JP2010147153A - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
- Publication number
- JP2010147153A JP2010147153A JP2008321038A JP2008321038A JP2010147153A JP 2010147153 A JP2010147153 A JP 2010147153A JP 2008321038 A JP2008321038 A JP 2008321038A JP 2008321038 A JP2008321038 A JP 2008321038A JP 2010147153 A JP2010147153 A JP 2010147153A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor chip
- resin
- wiring board
- wiring
- adhesion layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
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- H10W74/016—
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- H10W74/117—
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- H10W76/40—
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- H10W90/00—
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- H10W70/60—
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- H10W72/072—
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- H10W72/073—
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- H10W72/30—
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- H10W72/877—
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- H10W74/00—
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- H10W74/012—
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- H10W74/15—
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- H10W90/722—
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- H10W90/724—
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- H10W90/734—
Landscapes
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Combinations Of Printed Boards (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Structures For Mounting Electric Components On Printed Circuit Boards (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008321038A JP2010147153A (ja) | 2008-12-17 | 2008-12-17 | 半導体装置及びその製造方法 |
| US12/639,421 US8106495B2 (en) | 2008-12-17 | 2009-12-16 | Semiconductor apparatus and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008321038A JP2010147153A (ja) | 2008-12-17 | 2008-12-17 | 半導体装置及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2010147153A true JP2010147153A (ja) | 2010-07-01 |
| JP2010147153A5 JP2010147153A5 (enExample) | 2011-10-06 |
Family
ID=42239520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008321038A Pending JP2010147153A (ja) | 2008-12-17 | 2008-12-17 | 半導体装置及びその製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US8106495B2 (enExample) |
| JP (1) | JP2010147153A (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140098694A (ko) * | 2013-01-31 | 2014-08-08 | 신꼬오덴기 고교 가부시키가이샤 | 전자 부품 내장 기판 및 그 제조 방법 |
| JP2015153844A (ja) * | 2014-02-13 | 2015-08-24 | 日亜化学工業株式会社 | 発光装置 |
| JP2017050310A (ja) * | 2015-08-31 | 2017-03-09 | 新光電気工業株式会社 | 電子部品装置及びその製造方法 |
| US10485098B2 (en) | 2015-06-19 | 2019-11-19 | Shinko Electric Industries Co., Ltd. | Electronic component device |
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| JP5279631B2 (ja) * | 2009-06-23 | 2013-09-04 | 新光電気工業株式会社 | 電子部品内蔵配線基板と電子部品内蔵配線基板の製造方法 |
