EP2118492B1 - Rapidly rotating vacuum pump - Google Patents

Rapidly rotating vacuum pump Download PDF

Info

Publication number
EP2118492B1
EP2118492B1 EP08716880A EP08716880A EP2118492B1 EP 2118492 B1 EP2118492 B1 EP 2118492B1 EP 08716880 A EP08716880 A EP 08716880A EP 08716880 A EP08716880 A EP 08716880A EP 2118492 B1 EP2118492 B1 EP 2118492B1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
rotor
bending
critical
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP08716880A
Other languages
German (de)
French (fr)
Other versions
EP2118492A1 (en
Inventor
Heinrich Engländer
Christian Harig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP2118492A1 publication Critical patent/EP2118492A1/en
Application granted granted Critical
Publication of EP2118492B1 publication Critical patent/EP2118492B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations

Definitions

  • High-speed vacuum pumps which are in particular magnetic bearing non-displacing turbomolecular pumps, need safe overspeed protection, as overspeeds due to centrifugal forces not only lead to the destruction of the vacuum pump, but also pose a high risk to persons.
  • Such pumps are for example EP 0 333 200 A .
  • the object of the invention is to provide a high-speed vacuum pump with a simple and reliable overspeed protection.
  • the rotor is designed so that its bending-critical mating resonance frequency lies between 3% and at most 30% above the constant nominal rotational frequency.
  • the adjustment of the bending-critical resonance frequency in the counterflow such that it is between 3% and at most 30% above the constant nominal rotational frequency can be carried out in many ways.
  • the mass, the geometry and the bearing of the rotor of the vacuum pump can be changed and adjusted so that the bending critical resonance frequency in the opposite direction is a maximum of 30% above the nominal rotational frequency and in this way an overspeed is prevented.
  • the resonant vibrations at the bending-critical resonant frequency in the opposite direction consume a great deal of power, so that driving through to an overlying rotational frequency would only be possible with a considerable power surplus.
  • the drive power of the electric drive motor must be designed so that they of the resonant vibrations at a rotational frequency in the range of bending critical Resonant frequency is completely consumed in the opposite direction. In this way an intrinsic hardware overspeed protection is provided whose failure is virtually eliminated. The cost of an active overspeed protection is eliminated, so that the cost of overspeed protection are significantly reduced.
  • the critical bending frequencies are at relatively high frequencies. Therefore, the bending critical resonance frequency in the opposite direction is particularly suitable to be used as immanent overspeed protection.
  • the rotor of the vacuum pump is supported by a magnetic bearing.
  • a magnetic bearing By this is meant in the present case a magnetic bearing with respect to at least one radial degree of freedom.
  • the rotor of a high-speed vacuum pump is magnetically supported with respect to all five degrees of freedom when a magnetic bearing is provided.
  • the magnetic bearing generated during operation in turn by the balancing radial vibrations of the rotor.
  • a suitable magnetic bearing control algorithm is used to drive through the critical bending resonance frequencies.
  • Such a suitable control algorithm is not provided in the present case. Rather, the magnetic bearing control algorithm is designed so that the critical bending resonance frequencies can not be traversed with the available drive power.
  • the bending-critical resonance frequency is in the opposite direction between 5% and 25% of the nominal rotational frequency, in particular in the range of about 20% above the nominal rotational frequency.
  • a distance of about 20% above the nominal rotational frequency provides sufficient safety with respect to the overshoot of the rotational frequency during startup of the rotor from a standstill to the nominal rotation frequency. In this way, the accidental achievement of the critical bending resonance frequency in the opposite direction can be avoided by overshoot at startup.
  • the bending-critical resonance frequency in the opposite direction should be as close as possible above the nominal rotational frequency in order not to have to interpret the rotor unnecessarily stable.
  • the high-speed vacuum pump is a non-displacing vacuum pump, for example a turbomolecular vacuum pump.
  • a turbomolecular vacuum pump speeds of 10,000 to 100,000 rpm are common.
  • Such high speeds or rotational frequencies suggest for the storage of the rotor in particular a magnetic bearing.
  • the figure shows a so-called Campbell diagram for a high-speed vacuum pump.
  • the resonant frequency f res of the rotor is shown above the rotational frequency f rot of the rotor.
  • the high-speed vacuum pump is a turbomolecular vacuum pump whose rotor is mounted in a five-axis configuration by means of a magnetic bearing.
  • the rotor is driven by an electric drive motor and operated at a constant fixed nominal rotational frequency f nom .
  • the bending-critical resonance frequency f crit is in the opposite direction for the rotor of the vacuum pump at about 970 Hz.
  • the nominal rotational frequency f nom of the vacuum pump or the drive motor, the drive motor control and the rotor is approximately at 800 Hz. This is the critical bending resonance frequency f crit in the counter run about 21% above the nominal rotational frequency f nom of the vacuum pump.
  • the drive power of the electric motor is limited so that it is completely consumed by the reverse resonance vibrations when the rotor rotation frequency f ror the bending-critical resonance frequency f crit should even achieve in reverse .
  • the vacuum pump has no further active overspeed protection, i. has no second speed control circuit, which is provided in addition to the speed control circuit of the engine control.
  • the bending-critical mating resonance frequency curve 16 can not be influenced by appropriate adjustment of the control parameters of the magnetic bearing of the vacuum pump.
  • the control parameters of the magnetic bearing are designed so that the bending-critical resonance frequencies are excited so strong that with the available drive energy driving through the bending-critical resonance frequencies is excluded.
  • the magnetic bearing control parameters are to be interpreted relatively soft.

