JP2010157691A - 光半導体装置 - Google Patents
光半導体装置 Download PDFInfo
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- JP2010157691A JP2010157691A JP2009263472A JP2009263472A JP2010157691A JP 2010157691 A JP2010157691 A JP 2010157691A JP 2009263472 A JP2009263472 A JP 2009263472A JP 2009263472 A JP2009263472 A JP 2009263472A JP 2010157691 A JP2010157691 A JP 2010157691A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 170
- 239000004065 semiconductor Substances 0.000 title claims abstract description 164
- 239000000758 substrate Substances 0.000 claims abstract description 158
- 239000011701 zinc Substances 0.000 claims description 22
- 229910052725 zinc Inorganic materials 0.000 claims description 9
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 6
- 239000000969 carrier Substances 0.000 claims description 6
- 229910052707 ruthenium Inorganic materials 0.000 claims description 6
- 229910052717 sulfur Inorganic materials 0.000 claims description 6
- 239000011593 sulfur Substances 0.000 claims description 6
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 5
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 5
- 238000005253 cladding Methods 0.000 claims description 5
- 229910052790 beryllium Inorganic materials 0.000 claims description 2
- 229910052799 carbon Inorganic materials 0.000 claims description 2
- 229910052749 magnesium Inorganic materials 0.000 claims description 2
- 229910052762 osmium Inorganic materials 0.000 claims 3
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 claims 3
- 239000011777 magnesium Substances 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 claims 1
- 239000010410 layer Substances 0.000 description 169
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 72
- 238000005530 etching Methods 0.000 description 29
- 238000004519 manufacturing process Methods 0.000 description 29
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 28
- 238000000034 method Methods 0.000 description 16
- 235000012431 wafers Nutrition 0.000 description 16
- 238000000206 photolithography Methods 0.000 description 15
- 238000010586 diagram Methods 0.000 description 14
- 229910052742 iron Inorganic materials 0.000 description 11
- 230000000694 effects Effects 0.000 description 9
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- 238000009792 diffusion process Methods 0.000 description 7
- 230000031700 light absorption Effects 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 6
- 229910052785 arsenic Inorganic materials 0.000 description 6
