DE502008001821D1 - Schnelldrehende vakuumpumpe - Google Patents

Schnelldrehende vakuumpumpe

Info

Publication number
DE502008001821D1
DE502008001821D1 DE502008001821T DE502008001821T DE502008001821D1 DE 502008001821 D1 DE502008001821 D1 DE 502008001821D1 DE 502008001821 T DE502008001821 T DE 502008001821T DE 502008001821 T DE502008001821 T DE 502008001821T DE 502008001821 D1 DE502008001821 D1 DE 502008001821D1
Authority
DE
Germany
Prior art keywords
vacuum pump
fast
rotor
fnom
turning vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE502008001821T
Other languages
English (en)
Inventor
Heinrich Englaender
Christian Harig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of DE502008001821D1 publication Critical patent/DE502008001821D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Compressor (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
DE502008001821T 2007-02-24 2008-02-15 Schnelldrehende vakuumpumpe Active DE502008001821D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007009080A DE102007009080A1 (de) 2007-02-24 2007-02-24 Schnelldrehende Vakuumpumpe
PCT/EP2008/051874 WO2008101876A1 (de) 2007-02-24 2008-02-15 Schnelldrehende vakuumpumpe

Publications (1)

Publication Number Publication Date
DE502008001821D1 true DE502008001821D1 (de) 2010-12-30

Family

ID=39322764

Family Applications (2)

Application Number Title Priority Date Filing Date
DE102007009080A Withdrawn DE102007009080A1 (de) 2007-02-24 2007-02-24 Schnelldrehende Vakuumpumpe
DE502008001821T Active DE502008001821D1 (de) 2007-02-24 2008-02-15 Schnelldrehende vakuumpumpe

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE102007009080A Withdrawn DE102007009080A1 (de) 2007-02-24 2007-02-24 Schnelldrehende Vakuumpumpe

Country Status (8)

Country Link
US (1) US20100322798A1 (de)
EP (1) EP2118492B1 (de)
JP (1) JP5498171B2 (de)
KR (1) KR20090113341A (de)
CN (1) CN101617125B (de)
AT (1) ATE488700T1 (de)
DE (2) DE102007009080A1 (de)
WO (1) WO2008101876A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2970053B1 (fr) * 2011-01-05 2013-01-25 Turbomeca Dispositif et procede de protection mecanique
FR2974400B1 (fr) 2011-04-22 2013-05-10 Turbomeca Dispositif de protection mecanique
DE102020134924A1 (de) 2020-12-23 2022-06-23 Huga Kg Türflügel mit flächenbündigem Drückerbeschlag

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6163980A (ja) * 1984-09-05 1986-04-02 Hitachi Ltd 磁気デイスク装置
JPH0772556B2 (ja) * 1988-03-18 1995-08-02 株式会社荏原製作所 ターボ分子ポンプ
US5824004A (en) * 1990-06-18 1998-10-20 The Procter & Gamble Company Stretchable absorbent articles
DE69329116T2 (de) * 1992-08-10 2000-12-14 Dow Deutschland Inc Verfahren und vorrichtung zur überwachung der vibrationserregung eines axialverdichters.
JPH08114187A (ja) * 1994-10-19 1996-05-07 Hitachi Ltd 密閉形圧縮機
JPH09105412A (ja) * 1995-10-11 1997-04-22 Seiko Seiki Co Ltd 磁気軸受装置
US5833374A (en) * 1997-05-19 1998-11-10 Varian Associates, Inc. Rotatable assembly for supporting of the rotor of a vacuum pump
JP2000073986A (ja) * 1998-08-28 2000-03-07 Jeol Ltd ターボ分子ポンプの振動抑制器
EP1024294A3 (de) * 1999-01-29 2002-03-13 Ibiden Co., Ltd. Motor und Turbomolekularpumpe
JP2001241393A (ja) * 1999-12-21 2001-09-07 Seiko Seiki Co Ltd 真空ポンプ
DE10016912C1 (de) * 2000-04-05 2001-12-13 Aerodyn Eng Gmbh Turmeigenfrequenzabhängige Betriebsführung von Offshore-Windenergieanlagen
JP2002174238A (ja) * 2000-12-07 2002-06-21 Seiko Instruments Inc 磁気軸受制御装置、及び該装置を用いた真空ポンプ
JP2004116354A (ja) * 2002-09-25 2004-04-15 Mitsubishi Heavy Ind Ltd ターボ分子ポンプ
DE502004003752D1 (de) * 2004-01-29 2007-06-21 Pfeiffer Vacuum Gmbh Gasreibungspumpe
EP1781951B1 (de) * 2004-07-01 2014-05-21 Elliott Company Rotorsystem mit vier lagern
DE102004048866A1 (de) * 2004-10-07 2006-04-13 Leybold Vacuum Gmbh Schnelldrehende Vakuumpumpe

Also Published As

Publication number Publication date
WO2008101876A1 (de) 2008-08-28
US20100322798A1 (en) 2010-12-23
CN101617125A (zh) 2009-12-30
ATE488700T1 (de) 2010-12-15
EP2118492A1 (de) 2009-11-18
EP2118492B1 (de) 2010-11-17
JP5498171B2 (ja) 2014-05-21
KR20090113341A (ko) 2009-10-29
DE102007009080A1 (de) 2008-08-28
CN101617125B (zh) 2011-06-08
JP2010519453A (ja) 2010-06-03

Similar Documents

Publication Publication Date Title
WO2011145842A3 (ko) 유체 펌프
EP1752635A3 (de) Motorbetriebener Lader
WO2011088371A3 (en) Integral compressor-expander
EP2407670A3 (de) Elektrische Pumpe
EP2434162A3 (de) Handgeführtes Blasgerät
EP2749737A3 (de) Elektrische Pumpe
WO2012163996A3 (en) Subsea compressor directly driven by a permanent magnet motor with stator and rotor submerged in liquid
MY162264A (en) Improvements in multi-stage centrifugal compressors
EP2037557A3 (de) Elektromotor mit axialem Luftspalt
GB2455597B (en) Pump
WO2011145844A3 (ko) 방수구조를 갖는 유체 펌프
WO2010017795A3 (de) Pumpeneinheit
EP2354444A3 (de) Pumpsystem und -verfahren für ein Bohrwerkzeug
WO2009100720A3 (de) Vorrichtung zur drehmomentbegrenzung in einem triebstrang einer windkraftanlage
DE502008001821D1 (de) Schnelldrehende vakuumpumpe
EP2199615A3 (de) Motor für einen Verdichter, Verdichter und Kühlkreisvorrichtung
EP2072831A3 (de) Vakuumpumpe
WO2012057488A3 (en) Hermetic compressor
DK2343254T3 (da) Tromlemotor
WO2011145843A3 (ko) 방수형 유체 펌프
WO2012173757A3 (en) Turbine-generator driven by compressed air and magnet motor
EP2412973A3 (de) Schleifringeinheit für getriebelose Windturbinen
EP2763293A3 (de) Motor
TW200610251A (en) Electric rotation device
WO2007140577A3 (en) Molding-system drive