Abstract

A rapidly rotating vacuum pump includes: a magnet-mounted rotor driven by an electric drive motor with a predetermined constant nominal rotational frequency (fnom). The rotor and a rotor bearing are embodied in such a way that the bending-critical counter-rotational resonance frequency (fcrit) is between 3% and a maximum of 30% above the nominal rotational frequency (fnom), thereby preventing an overspeed.

Description

Schnelldrehende Vakuumpumpen, das sind insbesondere magnetgelagerte nicht verdrängende Turbomolekularpumpen, benötigen einen sicheren Überdrehzahl-Schutz, da Überdrehzahlen aufgrund der Fliehkräfte nicht nur zur Zerstörung der Vakuumpumpe führen, sondern auch eine hohe Gefahr für Personen darstellen können. Solche Pumpen sind z.B. aus EP 0 333 200 A , EP 1 024 294 A oder EP1 118 774 A bekannt, die alle Merkmale des Oberbegriffs des Anspruchs 1 offenbaren.High-speed vacuum pumps, which are in particular magnetic bearing non-displacing turbomolecular pumps, need safe overspeed protection, as overspeeds due to centrifugal forces not only lead to the destruction of the vacuum pump, but also pose a high risk to persons. Such pumps are for example EP 0 333 200 A . EP 1 024 294 A or EP1 118 774 A known, which disclose all the features of the preamble of claim 1.

In der Praxis werden für den Überdrehzahl-Schutz schnelldrehender Vakuumpumpen aufwändige elektronische Baugruppen verwendet, die die Drehzahl des Rotors bzw. des elektrischen Antriebsmotors kontrollieren und auf elektronischem Wege begrenzen. Zwar kann auf diese Weise mit hohem technischem Aufwand und redundanter Hard- und Software ein sicherer aktiver Überdrehzahl-Schutz für schnelldrehende Vakuumpumpen realisiert werden, jedoch fallen hierfür wegen des hohen technischen Aufwandes erhebliche Kosten an.In practice, for the overspeed protection of fast-rotating vacuum pumps consuming electronic assemblies are used, which control the speed of the rotor and the electric drive motor and on limit electronic ways. Although a safe active overspeed protection for high-speed vacuum pumps can be realized in this way with high technical complexity and redundant hardware and software, but this is due to the high technical complexity significant costs.

