JP2010508145A5 - - Google Patents

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Publication number
JP2010508145A5
JP2010508145A5 JP2009535302A JP2009535302A JP2010508145A5 JP 2010508145 A5 JP2010508145 A5 JP 2010508145A5 JP 2009535302 A JP2009535302 A JP 2009535302A JP 2009535302 A JP2009535302 A JP 2009535302A JP 2010508145 A5 JP2010508145 A5 JP 2010508145A5
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JP
Japan
Prior art keywords
orifice
fluid
component
jig
cleaning
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Granted
Application number
JP2009535302A
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English (en)
Japanese (ja)
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JP2010508145A (ja
JP5156752B2 (ja
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Priority claimed from PCT/US2007/022978 external-priority patent/WO2008057351A2/en
Publication of JP2010508145A publication Critical patent/JP2010508145A/ja
Publication of JP2010508145A5 publication Critical patent/JP2010508145A5/ja
Application granted granted Critical
Publication of JP5156752B2 publication Critical patent/JP5156752B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2009535302A 2006-11-01 2007-10-31 チャンバーコンポーネントを洗浄する方法及び装置 Expired - Fee Related JP5156752B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US86390606P 2006-11-01 2006-11-01
US60/863,906 2006-11-01
PCT/US2007/022978 WO2008057351A2 (en) 2006-11-01 2007-10-31 Methods and apparatus for cleaning chamber components

Publications (3)

Publication Number Publication Date
JP2010508145A JP2010508145A (ja) 2010-03-18
JP2010508145A5 true JP2010508145A5 (enrdf_load_stackoverflow) 2010-12-09
JP5156752B2 JP5156752B2 (ja) 2013-03-06

Family

ID=39365035

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009535302A Expired - Fee Related JP5156752B2 (ja) 2006-11-01 2007-10-31 チャンバーコンポーネントを洗浄する方法及び装置

Country Status (5)

Country Link
US (1) US7789969B2 (enrdf_load_stackoverflow)
JP (1) JP5156752B2 (enrdf_load_stackoverflow)
KR (1) KR101432161B1 (enrdf_load_stackoverflow)
TW (1) TWI381888B (enrdf_load_stackoverflow)
WO (1) WO2008057351A2 (enrdf_load_stackoverflow)

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KR101512632B1 (ko) 2007-12-19 2015-04-21 퀀텀 글로벌 테크놀로지스, 엘엘씨 프로세스 키트 및 챔버 세정 방법, 그리고 루테늄 회수 방법

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