JP2010519705A5 - - Google Patents

Download PDF

Info

Publication number
JP2010519705A5
JP2010519705A5 JP2009550960A JP2009550960A JP2010519705A5 JP 2010519705 A5 JP2010519705 A5 JP 2010519705A5 JP 2009550960 A JP2009550960 A JP 2009550960A JP 2009550960 A JP2009550960 A JP 2009550960A JP 2010519705 A5 JP2010519705 A5 JP 2010519705A5
Authority
JP
Japan
Prior art keywords
film layer
amorphous diamond
plasma
silicone oil
electronic device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009550960A
Other languages
English (en)
Japanese (ja)
Other versions
JP5431967B2 (ja
JP2010519705A (ja
Filing date
Publication date
Priority claimed from US11/677,327 external-priority patent/US8241713B2/en
Application filed filed Critical
Publication of JP2010519705A publication Critical patent/JP2010519705A/ja
Publication of JP2010519705A5 publication Critical patent/JP2010519705A5/ja
Application granted granted Critical
Publication of JP5431967B2 publication Critical patent/JP5431967B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2009550960A 2007-02-21 2008-02-07 有機発光ダイオードデバイスのための水分障壁コーティング Expired - Fee Related JP5431967B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/677,327 US8241713B2 (en) 2007-02-21 2007-02-21 Moisture barrier coatings for organic light emitting diode devices
US11/677,327 2007-02-21
PCT/US2008/053265 WO2008103558A1 (en) 2007-02-21 2008-02-07 Moisture barrier coatings for organic light emitting diode devices

Publications (3)

Publication Number Publication Date
JP2010519705A JP2010519705A (ja) 2010-06-03
JP2010519705A5 true JP2010519705A5 (cg-RX-API-DMAC7.html) 2011-03-17
JP5431967B2 JP5431967B2 (ja) 2014-03-05

Family

ID=39493283

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009550960A Expired - Fee Related JP5431967B2 (ja) 2007-02-21 2008-02-07 有機発光ダイオードデバイスのための水分障壁コーティング

Country Status (7)

Country Link
US (2) US8241713B2 (cg-RX-API-DMAC7.html)
EP (1) EP2115798B1 (cg-RX-API-DMAC7.html)
JP (1) JP5431967B2 (cg-RX-API-DMAC7.html)
KR (1) KR101481191B1 (cg-RX-API-DMAC7.html)
CN (2) CN104332564B (cg-RX-API-DMAC7.html)
BR (1) BRPI0807753A2 (cg-RX-API-DMAC7.html)
WO (1) WO2008103558A1 (cg-RX-API-DMAC7.html)