Aufgabe der Erfindung ist es, eine schnelldrehende Vakuumpumpe mit einem einfachen und zuverlässigen Überdrehzahl-Schutz zu schaffen.The object of the invention is to provide a high-speed vacuum pump with a simple and reliable overspeed protection.

Diese Aufgabe wird erfindungsgemäß gelöst mit den Merkmalen des Patentanspruches 1.This object is achieved by the features of claim 1.

Bei der erfindungsgemäßen schnelldrehenden Vakuumpumpe ist der Rotor so ausgelegt, dass seine biegekritische Gegenlauf-Resonanzfrequenz zwischen 3% und maximal 30% oberhalb der konstanten Nenn-Drehfrequenz liegt. Es ist kein aktiver Überdrehzahl-Schutz vorgesehen, d.h. keine unmittelbare Drehzahlkontrolle und -begrenzung vorgesehen, die neben der Regelvorrichtung für den elektrischen Antriebsmotor noch zusätzlich besteht.In the case of the fast-rotating vacuum pump according to the invention, the rotor is designed so that its bending-critical mating resonance frequency lies between 3% and at most 30% above the constant nominal rotational frequency. There is no active overspeed protection provided, i. no immediate speed control and limit provided, which in addition to the control device for the electric drive motor still exists.

Die Einstellung der biegekritischen Resonanzfrequenz im Gegenlauf derart, dass sie zwischen 3% und maximal 30% oberhalb der konstanten Nenn-Drehfrequenz liegt, kann auf vielfältige Weise vorgenommen werden. Insbesondere die Masse, die Geometrie sowie die Lagerung des Rotors der Vakuumpumpe können so verändert und angepasst werden, dass die biegekritische Resonanzfrequenz im Gegenlauf maximal 30% oberhalb der Nenn-Drehfrequenz liegt und auf diese Weise immanent eine Überdrehzahl verhindert wird. Die Resonanzschwingungen bei der biegekritischen Resonanzfrequenz im Gegenlauf verbrauchen sehr viel Leistung, so dass ein Durchfahren auf eine darüber liegende Drehfrequenz nur mit einem erheblichen Leistungsüberschuss möglich wäre. Die Antriebsleistung des elektrischen Antriebsmotors muss so ausgelegt sein, dass sie von den Resonanzschwingungen bei einer Drehfrequenz im Bereich der biegekritischen Resonanzfrequenz im Gegenlauf vollständig aufgezehrt wird. Auf diese Weise wird ein immanenter Hardware-Überdrehzahl-Schutz geschaffen, dessen Ausfall praktisch ausgeschlossen ist. Der Aufwand für einen aktiven Überdrehzahl-Schutz entfällt, so dass die Kosten für den Überdrehzahl-Schutz erheblich verringert sind.The adjustment of the bending-critical resonance frequency in the counterflow such that it is between 3% and at most 30% above the constant nominal rotational frequency can be carried out in many ways. In particular, the mass, the geometry and the bearing of the rotor of the vacuum pump can be changed and adjusted so that the bending critical resonance frequency in the opposite direction is a maximum of 30% above the nominal rotational frequency and in this way an overspeed is prevented. The resonant vibrations at the bending-critical resonant frequency in the opposite direction consume a great deal of power, so that driving through to an overlying rotational frequency would only be possible with a considerable power surplus. The drive power of the electric drive motor must be designed so that they of the resonant vibrations at a rotational frequency in the range of bending critical Resonant frequency is completely consumed in the opposite direction. In this way an intrinsic hardware overspeed protection is provided whose failure is virtually eliminated. The cost of an active overspeed protection is eliminated, so that the cost of overspeed protection are significantly reduced.

