JP2010519705A5 - - Google Patents

Download PDF

Info

Publication number
JP2010519705A5
JP2010519705A5 JP2009550960A JP2009550960A JP2010519705A5 JP 2010519705 A5 JP2010519705 A5 JP 2010519705A5 JP 2009550960 A JP2009550960 A JP 2009550960A JP 2009550960 A JP2009550960 A JP 2009550960A JP 2010519705 A5 JP2010519705 A5 JP 2010519705A5
Authority
JP
Japan
Prior art keywords
film layer
amorphous diamond
plasma
silicone oil
electronic device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009550960A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010519705A (ja
JP5431967B2 (ja
Filing date
Publication date
Priority claimed from US11/677,327 external-priority patent/US8241713B2/en
Application filed filed Critical
Publication of JP2010519705A publication Critical patent/JP2010519705A/ja
Publication of JP2010519705A5 publication Critical patent/JP2010519705A5/ja
Application granted granted Critical
Publication of JP5431967B2 publication Critical patent/JP5431967B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2009550960A 2007-02-21 2008-02-07 有機発光ダイオードデバイスのための水分障壁コーティング Expired - Fee Related JP5431967B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/677,327 US8241713B2 (en) 2007-02-21 2007-02-21 Moisture barrier coatings for organic light emitting diode devices
US11/677,327 2007-02-21
PCT/US2008/053265 WO2008103558A1 (en) 2007-02-21 2008-02-07 Moisture barrier coatings for organic light emitting diode devices

Publications (3)

Publication Number Publication Date
JP2010519705A JP2010519705A (ja) 2010-06-03
JP2010519705A5 true JP2010519705A5 (enExample) 2011-03-17
JP5431967B2 JP5431967B2 (ja) 2014-03-05

Family

ID=39493283

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009550960A Expired - Fee Related JP5431967B2 (ja) 2007-02-21 2008-02-07 有機発光ダイオードデバイスのための水分障壁コーティング

Country Status (7)

Country Link
US (2) US8241713B2 (enExample)
EP (1) EP2115798B1 (enExample)
JP (1) JP5431967B2 (enExample)
KR (1) KR101481191B1 (enExample)
CN (2) CN101632184A (enExample)
BR (1) BRPI0807753A2 (enExample)
WO (1) WO2008103558A1 (enExample)

