JP2010230401A - 圧力センサー - Google Patents

圧力センサー Download PDF

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Publication number
JP2010230401A
JP2010230401A JP2009076654A JP2009076654A JP2010230401A JP 2010230401 A JP2010230401 A JP 2010230401A JP 2009076654 A JP2009076654 A JP 2009076654A JP 2009076654 A JP2009076654 A JP 2009076654A JP 2010230401 A JP2010230401 A JP 2010230401A
Authority
JP
Japan
Prior art keywords
pressure
diaphragm
pressure sensor
sensor according
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2009076654A
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English (en)
Japanese (ja)
Other versions
JP2010230401A5 (https=
Inventor
Kenta Sato
健太 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2009076654A priority Critical patent/JP2010230401A/ja
Publication of JP2010230401A publication Critical patent/JP2010230401A/ja
Publication of JP2010230401A5 publication Critical patent/JP2010230401A5/ja
Pending legal-status Critical Current

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  • Measuring Fluid Pressure (AREA)
JP2009076654A 2009-03-26 2009-03-26 圧力センサー Pending JP2010230401A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009076654A JP2010230401A (ja) 2009-03-26 2009-03-26 圧力センサー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009076654A JP2010230401A (ja) 2009-03-26 2009-03-26 圧力センサー

Publications (2)

Publication Number Publication Date
JP2010230401A true JP2010230401A (ja) 2010-10-14
JP2010230401A5 JP2010230401A5 (https=) 2012-05-24

Family

ID=43046387

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009076654A Pending JP2010230401A (ja) 2009-03-26 2009-03-26 圧力センサー

Country Status (1)

Country Link
JP (1) JP2010230401A (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014533983A (ja) * 2011-10-07 2014-12-18 スンシル ユニバーシティー リサーチ コンソルティウム テクノーパークＳｏｏｎｇｓｉｌ Ｕｎｉｖｅｒｓｉｔｙ Ｒｅｓｅａｒｃｈ Ｃｏｎｓｏｒｔｉｕｍ Ｔｅｃｈｎｏ−Ｐａｒｋ 眼圧センサー及びその製造方法
WO2018061705A1 (ja) * 2016-09-27 2018-04-05 国立大学法人香川大学 圧力センサ、内視鏡フード、内視鏡および圧力測定装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03131732A (ja) * 1989-10-17 1991-06-05 Yokogawa Electric Corp 半導体圧力計
JP2001165796A (ja) * 1999-12-14 2001-06-22 Kyocera Corp 圧力センサ
JP2004125417A (ja) * 2002-09-30 2004-04-22 Nippon Seiki Co Ltd 半導体式圧力センサ
JP2007327922A (ja) * 2006-06-09 2007-12-20 Epson Toyocom Corp 圧力センサ用ダイヤフラム、及び圧力センサ
JP2007333452A (ja) * 2006-06-13 2007-12-27 Epson Toyocom Corp 圧力センサ用感圧素子、及び圧力センサ
JP2008070240A (ja) * 2006-09-14 2008-03-27 Epson Toyocom Corp 感圧センサ
JP2008241287A (ja) * 2007-03-26 2008-10-09 Epson Toyocom Corp 圧力センサ用の感圧素子、及びその製造方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03131732A (ja) * 1989-10-17 1991-06-05 Yokogawa Electric Corp 半導体圧力計
JP2001165796A (ja) * 1999-12-14 2001-06-22 Kyocera Corp 圧力センサ
JP2004125417A (ja) * 2002-09-30 2004-04-22 Nippon Seiki Co Ltd 半導体式圧力センサ
JP2007327922A (ja) * 2006-06-09 2007-12-20 Epson Toyocom Corp 圧力センサ用ダイヤフラム、及び圧力センサ
JP2007333452A (ja) * 2006-06-13 2007-12-27 Epson Toyocom Corp 圧力センサ用感圧素子、及び圧力センサ
JP2008070240A (ja) * 2006-09-14 2008-03-27 Epson Toyocom Corp 感圧センサ
JP2008241287A (ja) * 2007-03-26 2008-10-09 Epson Toyocom Corp 圧力センサ用の感圧素子、及びその製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014533983A (ja) * 2011-10-07 2014-12-18 スンシル ユニバーシティー リサーチ コンソルティウム テクノーパークＳｏｏｎｇｓｉｌ Ｕｎｉｖｅｒｓｉｔｙ Ｒｅｓｅａｒｃｈ Ｃｏｎｓｏｒｔｉｕｍ Ｔｅｃｈｎｏ−Ｐａｒｋ 眼圧センサー及びその製造方法
WO2018061705A1 (ja) * 2016-09-27 2018-04-05 国立大学法人香川大学 圧力センサ、内視鏡フード、内視鏡および圧力測定装置
JPWO2018061705A1 (ja) * 2016-09-27 2019-07-04 国立大学法人 香川大学 圧力センサ、内視鏡フード、内視鏡および圧力測定装置

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