Im Gegensatz zu starrkörperkritischen Resonanzfrequenzen, die relativ niedrig liegen und in der Regel schnell und mit relativ wenig Leistungsüberschuss durchfahren werden können, liegen die biegekritischen Frequenzen bei relativ hohen Frequenzen. Daher ist die biegekritische Resonanzfrequenz im Gegenlauf besonders geeignet, als immanenter Überdrehzahl-Schutz genutzt zu werden.In contrast to rigid-body-critical resonance frequencies, which are relatively low and can usually be passed through quickly and with relatively little power surplus, the critical bending frequencies are at relatively high frequencies. Therefore, the bending critical resonance frequency in the opposite direction is particularly suitable to be used as immanent overspeed protection.

Der Rotor der Vakuumpumpe ist durch eine Magnetlagerung gelagert. Hierunter ist vorliegend eine Magnetlagerung in Bezug auf mindestens einen radialen Freiheitsgrad gemeint. In der Praxis ist der Rotor einer schnelldrehenden Vakuumpumpe jedoch in Bezug auf alle fünf Freiheitsgrade magnetisch gelagert, wenn eine Magnetlagerung vorgesehen ist. Die Magnetlagerung generiert im Betrieb ihrerseits durch das Ausregeln radiale Schwingungen des Rotors. Hierdurch werden insbesondere auch biegekritische Schwingungen angeregt und ein Durchfahren verhindert, sofern kein geeigneter Magnetlagerungs-Regelalgorithmus zum Durchfahren der biegekritischen Resonanzfrequenzen eingesetzt wird. Ein solcher geeigneter Regelalgorithmus ist vorliegend nicht vorgesehen. Vielmehr ist der Magnetlagerungs-Regelalgorithmus so ausgelegt, dass die biegekritischen Resonanzfrequenzen mit der zur Verfügung stehenden Antriebsenergie nicht durchfahren werden können.The rotor of the vacuum pump is supported by a magnetic bearing. By this is meant in the present case a magnetic bearing with respect to at least one radial degree of freedom. In practice, however, the rotor of a high-speed vacuum pump is magnetically supported with respect to all five degrees of freedom when a magnetic bearing is provided. The magnetic bearing generated during operation in turn by the balancing radial vibrations of the rotor. As a result, particularly bending-critical oscillations are excited and driving through prevented, unless a suitable magnetic bearing control algorithm is used to drive through the critical bending resonance frequencies. Such a suitable control algorithm is not provided in the present case. Rather, the magnetic bearing control algorithm is designed so that the critical bending resonance frequencies can not be traversed with the available drive power.

Vorzugsweise liegt die biegekritische Resonanzfrequenz im Gegenlauf zwischen 5% und 25% der Nenn-Drehfrequenz, insbesondere im Bereich von ungefähr 20% oberhalb der Nenn-Drehfrequenz. Ein Abstand von ungefähr 20% oberhalb der Nenn-Drehfrequenz bietet ausreichende Sicherheit in Bezug auf das Überschwingen der Drehfrequenz beim Hochfahren des Rotors aus dem Stand auf die Nenn-Drehfrequenz. Auf diese Weise kann das versehentliche Erreichen der biegekritischen Resonanzfrequenz im Gegenlauf durch Überschwingen beim Hochfahren vermieden werden. Andererseits sollte die biegekritische Resonanzfrequenz im Gegenlauf so nah wie möglich oberhalb der Nenn-Drehfrequenz liegen, um den Rotor nicht unnötig stabil auslegen zu müssen.Preferably, the bending-critical resonance frequency is in the opposite direction between 5% and 25% of the nominal rotational frequency, in particular in the range of about 20% above the nominal rotational frequency. A distance of about 20% above the nominal rotational frequency provides sufficient safety with respect to the overshoot of the rotational frequency during startup of the rotor from a standstill to the nominal rotation frequency. In this way, the accidental achievement of the critical bending resonance frequency in the opposite direction can be avoided by overshoot at startup. On the other hand, the bending-critical resonance frequency in the opposite direction should be as close as possible above the nominal rotational frequency in order not to have to interpret the rotor unnecessarily stable.