Families Citing this family (61)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009032815A1 (en) * 2007-09-06 2009-03-12 3M Innovative Properties Company Tool for making microstructured articles
JP5951928B2 (ja) * 2007-09-06 2016-07-13 スリーエム イノベイティブ プロパティズ カンパニー 光出力の領域制御を提供する光抽出構造体を有する光ガイド
EP2197646B1 (en) * 2007-09-06 2011-11-23 3M Innovative Properties Company Methods of forming molds and methods of forming articles using said molds
CN101821659B (zh) 2007-10-11 2014-09-24 3M创新有限公司 色差共聚焦传感器
WO2009075970A1 (en) * 2007-12-12 2009-06-18 3M Innovative Properties Company Method for making structures with improved edge definition
CN101909873B (zh) * 2007-12-28 2016-10-19 3M创新有限公司 用于阳光控制及其它用途的红外线反射膜
US8846169B2 (en) * 2007-12-28 2014-09-30 3M Innovative Properties Company Flexible encapsulating film systems
TWI420722B (zh) 2008-01-30 2013-12-21 歐斯朗奧托半導體股份有限公司 具有封裝單元之裝置
JP5801558B2 (ja) * 2008-02-26 2015-10-28 スリーエム イノベイティブ プロパティズ カンパニー 多光子露光システム
US7976908B2 (en) * 2008-05-16 2011-07-12 General Electric Company High throughput processes and systems for barrier film deposition and/or encapsulation of optoelectronic devices
US9481927B2 (en) * 2008-06-30 2016-11-01 3M Innovative Properties Company Method of making inorganic or inorganic/organic hybrid barrier films
JP2010103082A (ja) * 2008-09-26 2010-05-06 Toppan Printing Co Ltd 有機エレクトロルミネッセンス素子及びその製造方法
CN102257553B (zh) * 2008-10-01 2014-10-01 皇家飞利浦电子股份有限公司 Oled器件和电子电路
EP2272928A1 (de) 2009-06-23 2011-01-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Hochbarrierenverbunde und Verfahren zu ihrer Herstellung
KR20100097513A (ko) * 2009-02-26 2010-09-03 삼성모바일디스플레이주식회사 유기 발광 표시 장치
DE102009024411A1 (de) * 2009-03-24 2010-09-30 Osram Opto Semiconductors Gmbh Dünnschichtverkapselung für ein optoelektronisches Bauelement, Verfahren zu dessen Herstellung und optoelektronisches Bauelement
TWI522404B (zh) * 2009-03-26 2016-02-21 Lintec Corp A molded body, a manufacturing method thereof, an electronic device element, and an electronic device
CN101697343B (zh) * 2009-10-27 2011-06-15 苏州纳科显示技术有限公司 一种薄膜封装方法
CN102754000A (zh) 2009-11-18 2012-10-24 3M创新有限公司 多层光学膜
US8753711B2 (en) * 2009-12-18 2014-06-17 General Electric Company Edge sealing method using barrier coatings
KR101125567B1 (ko) * 2009-12-24 2012-03-22 삼성모바일디스플레이주식회사 고분자 기판 및 그 제조 방법과 상기 고분자 기판을 포함하는 표시 장치 및 그 제조 방법
WO2011103341A1 (en) * 2010-02-18 2011-08-25 Alliance For Sustainable Energy, Llc Moisture barrier
BR112012030011A2 (pt) 2010-05-25 2016-08-02 3M Innovative Properties Co revestimentos antimicrobianos
TWI515276B (zh) 2010-05-25 2016-01-01 ３Ｍ新設資產公司 抗微生物塗料
US9254506B2 (en) 2010-07-02 2016-02-09 3M Innovative Properties Company Moisture resistant coating for barrier films
CN103079816B (zh) 2010-07-02 2018-01-02 3M创新有限公司 具有包封剂和光伏电池的阻挡组件
FR2965407A1 (fr) * 2010-09-27 2012-03-30 Saint Gobain Procédé de connexion(s) électrique(s) d'un dispositif a diode électroluminescente organique encapsule et un tel dispositif oled
KR102115937B1 (ko) 2010-10-06 2020-05-27 쓰리엠 이노베이티브 프로퍼티즈 컴파니 나노실리카계 코팅을 갖는 반사방지 물품
WO2012047749A1 (en) 2010-10-06 2012-04-12 3M Innovative Properties Company Anti-reflective articles with nanosilica-based coatings and barrier layer
NL2005506C2 (en) * 2010-10-12 2012-04-16 Stichting Energie Sealing layer for electronic or photovoltaic devices.
JP5631729B2 (ja) * 2010-12-28 2014-11-26 株式会社アルバック 半導体装置
JP5648523B2 (ja) * 2011-02-16 2015-01-07 富士通株式会社 半導体装置、電源装置、増幅器及び半導体装置の製造方法
JP5659079B2 (ja) * 2011-05-10 2015-01-28 株式会社アルバック ＺｒＢＯ膜の形成装置
BE1019991A3 (fr) * 2011-05-25 2013-03-05 Agc Glass Europe Procede de depot de couches sur un substrat verrier par pecvd a faible pression.
DE112012003941T5 (de) * 2011-09-21 2014-07-17 Panasonic Corporation Lichtemissionsvorrichtung
US9299956B2 (en) * 2012-06-13 2016-03-29 Aixtron, Inc. Method for deposition of high-performance coatings and encapsulated electronic devices
TWI610806B (zh) 2012-08-08 2018-01-11 ３Ｍ新設資產公司 障壁膜，製造該障壁膜之方法，及包含該障壁膜之物件
SG11201500952VA (en) 2012-08-08 2015-03-30 3M Innovative Properties Co Photovoltaic devices with encapsulating barrier film
WO2014025384A1 (en) 2012-08-08 2014-02-13 3M Innovative Properties Company Urea (multi)-(meth)acrylate (multi)-silane compositions and articles including the same
CN105720207B (zh) * 2013-06-29 2017-09-15 艾克斯特朗欧洲公司 用于高性能涂层的沉积的方法以及封装的电子器件
KR20150012584A (ko) * 2013-07-25 2015-02-04 삼성디스플레이 주식회사 스퍼터링 타겟 제조 방법, 유기 발광 표시 장치 및 유기 발광 표시 장치 제조 방법
US8981408B2 (en) 2013-07-26 2015-03-17 Avago Technologies General Ip (Singapore) Pte. Ltd. Light source having liquid encapsulant
US9356256B2 (en) * 2013-07-31 2016-05-31 Samsung Display Co., Ltd. Flexible display device and manufacturing method thereof
CN106463620B (zh) 2014-04-16 2019-04-12 里兰斯坦福初级大学理事会 用于高性能电子和光电子器件的极性弹性体
JP6469435B2 (ja) * 2014-10-30 2019-02-13 太陽誘電ケミカルテクノロジー株式会社 構造体及び構造体製造方法
US10696840B2 (en) * 2014-11-26 2020-06-30 Kyocera Corporation Resin composition for semiconductor encapsulation and semiconductor device
KR102456654B1 (ko) 2014-11-26 2022-10-18 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치 및 전자 기기
US9899457B2 (en) * 2015-04-24 2018-02-20 Universal Display Corporation Flexible OLED display having increased lifetime
WO2017031031A1 (en) * 2015-08-17 2017-02-23 3M Innovative Properties Company Barrier film constructions
KR102471159B1 (ko) 2015-10-12 2022-11-25 삼성전자주식회사 이미지 센서 및 그 제조 방법
CN105552247B (zh) * 2015-12-08 2018-10-26 上海天马微电子有限公司 复合基板、柔性显示装置及其制备方法
EP3417360B1 (en) 2016-02-16 2019-09-18 SABIC Global Technologies B.V. Barrier film laminate, method of manufacture, and displays comprising the barrier film laminate
CN105957960A (zh) * 2016-06-29 2016-09-21 京东方科技集团股份有限公司 一种磁敏器件及其制备方法
US10595417B2 (en) 2016-07-18 2020-03-17 Verily Life Sciences Llc Method of manufacturing flexible electronic circuits having conformal material coatings
DE102016214493A1 (de) * 2016-08-04 2018-02-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Passives elektrisches Bauteil mit Beschichtung zur Verbesserung der Belastbarkeit
WO2018085715A2 (en) * 2016-11-06 2018-05-11 Orbotech LT Solar, LLC. Method and apparatus for encapsulation of an organic light emitting diode
CN106450032B (zh) * 2016-11-08 2018-01-30 武汉华星光电技术有限公司 Oled显示器及其制作方法
DE102018102416A1 (de) 2017-10-23 2019-04-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verwendung einer kohlenstoffhaltigen Beschichtung zum Schutz eines passiven elektrischen Bauteils vor Angriff durch Ammoniak und Anlage, umfassend ein passives elektrisches Bauteil, das gegen Angriff von Ammoniak geschützt ist
US11380863B2 (en) * 2019-03-19 2022-07-05 Nanosys, Inc. Flexible electroluminescent devices
KR102351155B1 (ko) * 2020-01-30 2022-01-14 성균관대학교산학협력단 멀티 패시베이션을 이용한 인쇄 전자소자 제조 방법 및 인쇄 전자소자
CN115505907A (zh) * 2021-06-22 2022-12-23 江苏菲沃泰纳米科技股份有限公司 应用于柔性基材的复合膜及其制备方法和产品

