JP2010252302A - 屈曲振動片およびそれを用いた発振器 - Google Patents

屈曲振動片およびそれを用いた発振器 Download PDF

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Publication number
JP2010252302A
JP2010252302A JP2010002669A JP2010002669A JP2010252302A JP 2010252302 A JP2010252302 A JP 2010252302A JP 2010002669 A JP2010002669 A JP 2010002669A JP 2010002669 A JP2010002669 A JP 2010002669A JP 2010252302 A JP2010252302 A JP 2010252302A
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Japan
Prior art keywords
heat conduction
region
bending vibration
vibrating
vibration
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JP2010002669A
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English (en)
Japanese (ja)
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JP2010252302A5 (enExample
Inventor
Makoto Furuhata
誠 古畑
Akinori Yamada
明法 山田
裕史 ▲浜▼山
Yuji Hamayama
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Seiko Epson Corp
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Seiko Epson Corp
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Publication date
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Priority to JP2010002669A priority Critical patent/JP2010252302A/ja
Priority to US12/729,759 priority patent/US8362854B2/en
Priority to CN2010101483190A priority patent/CN101847978B/zh
Publication of JP2010252302A publication Critical patent/JP2010252302A/ja
Publication of JP2010252302A5 publication Critical patent/JP2010252302A5/ja
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H03H9/215—Crystal tuning forks consisting of quartz

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  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2010002669A 2009-03-25 2010-01-08 屈曲振動片およびそれを用いた発振器 Withdrawn JP2010252302A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2010002669A JP2010252302A (ja) 2009-03-25 2010-01-08 屈曲振動片およびそれを用いた発振器
US12/729,759 US8362854B2 (en) 2009-03-25 2010-03-23 Flexural vibration piece and oscillator using the same
CN2010101483190A CN101847978B (zh) 2009-03-25 2010-03-25 弯曲振动片及利用该弯曲振动片的振荡器

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009073739 2009-03-25
JP2010002669A JP2010252302A (ja) 2009-03-25 2010-01-08 屈曲振動片およびそれを用いた発振器

Publications (2)

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JP2010252302A true JP2010252302A (ja) 2010-11-04
JP2010252302A5 JP2010252302A5 (enExample) 2013-02-14

Family

ID=42772462

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JP2010002669A Withdrawn JP2010252302A (ja) 2009-03-25 2010-01-08 屈曲振動片およびそれを用いた発振器

Country Status (3)

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US (1) US8362854B2 (enExample)
JP (1) JP2010252302A (enExample)
CN (1) CN101847978B (enExample)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8482358B2 (en) 2010-07-09 2013-07-09 Seiko Epson Corporation Flexural resonator element, resonator, oscillator, and electronic device
US8525606B2 (en) 2011-02-02 2013-09-03 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic device
US8581669B2 (en) 2011-02-02 2013-11-12 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
US8760235B2 (en) 2010-07-09 2014-06-24 Seiko Epson Corporation Resonator element, resonator, and oscillator
US8816572B2 (en) 2010-04-08 2014-08-26 Seiko Epson Corporation Resonator element and resonator having a tapered arm next to the base
US9354128B2 (en) 2013-12-27 2016-05-31 Seiko Epson Corporation Resonator element, resonator, oscillator, electronic apparatus, sensor, and mobile object
US9461615B2 (en) 2013-07-19 2016-10-04 Seiko Epson Corporation Vibrator element, vibrator, oscillator, electronic apparatus, and moving object
US9705472B2 (en) 2013-06-24 2017-07-11 Seiko Epson Corporation Resonator element, resonator, electronic device, electronic apparatus, and moving object
JP2018160802A (ja) * 2017-03-23 2018-10-11 セイコーエプソン株式会社 振動素子、電子デバイス、電子機器および移動体
WO2019059187A1 (ja) * 2017-09-21 2019-03-28 住友精密工業株式会社 角速度センサ

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105210295B (zh) 2013-05-13 2017-10-03 株式会社村田制作所 振动装置
SG11201508860QA (en) * 2013-05-13 2015-11-27 Murata Manufacturing Co Vibrating device
CN107453649B (zh) * 2017-08-17 2023-06-16 浙江师范大学 一种压电振子单向弯曲的车载俘能器
DE102017130527A1 (de) * 2017-12-19 2019-06-19 Endress+Hauser SE+Co. KG Vibronischer Sensor
US10797681B1 (en) * 2019-07-25 2020-10-06 Zhuhai Crystal Resonance Technologies Co., Ltd. Method of fabricating novel packages for electronic components
DE102020116299A1 (de) * 2020-06-19 2021-12-23 Endress+Hauser SE+Co. KG Symmetrierung eines vibronischen Sensors
JP7689421B2 (ja) * 2020-11-30 2025-06-06 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片の製造方法
CN120979381A (zh) * 2023-12-29 2025-11-18 天津大学 一种音叉型压电振动片及振荡器