Vorzugsweise ist die schnelldrehende Vakuumpumpe eine nicht-verdrängende Vakuumpumpe, beispielsweise eine Turbomolekular-Vakuumpumpe. Bei Turbomolekular-Vakuumpumpen sind Drehzahlen von 10.000 bis 100.000 U/min üblich. Derartig hohe Drehzahlen bzw. Drehfrequenzen legen zur Lagerung des Rotors in besonderem Maße eine Magnetlagerung nahe.Preferably, the high-speed vacuum pump is a non-displacing vacuum pump, for example a turbomolecular vacuum pump. In turbomolecular vacuum pumps, speeds of 10,000 to 100,000 rpm are common. Such high speeds or rotational frequencies suggest for the storage of the rotor in particular a magnetic bearing.

Im Folgenden wird die Erfindung anhand der Figur erläutert.In the following the invention will be explained with reference to FIG.

Die Figur zeigt ein sogenanntes Campbell-Diagramm für eine schnelldrehende Vakuumpumpe.The figure shows a so-called Campbell diagram for a high-speed vacuum pump.

In dem Campbell-Diagramm der Figur ist die Resonanzfrequenz fres des Rotors über der Drehfrequenz frot des Rotors dargestellt.In the Campbell diagram of the figure, the resonant frequency f res of the rotor is shown above the rotational frequency f rot of the rotor.

Die schnelldrehende Vakuumpumpe ist vorliegend eine Turbomolekular-Vakuumpumpe, deren Rotor durch eine Magnetlagerung vollständig fünfachsig gelagert ist. Der Rotor wird durch einen elektrischen Antriebsmotor angetrieben und bei einer konstanten festgelegten Nenn-Drehfrequenz fnom betrieben.In the present case, the high-speed vacuum pump is a turbomolecular vacuum pump whose rotor is mounted in a five-axis configuration by means of a magnetic bearing. The rotor is driven by an electric drive motor and operated at a constant fixed nominal rotational frequency f nom .

In dem Diagramm sind in einem unteren Drehzahlbereich zunächst jeweils zwei mal zwei starrkörperkritische Resonanzfrequenz-Kurven 12,14 dargestellt. Diese Resonanzfrequenzen verändern sich in relativ geringem Maße mit der Drehfrequenz frot des Rotors. Ferner sind bei höheren Drehzahlen eine biegekritische Gegenlauf-Resonanzfrequenz-Kurve 16 und eine biegekritische Gleichlauf-Resonanzfrequenz-Kurve 18 dargestellt. Ferner ist mit einer unterbrochenen Linie der sogenannte Fahrstrahl 20 dargestellt. Dort, wo der Fahrstrahl 20 die biegekritische Gegenlauf-Resonanzfrequenz-Kurve 16 schneidet, kann die biegekritische Gegenlauf-Resonanzfrequenz fcrit für die vorliegende Vakuumpumpe abgelesen werden.In the diagram, two times two rigid-body critical resonance frequency curves 12, 14 are initially shown in a lower speed range. These resonance frequencies change to a relatively small extent with the rotational frequency f rot of the rotor. Furthermore, at higher speeds, a bending-critical mating resonance frequency curve 16 and a bending-critical synchronous resonance frequency curve 18 are shown. Furthermore, with a broken line of the so-called driving beam 20 shown. Where the traveling beam 20 intersects the bending-critical mating resonance frequency curve 16, the bending-critical mating resonance frequency f crit for the present vacuum pump can be read off.

Im vorliegenden Beispiel liegt die biegekritische Resonanzfrequenz fcrit im Gegenlauf für den Rotor der Vakuumpumpe bei ungefähr 970 Hz. Die Nenn-Drehfrequenz fnom der Vakuumpumpe bzw. des Antriebsmotors, der Antriebsmotorregelung und des Rotors liegt ungefähr bei 800 Hz. Damit liegt die biegekritische Resonanzfrequenz fcrit im Gegenlauf ungefähr 21% oberhalb der Nenn-Drehfrequenz fnom der Vakuumpumpe.In the present example, the bending-critical resonance frequency f crit is in the opposite direction for the rotor of the vacuum pump at about 970 Hz. The nominal rotational frequency f nom of the vacuum pump or the drive motor, the drive motor control and the rotor is approximately at 800 Hz. This is the critical bending resonance frequency f crit in the counter run about 21% above the nominal rotational frequency f nom of the vacuum pump.