| US8436255B2 (en) * | 2009-12-31 | 2013-05-07 | Stmicroelectronics Pte Ltd. | Fan-out wafer level package with polymeric layer for high reliability |
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| US20110156240A1 (en) * | 2009-12-31 | 2011-06-30 | Stmicroelectronics Asia Pacific Pte. Ltd. | Reliable large die fan-out wafer level package and method of manufacture |
| US8502394B2 (en) * | 2009-12-31 | 2013-08-06 | Stmicroelectronics Pte Ltd. | Multi-stacked semiconductor dice scale package structure and method of manufacturing same |
| US8742603B2 (en) * | 2010-05-20 | 2014-06-03 | Qualcomm Incorporated | Process for improving package warpage and connection reliability through use of a backside mold configuration (BSMC) |
| US8378477B2 (en) * | 2010-09-14 | 2013-02-19 | Stats Chippac Ltd. | Integrated circuit packaging system with film encapsulation and method of manufacture thereof |
| KR101817159B1 (ko) * | 2011-02-17 | 2018-02-22 | 삼성전자 주식회사 | Tsv를 가지는 인터포저를 포함하는 반도체 패키지 및 그 제조 방법 |
| KR101740483B1 (ko) * | 2011-05-02 | 2017-06-08 | 삼성전자 주식회사 | 고정 부재 및 할로겐-프리 패키지간 연결부를 포함하는 적층 패키지 |
| US8461676B2 (en) | 2011-09-09 | 2013-06-11 | Qualcomm Incorporated | Soldering relief method and semiconductor device employing same |
| US9013037B2 (en) | 2011-09-14 | 2015-04-21 | Stmicroelectronics Pte Ltd. | Semiconductor package with improved pillar bump process and structure |
| US8916481B2 (en) | 2011-11-02 | 2014-12-23 | Stmicroelectronics Pte Ltd. | Embedded wafer level package for 3D and package-on-package applications, and method of manufacture |
| US8779601B2 (en) | 2011-11-02 | 2014-07-15 | Stmicroelectronics Pte Ltd | Embedded wafer level package for 3D and package-on-package applications, and method of manufacture |
| TWI418009B (zh) * | 2011-12-08 | 2013-12-01 | 欣興電子股份有限公司 | 層疊封裝的封裝結構及其製法 |
| US9659893B2 (en) * | 2011-12-21 | 2017-05-23 | Mediatek Inc. | Semiconductor package |
| US8633588B2 (en) * | 2011-12-21 | 2014-01-21 | Mediatek Inc. | Semiconductor package |
| US8680663B2 (en) * | 2012-01-03 | 2014-03-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Methods and apparatus for package on package devices with reduced strain |
| US9704725B1 (en) | 2012-03-06 | 2017-07-11 | Amkor Technology, Inc. | Semiconductor device with leadframe configured to facilitate reduced burr formation |
| US9385006B2 (en) * | 2012-06-21 | 2016-07-05 | STATS ChipPAC Pte. Ltd. | Semiconductor device and method of forming an embedded SOP fan-out package |
| US8969730B2 (en) * | 2012-08-16 | 2015-03-03 | Apple Inc. | Printed circuit solder connections |
| US20140210106A1 (en) * | 2013-01-29 | 2014-07-31 | Apple Inc. | ULTRA THIN PoP PACKAGE |
| US20140225248A1 (en) * | 2013-02-13 | 2014-08-14 | Qualcomm Incorporated | Power distribution and thermal solution for direct stacked integrated circuits |
| KR101486790B1 (ko) | 2013-05-02 | 2015-01-28 | 앰코 테크놀로지 코리아 주식회사 | 강성보강부를 갖는 마이크로 리드프레임 |
| TWI533421B (zh) | 2013-06-14 | 2016-05-11 | 日月光半導體製造股份有限公司 | 半導體封裝結構及半導體製程 |
