EP2118492B1 - Schnelldrehende vakuumpumpe - Google Patents

Schnelldrehende vakuumpumpe Download PDF

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Publication number
EP2118492B1
EP2118492B1 EP08716880A EP08716880A EP2118492B1 EP 2118492 B1 EP2118492 B1 EP 2118492B1 EP 08716880 A EP08716880 A EP 08716880A EP 08716880 A EP08716880 A EP 08716880A EP 2118492 B1 EP2118492 B1 EP 2118492B1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
rotor
bending
critical
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP08716880A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP2118492A1 (de
Inventor
Heinrich Engländer
Christian Harig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP2118492A1 publication Critical patent/EP2118492A1/de
Application granted granted Critical
Publication of EP2118492B1 publication Critical patent/EP2118492B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations

Definitions

  • High-speed vacuum pumps which are in particular magnetic bearing non-displacing turbomolecular pumps, need safe overspeed protection, as overspeeds due to centrifugal forces not only lead to the destruction of the vacuum pump, but also pose a high risk to persons.
  • Such pumps are for example EP 0 333 200 A .
  • the object of the invention is to provide a high-speed vacuum pump with a simple and reliable overspeed protection.
  • the rotor is designed so that its bending-critical mating resonance frequency lies between 3% and at most 30% above the constant nominal rotational frequency.
  • the adjustment of the bending-critical resonance frequency in the counterflow such that it is between 3% and at most 30% above the constant nominal rotational frequency can be carried out in many ways.
  • the mass, the geometry and the bearing of the rotor of the vacuum pump can be changed and adjusted so that the bending critical resonance frequency in the opposite direction is a maximum of 30% above the nominal rotational frequency and in this way an overspeed is prevented.
  • the resonant vibrations at the bending-critical resonant frequency in the opposite direction consume a great deal of power, so that driving through to an overlying rotational frequency would only be possible with a considerable power surplus.
  • the drive power of the electric drive motor must be designed so that they of the resonant vibrations at a rotational frequency in the range of bending critical Resonant frequency is completely consumed in the opposite direction. In this way an intrinsic hardware overspeed protection is provided whose failure is virtually eliminated. The cost of an active overspeed protection is eliminated, so that the cost of overspeed protection are significantly reduced.
  • the critical bending frequencies are at relatively high frequencies. Therefore, the bending critical resonance frequency in the opposite direction is particularly suitable to be used as immanent overspeed protection.
  • the rotor of the vacuum pump is supported by a magnetic bearing.
  • a magnetic bearing By this is meant in the present case a magnetic bearing with respect to at least one radial degree of freedom.
  • the rotor of a high-speed vacuum pump is magnetically supported with respect to all five degrees of freedom when a magnetic bearing is provided.
  • the magnetic bearing generated during operation in turn by the balancing radial vibrations of the rotor.
  • a suitable magnetic bearing control algorithm is used to drive through the critical bending resonance frequencies.
  • Such a suitable control algorithm is not provided in the present case. Rather, the magnetic bearing control algorithm is designed so that the critical bending resonance frequencies can not be traversed with the available drive power.
  • the bending-critical resonance frequency is in the opposite direction between 5% and 25% of the nominal rotational frequency, in particular in the range of about 20% above the nominal rotational frequency.
  • a distance of about 20% above the nominal rotational frequency provides sufficient safety with respect to the overshoot of the rotational frequency during startup of the rotor from a standstill to the nominal rotation frequency. In this way, the accidental achievement of the critical bending resonance frequency in the opposite direction can be avoided by overshoot at startup.
  • the bending-critical resonance frequency in the opposite direction should be as close as possible above the nominal rotational frequency in order not to have to interpret the rotor unnecessarily stable.
  • the high-speed vacuum pump is a non-displacing vacuum pump, for example a turbomolecular vacuum pump.
  • a turbomolecular vacuum pump speeds of 10,000 to 100,000 rpm are common.
  • Such high speeds or rotational frequencies suggest for the storage of the rotor in particular a magnetic bearing.
  • the figure shows a so-called Campbell diagram for a high-speed vacuum pump.
  • the resonant frequency f res of the rotor is shown above the rotational frequency f rot of the rotor.
  • the high-speed vacuum pump is a turbomolecular vacuum pump whose rotor is mounted in a five-axis configuration by means of a magnetic bearing.
  • the rotor is driven by an electric drive motor and operated at a constant fixed nominal rotational frequency f nom .
  • the bending-critical resonance frequency f crit is in the opposite direction for the rotor of the vacuum pump at about 970 Hz.
  • the nominal rotational frequency f nom of the vacuum pump or the drive motor, the drive motor control and the rotor is approximately at 800 Hz. This is the critical bending resonance frequency f crit in the counter run about 21% above the nominal rotational frequency f nom of the vacuum pump.
  • the drive power of the electric motor is limited so that it is completely consumed by the reverse resonance vibrations when the rotor rotation frequency f ror the bending-critical resonance frequency f crit should even achieve in reverse .
  • the vacuum pump has no further active overspeed protection, i. has no second speed control circuit, which is provided in addition to the speed control circuit of the engine control.
  • the bending-critical mating resonance frequency curve 16 can not be influenced by appropriate adjustment of the control parameters of the magnetic bearing of the vacuum pump.
  • the control parameters of the magnetic bearing are designed so that the bending-critical resonance frequencies are excited so strong that with the available drive energy driving through the bending-critical resonance frequencies is excluded.
  • the magnetic bearing control parameters are to be interpreted relatively soft.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Compressor (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
EP08716880A 2007-02-24 2008-02-15 Schnelldrehende vakuumpumpe Active EP2118492B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007009080A DE102007009080A1 (de) 2007-02-24 2007-02-24 Schnelldrehende Vakuumpumpe
PCT/EP2008/051874 WO2008101876A1 (de) 2007-02-24 2008-02-15 Schnelldrehende vakuumpumpe

