JP2010153824A - 多孔質絶縁膜の製造方法、半導体装置の製造方法、及び半導体装置 - Google Patents
多孔質絶縁膜の製造方法、半導体装置の製造方法、及び半導体装置 Download PDFInfo
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Abstract
【解決手段】環状シロキサンを骨格とし側鎖に少なくとも一つの揮発性炭化水素基が結合した環状シロキサン化合物と、シリコン含有化合物とを、プラズマ中に導入し、基板上に絶縁膜を形成する工程と、絶縁膜にエネルギーを加えることにより、絶縁膜を多孔質絶縁膜にする工程とを備える。シリコン含有化合物は、環状シロキサン化合物の骨格、揮発性炭化水素基、及び環状シロキサン化合物と揮発性炭化水素基の結合より低エネルギーで分解する。
【選択図】図1
Description
前記絶縁膜にエネルギーを加えることにより、前記絶縁膜を多孔質絶縁膜にする工程と、
を備え、
前記シリコン含有化合物は、前記環状シロキサン化合物の骨格、前記揮発性炭化水素基、及び前記環状シロキサン化合物と前記揮発性炭化水素基の結合より低エネルギーで分解する多孔質絶縁膜の製造方法が提供される。
前記基板上に形成された多孔質絶縁膜と、
を備え、
前記多孔質絶縁膜は、複数の環状シロキサンを含有しており、かつナノインデンタによる弾性率が5以上である半導体装置が提供される。
(a)環状構造を有する式CnH2nの少なくとも1つの環状炭化水素
(nは4〜14、環状構造中の炭素数は4〜10であり、かつこの少なくとも1つの環状炭化水素は、環状構造上に置換された複数の単純もしくは分枝炭化水素を有していてもよい);
(b)一般式CnH(2n+2)-2yの少なくとも1つの直鎖もしくは分枝の、飽和の、単もしくは複不飽和の炭化水素
(nは2〜20およびy=0〜n);
(c)環状構造を有する式CnH2n-2xの少なくとも1つの、単もしくは複不飽和の環状炭化水素
(xは不飽和部位の数、nは4〜14、環状構造中の炭素数は4〜10、かつこの少なくとも1つの単もしくは複不飽和の環状炭化水素は、環状構造上に置換された複数の単純もしくは分枝炭化水素置換基を有していてもよく、またその炭化水素置換基の1つに不飽和もしくは環内不飽和を有していてもよい);
(d)2環構造を有する式CnH2n-2の少なくとも1つの2環状炭化水素
(nは4〜14、2環構造中の炭素数は4〜12、かつこの少なくとも1つの2環状炭化水素は、2環構造上に置換された複数の単純もしくは分枝炭化水素を有していてもよい);
(e)2環構造を有する式CnH2n-(2+2x)の少なくとも1つの複不飽和の2環炭化水素
(xは不飽和部位の数、nは4〜14、2環構造中の炭素数は4〜12、かつこの少なくとも1つの複不飽和の2環状炭化水素は、2環構造上に置換された複数の単純もしくは分枝炭化水素置換基を有していてもよく、またその炭化水素置換基の1つに不飽和もしくは環内不飽和を有していてもよい);
(f)3環構造を有する式CnH2n-4の少なくとも1つの3環状炭化水素
(nは4〜14、3環構造中の炭素数は4〜12、かつこの少なくとも1つの3環状炭化水素は、3環構造上に置換された複数の単純もしくは分枝炭化水素を有していてもよい)。
環状シロキサン化合物として、側鎖の1つにビニル基を有する6員環Si−Oからなる原料分子(トリビニルシクロトリシロキサンモノマー)に、高分子炭化水素(炭素数2から10以下)を側鎖として結合させた化合物を用意した。また、シリコン含有化合物として、ジメチルジメトキシシラン(DMDMOS)を用意した。そして、環状シロキサン化合物、シリコン含有化合物、及び酸素ガスを成膜室10に導入し、シリコン基板上に絶縁膜を成膜した。そして、シリコン基板を紫外線照射することにより、シリコン基板上の絶縁膜を多孔質絶縁膜にした(実施例)。
20 上部電極
30 下部電極
100 基板
102 トランジスタ
104 層間絶縁膜
110 絶縁層
120 絶縁層
130 絶縁層
140 絶縁層
150 絶縁層
210 導電パターン
220 導電パターン
230 導電パターン
240 導電パターン
310 拡散防止膜
320 拡散防止膜
330 拡散防止膜
340 拡散防止膜
Claims (17)
- 環状シロキサンを骨格とし側鎖に少なくとも一つの揮発性炭化水素基が結合した環状シロキサン化合物と、シリコン含有化合物とを、プラズマ中に導入し、基板上に絶縁膜を形成する工程と、