Families Citing this family (61)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20100080785A (ko) 2007-09-06 2010-07-12 쓰리엠 이노베이티브 프로퍼티즈 컴파니 광 출력의 영역 제어를 제공하는 광 추출 구조물을 갖는 도광체
JP2010537843A (ja) * 2007-09-06 2010-12-09 スリーエム イノベイティブ プロパティズ カンパニー 微細構造物品を作製するための工具
US9102083B2 (en) 2007-09-06 2015-08-11 3M Innovative Properties Company Methods of forming molds and methods of forming articles using said molds
JP2011501209A (ja) 2007-10-11 2011-01-06 スリーエム イノベイティブ プロパティズ カンパニー 色共焦点センサ
CN101946305B (zh) * 2007-12-12 2014-02-12 3M创新有限公司 用于制备具有改善的边缘清晰度的结构的方法
BRPI0821436A2 (pt) * 2007-12-28 2015-06-16 3M Innovative Properties Co Filmes refletores de infravermelho para controle solar e outros usos
CN104327758A (zh) * 2007-12-28 2015-02-04 3M创新有限公司 柔性封装膜系统
TWI420722B (zh) 2008-01-30 2013-12-21 歐斯朗奧托半導體股份有限公司 具有封裝單元之裝置
JP5801558B2 (ja) 2008-02-26 2015-10-28 スリーエム イノベイティブ プロパティズ カンパニー 多光子露光システム
US7976908B2 (en) * 2008-05-16 2011-07-12 General Electric Company High throughput processes and systems for barrier film deposition and/or encapsulation of optoelectronic devices
CN102124137B (zh) * 2008-06-30 2013-09-11 3M创新有限公司 制备无机或无机/有机杂化阻挡膜的方法
JP2010103082A (ja) * 2008-09-26 2010-05-06 Toppan Printing Co Ltd 有機エレクトロルミネッセンス素子及びその製造方法
CN102257553B (zh) * 2008-10-01 2014-10-01 皇家飞利浦电子股份有限公司 Oled器件和电子电路
EP2272928A1 (de) 2009-06-23 2011-01-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Hochbarrierenverbunde und Verfahren zu ihrer Herstellung
KR20100097513A (ko) * 2009-02-26 2010-09-03 삼성모바일디스플레이주식회사 유기 발광 표시 장치
DE102009024411A1 (de) 2009-03-24 2010-09-30 Osram Opto Semiconductors Gmbh Dünnschichtverkapselung für ein optoelektronisches Bauelement, Verfahren zu dessen Herstellung und optoelektronisches Bauelement
TWI522404B (zh) * 2009-03-26 2016-02-21 Lintec Corp A molded body, a manufacturing method thereof, an electronic device element, and an electronic device
CN101697343B (zh) * 2009-10-27 2011-06-15 苏州纳科显示技术有限公司 一种薄膜封装方法
WO2011062836A1 (en) 2009-11-18 2011-05-26 3M Innovative Properties Company Multi-layer optical films
US8753711B2 (en) * 2009-12-18 2014-06-17 General Electric Company Edge sealing method using barrier coatings
KR101125567B1 (ko) * 2009-12-24 2012-03-22 삼성모바일디스플레이주식회사 고분자 기판 및 그 제조 방법과 상기 고분자 기판을 포함하는 표시 장치 및 그 제조 방법
US9013018B2 (en) 2010-02-18 2015-04-21 Beneq Oy Multilayer moisture barrier
CN102947237B (zh) 2010-05-25 2016-01-20 3M创新有限公司 抗微生物剂涂覆的医学制品
TWI515276B (zh) 2010-05-25 2016-01-01 3M新設資產公司 抗微生物塗料
CN103079816B (zh) 2010-07-02 2018-01-02 3M创新有限公司 具有包封剂和光伏电池的阻挡组件
US9254506B2 (en) * 2010-07-02 2016-02-09 3M Innovative Properties Company Moisture resistant coating for barrier films
FR2965407A1 (fr) * 2010-09-27 2012-03-30 Saint Gobain Procédé de connexion(s) électrique(s) d'un dispositif a diode électroluminescente organique encapsule et un tel dispositif oled
JP6247533B2 (ja) 2010-10-06 2017-12-13 スリーエム イノベイティブ プロパティズ カンパニー ナノシリカ系コーティング及びバリア層を有する反射防止物品
BR112013008304A2 (pt) 2010-10-06 2016-06-14 3M Innovative Properties Co artigos que compreende um substrato transparente, e dispositivo de absorção de energia de luz que compreende o artigo
NL2005506C2 (en) * 2010-10-12 2012-04-16 Stichting Energie Sealing layer for electronic or photovoltaic devices.
JP5631729B2 (ja) * 2010-12-28 2014-11-26 株式会社アルバック 半導体装置
JP5648523B2 (ja) * 2011-02-16 2015-01-07 富士通株式会社 半導体装置、電源装置、増幅器及び半導体装置の製造方法
JP5659079B2 (ja) * 2011-05-10 2015-01-28 株式会社アルバック ZrBO膜の形成装置
BE1019991A3 (fr) * 2011-05-25 2013-03-05 Agc Glass Europe Procede de depot de couches sur un substrat verrier par pecvd a faible pression.
US20140217386A1 (en) * 2011-09-21 2014-08-07 Panasonic Corporation Light emission device
US9299956B2 (en) * 2012-06-13 2016-03-29 Aixtron, Inc. Method for deposition of high-performance coatings and encapsulated electronic devices
KR20150041058A (ko) 2012-08-08 2015-04-15 쓰리엠 이노베이티브 프로퍼티즈 캄파니 다이우레탄 (메트)아크릴레이트-실란 조성물 및 이를 포함하는 물품
US20150221797A1 (en) 2012-08-08 2015-08-06 3M Innovative Properties Company Photovoltaic devices with encapsulating barrier film
TWI610806B (zh) 2012-08-08 2018-01-11 3M新設資產公司 障壁膜,製造該障壁膜之方法,及包含該障壁膜之物件
US9831466B2 (en) * 2013-06-29 2017-11-28 Aixtron Se Method for depositing a multi-layer moisture barrier on electronic devices and electronic devices protected by a multi-layer moisture barrier
KR20150012584A (ko) * 2013-07-25 2015-02-04 삼성디스플레이 주식회사 스퍼터링 타겟 제조 방법, 유기 발광 표시 장치 및 유기 발광 표시 장치 제조 방법
US8981408B2 (en) 2013-07-26 2015-03-17 Avago Technologies General Ip (Singapore) Pte. Ltd. Light source having liquid encapsulant
US9356256B2 (en) * 2013-07-31 2016-05-31 Samsung Display Co., Ltd. Flexible display device and manufacturing method thereof
EP3132471A4 (en) 2014-04-16 2017-11-22 The Board of Trustees of The Leland Stanford Junior University Polar elastomers for high performance electronic and optoelectronic devices
JP6469435B2 (ja) * 2014-10-30 2019-02-13 太陽誘電ケミカルテクノロジー株式会社 構造体及び構造体製造方法
US10696840B2 (en) * 2014-11-26 2020-06-30 Kyocera Corporation Resin composition for semiconductor encapsulation and semiconductor device
KR102456654B1 (ko) 2014-11-26 2022-10-18 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치 및 전자 기기
US9899457B2 (en) * 2015-04-24 2018-02-20 Universal Display Corporation Flexible OLED display having increased lifetime
CN107925010B (zh) 2015-08-17 2020-11-06 3M创新有限公司 阻挡膜构造
KR102471159B1 (ko) 2015-10-12 2022-11-25 삼성전자주식회사 이미지 센서 및 그 제조 방법
CN105552247B (zh) * 2015-12-08 2018-10-26 上海天马微电子有限公司 复合基板、柔性显示装置及其制备方法
WO2017141163A1 (en) * 2016-02-16 2017-08-24 Sabic Global Technologies B.V. Barrier film laminate, method of manufacture, and displays comprising the barrier film laminate
CN105957960A (zh) * 2016-06-29 2016-09-21 京东方科技集团股份有限公司 一种磁敏器件及其制备方法
US10595417B2 (en) 2016-07-18 2020-03-17 Verily Life Sciences Llc Method of manufacturing flexible electronic circuits having conformal material coatings
DE102016214493A1 (de) * 2016-08-04 2018-02-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Passives elektrisches Bauteil mit Beschichtung zur Verbesserung der Belastbarkeit
JP2019534538A (ja) * 2016-11-06 2019-11-28 オルボテック エルティ ソラー,エルエルシー 有機発光ダイオードの封止方法及び装置
CN106450032B (zh) * 2016-11-08 2018-01-30 武汉华星光电技术有限公司 Oled显示器及其制作方法
DE102018102416A1 (de) 2017-10-23 2019-04-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verwendung einer kohlenstoffhaltigen Beschichtung zum Schutz eines passiven elektrischen Bauteils vor Angriff durch Ammoniak und Anlage, umfassend ein passives elektrisches Bauteil, das gegen Angriff von Ammoniak geschützt ist
US11380863B2 (en) * 2019-03-19 2022-07-05 Nanosys, Inc. Flexible electroluminescent devices
KR102351155B1 (ko) * 2020-01-30 2022-01-14 성균관대학교산학협력단 멀티 패시베이션을 이용한 인쇄 전자소자 제조 방법 및 인쇄 전자소자
CN115505907A (zh) * 2021-06-22 2022-12-23 江苏菲沃泰纳米科技股份有限公司 应用于柔性基材的复合膜及其制备方法和产品

