JP2009543337A5 - - Google Patents

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Publication number
JP2009543337A5
JP2009543337A5 JP2009518147A JP2009518147A JP2009543337A5 JP 2009543337 A5 JP2009543337 A5 JP 2009543337A5 JP 2009518147 A JP2009518147 A JP 2009518147A JP 2009518147 A JP2009518147 A JP 2009518147A JP 2009543337 A5 JP2009543337 A5 JP 2009543337A5
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JP
Japan
Prior art keywords
substrate
liquid carrier
suspended
chemical
abrasive particles
Prior art date
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Application number
JP2009518147A
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English (en)
Japanese (ja)
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JP2009543337A (ja
JP5596344B2 (ja
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Publication date
Priority claimed from US11/478,004 external-priority patent/US20080220610A1/en
Application filed filed Critical
Publication of JP2009543337A publication Critical patent/JP2009543337A/ja
Publication of JP2009543337A5 publication Critical patent/JP2009543337A5/ja
Application granted granted Critical
Publication of JP5596344B2 publication Critical patent/JP5596344B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2009518147A 2006-06-29 2007-06-14 コロイダルシリカを利用した酸化ケイ素研磨方法 Expired - Fee Related JP5596344B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/478,004 2006-06-29
US11/478,004 US20080220610A1 (en) 2006-06-29 2006-06-29 Silicon oxide polishing method utilizing colloidal silica
PCT/US2007/013943 WO2008005164A1 (en) 2006-06-29 2007-06-14 Silicon oxide polishing method utilizing colloidal silica

Publications (3)

Publication Number Publication Date
JP2009543337A JP2009543337A (ja) 2009-12-03
JP2009543337A5 true JP2009543337A5 (enExample) 2010-06-03
JP5596344B2 JP5596344B2 (ja) 2014-09-24

Family

ID=38894886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009518147A Expired - Fee Related JP5596344B2 (ja) 2006-06-29 2007-06-14 コロイダルシリカを利用した酸化ケイ素研磨方法

Country Status (10)

Country Link
US (1) US20080220610A1 (enExample)
EP (1) EP2038916A4 (enExample)
JP (1) JP5596344B2 (enExample)
KR (1) KR101378259B1 (enExample)
CN (1) CN101479836A (enExample)
IL (1) IL195699A (enExample)
MY (1) MY151925A (enExample)
SG (1) SG172740A1 (enExample)
TW (1) TWI375264B (enExample)
WO (1) WO2008005164A1 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101564673B1 (ko) * 2008-02-01 2015-10-30 가부시키가이샤 후지미인코퍼레이티드 연마용 조성물 및 이를 이용한 연마 방법
FR2929756B1 (fr) * 2008-04-08 2010-08-27 Commissariat Energie Atomique Procede de formation de materiau poreux dans une microcavite ou un micropassage par polissage mecano-chimique
JP5407188B2 (ja) * 2008-06-11 2014-02-05 信越化学工業株式会社 合成石英ガラス基板用研磨剤
KR101548756B1 (ko) * 2008-06-11 2015-08-31 신에쓰 가가꾸 고교 가부시끼가이샤 합성 석영 유리 기판용 연마제
KR101279971B1 (ko) * 2008-12-31 2013-07-05 제일모직주식회사 구리 배리어층 연마용 ｃｍｐ 슬러리 조성물, 이를 이용한 연마 방법, 및 그 연마방법에 의해 제조된 반도체 소자
US20100164106A1 (en) * 2008-12-31 2010-07-01 Cheil Industries Inc. CMP Slurry Composition for Barrier Polishing for Manufacturing Copper Interconnects, Polishing Method Using the Composition, and Semiconductor Device Manufactured by the Method
US8119529B2 (en) * 2009-04-29 2012-02-21 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Method for chemical mechanical polishing a substrate
US8247328B2 (en) * 2009-05-04 2012-08-21 Cabot Microelectronics Corporation Polishing silicon carbide
US8232208B2 (en) 2010-06-15 2012-07-31 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Stabilized chemical mechanical polishing composition and method of polishing a substrate
US8568610B2 (en) 2010-09-20 2013-10-29 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Stabilized, concentratable chemical mechanical polishing composition and method of polishing a substrate
US8513126B2 (en) 2010-09-22 2013-08-20 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Slurry composition having tunable dielectric polishing selectivity and method of polishing a substrate
CN102800580B (zh) * 2011-05-25 2015-07-08 中芯国际集成电路制造(上海)有限公司 抛光方法以及栅极的形成方法
KR102501107B1 (ko) * 2014-06-25 2023-02-17 씨엠씨 머티리얼즈, 인코포레이티드 콜로이드성 실리카 화학적-기계적 연마 조성물
ES2756948B2 (es) * 2020-02-04 2022-12-19 Drylyte Sl Electrolito solido para el electropulido en seco de metales con moderador de actividad

