KR20090113341A - 빠르게 회전하는 진공 펌프 - Google Patents

빠르게 회전하는 진공 펌프 Download PDF

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Publication number
KR20090113341A
KR20090113341A KR1020097019677A KR20097019677A KR20090113341A KR 20090113341 A KR20090113341 A KR 20090113341A KR 1020097019677 A KR1020097019677 A KR 1020097019677A KR 20097019677 A KR20097019677 A KR 20097019677A KR 20090113341 A KR20090113341 A KR 20090113341A
Authority
KR
South Korea
Prior art keywords
vacuum pump
frequency
rotor
rotational
bending
Prior art date
Application number
KR1020097019677A
Other languages
English (en)
Korean (ko)
Inventor
하인리히 엥글렌더
크리스티안 하리그
Original Assignee
욀리콘 라이볼트 바쿰 게엠베하
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 욀리콘 라이볼트 바쿰 게엠베하 filed Critical 욀리콘 라이볼트 바쿰 게엠베하
Publication of KR20090113341A publication Critical patent/KR20090113341A/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Compressor (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
KR1020097019677A 2007-02-24 2008-02-15 빠르게 회전하는 진공 펌프 KR20090113341A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102007009080.5 2007-02-24
DE102007009080A DE102007009080A1 (de) 2007-02-24 2007-02-24 Schnelldrehende Vakuumpumpe
PCT/EP2008/051874 WO2008101876A1 (de) 2007-02-24 2008-02-15 Schnelldrehende vakuumpumpe

Publications (1)

Publication Number Publication Date
KR20090113341A true KR20090113341A (ko) 2009-10-29

Family

ID=39322764

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020097019677A KR20090113341A (ko) 2007-02-24 2008-02-15 빠르게 회전하는 진공 펌프

Country Status (8)

Country Link
US (1) US20100322798A1 (ja)
EP (1) EP2118492B1 (ja)
JP (1) JP5498171B2 (ja)
KR (1) KR20090113341A (ja)
CN (1) CN101617125B (ja)
AT (1) ATE488700T1 (ja)
DE (2) DE102007009080A1 (ja)
WO (1) WO2008101876A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130135888A (ko) * 2011-01-05 2013-12-11 터보메카 기계적 보호 방법 및 장치

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2974400B1 (fr) 2011-04-22 2013-05-10 Turbomeca Dispositif de protection mecanique
DE102020134924A1 (de) 2020-12-23 2022-06-23 Huga Kg Türflügel mit flächenbündigem Drückerbeschlag

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6163980A (ja) * 1984-09-05 1986-04-02 Hitachi Ltd 磁気デイスク装置
JPH0772556B2 (ja) * 1988-03-18 1995-08-02 株式会社荏原製作所 ターボ分子ポンプ
US5824004A (en) * 1990-06-18 1998-10-20 The Procter & Gamble Company Stretchable absorbent articles
AU4637493A (en) * 1992-08-10 1994-03-03 Dow Deutschland Inc. Process and device for monitoring vibrational excitation of an axial compressor
JPH08114187A (ja) * 1994-10-19 1996-05-07 Hitachi Ltd 密閉形圧縮機
JPH09105412A (ja) * 1995-10-11 1997-04-22 Seiko Seiki Co Ltd 磁気軸受装置
US5833374A (en) * 1997-05-19 1998-11-10 Varian Associates, Inc. Rotatable assembly for supporting of the rotor of a vacuum pump
JP2000073986A (ja) * 1998-08-28 2000-03-07 Jeol Ltd ターボ分子ポンプの振動抑制器
EP1024294A3 (en) * 1999-01-29 2002-03-13 Ibiden Co., Ltd. Motor and turbo-molecular pump
JP2001241393A (ja) * 1999-12-21 2001-09-07 Seiko Seiki Co Ltd 真空ポンプ
DE10016912C1 (de) * 2000-04-05 2001-12-13 Aerodyn Eng Gmbh Turmeigenfrequenzabhängige Betriebsführung von Offshore-Windenergieanlagen
JP2002174238A (ja) * 2000-12-07 2002-06-21 Seiko Instruments Inc 磁気軸受制御装置、及び該装置を用いた真空ポンプ
JP2004116354A (ja) * 2002-09-25 2004-04-15 Mitsubishi Heavy Ind Ltd ターボ分子ポンプ
ATE362051T1 (de) * 2004-01-29 2007-06-15 Pfeiffer Vacuum Gmbh Gasreibungspumpe
JP4907525B2 (ja) * 2004-07-01 2012-03-28 エリオット・カンパニー ４軸受装置
DE102004048866A1 (de) * 2004-10-07 2006-04-13 Leybold Vacuum Gmbh Schnelldrehende Vakuumpumpe

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130135888A (ko) * 2011-01-05 2013-12-11 터보메카 기계적 보호 방법 및 장치

Also Published As

Publication number Publication date
US20100322798A1 (en) 2010-12-23
DE102007009080A1 (de) 2008-08-28
WO2008101876A1 (de) 2008-08-28
EP2118492A1 (de) 2009-11-18
CN101617125B (zh) 2011-06-08
CN101617125A (zh) 2009-12-30
EP2118492B1 (de) 2010-11-17
ATE488700T1 (de) 2010-12-15
JP2010519453A (ja) 2010-06-03
JP5498171B2 (ja) 2014-05-21
DE502008001821D1 (de) 2010-12-30

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