JP2010186987A5 - - Google Patents
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- Publication number
- JP2010186987A5 JP2010186987A5 JP2009294040A JP2009294040A JP2010186987A5 JP 2010186987 A5 JP2010186987 A5 JP 2010186987A5 JP 2009294040 A JP2009294040 A JP 2009294040A JP 2009294040 A JP2009294040 A JP 2009294040A JP 2010186987 A5 JP2010186987 A5 JP 2010186987A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- filler
- raised
- specifically
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 16
- 239000000945 filler Substances 0.000 claims description 12
- 238000012876 topography Methods 0.000 claims description 11
- 238000005498 polishing Methods 0.000 claims description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims description 3
- 238000006392 deoxygenation reaction Methods 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 238000005468 ion implantation Methods 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 3
- 229910004298 SiO 2 Inorganic materials 0.000 claims 2
- 239000012686 silicon precursor Substances 0.000 claims 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 1
- 230000007547 defect Effects 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 claims 1
- 238000002513 implantation Methods 0.000 claims 1
- 230000001172 regenerating effect Effects 0.000 claims 1
- 229910000077 silane Inorganic materials 0.000 claims 1
- 230000003746 surface roughness Effects 0.000 description 3
- 239000002253 acid Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP09290104.0 | 2009-02-12 | ||
| EP09290104A EP2219208B1 (en) | 2009-02-12 | 2009-02-12 | Method for reclaiming a surface of a substrate |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010186987A JP2010186987A (ja) | 2010-08-26 |
| JP2010186987A5 true JP2010186987A5 (enExample) | 2012-07-19 |
| JP5219094B2 JP5219094B2 (ja) | 2013-06-26 |
Family
ID=40725919
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009294040A Expired - Fee Related JP5219094B2 (ja) | 2009-02-12 | 2009-12-25 | 基板の表面を再生する方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8435897B2 (enExample) |
| EP (1) | EP2219208B1 (enExample) |
| JP (1) | JP5219094B2 (enExample) |
| KR (1) | KR101536334B1 (enExample) |
| CN (1) | CN101866824B (enExample) |
| SG (1) | SG164310A1 (enExample) |
| TW (1) | TWI480939B (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100022070A1 (en) * | 2008-07-22 | 2010-01-28 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing soi substrate |
| FR2971365B1 (fr) * | 2011-02-08 | 2013-02-22 | Soitec Silicon On Insulator | Méthode de recyclage d'un substrat source |
| JP5799740B2 (ja) * | 2011-10-17 | 2015-10-28 | 信越半導体株式会社 | 剥離ウェーハの再生加工方法 |
| CN103646867B (zh) * | 2013-11-29 | 2016-04-06 | 上海华力微电子有限公司 | 改善晶圆剥落缺陷的方法 |
| JP6676365B2 (ja) * | 2015-12-21 | 2020-04-08 | キヤノン株式会社 | 撮像装置の製造方法 |
| FR3074608B1 (fr) | 2017-12-05 | 2019-12-06 | Soitec | Procede de preparation d'un residu de substrat donneur, substrat obtenu a l'issu de ce procede, et utilisation d'un tel susbtrat |
| US10373818B1 (en) * | 2018-01-31 | 2019-08-06 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method of wafer recycling |
| SE1950611A1 (en) * | 2019-05-23 | 2020-09-29 | Ascatron Ab | Crystal efficient SiC device wafer production |
| FR3120159B1 (fr) | 2021-02-23 | 2023-06-23 | Soitec Silicon On Insulator | Procédé de préparation du résidu d’un substrat donneur ayant subi un prélèvement d’une couche par délamination |
| CN113192823B (zh) * | 2021-04-27 | 2022-06-21 | 麦斯克电子材料股份有限公司 | 一种soi键合工艺后衬底片的再生加工方法 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5867302A (en) * | 1997-08-07 | 1999-02-02 | Sandia Corporation | Bistable microelectromechanical actuator |
| JPH11195775A (ja) * | 1997-12-26 | 1999-07-21 | Sony Corp | 半導体基板および薄膜半導体素子およびそれらの製造方法ならびに陽極化成装置 |
| SG71903A1 (en) * | 1998-01-30 | 2000-04-18 | Canon Kk | Process of reclamation of soi substrate and reproduced substrate |
| US6863593B1 (en) | 1998-11-02 | 2005-03-08 | Applied Materials, Inc. | Chemical mechanical polishing a substrate having a filler layer and a stop layer |
| JP3943782B2 (ja) | 1999-11-29 | 2007-07-11 | 信越半導体株式会社 | 剥離ウエーハの再生処理方法及び再生処理された剥離ウエーハ |
| CN1270366C (zh) * | 2002-06-04 | 2006-08-16 | 中芯国际集成电路制造(上海)有限公司 | 可重复使用的晶圆控片及其形成方法 |
| WO2004019403A2 (en) * | 2002-08-26 | 2004-03-04 | S.O.I.Tec Silicon On Insulator Technologies | Mechanical recycling of a wafer comprising a buffer layer, after having taken a layer therefrom |
| JP4492054B2 (ja) * | 2003-08-28 | 2010-06-30 | 株式会社Sumco | 剥離ウェーハの再生処理方法及び再生されたウェーハ |
| US6987055B2 (en) * | 2004-01-09 | 2006-01-17 | Micron Technology, Inc. | Methods for deposition of semiconductor material |
| US7402520B2 (en) * | 2004-11-26 | 2008-07-22 | Applied Materials, Inc. | Edge removal of silicon-on-insulator transfer wafer |
-
2009
- 2009-02-12 EP EP09290104A patent/EP2219208B1/en not_active Not-in-force
- 2009-10-29 SG SG200907181-2A patent/SG164310A1/en unknown
- 2009-10-30 TW TW098136973A patent/TWI480939B/zh not_active IP Right Cessation
- 2009-11-13 KR KR1020090109607A patent/KR101536334B1/ko not_active Expired - Fee Related
- 2009-12-16 CN CN200910246888.6A patent/CN101866824B/zh not_active Expired - Fee Related
- 2009-12-25 JP JP2009294040A patent/JP5219094B2/ja not_active Expired - Fee Related
-
2010
- 2010-02-12 US US12/658,655 patent/US8435897B2/en not_active Expired - Fee Related
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