2 (ja) | 2009-07-31 | 2009-07-31 | 光電変換部材 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013043730A Division JP5446022B2 (ja) | 2013-03-06 | 2013-03-06 | 光電変換部材 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011035123A true JP2011035123A (ja) | 2011-02-17 |
JP5224470B2 JP5224470B2 (ja) | 2013-07-03 |
Family
ID=43529254
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009179181A Expired - Fee Related JP5224470B2 (ja) | 2009-07-31 | 2009-07-31 | 光電変換部材 |
Country Status (7)
Country | Link |
---|---|
US (1) | US8941005B2 (ja) |
JP (1) | JP5224470B2 (ja) |
KR (1) | KR101286904B1 (ja) |
CN (1) | CN102473754A (ja) |
DE (1) | DE112010003152T5 (ja) |
TW (1) | TWI499068B (ja) |
WO (1) | WO2011013599A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101223020B1 (ko) | 2011-07-13 | 2013-01-17 | 박충권 | 박막형 실리콘 태양전지 모듈 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5540431B2 (ja) * | 2010-07-30 | 2014-07-02 | 国立大学法人東北大学 | 光電変換部材 |
CN114914321B (zh) * | 2022-06-13 | 2024-02-06 | 南通市乐能电力有限公司 | 一种光伏电板用n型电池片 |
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2009
- 2009-07-31 JP JP2009179181A patent/JP5224470B2/ja not_active Expired - Fee Related
-
2010
- 2010-07-26 US US13/383,660 patent/US8941005B2/en not_active Expired - Fee Related
- 2010-07-26 DE DE112010003152T patent/DE112010003152T5/de not_active Withdrawn
- 2010-07-26 KR KR1020127000342A patent/KR101286904B1/ko not_active IP Right Cessation
- 2010-07-26 WO PCT/JP2010/062488 patent/WO2011013599A1/ja active Application Filing
- 2010-07-26 CN CN2010800323188A patent/CN102473754A/zh active Pending
- 2010-07-30 TW TW099125476A patent/TWI499068B/zh not_active IP Right Cessation
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JPH08213645A (ja) * | 1995-02-02 | 1996-08-20 | Sony Corp | 基体から素子形成層を分離する方法 |
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Publication number | Priority date | Publication date | Assignee | Title |
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KR101223020B1 (ko) | 2011-07-13 | 2013-01-17 | 박충권 | 박막형 실리콘 태양전지 모듈 |
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CN102473754A (zh) | 2012-05-23 |
KR20120036948A (ko) | 2012-04-18 |
KR101286904B1 (ko) | 2013-07-16 |
DE112010003152T5 (de) | 2012-07-05 |
WO2011013599A1 (ja) | 2011-02-03 |
JP5224470B2 (ja) | 2013-07-03 |
US8941005B2 (en) | 2015-01-27 |
US20120111394A1 (en) | 2012-05-10 |
TW201133902A (en) | 2011-10-01 |
TWI499068B (zh) | 2015-09-01 |
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