前記絶縁膜にエネルギーを加えることにより、前記絶縁膜を多孔質絶縁膜にする工程と、
を備え、
前記シリコン含有化合物は、前記環状シロキサン化合物の骨格、前記揮発性炭化水素基、及び前記環状シロキサン化合物と前記揮発性炭化水素基の結合より低エネルギーで分解する多孔質絶縁膜の製造方法。 - 請求項1に記載の多孔質絶縁膜の製造方法において、
前記絶縁膜を前記多孔質絶縁膜にする工程は、前記絶縁膜に含まれる前記揮発性炭化水素基を揮発させることにより前記多孔質絶縁膜を形成する工程である多孔質絶縁膜の製造方法。 - 請求項1又は2に記載の多孔質絶縁膜の製造方法において、
前記揮発性炭化水素基は、下記(a)〜(f)からなる群より選ばれた一つである多孔質絶縁膜の製造方法。
(a)環状構造を有する式CnH2nの少なくとも1つの環状炭化水素
(nは4〜14、環状構造中の炭素数は4〜10であり、かつこの少なくとも1つの環状炭化水素は、環状構造上に置換された複数の単純もしくは分枝炭化水素を有していてもよい);
(b)一般式CnH(2n+2)-2yの少なくとも1つの直鎖もしくは分枝の、飽和の、単もしくは複不飽和の炭化水素
(nは2〜20およびy=0〜n);
(c)環状構造を有する式CnH2n-2xの少なくとも1つの、単もしくは複不飽和の環状炭化水素
(xは不飽和部位の数、nは4〜14、環状構造中の炭素数は4〜10、かつこの少なくとも1つの単もしくは複不飽和の環状炭化水素は、環状構造上に置換された複数の単純もしくは分枝炭化水素置換基を有していてもよく、またその炭化水素置換基の1つに不飽和もしくは環内不飽和を有していてもよい);
(d)2環構造を有する式CnH2n-2の少なくとも1つの2環状炭化水素
(nは4〜14、2環構造中の炭素数は4〜12、かつこの少なくとも1つの2環状炭化水素は、2環構造上に置換された複数の単純もしくは分枝炭化水素を有していてもよい);
(e)2環構造を有する式CnH2n-(2+2x)の少なくとも1つの複不飽和の2環炭化水素
(xは不飽和部位の数、nは4〜14、2環構造中の炭素数は4〜12、かつこの少なくとも1つの複不飽和の2環状炭化水素は、2環構造上に置換された複数の単純もしくは分枝炭化水素置換基を有していてもよく、またその炭化水素置換基の1つに不飽和もしくは環内不飽和を有していてもよい);
(f)3環構造を有する式CnH2n-4の少なくとも1つの3環状炭化水素
(nは4〜14、3環構造中の炭素数は4〜12、かつこの少なくとも1つの3環状炭化水素は、3環構造上に置換された複数の単純もしくは分枝炭化水素を有していてもよい)。 - 請求項1〜3のいずれか一つに記載の多孔質絶縁膜の製造方法において、
前記揮発性炭化水素基の炭素数は2以上10以下である多孔質絶縁膜の製造方法。 - 請求項1〜6のいずれか一つに記載の多孔質絶縁膜の製造方法において、前記シリコン含有化合物の骨格は直鎖状のSiとOである多孔質絶縁膜の製造方法。
- 請求項1〜8のいずれか一つに記載の多孔質絶縁膜の製造方法において、
前記プラズマ中に酸化剤ガスを導入する多孔質絶縁膜の製造方法。 - 請求項1〜9のいずれか一つに記載の多孔質絶縁膜の製造方法において、
前記多孔質絶縁膜における空孔径の平均値は直径で1nm以下である多孔質絶縁膜の製造方法。 - 請求項1〜10のいずれか一つに記載の多孔質絶縁膜の製造方法において、
前記多孔質絶縁膜におけるC/Si比は、原子数比で1以上3以下である多孔質絶縁膜の製造方法。 - 請求項1〜11のいずれか一つに記載の多孔質絶縁膜の製造方法により、多孔質絶縁膜を形成する工程を有する半導体装置の製造方法。
- 基板と、
前記基板上に形成された多孔質絶縁膜と、
を備え、
前記多孔質絶縁膜は、複数の環状シロキサンを含有しており、かつナノインデンタによる弾性率が5以上である半導体装置。 - 請求項13に記載の半導体装置において、
前記複数の環状シロキサンがSi又は直鎖シロキサンを介して互いに結合している半導体装置。 - 請求項13または14に記載の半導体装置において、
前記多孔質絶縁膜に含まれる空孔の直径の平均値は1nm以下である半導体装置。 - 請求項13〜15のいずれか一つに記載の半導体装置において、
前記多孔質絶縁膜の比誘電率は2.7以下である半導体装置。 - 請求項13〜16のいずれか一つに記載の半導体装置において、
前記多孔質絶縁膜におけるC/Si比は、原子数比で1以上3以下である半導体装置。
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