- 230000004888 barrier function Effects 0.000 description 6
- 230000006866 deterioration Effects 0.000 description 6
- 239000002019 doping agent Substances 0.000 description 6
- 229910052733 gallium Inorganic materials 0.000 description 6
- 229910052738 indium Inorganic materials 0.000 description 6
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 230000000875 corresponding effect Effects 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000006731 degradation reaction Methods 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
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- 239000011810 insulating material Substances 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
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- 150000004678 hydrides Chemical class 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
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- 230000005693 optoelectronics Effects 0.000 description 1
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- 230000002265 prevention Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
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Abstract
【解決手段】 導電性InP基板上にRu-InP層を備えた半絶縁性基板を用いるか、Ru-InP基板或いはFe-InP基板上にRu-InP層を備えた半絶縁性基板を用い、半導体層の積層順を基板側からn型半導体層/量子井戸層/p型半導体層の順とする。
【選択図】 図3
Description
素子の両面に電極を配置する光半導体装置で用いるInP基板は、n型又はp型の導電性基板か、絶縁性基板を用いる。
(B)電界吸収型(EA)変調器、マッハツェンダ型(MZ)変調器、方向性結合型光(DC)変調器
(C)PIN型フォトダイオード(PD)、雪崩型フォトダイオード(APD)
(D)パッシブ導波路、多モード干渉器(MMI)、アレイ型導波路回折格子(AWG)
(B)電界吸収型(EA)変調器、マッハツェンダ型(MZ)変調器、方向性結合型光(DC)変調器
(C)PIN型フォトダイオード(PD)、雪崩型フォトダイオード(APD)
(D)パッシブ導波路、多モード干渉器(MMI)、アレイ型導波路回折格子(AWG)
また、レーザ部が熱的、あるいは電気的な手段で発振波長を可変する機能を有していても、本発明の効果は本質的に変わるものではない。
(A)分布帰還型(DFB)レーザ、分布反射型(DBR)レーザ、半導体光増幅器(SOA)
(B)電界吸収型(EA)変調器、マッハツェンダ型(MZ)変調器、方向性結合型光(DC)変調器
(C)PIN型フォトダイオード(PD)、雪崩型フォトダイオード(APD)
(D)パッシブ導波路、多モード干渉器(MMI)、アレイ型導波路回折格子(AWG)
また、レーザ部が熱的、あるいは電気的な手段で発振波長を可変する機能を有していても、本発明の効果は本質的に変わるものではない。
ただし図は飽くまで本実施例を説明するものであって、図の大きさと本実施例記載の縮尺や曲率などは必ずしも一致するものではない。ここではS-InPで構成されたn型InP基板を用いて説明するが、Zn-InPで構成されたp型InP基板を用いることができる。また、導電性InP基板上のSI-InP層として、Ru-InPを用いた例を説明するが、Os-InP層でもよい。なお、実施例4の光集積デバイスの作成法は実施例2から容易に推測可能であるため、ここでは詳細な説明は割愛する。
(B)電界吸収型(EA)変調器、マッハツェンダ型(MZ)変調器、方向性結合型光(DC)変調器
(C)PIN型フォトダイオード(PD)、雪崩型フォトダイオード(APD)
(D)パッシブ導波路、多モード干渉器(MMI)、アレイ型導波路回折格子(AWG)
また、レーザ部が熱的、あるいは電気的な手段で発振波長を可変する機能を有していても、本発明の効果は本質的に変わるものではない。
なお、実施例1乃至4に記載したRu-InP膜の好ましい膜厚について、以下説明する。
(B)電界吸収型(EA)変調器、マッハツェンダ型(MZ)変調器、方向性結合型光(DC)変調器
(C)PIN型フォトダイオード(PD)、雪崩型フォトダイオード(APD)
(D)パッシブ導波路、多モード干渉器(MMI)、アレイ型導波路回折格子(AWG)