| KR20150014701A (ko) * | 2013-07-30 | 2015-02-09 | 삼성전자주식회사 | 반도체 패키지 및 이의 제조 방법 |
| TWI520285B (zh) * | 2013-08-12 | 2016-02-01 | 矽品精密工業股份有限公司 | 半導體封裝件及其製法 |
| US9299650B1 (en) | 2013-09-25 | 2016-03-29 | Stats Chippac Ltd. | Integrated circuit packaging system with single metal layer interposer and method of manufacture thereof |
| NL2011512C2 (en) * | 2013-09-26 | 2015-03-30 | Besi Netherlands B V | Method for moulding and surface processing electronic components and electronic component produced with this method. |
| US9905491B1 (en) | 2013-09-27 | 2018-02-27 | STATS ChipPAC Pte. Ltd. | Interposer substrate designs for semiconductor packages |
| KR101563911B1 (ko) | 2013-10-24 | 2015-10-28 | 앰코 테크놀로지 코리아 주식회사 | 반도체 패키지 |
| US20150221570A1 (en) * | 2014-02-04 | 2015-08-06 | Amkor Technology, Inc. | Thin sandwich embedded package |
| US9693455B1 (en) | 2014-03-27 | 2017-06-27 | STATS ChipPAC Pte. Ltd. | Integrated circuit packaging system with plated copper posts and method of manufacture thereof |
| US9673122B2 (en) | 2014-05-02 | 2017-06-06 | Amkor Technology, Inc. | Micro lead frame structure having reinforcing portions and method |
| KR102154830B1 (ko) * | 2014-08-05 | 2020-09-11 | 삼성전자주식회사 | 반도체 패키지 및 그 제조 방법 |
| KR20160022603A (ko) * | 2014-08-20 | 2016-03-02 | 삼성전기주식회사 | 플립칩 패키지 및 그 제조 방법 |
| US9859200B2 (en) * | 2014-12-29 | 2018-01-02 | STATS ChipPAC Pte. Ltd. | Integrated circuit packaging system with interposer support structure mechanism and method of manufacture thereof |
| US20170110392A1 (en) * | 2015-10-15 | 2017-04-20 | Advanced Semiconductor Engineering, Inc. | Semiconductor package structure and method for manufacturing the same structure |
| KR102450576B1 (ko) * | 2016-01-22 | 2022-10-07 | 삼성전자주식회사 | 전자 부품 패키지 및 그 제조방법 |
| KR20180095371A (ko) * | 2017-02-17 | 2018-08-27 | 엘지전자 주식회사 | 이동 단말기 및 인쇄 회로 기판 |
| JP6917295B2 (ja) * | 2017-12-25 | 2021-08-11 | 新光電気工業株式会社 | 電子部品内蔵基板、シート基板 |
| US11101214B2 (en) * | 2019-01-02 | 2021-08-24 | Taiwan Semiconductor Manufacturing Co., Ltd. | Package structure with dam structure and method for forming the same |
| US11094625B2 (en) * | 2019-01-02 | 2021-08-17 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor package with improved interposer structure |
| US11721657B2 (en) | 2019-06-14 | 2023-08-08 | Stmicroelectronics Pte Ltd | Wafer level chip scale package having varying thicknesses |
| KR102908318B1 (ko) * | 2020-12-28 | 2026-01-05 | 삼성전기주식회사 | 패키지 내장기판 |
| KR102760431B1 (ko) * | 2021-02-25 | 2025-02-03 | 창신 메모리 테크놀로지즈 아이엔씨 | 반도체 구조 및 반도체 구조의 제조 방법 |
| CN114975325B (zh) * | 2021-02-25 | 2025-01-10 | 长鑫存储技术有限公司 | 半导体结构及半导体结构的制备方法 |
| KR20220169284A (ko) | 2021-06-18 | 2022-12-27 | 삼성전자주식회사 | 반도체 패키지 및 이의 제조 방법 |
| US12107037B2 (en) * | 2021-11-03 | 2024-10-01 | Amkor Technology Singapore Holding Pte. Ltd. | Semiconductor devices and methods of manufacturing electronic devices |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04254829A (ja) * | 1991-02-07 | 1992-09-10 | Seiko Epson Corp | アクティブデバイス |
| JPH0577423A (ja) * | 1991-09-24 | 1993-03-30 | Canon Inc | インクジエツト記録ヘツド |