Family Cites Families (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4789648A (en) * 1985-10-28 1988-12-06 International Business Machines Corporation Method for producing coplanar multi-level metal/insulator films on a substrate and for forming patterned conductive lines simultaneously with stud vias
US4944836A (en) * 1985-10-28 1990-07-31 International Business Machines Corporation Chem-mech polishing method for producing coplanar metal/insulator films on a substrate
US4671851A (en) * 1985-10-28 1987-06-09 International Business Machines Corporation Method for removing protuberances at the surface of a semiconductor wafer using a chem-mech polishing technique
US4910155A (en) * 1988-10-28 1990-03-20 International Business Machines Corporation Wafer flood polishing
US5196353A (en) * 1992-01-03 1993-03-23 Micron Technology, Inc. Method for controlling a semiconductor (CMP) process by measuring a surface temperature and developing a thermal image of the wafer
US6614529B1 (en) * 1992-12-28 2003-09-02 Applied Materials, Inc. In-situ real-time monitoring technique and apparatus for endpoint detection of thin films during chemical/mechanical polishing planarization
US5658183A (en) * 1993-08-25 1997-08-19 Micron Technology, Inc. System for real-time control of semiconductor wafer polishing including optical monitoring
US5433651A (en) * 1993-12-22 1995-07-18 International Business Machines Corporation In-situ endpoint detection and process monitoring method and apparatus for chemical-mechanical polishing
JP3270282B2 (ja) * 1994-02-21 2002-04-02 株式会社東芝 半導体製造装置及び半導体装置の製造方法
JP3313505B2 (ja) * 1994-04-14 2002-08-12 株式会社日立製作所 研磨加工法
US5964643A (en) * 1995-03-28 1999-10-12 Applied Materials, Inc. Apparatus and method for in-situ monitoring of chemical mechanical polishing operations
US5893796A (en) * 1995-03-28 1999-04-13 Applied Materials, Inc. Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus
US5838447A (en) * 1995-07-20 1998-11-17 Ebara Corporation Polishing apparatus including thickness or flatness detector
US5741626A (en) * 1996-04-15 1998-04-21 Motorola, Inc. Method for forming a dielectric tantalum nitride layer as an anti-reflective coating (ARC)
US5872633A (en) * 1996-07-26 1999-02-16 Speedfam Corporation Methods and apparatus for detecting removal of thin film layers during planarization
FR2761629B1 (fr) * 1997-04-07 1999-06-18 Hoechst France Nouveau procede de polissage mecano-chimique de couches de materiaux semi-conducteurs a base de polysilicium ou d'oxyde de silicium dope
US6080216A (en) * 1998-04-22 2000-06-27 3M Innovative Properties Company Layered alumina-based abrasive grit, abrasive products, and methods
US6355075B1 (en) * 2000-02-11 2002-03-12 Fujimi Incorporated Polishing composition
KR100481651B1 (ko) * 2000-08-21 2005-04-08 가부시끼가이샤 도시바 화학 기계 연마용 슬러리 및 반도체 장치의 제조 방법
DE10063491A1 (de) * 2000-12-20 2002-06-27 Bayer Ag Saure Polierslurry für das chemisch-mechanische Polieren von SiO¶2¶-Isolationsschichten