(B)電界吸収型(EA)変調器、マッハツェンダ型(MZ)変調器、方向性結合型光(DC)変調器
(C)PIN型フォトダイオード(PD)、雪崩型フォトダイオード(APD)
(D)パッシブ導波路、多モード干渉器(MMI)、アレイ型導波路回折格子(AWG)
(B)電界吸収型(EA)変調器、マッハツェンダ型(MZ)変調器、方向性結合型光(DC)変調器
(C)PIN型フォトダイオード(PD)、雪崩型フォトダイオード(APD)
(D)パッシブ導波路、多モード干渉器(MMI)、アレイ型導波路回折格子(AWG)
また、レーザ部が熱的、あるいは電気的な手段で発振波長を可変する機能を有していても、本発明の効果は本質的に変わるものではない。
(B)電界吸収型(EA)変調器、マッハツェンダ型(MZ)変調器、方向性結合型光(DC)変調器
(C)PIN型フォトダイオード(PD)、雪崩型フォトダイオード(APD)
(D)パッシブ導波路、多モード干渉器(MMI)、アレイ型導波路回折格子(AWG)
尚、実施例5乃至8におけるRu-InP基板91は、既に述べた別の発明コンセプトに基づき、Fe-InP基板で置き換えても良い。
91…RuドープInP基板、92…RuドープInPバッファー層、93…n型InPクラッド層、94…多重量子井戸、95…回折格子層、96…p型InPクラッド層、97…p+型コンタクト層、98…誘電体マスク、99…半絶縁InP埋め込み層、910…パッシベーション膜、911…DFBレーザp電極、912…n電極、913…光吸収層、914…EA変調器p電極、916…位相調整領域p電極、917…光導波路、918…多モード干渉器
Claims (17)
- 第1導電型InP層上に半絶縁性InP層が積層された半絶縁性基板上に、半導体積層体が積層されていることを特徴とする光半導体装置。
- 請求項1において、
前記第1導電型InP層は、亜鉛又は硫黄がドーピングされており、
前記半絶縁性InP層は、ルテニウム又はオスミウムがドーピングされていることを特徴とする光半導体装置。 - 請求項2において、
ルテニウムがドーピングされた半絶縁性InP層の膜厚は、0.5μm以上150μm以下とする光半導体装置。 - 請求項3において、
第1導電型のキャリアを供給する第1電極と、前記第1導電型とは異なる第2導電型のキャリアを供給する第2電極とを前記半絶縁性基板の一方の面に備えている光半導体装置。 - 請求項1において、
第1光機能素子と第2光機能素子を備え、
前記第1光機能素子は、第1導電型のキャリアを供給する第1電極と、前記第1導電型とは異なる第2導電型のキャリアを供給する第2電極とを前記半絶縁性基板の一方の面に備え、
前記第2光機能素子は、第1導電型のキャリアを供給する第3電極と、前記第1導電型とは異なる第2導電型のキャリアを供給する第4電極とを前記半絶縁性基板の一方の面に備え、
前記第1電極と前記第3電極とは連結されており、
前記第2電極と前記第4電極とは分離されていることを特徴とする光半導体装置。 - 請求項1において、
前記半絶縁性InP層の上に下部クラッド層、活性層及び上部クラッド層の積層体を有し、
分布帰還型(DFB)レーザ、分布反射型(DBR)レーザ、半導体光増幅器(SOA)のいずれかが構成されていることを特徴とする光半導体装置。 - 請求項5において、
前記第1光機能素子は、分布帰還型(DFB)レーザ、分布反射型(DBR)レーザ、半導体光増幅器(SOA)のいずれかであることを特徴とする光半導体装置。 - 請求項1において、
PIN型フォトダイオード(PD)、雪崩型フォトダイオード(APD)のどちらかが構成されていることを特徴とする光半導体装置。 - 請求項1において、
パッシブ導波路、多モード干渉器(MMI)、アレイ型導波路回折格子(AWG)のいずれかが構成されていることを特徴とする光半導体装置。 - 少なくとも表面にルテニウム(Ru)或いはオスニウム(Os)がド−ピングされた半絶縁性InPを有する半絶縁性InP基板と、
前記半絶縁性InP基板上に配置されたn型半導体層と、
前記n型半導体層上に積層されている活性層と、
前記活性層上に積層されているp型半導体層と、
前記p型半導体層に接続された第1電極と、
前記n型半導体層に接続された第2電極とを備えた光半導体装置 - 請求項10において、
前記半絶縁性InP基板は、Ruがドーピングされた半絶縁性InPで構成されていることを特徴とする光半導体装置。 - 請求項10において、
前記半絶縁性InP基板は、Ruがドーピングされた半絶縁性InP層が、導電性InP基板上に積層されていることを特徴とする光半導体装置。 - 請求項10において、
前記半絶縁性InP基板は、Ruがドーピングされた半絶縁性InP層が、Feドープ半絶縁性InP基板上に積層されていることを特徴とする光半導体装置。 - 請求項10において、
前記光半導体装置は、少なくとも半導体レーザ、或いは半導体光増幅器を含むことを特徴とする光半導体装置。 - 請求項14において、
前記半絶縁性基板のルテニウム、或いはオスニウムのドーピング濃度は5x1015cm-3から1x1019cm-3の範囲であることを特徴とする光半導体装置。 - 請求項15において、
前記半絶縁性基板中の亜鉛(Zn)、ベリリウム(Be)、マグネシウム(Mg)、炭素(C)、シリコン(Si)、硫黄(S)、錫(Sn)の濃度が1x1016cm-3未満であることを特徴とする光半導体装置。 - 請求項16において、
前期基板主表面が(100)面であって、該基板面が-0.05度以上-0.2度以下の角度で微傾斜していることを特徴とする光半導体装置。
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