Die Antriebsleistung des Elektromotors ist derart begrenzt, dass sie vollständig von den Gegenlauf-Resonanzschwingungen aufgezehrt wird, wenn die Rotor-Drehfrequenz fror die biegekritische Resonanzfrequenz fcrit im Gegenlauf einmal erreichen sollte.The drive power of the electric motor is limited so that it is completely consumed by the reverse resonance vibrations when the rotor rotation frequency f ror the bending-critical resonance frequency f crit should even achieve in reverse .

Die Vakuumpumpe weist keinerlei weiteren aktiven Überdrehzahl-Schutz auf, d.h. weist keinen zweiten Drehzahl-Regelkreis auf, der neben dem Drehzahl-Regelkreis der Motorsteuerung vorgesehen ist.The vacuum pump has no further active overspeed protection, i. has no second speed control circuit, which is provided in addition to the speed control circuit of the engine control.

Die biegekritische Gegenlauf-Resonanzfrequenz-Kurve 16 kann durch entsprechende Einstellung der Regelparameter der Magnetlagerung der Vakuumpumpe nicht beeinflusst werden. Allerdings sind die Regelparameter der Magnetlagerung so ausgelegt, dass die biegekritischen Resonanzfrequenzen so stark angeregt werden, dass mit der zur Verfügung stehenden Antriebsenergie ein Durchfahren der biegekritischen Resonanzfrequenzen ausgeschlossen ist. Hierzu sind die Magnetlagerungs-Regelparameter relativ weich auszulegen.The bending-critical mating resonance frequency curve 16 can not be influenced by appropriate adjustment of the control parameters of the magnetic bearing of the vacuum pump. However, the control parameters of the magnetic bearing are designed so that the bending-critical resonance frequencies are excited so strong that with the available drive energy driving through the bending-critical resonance frequencies is excluded. For this purpose, the magnetic bearing control parameters are to be interpreted relatively soft.

Claims (4)

  1. A rapidly rotating vacuum pump, comprising a rotor driven by an electric drive motor and having a predetermined constant nominal rotational frequency (fnom), wherein
    said rotor is supported by a magnetic bearing, and
    no active overspeed protection is provided,
    characterized in that
    the bending-critical counter-rotational resonance frequency (fcrit) of the rotor is between 3% and a maximum of 30% above the nominal rotational frequency (fnom).
  2. The rapidly rotating vacuum pump according to claim 1, characterized in that said vacuum pump is designed as a non-displacing vacuum pump.
  3. The rapidly rotating vacuum pump according to claim 2, characterized in that said vacuum pump is a turbomolecular pump.
  4. The rapidly rotating vacuum pump according to any one of claims 1 to 3, characterized in that the bending-critical counter-rotational resonance frequency (fcrit) is between 5% and 25% above the nominal rotational frequency (fnom).
EP08716880A 2007-02-24 2008-02-15 Rapidly rotating vacuum pump Active EP2118492B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007009080A DE102007009080A1 (en) 2007-02-24 2007-02-24 Fast-rotating vacuum pump
PCT/EP2008/051874 WO2008101876A1 (en) 2007-02-24 2008-02-15 Rapidly rotating vacuum pump

Publications (2)

Publication Number Publication Date
EP2118492A1 EP2118492A1 (en) 2009-11-18
EP2118492B1 true EP2118492B1 (en) 2010-11-17

Family

ID=39322764

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08716880A Active EP2118492B1 (en) 2007-02-24 2008-02-15 Rapidly rotating vacuum pump

Country Status (8)