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5718976A (en) * 1991-05-03 1998-02-17 Advanced Refractory Technologies, Inc. Erosion resistant diamond-like nanocomposite coatings for optical components
US5298587A (en) 1992-12-21 1994-03-29 The Dow Chemical Company Protective film for articles and method
US5440446A (en) 1993-10-04 1995-08-08 Catalina Coatings, Inc. Acrylate coating material
ATE218398T1 (de) 1993-10-04 2002-06-15 3M Innovative Properties Co Verfahren zur herstellung einer acrylatbeschichtung
US5682043A (en) 1994-06-28 1997-10-28 Uniax Corporation Electrochemical light-emitting devices
US5877895A (en) 1995-03-20 1999-03-02 Catalina Coatings, Inc. Multicolor interference coating
US5948166A (en) 1996-11-05 1999-09-07 3M Innovative Properties Company Process and apparatus for depositing a carbon-rich coating on a moving substrate
US5888594A (en) 1996-11-05 1999-03-30 Minnesota Mining And Manufacturing Company Process for depositing a carbon-rich coating on a moving substrate
EP0856592A1 (en) 1997-02-04 1998-08-05 N.V. Bekaert S.A. A coating comprising layers of diamond like carbon and diamond like nanocomposite compositions
US6203898B1 (en) * 1997-08-29 2001-03-20 3M Innovatave Properties Company Article comprising a substrate having a silicone coating
EP1524708A3 (en) 1998-12-16 2006-07-26 Battelle Memorial Institute Environmental barrier material and methods of making.
US6083313A (en) 1999-07-27 2000-07-04 Advanced Refractory Technologies, Inc. Hardcoats for flat panel display substrates
US6413645B1 (en) 2000-04-20 2002-07-02 Battelle Memorial Institute Ultrabarrier substrates
US6696157B1 (en) 2000-03-05 2004-02-24 3M Innovative Properties Company Diamond-like glass thin films
US6492026B1 (en) 2000-04-20 2002-12-10 Battelle Memorial Institute Smoothing and barrier layers on high Tg substrates
DE10044841B4 (de) * 2000-09-11 2006-11-30 Osram Opto Semiconductors Gmbh Plasmaverkapselung für elektronische und mikroelektronische Bauelemente wie OLEDs sowie Verfahren zu dessen Herstellung
DE10130666A1 (de) * 2001-06-28 2003-01-23 Applied Films Gmbh & Co Kg Softcoat
US7106939B2 (en) * 2001-09-19 2006-09-12 3M Innovative Properties Company Optical and optoelectronic articles
US6878419B2 (en) 2001-12-14 2005-04-12 3M Innovative Properties Co. Plasma treatment of porous materials
GB0208261D0 (en) * 2002-04-10 2002-05-22 Dow Corning An atmospheric pressure plasma assembly
US6743524B2 (en) 2002-05-23 2004-06-01 General Electric Company Barrier layer for an article and method of making said barrier layer by expanding thermal plasma
TW569644B (en) 2002-08-06 2004-01-01 Chi Mei Optoelectronics Corp Plastic substrate for organic electroluminescent display element, manufacturing method thereof and organic electroluminescent display element made by the substrate
US7387081B2 (en) 2003-01-23 2008-06-17 3M Innovative Properties Company Plasma reactor including helical electrodes
JP4653964B2 (ja) 2003-04-08 2011-03-16 株式会社栗田製作所 Dlc膜の成膜方法およびdlc成膜物
EP1685606A1 (en) * 2003-11-13 2006-08-02 Philips Intellectual Property & Standards GmbH Electronic device comprising a protective barrier layer stack
CN1563243A (zh) * 2004-03-25 2005-01-12 复旦大学 一种高热导性和高气密性的薄膜封装材料及其制备方法
US7342356B2 (en) 2004-09-23 2008-03-11 3M Innovative Properties Company Organic electroluminescent device having protective structure with boron oxide layer and inorganic barrier layer
US20060063015A1 (en) 2004-09-23 2006-03-23 3M Innovative Properties Company Protected polymeric film
US8124434B2 (en) * 2004-09-27 2012-02-28 Qualcomm Mems Technologies, Inc. Method and system for packaging a display
US20070020451A1 (en) * 2005-07-20 2007-01-25 3M Innovative Properties Company Moisture barrier coatings

