JP2010519515A - 自動検査用に材料を照明するための方法及び装置 - Google Patents

自動検査用に材料を照明するための方法及び装置 Download PDF

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JP2010519515A
JP2010519515A JP2009549653A JP2009549653A JP2010519515A JP 2010519515 A JP2010519515 A JP 2010519515A JP 2009549653 A JP2009549653 A JP 2009549653A JP 2009549653 A JP2009549653 A JP 2009549653A JP 2010519515 A JP2010519515 A JP 2010519515A
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light source
camera
dark field
dark
angle
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JP2009549653A
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Japanese (ja)
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JP2010519515A5 (enExample
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ジー． ブリテン，ケニス
ピー． フローダー，スティーブン
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3M Innovative Properties Co
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8822—Dark field detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8829—Shadow projection or structured background, e.g. for deflectometry
    • G01N2021/8832—Structured background, e.g. for transparent objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8841—Illumination and detection on two sides of object

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2009549653A 2007-02-16 2008-01-21 自動検査用に材料を照明するための方法及び装置 Pending JP2010519515A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US89028407P 2007-02-16 2007-02-16
PCT/US2008/051556 WO2008100683A1 (en) 2007-02-16 2008-01-21 Method and apparatus for illuminating material for automated inspection

Publications (2)

Publication Number Publication Date
JP2010519515A true JP2010519515A (ja) 2010-06-03
JP2010519515A5 JP2010519515A5 (enExample) 2011-03-10

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JP2009549653A Pending JP2010519515A (ja) 2007-02-16 2008-01-21 自動検査用に材料を照明するための方法及び装置

Country Status (7)

Country Link
US (1) US8072593B2 (enExample)
EP (1) EP2126552A4 (enExample)
JP (1) JP2010519515A (enExample)
KR (1) KR101442871B1 (enExample)
CN (1) CN101611309B (enExample)
BR (1) BRPI0807774A2 (enExample)
WO (1) WO2008100683A1 (enExample)

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KR200474087Y1 (ko) * 2013-11-29 2014-09-19 피에스아이트레이딩 주식회사 필름 결함 검사 장치
JP2016534329A (ja) * 2013-10-24 2016-11-04 フィリップス ライティング ホールディング ビー ヴィ 欠陥検査システム及び方法

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ATE524446T1 (de) 2006-12-20 2011-09-15 Boehringer Ingelheim Int Sulfatierte benzimidazolon-derivate mit gemischter serotonin-rezeptor-affinität
US8083201B2 (en) * 2009-02-09 2011-12-27 The Procter & Gamble Company Apparatus and method for supporting and aligning imaging equipment on a web converting manufacturing line
CN101887030A (zh) * 2009-05-15 2010-11-17 圣戈本玻璃法国公司 用于检测透明基板表面和/或其内部的缺陷的方法及系统
CN102169093B (zh) * 2010-12-20 2012-10-10 湖南大学 基于图形处理器的多工位机器视觉成像检测方法及系统
US9019486B2 (en) 2013-01-31 2015-04-28 Fluke Corporation Multi-light fiber source for fiber end-surface inspection
KR20160047360A (ko) * 2014-10-22 2016-05-02 동우 화인켐 주식회사 결함 검출 시스템 및 방법
WO2017001897A1 (pt) * 2015-06-30 2017-01-05 Bosch Car Multimedia Portugal, S.A. Dispositivo e método para deteção de defeitos em superfícies especulares com luz difusa estruturada
CN105222728A (zh) * 2015-09-14 2016-01-06 深圳市星源材质科技股份有限公司 一种锂电池隔膜表面平整度的检测装置及其方法
KR102499831B1 (ko) * 2016-05-23 2023-02-14 코닝 인코포레이티드 글라스 시트의 무중력 형상 예측 방법 및 무중력 형상 기반 글라스 시트 품질 관리 방법
US10402958B2 (en) * 2016-09-22 2019-09-03 Current Lighting Solutions, Llc Systems and methods for window contamination detection
JP6788837B2 (ja) * 2017-01-06 2020-11-25 日本電気硝子株式会社 ガラス板の検査方法及びその製造方法並びにガラス板の検査装置
KR102632169B1 (ko) * 2018-11-12 2024-02-02 삼성디스플레이 주식회사 유리기판 검사 장치 및 방법
KR102162693B1 (ko) 2018-12-14 2020-10-07 동우 화인켐 주식회사 결함 검출 시스템 및 방법
CN110609040B (zh) * 2019-09-30 2022-01-07 苏州精濑光电有限公司 一种隔膜的光学检测方法
JP2023506778A (ja) * 2019-12-13 2023-02-20 コーニング インコーポレイテッド レーザを利用した内包異物検出システム及び方法
CN111999316B (zh) * 2020-09-02 2021-06-04 惠州高视科技有限公司 一种曲面玻璃检测系统及方法
US12175654B2 (en) 2020-11-06 2024-12-24 Carl Zeiss Metrology Llc Surface inspection system and method for differentiating particulate contamination from defects on a surface of a specimen
EP4231001A1 (en) * 2022-02-16 2023-08-23 Carl Zeiss Vision International GmbH Testing device and testing method
EP4660617A1 (en) * 2024-06-05 2025-12-10 Hexagon Technology Center GmbH Method and system for inspecting transparent objects

