CN101847978B - 弯曲振动片及利用该弯曲振动片的振荡器 - Google Patents

弯曲振动片及利用该弯曲振动片的振荡器 Download PDF

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Publication number
CN101847978B
CN101847978B CN2010101483190A CN201010148319A CN101847978B CN 101847978 B CN101847978 B CN 101847978B CN 2010101483190 A CN2010101483190 A CN 2010101483190A CN 201010148319 A CN201010148319 A CN 201010148319A CN 101847978 B CN101847978 B CN 101847978B
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CN
China
Prior art keywords
heat conduction
vibrating
flexural
conduction path
vibration
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Expired - Fee Related
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CN2010101483190A
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English (en)
Chinese (zh)
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CN101847978A (zh
Inventor
古畑诚
山田明法
浜山裕史
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Seiko Epson Corp
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Seiko Epson Corp
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Publication of CN101847978A publication Critical patent/CN101847978A/zh
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H03H9/215—Crystal tuning forks consisting of quartz

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  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CN2010101483190A 2009-03-25 2010-03-25 弯曲振动片及利用该弯曲振动片的振荡器 Expired - Fee Related CN101847978B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2009-073739 2009-03-25
JP2009073739 2009-03-25
JP2010002669A JP2010252302A (ja) 2009-03-25 2010-01-08 屈曲振動片およびそれを用いた発振器
JP2010-002669 2010-02-04

Publications (2)

Publication Number Publication Date
CN101847978A CN101847978A (zh) 2010-09-29
CN101847978B true CN101847978B (zh) 2013-09-04

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CN2010101483190A Expired - Fee Related CN101847978B (zh) 2009-03-25 2010-03-25 弯曲振动片及利用该弯曲振动片的振荡器

Country Status (3)

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US (1) US8362854B2 (enExample)
JP (1) JP2010252302A (enExample)
CN (1) CN101847978B (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5499852B2 (ja) 2010-04-08 2014-05-21 セイコーエプソン株式会社 振動片、振動子
JP5659585B2 (ja) 2010-07-09 2015-01-28 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
JP5617392B2 (ja) 2010-07-09 2014-11-05 セイコーエプソン株式会社 振動片、振動子及び発振器
JP5685962B2 (ja) 2011-02-02 2015-03-18 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
US8581669B2 (en) 2011-02-02 2013-11-12 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
CN105210295B (zh) 2013-05-13 2017-10-03 株式会社村田制作所 振动装置
SG11201508860QA (en) * 2013-05-13 2015-11-27 Murata Manufacturing Co Vibrating device
JP6155897B2 (ja) 2013-06-24 2017-07-05 セイコーエプソン株式会社 振動片、振動子、電子デバイス、電子機器及び移動体
JP6482169B2 (ja) 2013-07-19 2019-03-13 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器及び移動体
JP6375622B2 (ja) 2013-12-27 2018-08-22 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器、センサーおよび移動体
JP2018160802A (ja) * 2017-03-23 2018-10-11 セイコーエプソン株式会社 振動素子、電子デバイス、電子機器および移動体
CN107453649B (zh) * 2017-08-17 2023-06-16 浙江师范大学 一种压电振子单向弯曲的车载俘能器
JP7258760B2 (ja) * 2017-09-21 2023-04-17 住友精密工業株式会社 角速度センサ
DE102017130527A1 (de) * 2017-12-19 2019-06-19 Endress+Hauser SE+Co. KG Vibronischer Sensor
US10797681B1 (en) * 2019-07-25 2020-10-06 Zhuhai Crystal Resonance Technologies Co., Ltd. Method of fabricating novel packages for electronic components
DE102020116299A1 (de) * 2020-06-19 2021-12-23 Endress+Hauser SE+Co. KG Symmetrierung eines vibronischen Sensors
JP7689421B2 (ja) * 2020-11-30 2025-06-06 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片の製造方法
CN120979381A (zh) * 2023-12-29 2025-11-18 天津大学 一种音叉型压电振动片及振荡器

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1764067A (zh) * 2004-10-20 2006-04-26 精工爱普生株式会社 压电振动片和压电器件
CN1838533A (zh) * 2005-03-22 2006-09-27 精工爱普生株式会社 压电振动片和压电器件
CN101847979A (zh) * 2009-03-25 2010-09-29 爱普生拓优科梦株式会社 弯曲振动片及利用该弯曲振动片的振荡器

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0232229U (enExample) 1988-08-23 1990-02-28
JP3257203B2 (ja) * 1993-11-19 2002-02-18 株式会社豊田中央研究所 角速度検出素子の振動数調整方法と角速度検出素子
JP2002261575A (ja) 2000-12-25 2002-09-13 Seiko Epson Corp 振動片、振動子、発振器及び電子機器
US6587009B2 (en) 2000-12-25 2003-07-01 Seiko Epson Corporation Vibrating piece, vibrator, oscillator, and electronic equipment
JP2004260718A (ja) 2003-02-27 2004-09-16 Seiko Epson Corp 音叉型振動片及び音叉型振動片の製造方法並びに圧電デバイス
CH700716B1 (fr) 2006-10-09 2010-10-15 Suisse Electronique Microtech Résonateur en silicium de type diapason.
US8067880B2 (en) * 2008-12-27 2011-11-29 Seiko Epson Corporation Flexural vibration element and electronic component
JP5446839B2 (ja) * 2009-02-17 2014-03-19 セイコーエプソン株式会社 振動片および振動子

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1764067A (zh) * 2004-10-20 2006-04-26 精工爱普生株式会社 压电振动片和压电器件
CN1838533A (zh) * 2005-03-22 2006-09-27 精工爱普生株式会社 压电振动片和压电器件
CN101847979A (zh) * 2009-03-25 2010-09-29 爱普生拓优科梦株式会社 弯曲振动片及利用该弯曲振动片的振荡器

Also Published As

Publication number Publication date
US8362854B2 (en) 2013-01-29
CN101847978A (zh) 2010-09-29
US20100244989A1 (en) 2010-09-30
JP2010252302A (ja) 2010-11-04

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Owner name: SEIKO EPSON CORP.

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Effective date: 20111008

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Effective date of registration: 20111008

Address after: Tokyo, Japan, Japan

Applicant after: Seiko Epson Corp.

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Applicant before: Epson Toyocom Corp.

Co-applicant before: Seiko Epson Corp.

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20130904

Termination date: 20160325

CF01 Termination of patent right due to non-payment of annual fee