JP2010225768A5 - - Google Patents
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- Publication number
- JP2010225768A5 JP2010225768A5 JP2009070257A JP2009070257A JP2010225768A5 JP 2010225768 A5 JP2010225768 A5 JP 2010225768A5 JP 2009070257 A JP2009070257 A JP 2009070257A JP 2009070257 A JP2009070257 A JP 2009070257A JP 2010225768 A5 JP2010225768 A5 JP 2010225768A5
- Authority
- JP
- Japan
- Prior art keywords
- transistor
- substrate
- fin
- type semiconductor
- width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009070257A JP2010225768A (ja) | 2009-03-23 | 2009-03-23 | 半導体装置 |
| US12/629,998 US8129798B2 (en) | 2009-03-23 | 2009-12-03 | Semiconductor device comprising fully-depleted and partially-depleted FinFETs |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009070257A JP2010225768A (ja) | 2009-03-23 | 2009-03-23 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2010225768A JP2010225768A (ja) | 2010-10-07 |
| JP2010225768A5 true JP2010225768A5 (OSRAM) | 2011-06-30 |
Family
ID=42736778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009070257A Pending JP2010225768A (ja) | 2009-03-23 | 2009-03-23 | 半導体装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US8129798B2 (OSRAM) |
| JP (1) | JP2010225768A (OSRAM) |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8243526B2 (en) * | 2009-12-14 | 2012-08-14 | Intel Corporation | Depletion mode circuit protection device |
| US8633076B2 (en) * | 2010-11-23 | 2014-01-21 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method for adjusting fin width in integrated circuitry |
| US8525267B2 (en) * | 2010-11-23 | 2013-09-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | Device and method for forming Fins in integrated circuitry |
| US9472550B2 (en) * | 2010-11-23 | 2016-10-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Adjusted fin width in integrated circuitry |
| US8582352B2 (en) * | 2011-12-06 | 2013-11-12 | Taiwan Semiconductor Manufacturing Company, Ltd. | Methods and apparatus for FinFET SRAM cells |
| US8693235B2 (en) | 2011-12-06 | 2014-04-08 | Taiwan Semiconductor Manufacturing Company, Ltd. | Methods and apparatus for finFET SRAM arrays in integrated circuits |
| EP2803077A4 (en) * | 2012-01-13 | 2015-11-04 | Tela Innovations Inc | CIRCUITS WITH LINEAR FINFET STRUCTURES |
| KR101979733B1 (ko) * | 2012-11-08 | 2019-05-20 | 삼성전자 주식회사 | 적어도 하나의 핀 트랜지스터를 가지는 셀 및 이를 포함하는 반도체 집적 회로 |
| US9576978B2 (en) * | 2012-10-09 | 2017-02-21 | Samsung Electronics Co., Ltd. | Cells including at least one fin field effect transistor and semiconductor integrated circuits including the same |
| US20140103437A1 (en) * | 2012-10-15 | 2014-04-17 | Gold Standard Simulations Ltd. | Random Doping Fluctuation Resistant FinFET |
| CN102956693B (zh) * | 2012-11-01 | 2015-12-09 | 无锡中星微电子有限公司 | 一种finfet以及采用该finfet的应用电路 |
| US9397217B2 (en) * | 2012-12-28 | 2016-07-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Contact structure of non-planar semiconductor device |
| US9105719B2 (en) * | 2013-01-09 | 2015-08-11 | Broadcom Corporation | Multigate metal oxide semiconductor devices and fabrication methods |
