JP2010239031A - アンダーフィル用液状樹脂組成物、フリップチップ実装体およびその製造方法 - Google Patents
アンダーフィル用液状樹脂組成物、フリップチップ実装体およびその製造方法 Download PDFInfo
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
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Abstract
【解決手段】
(A)エポキシ樹脂、(B)アミン系硬化剤、および(C)無機充填剤を含む組成物であって、温度:25℃での粘度が1〜150Pa・sであり、かつ温度:100℃において粘度が1Pa・sになるまでの時間が40〜180分であることを特徴とする、アンダーフィル用液状樹脂組成物である。
【選択図】 なし
Description
(1)(A)エポキシ樹脂、(B)アミン系硬化剤、および(C)無機充填剤を含む組成物であって、温度:25℃での粘度が1〜150Pa・sであり、かつ温度:100℃において粘度が1Pa・sになるまでの時間が40〜180分であることを特徴とする、アンダーフィル用液状樹脂組成物。
(2)圧力:100Pa、温度:100℃において、粘度が1Pa・sになるまでの時間が40〜180分である、上記(1)記載のアンダーフィル用液状樹脂組成物。
(3)圧力:100Pa、温度:100℃において、2時間保持したときの平均揮発速度が0〜1.3質量%/時である、上記(1)または(2)記載のアンダーフィル用液状樹脂組成物。
(4)圧力:100Pa、温度:100℃において、2時間保持したときの成分(B)の平均揮発速度が0〜10質量%/時である、上記(1)〜(3)のいずれか記載のアンダーフィル用液状樹脂組成物。
(5)成分(B)が、1個の芳香族環を有する芳香族アミン化合物および/または2個の芳香族環を有する芳香族アミン化合物を含み、前記芳香族アミン化合物の合計100質量部に対して、2個のベンゼン環を有する芳香族アミン化合物が50〜100質量部である、上記(1)〜(4)のいずれか記載のアンダーフィル用液状樹脂組成物。
(6)成分(A)が、ビスフェノールF型エポキシ樹脂およびナフタレン型エポキシ樹脂からなる群より選択される少なくとも1種である、上記(1)〜(5)のいずれか記載のアンダーフィル用液状樹脂組成物。
(7)成分(A)100質量部に対して、成分(B)を30〜120質量部、成分(C)を160〜400質量部含む、上記(1)〜(6)のいずれか記載のアンダーフィル用液状樹脂組成物。
(8)上記(1)〜(7)のいずれか記載のアンダーフィル用液状樹脂組成物を用いて封止された、フリップチップ実装体。
(9)上記(1)〜(7)のいずれか記載のアンダーフィル用液状樹脂組成物を用いて封止する、フリップチップ実装体の製造方法。
表1に示す配合で、アンダーフィル用液状樹脂組成物を調整した。
得られた1gのアンダーフィル用液状樹脂組成物の初期粘度を、HAAKE社製レオメーター(型番:MARS2)を用い、25℃で測定した。結果を表2に示す。
1gのアンダーフィル用液状樹脂組成物の100℃での粘度変化をHAAKE社製レオメーター(型番:MARS2)で測定した。アンダーフィル用液状樹脂組成物が増粘し、1Pa・sに至るまでの時間(分)を「ポットライフ・大気中」とした。また、1gのアンダーフィル用液状樹脂組成物を、真空乾燥機の中に入れ、圧力100±100Paにし、100℃で10分保持後の粘度を、上記レオメーターにより測定した。この測定を繰り返し、粘度が1Pa・s以上になるまでの時間を「ポットライフ・真空中」とした。結果を表2に示す。
3gのアンダーフィル用液状樹脂組成物または硬化剤を、直径5cmの円筒形アルミ製容器に入れ、圧力100Pa、100℃で2時間放置後、質量測定を行った。