Publications (2)

Publication Number Publication Date
EP2118492A1 EP2118492A1 (de) 2009-11-18
EP2118492B1 true EP2118492B1 (de) 2010-11-17

Family

ID=39322764

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08716880A Active EP2118492B1 (de) 2007-02-24 2008-02-15 Schnelldrehende vakuumpumpe

Country Status (8)

Country Link
US (1) US20100322798A1 (ja)
EP (1) EP2118492B1 (ja)
JP (1) JP5498171B2 (ja)
KR (1) KR20090113341A (ja)
CN (1) CN101617125B (ja)
AT (1) ATE488700T1 (ja)
DE (2) DE102007009080A1 (ja)
WO (1) WO2008101876A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2970053B1 (fr) 2011-01-05 2013-01-25 Turbomeca Dispositif et procede de protection mecanique
FR2974400B1 (fr) 2011-04-22 2013-05-10 Turbomeca Dispositif de protection mecanique
DE102020134924A1 (de) 2020-12-23 2022-06-23 Huga Kg Türflügel mit flächenbündigem Drückerbeschlag

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6163980A (ja) * 1984-09-05 1986-04-02 Hitachi Ltd 磁気デイスク装置
JPH0772556B2 (ja) * 1988-03-18 1995-08-02 株式会社荏原製作所 ターボ分子ポンプ
US5824004A (en) * 1990-06-18 1998-10-20 The Procter & Gamble Company Stretchable absorbent articles
AU4637493A (en) * 1992-08-10 1994-03-03 Dow Deutschland Inc. Process and device for monitoring vibrational excitation of an axial compressor
JPH08114187A (ja) * 1994-10-19 1996-05-07 Hitachi Ltd 密閉形圧縮機
JPH09105412A (ja) * 1995-10-11 1997-04-22 Seiko Seiki Co Ltd 磁気軸受装置
US5833374A (en) * 1997-05-19 1998-11-10 Varian Associates, Inc. Rotatable assembly for supporting of the rotor of a vacuum pump
JP2000073986A (ja) * 1998-08-28 2000-03-07 Jeol Ltd ターボ分子ポンプの振動抑制器
EP1024294A3 (en) * 1999-01-29 2002-03-13 Ibiden Co., Ltd. Motor and turbo-molecular pump
JP2001241393A (ja) * 1999-12-21 2001-09-07 Seiko Seiki Co Ltd 真空ポンプ
DE10016912C1 (de) * 2000-04-05 2001-12-13 Aerodyn Eng Gmbh Turmeigenfrequenzabhängige Betriebsführung von Offshore-Windenergieanlagen
JP2002174238A (ja) * 2000-12-07 2002-06-21 Seiko Instruments Inc 磁気軸受制御装置、及び該装置を用いた真空ポンプ
JP2004116354A (ja) * 2002-09-25 2004-04-15 Mitsubishi Heavy Ind Ltd ターボ分子ポンプ
ATE362051T1 (de) * 2004-01-29 2007-06-15 Pfeiffer Vacuum Gmbh Gasreibungspumpe
JP4907525B2 (ja) * 2004-07-01 2012-03-28 エリオット・カンパニー ４軸受装置
DE102004048866A1 (de) * 2004-10-07 2006-04-13 Leybold Vacuum Gmbh Schnelldrehende Vakuumpumpe

Also Published As

Publication number Publication date
US20100322798A1 (en) 2010-12-23
DE102007009080A1 (de) 2008-08-28
WO2008101876A1 (de) 2008-08-28
EP2118492A1 (de) 2009-11-18
CN101617125B (zh) 2011-06-08
KR20090113341A (ko) 2009-10-29
CN101617125A (zh) 2009-12-30
ATE488700T1 (de) 2010-12-15
JP2010519453A (ja) 2010-06-03
JP5498171B2 (ja) 2014-05-21
DE502008001821D1 (de) 2010-12-30

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