Similar Documents

Publication Publication Date Title
JP2010519705A5 (cg-RX-API-DMAC7.html)
JP2010013676A5 (cg-RX-API-DMAC7.html)
JP2009212509A5 (cg-RX-API-DMAC7.html)
WO2005097484A1 (ja) 透明導電性フィルム、透明導電性フィルムの製造方法及び有機エレクトロルミネッセンス素子
JP2009071288A5 (cg-RX-API-DMAC7.html)
JP6477462B2 (ja) 積層体及びガスバリアフィルム
JP2009071291A5 (cg-RX-API-DMAC7.html)
JP2008211191A5 (cg-RX-API-DMAC7.html)
KR102374497B1 (ko) 적층 필름 및 플렉시블 전자 디바이스
JP2006513126A5 (ja) 基材上にフィルムを堆積する装置
CN103489880B (zh) 一种显示基板和含有该显示基板的柔性显示装置
JP2008135731A5 (cg-RX-API-DMAC7.html)
JP2011238900A5 (cg-RX-API-DMAC7.html)
JP2014534336A5 (cg-RX-API-DMAC7.html)
Pekdemir et al. Low temperature growth of graphene using inductively-coupled plasma chemical vapor deposition
CN106025095A (zh) 一种柔性oled器件的封装结构及显示装置
JP2012517529A5 (cg-RX-API-DMAC7.html)
JP2011528156A5 (cg-RX-API-DMAC7.html)
JP2011119246A5 (ja) 発光装置の作製方法、および発光装置
CN111244110B (zh) 一种显示面板以及电子装置
CN108321207B (zh) 薄膜晶体管及其制备方法、显示面板和显示装置
WO2005035824A1 (ja) アモルファス窒化硼素薄膜及びその製造方法、並びに積層膜、透明プラスチックフィルム、及び有機el素子
CN108374200A (zh) 一种纳米线状有机单晶晶畴的制备方法
CN203351574U (zh) 阵列基板和显示装置
CN102373470B (zh) 一种制作复合半导体薄膜材料的方法