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5718976A (en) * 1991-05-03 1998-02-17 Advanced Refractory Technologies, Inc. Erosion resistant diamond-like nanocomposite coatings for optical components
US5298587A (en) 1992-12-21 1994-03-29 The Dow Chemical Company Protective film for articles and method
US5440446A (en) 1993-10-04 1995-08-08 Catalina Coatings, Inc. Acrylate coating material
ATE218398T1 (de) 1993-10-04 2002-06-15 3M Innovative Properties Co Verfahren zur herstellung einer acrylatbeschichtung
US5682043A (en) 1994-06-28 1997-10-28 Uniax Corporation Electrochemical light-emitting devices
US5877895A (en) 1995-03-20 1999-03-02 Catalina Coatings, Inc. Multicolor interference coating
US5948166A (en) 1996-11-05 1999-09-07 3M Innovative Properties Company Process and apparatus for depositing a carbon-rich coating on a moving substrate
US5888594A (en) 1996-11-05 1999-03-30 Minnesota Mining And Manufacturing Company Process for depositing a carbon-rich coating on a moving substrate
EP0856592A1 (en) 1997-02-04 1998-08-05 N.V. Bekaert S.A. A coating comprising layers of diamond like carbon and diamond like nanocomposite compositions
US6203898B1 (en) 1997-08-29 2001-03-20 3M Innovatave Properties Company Article comprising a substrate having a silicone coating
EP1145338B1 (en) 1998-12-16 2012-12-05 Samsung Display Co., Ltd. Environmental barrier material for organic light emitting device and method of making
US6083313A (en) 1999-07-27 2000-07-04 Advanced Refractory Technologies, Inc. Hardcoats for flat panel display substrates
US6413645B1 (en) 2000-04-20 2002-07-02 Battelle Memorial Institute Ultrabarrier substrates
US6696157B1 (en) * 2000-03-05 2004-02-24 3M Innovative Properties Company Diamond-like glass thin films
US6492026B1 (en) 2000-04-20 2002-12-10 Battelle Memorial Institute Smoothing and barrier layers on high Tg substrates
DE10044841B4 (de) * 2000-09-11 2006-11-30 Osram Opto Semiconductors Gmbh Plasmaverkapselung für elektronische und mikroelektronische Bauelemente wie OLEDs sowie Verfahren zu dessen Herstellung
DE10130666A1 (de) * 2001-06-28 2003-01-23 Applied Films Gmbh & Co Kg Softcoat
US7106939B2 (en) * 2001-09-19 2006-09-12 3M Innovative Properties Company Optical and optoelectronic articles
US6878419B2 (en) 2001-12-14 2005-04-12 3M Innovative Properties Co. Plasma treatment of porous materials
GB0208261D0 (en) * 2002-04-10 2002-05-22 Dow Corning An atmospheric pressure plasma assembly
US6743524B2 (en) 2002-05-23 2004-06-01 General Electric Company Barrier layer for an article and method of making said barrier layer by expanding thermal plasma
TW569644B (en) 2002-08-06 2004-01-01 Chi Mei Optoelectronics Corp Plastic substrate for organic electroluminescent display element, manufacturing method thereof and organic electroluminescent display element made by the substrate
US7387081B2 (en) 2003-01-23 2008-06-17 3M Innovative Properties Company Plasma reactor including helical electrodes
JP4653964B2 (ja) 2003-04-08 2011-03-16 株式会社栗田製作所 Ｄｌｃ膜の成膜方法およびｄｌｃ成膜物
CN1879238B (zh) * 2003-11-13 2010-04-28 皇家飞利浦电子股份有限公司 包括保护性阻挡层叠层的电子器件
CN1563243A (zh) * 2004-03-25 2005-01-12 复旦大学 一种高热导性和高气密性的薄膜封装材料及其制备方法
US20060063015A1 (en) 2004-09-23 2006-03-23 3M Innovative Properties Company Protected polymeric film
US7342356B2 (en) 2004-09-23 2008-03-11 3M Innovative Properties Company Organic electroluminescent device having protective structure with boron oxide layer and inorganic barrier layer
US8124434B2 (en) * 2004-09-27 2012-02-28 Qualcomm Mems Technologies, Inc. Method and system for packaging a display
US20070020451A1 (en) * 2005-07-20 2007-01-25 3M Innovative Properties Company Moisture barrier coatings

