JP2010519453A - 高速回転式真空ポンプ - Google Patents
高速回転式真空ポンプ Download PDFInfo
- Publication number
- JP2010519453A JP2010519453A JP2009550267A JP2009550267A JP2010519453A JP 2010519453 A JP2010519453 A JP 2010519453A JP 2009550267 A JP2009550267 A JP 2009550267A JP 2009550267 A JP2009550267 A JP 2009550267A JP 2010519453 A JP2010519453 A JP 2010519453A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- speed
- rotor
- rotary vacuum
- resonance frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/056—Bearings
- F04D29/058—Bearings magnetic; electromagnetic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/06—Lubrication
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
- F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
- F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Thermal Sciences (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
- Compressor (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
Description
Claims (4)
- 電気駆動モータによって駆動され、予め設定された一定の公称回転数(fnom)を有するロータを備えた高速回転式真空ポンプにおいて、
前記ロータは磁気軸受に支持されており、
前記ロータの撓み臨界反回転共振周波数(fcrit) が、前記公称回転数(fnom)を3%乃至最大30%の間で超えており、
能動型超過速度防止手段が設けられていないことを特徴とする高速回転式真空ポンプ。 - 非容積型真空ポンプとして設計されていることを特徴とする請求項1に記載の高速回転式真空ポンプ。
- ターボ分子ポンプであることを特徴とする請求項2に記載の高速回転式真空ポンプ。
- 前記撓み臨界反回転共振周波数(fcrit) は、前記公称回転数(fnom)を5%乃至25%の間で超えていることを特徴とする請求項1乃至3のいずれかに記載の高速回転式真空ポンプ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007009080A DE102007009080A1 (de) | 2007-02-24 | 2007-02-24 | Schnelldrehende Vakuumpumpe |
DE102007009080.5 | 2007-02-24 | ||
PCT/EP2008/051874 WO2008101876A1 (de) | 2007-02-24 | 2008-02-15 | Schnelldrehende vakuumpumpe |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010519453A true JP2010519453A (ja) | 2010-06-03 |
JP5498171B2 JP5498171B2 (ja) | 2014-05-21 |
Family
ID=39322764
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009550267A Active JP5498171B2 (ja) | 2007-02-24 | 2008-02-15 | 高速回転式真空ポンプ |
Country Status (8)
Country | Link |
---|---|
US (1) | US20100322798A1 (ja) |
EP (1) | EP2118492B1 (ja) |
JP (1) | JP5498171B2 (ja) |
KR (1) | KR20090113341A (ja) |
CN (1) | CN101617125B (ja) |
AT (1) | ATE488700T1 (ja) |
DE (2) | DE102007009080A1 (ja) |
WO (1) | WO2008101876A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2970053B1 (fr) * | 2011-01-05 | 2013-01-25 | Turbomeca | Dispositif et procede de protection mecanique |
FR2974400B1 (fr) | 2011-04-22 | 2013-05-10 | Turbomeca | Dispositif de protection mecanique |
DE102020134924A1 (de) | 2020-12-23 | 2022-06-23 | Huga Kg | Türflügel mit flächenbündigem Drückerbeschlag |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6163980A (ja) * | 1984-09-05 | 1986-04-02 | Hitachi Ltd | 磁気デイスク装置 |
JPH08114187A (ja) * | 1994-10-19 | 1996-05-07 | Hitachi Ltd | 密閉形圧縮機 |
JPH09105412A (ja) * | 1995-10-11 | 1997-04-22 | Seiko Seiki Co Ltd | 磁気軸受装置 |
JP2002174238A (ja) * | 2000-12-07 | 2002-06-21 | Seiko Instruments Inc | 磁気軸受制御装置、及び該装置を用いた真空ポンプ |
JP2004116354A (ja) * | 2002-09-25 | 2004-04-15 | Mitsubishi Heavy Ind Ltd | ターボ分子ポンプ |