JP2003086548A (ja) * 2001-06-29 2003-03-20 Hitachi Ltd 半導体装置の製造方法及びその研磨液
JP4954398B2 (ja) * 2001-08-09 2012-06-13 株式会社フジミインコーポレーテッド 研磨用組成物およびそれを用いた研磨方法
JP2003197573A (ja) * 2001-12-26 2003-07-11 Ekc Technology Kk メタル膜絶縁膜共存表面研磨用コロイダルシリカ
US20030162398A1 (en) * 2002-02-11 2003-08-28 Small Robert J. Catalytic composition for chemical-mechanical polishing, method of using same, and substrate treated with same
US6776810B1 (en) * 2002-02-11 2004-08-17 Cabot Microelectronics Corporation Anionic abrasive particles treated with positively charged polyelectrolytes for CMP
US20030162399A1 (en) * 2002-02-22 2003-08-28 University Of Florida Method, composition and apparatus for tunable selectivity during chemical mechanical polishing of metallic structures
TW200400554A (en) * 2002-03-04 2004-01-01 Fujimi Inc Polishing composition and method for forming wiring structure
JP4083528B2 (ja) * 2002-10-01 2008-04-30 株式会社フジミインコーポレーテッド 研磨用組成物
JP3984902B2 (ja) * 2002-10-31 2007-10-03 Ｊｓｒ株式会社 ポリシリコン膜又はアモルファスシリコン膜研磨用化学機械研磨用水系分散体およびこれを用いた化学機械研磨方法ならびに半導体装置の製造方法
US20040123528A1 (en) * 2002-12-30 2004-07-01 Jung Jong Goo CMP slurry for semiconductor device, and method for manufacturing semiconductor device using the same
KR100507369B1 (ko) * 2002-12-30 2005-08-05 주식회사 하이닉스반도체 반도체소자의 폴리 플러그 형성방법
JP2004356326A (ja) * 2003-05-28 2004-12-16 Sumitomo Bakelite Co Ltd 研磨用組成物
JP2004356327A (ja) * 2003-05-28 2004-12-16 Sumitomo Bakelite Co Ltd 研磨用組成物
JP4130614B2 (ja) * 2003-06-18 2008-08-06 株式会社東芝 半導体装置の製造方法
TWI291987B (en) * 2003-07-04 2008-01-01 Jsr Corp Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method
US20050097825A1 (en) * 2003-11-06 2005-05-12 Jinru Bian Compositions and methods for a barrier removal
US6964600B2 (en) * 2003-11-21 2005-11-15 Praxair Technology, Inc. High selectivity colloidal silica slurry
KR100596834B1 (ko) * 2003-12-24 2006-07-04 주식회사 하이닉스반도체 반도체소자의 폴리실리콘 플러그 형성방법
JP2005244123A (ja) * 2004-02-27 2005-09-08 Fujimi Inc 研磨用組成物
DE602005023557D1 (de) * 2004-04-12 2010-10-28 Jsr Corp Wässrige Dispersion zum chemisch-mechanischen Polieren und chemisch-mechanisches Polierverfahren
US7316976B2 (en) * 2004-05-19 2008-01-08 Dupont Air Products Nanomaterials Llc Polishing method to reduce dishing of tungsten on a dielectric
GB2415199B (en) * 2004-06-14 2009-06-17 Kao Corp Polishing composition
JP4951218B2 (ja) * 2004-07-15 2012-06-13 三星電子株式会社 酸化セリウム研磨粒子及び該研磨粒子を含む組成物
US20060124026A1 (en) * 2004-12-10 2006-06-15 3M Innovative Properties Company Polishing solutions
US20080171441A1 (en) * 2005-06-28 2008-07-17 Asahi Glass Co., Ltd. Polishing compound and method for producing semiconductor integrated circuit device
WO2007038321A2 (en) * 2005-09-26 2007-04-05 Planar Solutions, Llc Ultrapure colloidal silica for use in chemical mechanical polishing applications
JP2007180451A (ja) * 2005-12-28 2007-07-12 Fujifilm Corp 化学的機械的平坦化方法
JP2008117807A (ja) * 2006-10-31 2008-05-22 Fujimi Inc 研磨用組成物及び研磨方法

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