JP2010205806A5 - - Google Patents
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- Publication number
- JP2010205806A5 JP2010205806A5 JP2009047466A JP2009047466A JP2010205806A5 JP 2010205806 A5 JP2010205806 A5 JP 2010205806A5 JP 2009047466 A JP2009047466 A JP 2009047466A JP 2009047466 A JP2009047466 A JP 2009047466A JP 2010205806 A5 JP2010205806 A5 JP 2010205806A5
- Authority
- JP
- Japan
- Prior art keywords
- heat sink
- heat
- light
- light source
- portions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000017525 heat dissipation Effects 0.000 claims description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 4
- 238000002844 melting Methods 0.000 claims description 4
- 230000008018 melting Effects 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 239000004575 stone Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 230000005855 radiation Effects 0.000 claims 1
- 229920001296 polysiloxane Polymers 0.000 description 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009047466A JP5305987B2 (ja) | 2009-03-02 | 2009-03-02 | 放熱ユニット及び露光装置 |
| KR1020100014924A KR101240018B1 (ko) | 2009-03-02 | 2010-02-19 | 방열 유닛 및 노광 장치 |
| TW099105351A TWI459439B (zh) | 2009-03-02 | 2010-02-24 | 熱輻射單元及曝光裝置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009047466A JP5305987B2 (ja) | 2009-03-02 | 2009-03-02 | 放熱ユニット及び露光装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010205806A JP2010205806A (ja) | 2010-09-16 |
| JP2010205806A5 true JP2010205806A5 (https=) | 2012-04-19 |
| JP5305987B2 JP5305987B2 (ja) | 2013-10-02 |
Family
ID=42967051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009047466A Expired - Fee Related JP5305987B2 (ja) | 2009-03-02 | 2009-03-02 | 放熱ユニット及び露光装置 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP5305987B2 (https=) |
| KR (1) | KR101240018B1 (https=) |
| TW (1) | TWI459439B (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101238453B1 (ko) * | 2012-07-26 | 2013-02-28 | 유버 주식회사 | 광 경화 장치 |
| JP2022119372A (ja) * | 2021-02-04 | 2022-08-17 | キヤノン株式会社 | 放熱ユニット、露光装置、及び物品の製造方法 |
| KR102726822B1 (ko) | 2022-10-12 | 2024-11-07 | 한국광기술원 | 다중 히트싱크를 구비한 자외선 광원 조립체 및 이를 이용한 광원장치 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05326762A (ja) * | 1992-05-20 | 1993-12-10 | Ibiden Co Ltd | 半導体素子搭載装置用放熱板 |
| JP2002097372A (ja) * | 2000-09-20 | 2002-04-02 | Polymatech Co Ltd | 熱伝導性高分子組成物及び熱伝導性成形体 |
| JP2002329651A (ja) * | 2001-04-27 | 2002-11-15 | Nikon Corp | 露光装置、露光装置の製造方法、及びマイクロデバイスの製造方法 |
| GB0209069D0 (en) * | 2002-04-20 | 2002-05-29 | Ewington Christopher D | Lighting module |
| JP2004157219A (ja) * | 2002-11-05 | 2004-06-03 | Fuji Photo Film Co Ltd | 露光ヘッドおよび露光装置 |
| JP4548317B2 (ja) * | 2004-11-18 | 2010-09-22 | 三菱マテリアル株式会社 | 絶縁回路基板及びこれを備えるパワーモジュール構造体 |
| CN2833884Y (zh) * | 2005-06-27 | 2006-11-01 | 杨开艳 | 一种散热器的结构改良 |
| JP2007242820A (ja) | 2006-03-08 | 2007-09-20 | Asahi Kasei Corp | 発光デバイス及び発光デバイスモジュール |
| JP2007323879A (ja) * | 2006-05-31 | 2007-12-13 | Fujitsu General Ltd | 光源装置及び光源装置を用いたプロジェクタ |
| JP5188120B2 (ja) * | 2007-08-10 | 2013-04-24 | 新光電気工業株式会社 | 半導体装置 |
| JP4692908B2 (ja) | 2008-04-14 | 2011-06-01 | 電気化学工業株式会社 | モジュール構造体 |
-
2009
- 2009-03-02 JP JP2009047466A patent/JP5305987B2/ja not_active Expired - Fee Related
-
2010
- 2010-02-19 KR KR1020100014924A patent/KR101240018B1/ko not_active Expired - Fee Related
- 2010-02-24 TW TW099105351A patent/TWI459439B/zh not_active IP Right Cessation
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