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07139953A (ja) * 1993-11-19 1995-06-02 Toyota Central Res & Dev Lab Inc 角速度検出素子の振動数調整方法と角速度検出素子

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0232229U (enExample) 1988-08-23 1990-02-28
JP2002261575A (ja) 2000-12-25 2002-09-13 Seiko Epson Corp 振動片、振動子、発振器及び電子機器
US6587009B2 (en) 2000-12-25 2003-07-01 Seiko Epson Corporation Vibrating piece, vibrator, oscillator, and electronic equipment
JP2004260718A (ja) 2003-02-27 2004-09-16 Seiko Epson Corp 音叉型振動片及び音叉型振動片の製造方法並びに圧電デバイス
JP4301200B2 (ja) * 2004-10-20 2009-07-22 セイコーエプソン株式会社 圧電振動片および圧電デバイス
JP4277818B2 (ja) * 2005-03-22 2009-06-10 セイコーエプソン株式会社 圧電振動片および圧電デバイス
CH700716B1 (fr) 2006-10-09 2010-10-15 Suisse Electronique Microtech Résonateur en silicium de type diapason.
US8067880B2 (en) * 2008-12-27 2011-11-29 Seiko Epson Corporation Flexural vibration element and electronic component
JP5446839B2 (ja) * 2009-02-17 2014-03-19 セイコーエプソン株式会社 振動片および振動子
JP2010252303A (ja) * 2009-03-25 2010-11-04 Seiko Epson Corp 屈曲振動片およびそれを用いた発振器

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07139953A (ja) * 1993-11-19 1995-06-02 Toyota Central Res & Dev Lab Inc 角速度検出素子の振動数調整方法と角速度検出素子

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8816572B2 (en) 2010-04-08 2014-08-26 Seiko Epson Corporation Resonator element and resonator having a tapered arm next to the base
US9257961B2 (en) 2010-04-08 2016-02-09 Seiko Epson Corporation Resonator element and resonator having a tapered arm next to the base
US9252741B2 (en) 2010-04-08 2016-02-02 Seiko Epson Corporation Resonator element and resonator having a tapered arm next to the base
US9325278B2 (en) 2010-07-09 2016-04-26 Seiko Epson Corporation Resonator element, resonator, and oscillator
US9166554B2 (en) 2010-07-09 2015-10-20 Seiko Epson Corporation Flexural resonator element, resonator, oscillator, and electronic device
US8482358B2 (en) 2010-07-09 2013-07-09 Seiko Epson Corporation Flexural resonator element, resonator, oscillator, and electronic device
US8760235B2 (en) 2010-07-09 2014-06-24 Seiko Epson Corporation Resonator element, resonator, and oscillator
US8581669B2 (en) 2011-02-02 2013-11-12 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
US8525606B2 (en) 2011-02-02 2013-09-03 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic device
US9705472B2 (en) 2013-06-24 2017-07-11 Seiko Epson Corporation Resonator element, resonator, electronic device, electronic apparatus, and moving object
US10659006B2 (en) 2013-06-24 2020-05-19 Seiko Epson Corporation Resonator element, resonator, electronic device, electronic apparatus, and moving object
US9461615B2 (en) 2013-07-19 2016-10-04 Seiko Epson Corporation Vibrator element, vibrator, oscillator, electronic apparatus, and moving object
US9354128B2 (en) 2013-12-27 2016-05-31 Seiko Epson Corporation Resonator element, resonator, oscillator, electronic apparatus, sensor, and mobile object
JP2018160802A (ja) * 2017-03-23 2018-10-11 セイコーエプソン株式会社 振動素子、電子デバイス、電子機器および移動体
WO2019059187A1 (ja) * 2017-09-21 2019-03-28 住友精密工業株式会社 角速度センサ
JPWO2019059187A1 (ja) * 2017-09-21 2020-11-19 住友精密工業株式会社 角速度センサ
JP7258760B2 (ja) 2017-09-21 2023-04-17 住友精密工業株式会社 角速度センサ

Also Published As

Publication number Publication date
CN101847978B (zh) 2013-09-04
US8362854B2 (en) 2013-01-29
CN101847978A (zh) 2010-09-29
US20100244989A1 (en) 2010-09-30

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