Country Link
US (1) US20100322798A1 (en)
EP (1) EP2118492B1 (en)
JP (1) JP5498171B2 (en)
KR (1) KR20090113341A (en)
CN (1) CN101617125B (en)
AT (1) ATE488700T1 (en)
DE (2) DE102007009080A1 (en)
WO (1) WO2008101876A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2970053B1 (en) * 2011-01-05 2013-01-25 Turbomeca DEVICE AND METHOD FOR MECHANICAL PROTECTION
FR2974400B1 (en) 2011-04-22 2013-05-10 Turbomeca MECHANICAL PROTECTION DEVICE
DE102020134924A1 (en) 2020-12-23 2022-06-23 Huga Kg Door leaf with flush handle fitting

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6163980A (en) * 1984-09-05 1986-04-02 Hitachi Ltd Magnetic disk device
JPH0772556B2 (en) * 1988-03-18 1995-08-02 株式会社荏原製作所 Turbo molecular pump
US5824004A (en) * 1990-06-18 1998-10-20 The Procter & Gamble Company Stretchable absorbent articles
KR100304466B1 (en) * 1992-08-10 2001-11-22 스티븐에스. 그레이스 Processes and devices for monitoring the vibrations of axial compressors
JPH08114187A (en) * 1994-10-19 1996-05-07 Hitachi Ltd Hermetic compressor
JPH09105412A (en) * 1995-10-11 1997-04-22 Seiko Seiki Co Ltd Magnetic bearing device
US5833374A (en) * 1997-05-19 1998-11-10 Varian Associates, Inc. Rotatable assembly for supporting of the rotor of a vacuum pump
JP2000073986A (en) * 1998-08-28 2000-03-07 Jeol Ltd Vibration restraining unit for turbo-molecular pump
EP1024294A3 (en) * 1999-01-29 2002-03-13 Ibiden Co., Ltd. Motor and turbo-molecular pump
JP2001241393A (en) * 1999-12-21 2001-09-07 Seiko Seiki Co Ltd Vacuum pump
DE10016912C1 (en) * 2000-04-05 2001-12-13 Aerodyn Eng Gmbh Operation of offshore wind turbines dependent on the natural frequency of the tower
JP2002174238A (en) * 2000-12-07 2002-06-21 Seiko Instruments Inc Magnetic bearing control device and vacuum pump using the same
JP2004116354A (en) * 2002-09-25 2004-04-15 Mitsubishi Heavy Ind Ltd Turbo molecular pump
EP1559914B1 (en) * 2004-01-29 2007-05-09 Pfeiffer Vacuum GmbH Gas friction pump
CA2571920C (en) * 2004-07-01 2012-10-02 Elliott Company Four-bearing rotor system
DE102004048866A1 (en) * 2004-10-07 2006-04-13 Leybold Vacuum Gmbh Fast-rotating vacuum pump

Also Published As

Publication number Publication date
WO2008101876A1 (en) 2008-08-28
JP2010519453A (en) 2010-06-03
CN101617125B (en) 2011-06-08
DE502008001821D1 (en) 2010-12-30
US20100322798A1 (en) 2010-12-23
KR20090113341A (en) 2009-10-29
JP5498171B2 (en) 2014-05-21
EP2118492A1 (en) 2009-11-18
DE102007009080A1 (en) 2008-08-28
CN101617125A (en) 2009-12-30
ATE488700T1 (en) 2010-12-15