| JPH0621271A (ja) * | 1992-07-02 | 1994-01-28 | Sharp Corp | 半導体パッケージ構造 |
| JP2001015682A (ja) * | 1999-06-28 | 2001-01-19 | Hitachi Ltd | 樹脂封止型電子装置 |
| JP2002158316A (ja) * | 2000-11-16 | 2002-05-31 | Towa Corp | 半導体装置及びその製造方法 |
| JP2004296690A (ja) * | 2003-03-26 | 2004-10-21 | Shinko Electric Ind Co Ltd | 半導体素子を内蔵した多層回路基板の製造方法 |
| JP2007048860A (ja) * | 2005-08-09 | 2007-02-22 | Toshiba Corp | 半導体装置とその製造方法 |
| JP2008294330A (ja) * | 2007-05-28 | 2008-12-04 | Shinko Electric Ind Co Ltd | チップ内蔵基板 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10294423A (ja) * | 1997-04-17 | 1998-11-04 | Nec Corp | 半導体装置 |
| JP2000223645A (ja) * | 1999-02-01 | 2000-08-11 | Mitsubishi Electric Corp | 半導体装置 |
| JP2003347722A (ja) | 2002-05-23 | 2003-12-05 | Ibiden Co Ltd | 多層電子部品搭載用基板及びその製造方法 |
| JP3912318B2 (ja) * | 2003-05-02 | 2007-05-09 | セイコーエプソン株式会社 | 半導体装置の製造方法および電子デバイスの製造方法 |
| JP3879853B2 (ja) * | 2003-10-10 | 2007-02-14 | セイコーエプソン株式会社 | 半導体装置、回路基板及び電子機器 |
| JP4512545B2 (ja) * | 2005-10-27 | 2010-07-28 | パナソニック株式会社 | 積層型半導体モジュール |
| JP2007123454A (ja) * | 2005-10-27 | 2007-05-17 | Renesas Technology Corp | 半導体装置及びその製造方法 |
| JPWO2007069606A1 (ja) | 2005-12-14 | 2009-05-21 | 新光電気工業株式会社 | チップ内蔵基板の製造方法 |
| JP5068990B2 (ja) * | 2006-12-26 | 2012-11-07 | 新光電気工業株式会社 | 電子部品内蔵基板 |
| US7982298B1 (en) * | 2008-12-03 | 2011-07-19 | Amkor Technology, Inc. | Package in package semiconductor device |
-
2008
- 2008-12-17 JP JP2008321038A patent/JP2010147153A/ja active Pending
-
2009
- 2009-12-16 US US12/639,421 patent/US8106495B2/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04254829A (ja) * | 1991-02-07 | 1992-09-10 | Seiko Epson Corp | アクティブデバイス |
| JPH0577423A (ja) * | 1991-09-24 | 1993-03-30 | Canon Inc | インクジエツト記録ヘツド |
| JPH0621271A (ja) * | 1992-07-02 | 1994-01-28 | Sharp Corp | 半導体パッケージ構造 |
| JP2001015682A (ja) * | 1999-06-28 | 2001-01-19 | Hitachi Ltd | 樹脂封止型電子装置 |
| JP2002158316A (ja) * | 2000-11-16 | 2002-05-31 | Towa Corp | 半導体装置及びその製造方法 |
| JP2004296690A (ja) * | 2003-03-26 | 2004-10-21 | Shinko Electric Ind Co Ltd | 半導体素子を内蔵した多層回路基板の製造方法 |
| JP2007048860A (ja) * | 2005-08-09 | 2007-02-22 | Toshiba Corp | 半導体装置とその製造方法 |
| JP2008294330A (ja) * | 2007-05-28 | 2008-12-04 | Shinko Electric Ind Co Ltd | チップ内蔵基板 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140098694A (ko) * | 2013-01-31 | 2014-08-08 | 신꼬오덴기 고교 가부시키가이샤 | 전자 부품 내장 기판 및 그 제조 방법 |
| JP2014150154A (ja) * | 2013-01-31 | 2014-08-21 | Shinko Electric Ind Co Ltd | 電子部品内蔵基板及びその製造方法 |
| KR102032844B1 (ko) * | 2013-01-31 | 2019-10-16 | 신꼬오덴기 고교 가부시키가이샤 | 전자 부품 내장 기판 및 그 제조 방법 |
| JP2015153844A (ja) * | 2014-02-13 | 2015-08-24 | 日亜化学工業株式会社 | 発光装置 |
| US10485098B2 (en) | 2015-06-19 | 2019-11-19 | Shinko Electric Industries Co., Ltd. | Electronic component device |
| JP2017050310A (ja) * | 2015-08-31 | 2017-03-09 | 新光電気工業株式会社 | 電子部品装置及びその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20100148332A1 (en) | 2010-06-17 |
| US8106495B2 (en) | 2012-01-31 |
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