JP2005214192A (ja) * | 2004-01-29 | 2005-08-11 | Pfeiffer Vacuum Gmbh | ガス摩擦ポンプ |
WO2006007549A2 (en) * | 2004-07-01 | 2006-01-19 | Elliott Company | Four-bearing rotor system |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0772556B2 (ja) * | 1988-03-18 | 1995-08-02 | 株式会社荏原製作所 | ターボ分子ポンプ |
US5824004A (en) * | 1990-06-18 | 1998-10-20 | The Procter & Gamble Company | Stretchable absorbent articles |
ATE195021T1 (de) * | 1992-08-10 | 2000-08-15 | Dow Deutschland Inc | Verfahren und vorrichtung zur überwachung der vibrationserregung eines axialverdichters. |
US5833374A (en) * | 1997-05-19 | 1998-11-10 | Varian Associates, Inc. | Rotatable assembly for supporting of the rotor of a vacuum pump |
JP2000073986A (ja) * | 1998-08-28 | 2000-03-07 | Jeol Ltd | ターボ分子ポンプの振動抑制器 |
EP1024294A3 (en) * | 1999-01-29 | 2002-03-13 | Ibiden Co., Ltd. | Motor and turbo-molecular pump |
JP2001241393A (ja) * | 1999-12-21 | 2001-09-07 | Seiko Seiki Co Ltd | 真空ポンプ |
DE10016912C1 (de) * | 2000-04-05 | 2001-12-13 | Aerodyn Eng Gmbh | Turmeigenfrequenzabhängige Betriebsführung von Offshore-Windenergieanlagen |
DE102004048866A1 (de) * | 2004-10-07 | 2006-04-13 | Leybold Vacuum Gmbh | Schnelldrehende Vakuumpumpe |
-
2007
- 2007-02-24 DE DE102007009080A patent/DE102007009080A1/de not_active Withdrawn
-
2008
- 2008-02-15 EP EP08716880A patent/EP2118492B1/de active Active
- 2008-02-15 DE DE502008001821T patent/DE502008001821D1/de active Active
- 2008-02-15 CN CN2008800058397A patent/CN101617125B/zh active Active
- 2008-02-15 US US12/528,192 patent/US20100322798A1/en not_active Abandoned
- 2008-02-15 WO PCT/EP2008/051874 patent/WO2008101876A1/de active Application Filing
- 2008-02-15 AT AT08716880T patent/ATE488700T1/de active
- 2008-02-15 JP JP2009550267A patent/JP5498171B2/ja active Active
- 2008-02-15 KR KR1020097019677A patent/KR20090113341A/ko not_active Application Discontinuation
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6163980A (ja) * | 1984-09-05 | 1986-04-02 | Hitachi Ltd | 磁気デイスク装置 |
JPH08114187A (ja) * | 1994-10-19 | 1996-05-07 | Hitachi Ltd | 密閉形圧縮機 |
JPH09105412A (ja) * | 1995-10-11 | 1997-04-22 | Seiko Seiki Co Ltd | 磁気軸受装置 |
JP2002174238A (ja) * | 2000-12-07 | 2002-06-21 | Seiko Instruments Inc | 磁気軸受制御装置、及び該装置を用いた真空ポンプ |
JP2004116354A (ja) * | 2002-09-25 | 2004-04-15 | Mitsubishi Heavy Ind Ltd | ターボ分子ポンプ |
JP2005214192A (ja) * | 2004-01-29 | 2005-08-11 | Pfeiffer Vacuum Gmbh | ガス摩擦ポンプ |
WO2006007549A2 (en) * | 2004-07-01 | 2006-01-19 | Elliott Company | Four-bearing rotor system |
Also Published As
Publication number | Publication date |
---|---|
US20100322798A1 (en) | 2010-12-23 |
CN101617125A (zh) | 2009-12-30 |
EP2118492A1 (de) | 2009-11-18 |
KR20090113341A (ko) | 2009-10-29 |
JP5498171B2 (ja) | 2014-05-21 |
DE102007009080A1 (de) | 2008-08-28 |
CN101617125B (zh) | 2011-06-08 |
DE502008001821D1 (de) | 2010-12-30 |
EP2118492B1 (de) | 2010-11-17 |
ATE488700T1 (de) | 2010-12-15 |
WO2008101876A1 (de) | 2008-08-28 |
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