Similar Documents

Publication Publication Date Title
JP2010519705A5 (enExample)
JP2010013676A5 (enExample)
JP2009212509A5 (enExample)
WO2005097484A1 (ja) 透明導電性フィルム、透明導電性フィルムの製造方法及び有機エレクトロルミネッセンス素子
JP2009071288A5 (enExample)
JP6477462B2 (ja) 積層体及びガスバリアフィルム
JP2009071291A5 (enExample)
JP2008211191A5 (enExample)
CN103489880B (zh) 一种显示基板和含有该显示基板的柔性显示装置
JP2008135731A5 (enExample)
CN107331784A (zh) 层叠膜及其制造方法
JP2014534336A5 (enExample)
WO2015098671A1 (ja) 積層フィルムおよびフレキシブル電子デバイス
Pekdemir et al. Low temperature growth of graphene using inductively-coupled plasma chemical vapor deposition
CN106025095A (zh) 一种柔性oled器件的封装结构及显示装置
JP2012517529A5 (enExample)
JP2011119246A5 (ja) 発光装置の作製方法、および発光装置
Campos et al. Surface treatment of polyimide substrates for the transfer and multitransfer of graphene films
WO2018133344A1 (zh) 薄膜晶体管及其制备方法、显示面板和显示装置
JP2006500785A5 (enExample)
WO2005035824A1 (ja) アモルファス窒化硼素薄膜及びその製造方法、並びに積層膜、透明プラスチックフィルム、及び有機ｅｌ素子
JP5195567B2 (ja) 窒化炭素含有膜、その製法、及びその用途
CN108374200A (zh) 一种纳米线状有机单晶晶畴的制备方法
CN203351574U (zh) 阵列基板和显示装置
CN102373470B (zh) 一种制作复合半导体薄膜材料的方法