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JPH01210807A (ja) * 1988-02-18 1989-08-24 Toyota Motor Corp 塗膜平滑度自動検査装置
JPH02116741A (ja) * 1988-10-27 1990-05-01 Mitsubishi Rayon Co Ltd フィッシュアイ検査装置
JPH04236344A (ja) * 1991-01-18 1992-08-25 Omron Corp 視覚検査装置
JPH0674907A (ja) * 1992-06-26 1994-03-18 Central Glass Co Ltd 透明板状体の欠点検出方法
JPH0798282A (ja) * 1993-09-28 1995-04-11 Dainippon Printing Co Ltd 着色パターンの欠陥検査方法
JPH0992692A (ja) * 1995-07-13 1997-04-04 Toray Ind Inc Ｔａｂテープの検査装置および検査方法ならびに実装ｔａｂテープの製造方法および製造装置
JPH11337504A (ja) * 1998-05-26 1999-12-10 Central Glass Co Ltd ガラス板の欠陥識別検査方法および装置
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JP2002214158A (ja) * 2001-01-19 2002-07-31 Central Glass Co Ltd 透明板状体の欠点検出方法および検出装置
JP2003215051A (ja) * 2002-01-22 2003-07-30 Hitachi Ltd フィルムに対する欠陥検査方法およびその装置並びにフィルム状製品、その加工方法およびその加工システム
JP2004177306A (ja) * 2002-11-28 2004-06-24 Canon Inc 塗工欠陥検出装置

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JPH01210807A (ja) * 1988-02-18 1989-08-24 Toyota Motor Corp 塗膜平滑度自動検査装置
JPH02116741A (ja) * 1988-10-27 1990-05-01 Mitsubishi Rayon Co Ltd フィッシュアイ検査装置
JPH04236344A (ja) * 1991-01-18 1992-08-25 Omron Corp 視覚検査装置
JPH0674907A (ja) * 1992-06-26 1994-03-18 Central Glass Co Ltd 透明板状体の欠点検出方法
JPH0798282A (ja) * 1993-09-28 1995-04-11 Dainippon Printing Co Ltd 着色パターンの欠陥検査方法
JPH0992692A (ja) * 1995-07-13 1997-04-04 Toray Ind Inc Ｔａｂテープの検査装置および検査方法ならびに実装ｔａｂテープの製造方法および製造装置
JPH11337504A (ja) * 1998-05-26 1999-12-10 Central Glass Co Ltd ガラス板の欠陥識別検査方法および装置
JP2001215197A (ja) * 2000-02-01 2001-08-10 Sekisui Chem Co Ltd 透明シートの検査方法および装置
JP2002214158A (ja) * 2001-01-19 2002-07-31 Central Glass Co Ltd 透明板状体の欠点検出方法および検出装置
JP2003215051A (ja) * 2002-01-22 2003-07-30 Hitachi Ltd フィルムに対する欠陥検査方法およびその装置並びにフィルム状製品、その加工方法およびその加工システム
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016534329A (ja) * 2013-10-24 2016-11-04 フィリップス ライティング ホールディング ビー ヴィ 欠陥検査システム及び方法
KR200474087Y1 (ko) * 2013-11-29 2014-09-19 피에스아이트레이딩 주식회사 필름 결함 검사 장치

Also Published As

Publication number Publication date
CN101611309B (zh) 2012-06-27
US20080198602A1 (en) 2008-08-21
EP2126552A4 (en) 2016-04-20
KR20090113885A (ko) 2009-11-02
KR101442871B1 (ko) 2014-09-19
EP2126552A1 (en) 2009-12-02
US8072593B2 (en) 2011-12-06
BRPI0807774A2 (pt) 2014-06-17
CN101611309A (zh) 2009-12-23
WO2008100683A1 (en) 2008-08-21

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