| US9847404B2 (en) * | 2013-07-06 | 2017-12-19 | Semiwise Limited | Fluctuation resistant FinFET |
| KR102083774B1 (ko) * | 2013-07-12 | 2020-03-03 | 삼성전자 주식회사 | 반도체 장치 및 그 제조 방법 |
| US9318607B2 (en) * | 2013-07-12 | 2016-04-19 | Samsung Electronics Co., Ltd. | Semiconductor device and method of fabricating the same |
| WO2015029280A1 (ja) * | 2013-08-28 | 2015-03-05 | パナソニック株式会社 | 半導体集積回路装置 |
| JP6443336B2 (ja) | 2013-09-27 | 2018-12-26 | 株式会社ソシオネクスト | 半導体集積回路および論理回路 |
| WO2015199712A1 (en) * | 2014-06-27 | 2015-12-30 | Intel Corporation | Multi-gate transistor with variably sized fin |
| KR102237713B1 (ko) | 2014-11-17 | 2021-04-08 | 삼성전자주식회사 | 반도체 장치의 제조 방법 |
| JP5982055B1 (ja) * | 2015-12-18 | 2016-08-31 | 株式会社フローディア | メモリセル、不揮発性半導体記憶装置、および不揮発性半導体記憶装置の製造方法 |
| JP6069569B1 (ja) * | 2016-08-24 | 2017-02-01 | 株式会社フローディア | メモリセル、および不揮発性半導体記憶装置 |
| US10134902B2 (en) * | 2016-12-15 | 2018-11-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | PMOS FinFET |
| US11132177B2 (en) * | 2019-05-14 | 2021-09-28 | International Business Machines Corporation | CMOS-compatible high-speed and low-power random number generator |
| TWI868171B (zh) | 2019-06-26 | 2025-01-01 | 日商索尼半導體解決方案公司 | 攝像裝置 |
| US10950546B1 (en) | 2019-09-17 | 2021-03-16 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device including back side power supply circuit |
| CN113314605B (zh) * | 2020-02-26 | 2023-11-21 | 中芯国际集成电路制造(上海)有限公司 | 半导体结构及半导体结构的形成方法 |
| JP7600701B2 (ja) * | 2021-01-19 | 2024-12-17 | 株式会社ソシオネクスト | 半導体装置 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3250711B2 (ja) * | 1994-06-28 | 2002-01-28 | 日本電信電話株式会社 | 低電圧soi型論理回路 |
| JP3416628B2 (ja) * | 2000-04-27 | 2003-06-16 | 松下電器産業株式会社 | 半導体集積回路装置 |
| US6720619B1 (en) * | 2002-12-13 | 2004-04-13 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor-on-insulator chip incorporating partially-depleted, fully-depleted, and multiple-gate devices |
| US7456476B2 (en) * | 2003-06-27 | 2008-11-25 | Intel Corporation | Nonplanar semiconductor device with partially or fully wrapped around gate electrode and methods of fabrication |
| US6867460B1 (en) * | 2003-11-05 | 2005-03-15 | International Business Machines Corporation | FinFET SRAM cell with chevron FinFET logic |
| JP4064955B2 (ja) * | 2004-09-30 | 2008-03-19 | 株式会社東芝 | 半導体装置及びその製造方法 |
| US7547947B2 (en) * | 2005-11-15 | 2009-06-16 | International Business Machines Corporation | SRAM cell |
| US7301210B2 (en) * | 2006-01-12 | 2007-11-27 | International Business Machines Corporation | Method and structure to process thick and thin fins and variable fin to fin spacing |
| JP4855786B2 (ja) * | 2006-01-25 | 2012-01-18 | 株式会社東芝 | 半導体装置 |
| JP5057739B2 (ja) * | 2006-10-03 | 2012-10-24 | 株式会社東芝 | 半導体記憶装置 |
| JP4461154B2 (ja) * | 2007-05-15 | 2010-05-12 | 株式会社東芝 | 半導体装置 |
| JP5086797B2 (ja) * | 2007-12-26 | 2012-11-28 | 株式会社東芝 | 半導体装置 |
-
2009
- 2009-03-23 JP JP2009070257A patent/JP2010225768A/ja active Pending
- 2009-12-03 US US12/629,998 patent/US8129798B2/en active Active
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