Similar Documents

Publication Publication Date Title
EP3112676B1 (en) Method for operating a wind farm and wind farm
DE60030833T2 (en) vacuum pump
EP2280116B1 (en) Pulper with torque motor and method for operating such a pulper
EP1749576B1 (en) Comminuting apparatus having a frequency controlled electric motor and an epicyclic gear mechanism
EP2118492B1 (en) Rapidly rotating vacuum pump
EP2017435A2 (en) Turbo engine with electric machine and magnetic bearings
EP1230487B1 (en) High-speed turbopump
DE112016006959T5 (en) TRANSMISSION WITH VARIABLE SPEED
EP1243791A2 (en) Power transmission for a wind turbine
EP2741980A1 (en) Continuous conveyor for transporting heavy bulk material or articles
EP3677771A1 (en) Vertical wind turbine
DE202018106694U1 (en) Rotor assembly unit
EP1626179B1 (en) Vacuum pump
EP2721258A1 (en) Method for operating a rotary machine
EP3491238A2 (en) Nacelle and rotor for a wind turbine, and method
DE102020104347A1 (en) Turbomachine with adjustable blades and operating procedures
DE102007006915A1 (en) Turbo-molecular pump rotor element, has reinforcement element connecting parts of pinions with each other and providing improved distribution of loads during operation of rotor element
WO2008098867A1 (en) Recycling machine, in particular comminuting machine
WO2015044009A1 (en) Dressing machine and dressing plant
EP2525082A1 (en) Method for controlling positioning and run-up procedures in wind power plants
DE102008058149A1 (en) Turbo-molecular pump, has rotor element arranged in pump housing, and stator rings surrounding rotor element, where rings exhibit attachment piece extending in longitudinal direction such that adjacent stator ring is arranged within piece
EP1766119B1 (en) Drive unit for a loom and loom comprising a drive unit of this type
DE102012111402A1 (en) Hydrostatic transmission for wind power plant for current generation, has motors driven by pumps and connected with generator, where total delivery rate of pumps and/or displacement of motors is changed based on wind load at rotor
EP3580450B1 (en) Wind turbine having radial turbines and a generator
DE102008058151A1 (en) Turbomolecular pump

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20090821

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

DAX Request for extension of the european patent (deleted)
GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

RIN1 Information on inventor provided before grant (corrected)

Inventor name: ENGLAENDER, HEINRICH

Inventor name: HARIG, CHRISTIAN

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

REF Corresponds to:

Ref document number: 502008001821

Country of ref document: DE

Date of ref document: 20101230

Kind code of ref document: P

REG Reference to a national code

Ref country code: NL

Ref legal event code: VDEP

Effective date: 20101117

LTIE Lt: invalidation of european patent or patent extension

Effective date: 20101117

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20110217

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20101117

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20101117

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20101117

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20101117

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20101117

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20110217

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20101117

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20101117

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20110317

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20101117

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20110317

REG Reference to a national code

Ref country code: IE

Ref legal event code: FD4D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20110218

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20101117

Ref country code: CZ

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20101117

Ref country code: IE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20101117

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20110228

BERE Be: lapsed

Owner name: OERLIKON LEYBOLD VACUUM G.M.B.H.

Effective date: 20110228

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20101117

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20101117

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20101117

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20101117

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20110228

26N No opposition filed

Effective date: 20110818

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20110228

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 502008001821

Country of ref document: DE

Effective date: 20110818

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20101117

Ref country code: MT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20101117

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20120228

Year of fee payment: 5

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20120229

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20120229

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20130219

Year of fee payment: 6

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20110215

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20101117

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20101117

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20131031

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20130228

REG Reference to a national code

Ref country code: AT

Ref legal event code: MM01

Ref document number: 488700

Country of ref document: AT

Kind code of ref document: T

Effective date: 20130215

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20130215

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20140215

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20140215

REG Reference to a national code

Ref country code: DE

Ref legal event code: R082

Ref document number: 502008001821

Country of ref document: DE

Representative=s name: DOMPATENT VON KREISLER SELTING WERNER - PARTNE, DE

Ref country code: DE

Ref legal event code: R081

Ref document number: 502008001821

Country of ref document: DE

Owner name: LEYBOLD GMBH, DE

Free format text: FORMER OWNER: OERLIKON LEYBOLD VACUUM GMBH, 50968 KOELN, DE

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20230224

Year of fee payment: 16

P01 Opt-out of the competence of the unified patent court (upc) registered

Effective date: 20230421