{(放置前の質量)−(放置後の質量)/(放置前の質量)}×100/2}を平均揮発速度(単位:質量%/時)とした。このとき、圧力は、100±50Paで制御した。但し酸無水物系硬化剤を用いた場合については硬化が早く、早期に揮発しなくなることから30分後に質量測定を行い、平均揮発速度を求めた。このときには、上記の式の「2」を「0.5」として計算をした。結果を表2に示す。また、表3に、硬化剤を変化させた参考例1〜7の配合と、それぞれの揮発速度を示す。図3に、このときのアミン系硬化剤Aとアミン系硬化剤Bの合計100質量部に対するアミン系硬化剤Aの質量部が、揮発速度に及ぼす影響を示す。
10gのアンダーフィル用液状樹脂組成物を、ディスペンサーに入れ、圧力130Pa、100℃に設定した東レエンジニアリング製真空ディスペンサー(型番:FS2500)中で、ディスペンスを行った。ボイドが発生しないでディスペンスできる時間を測定した。このとき、圧力は、130±5Paで制御した。ボイドの有無は、肉眼で観察した。ボイド試験では、ボイドがない時間が60分以上であると好ましい。結果を表2に示す。
5gのアンダーフィル用液状樹脂組成物を、東レエンジニアリング製真空ディスペンサー(型番:FS2500中)に入れ、圧力130Pa、100℃で30分間保持したときの発泡の有無を肉眼で確認した。このとき、圧力は、130±5Paで制御した。結果を表2に示す。
2 基板
3 バンプ
4 アンダーフィル用樹脂組成物
5 フィレット剤
6 硬化後のアンダーフィル用樹脂組成物
Claims (9)
- (A)エポキシ樹脂、(B)アミン系硬化剤、および(C)無機充填剤を含む組成物であって、温度:25℃での粘度が1〜150Pa・sであり、かつ温度:100℃において粘度が1Pa・sになるまでの時間が40〜180分であることを特徴とする、アンダーフィル用液状樹脂組成物。
- 圧力:100Pa、温度:100℃において、粘度が1Pa・sになるまでの時間が40〜180分である、請求項1記載のアンダーフィル用液状樹脂組成物。
- 圧力:100Pa、温度:100℃において、2時間保持したときの平均揮発速度が0〜1.3質量%/時である、請求項1または2記載のアンダーフィル用液状樹脂組成物。
- 圧力:100Pa、温度:100℃において、2時間保持したときの成分(B)の平均揮発速度が0〜10質量%/時である、請求項1〜3のいずれか1項記載のアンダーフィル用液状樹脂組成物。
- 成分(B)が、1個の芳香族環を有する芳香族アミン化合物および/または2個の芳香族環を有する芳香族アミン化合物を含み、前記芳香族アミン化合物の合計100質量部に対して、2個のベンゼン環を有する芳香族アミン化合物が50〜100質量部である、請求項1〜4のいずれか1項記載のアンダーフィル用液状樹脂組成物。
- 成分(A)が、ビスフェノールF型エポキシ樹脂およびナフタレン型エポキシ樹脂からなる群より選択される少なくとも1種である、請求項1〜5のいずれか1項記載のアンダーフィル用液状樹脂組成物。
- 成分(A)100質量部に対して、成分(B)を30〜120質量部、成分(C)を160〜400質量部含む、請求項1〜6のいずれか1項記載のアンダーフィル用液状樹脂組成物。
- 請求項1〜7のいずれか1項記載のアンダーフィル用液状樹脂組成物を用いて封止された、フリップチップ実装体。
- 請求項1〜7のいずれか1項記載のアンダーフィル用液状樹脂組成物を用いて封止する、フリップチップ実装体の製造方法。
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JP2012191062A (ja) * | 2011-03-11 | 2012-10-04 | Toshiba Corp | 半導体装置 |
JP2012212786A (ja) * | 2011-03-31 | 2012-11-01 | Elpida Memory Inc | 半導体装置の製造方法 |
JP2014091744A (ja) * | 2012-10-31 | 2014-05-19 | 3M Innovative Properties Co | アンダーフィル組成物、半導体装置およびその製造方法 |
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