JP2009532309A - Si上のエピタキシャルな半導体ナノワイヤの金属無しでの合成方法 - Google Patents
Si上のエピタキシャルな半導体ナノワイヤの金属無しでの合成方法 Download PDFInfo
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- JP2009532309A JP2009532309A JP2008558235A JP2008558235A JP2009532309A JP 2009532309 A JP2009532309 A JP 2009532309A JP 2008558235 A JP2008558235 A JP 2008558235A JP 2008558235 A JP2008558235 A JP 2008558235A JP 2009532309 A JP2009532309 A JP 2009532309A
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Abstract
Description
R.S.ワグナー、ウィスカー技術、レビット.A.P.編集、ニューヨーク、ワイリー,1970 S.F.Fang他、Si上へのガリウムヒ素および他の化合物半導体、応用物理学会誌R31-R58(1990)
−一時的に不活性化した表面を持つ基板を提供するために前記基板の表面を水素終端する終端工程と、
−前記基板(105)の不活性化した表面(110)に酸化物テンプレート(115)を提供する提供工程とを有する。前記酸化物テンプレートは、その後のナノワイヤの成長のための複数の核形成成長位置を画定する。
−前記前記基板の表面(110)上の前記酸化物テンプレートによって画定された前記複数の核形成成長位置で複数のナノワイヤを成長させる成長工程を有する。
−前記基板の表面上に有機薄膜を付ける工程と、
−核形成成長期間を提供する工程とを有し、前記基板の表面に部分酸化が起こるように時間と環境に関する条件が制御されている。前記部分酸化のプロセスは、前記付けられた有機薄膜によってまたは前記有機薄膜の複数の残留物によって少なくとも部分的に誘導され、前記酸化物テンプレートの構造と前記有機薄膜または前記有機薄膜の複数の残留物との間に相関関係を与える。
−前記基板に酸化物テンプレートを形成する揮発性種の薄膜層を付ける工程と、
−成長段階の間、前記複数のナノワイヤの核形成が前記酸化物テンプレートによって誘導されるのを確実にする時間、圧力、および温度に対する条件を提供する工程とを有する。
a):例えば、フッ化水素酸HFでエッチングすることによる基板100の表面の水素終端。HFエッチングは、Si(111)基板100の表面から自然酸化物105を除去して、一時的に不活性化した表面110を有する基板を提供する。
b):基板100の不活性化した表面110上への酸化物テンプレート115の提供。酸化物テンプレートは、その後のナノワイヤ成長のための複数の核形成成長位置を画定する。酸化物テンプレートは、以下に記載する異なる方法で提供することができる。
c):複数のナノワイヤの成長、ここでエピタキシャル成長して垂直に立っている複数のナノワイヤ125を複数の核形成成長位置のうちの少なくとも一部の基板の表面に形成する。
b')基板に揮発性種の薄膜層を付ける前処理位段階において、揮発性種の薄膜層が酸化物テンプレート115を形成する。
c')成長段階の間に、複数のナノワイヤの核形成が酸化物テンプレート115によって誘導されるのを確実にする時間、圧力、および温度に関する条件を提供する。
c':1)ナノワイヤ成長ソースを酸化物テンプレートに対する予め決定された温度より低い基板の温度で出す第1条件を提供する。この予め決められた温度は、酸化物テンプレートの再構築がこの工程の時間枠中に起こらないように選ばれる。この予め決められた温度は、最適化されたナノワイヤ成長温度より通常は低いが、ナノワイヤの核形成の開始を容易にするのには十分高い温度である。
c':2)基板温度がナノワイヤの成長を促進するように最適化する第2条件を提供する。第2温度は、第1温度より通常は高い。核形成が前の工程で開始しているので、酸化物テンプレートの変化は、ナノワイヤの成長に対しそれほど影響を与えない。
a"):例えば、フッ化水素酸HF中でエッチングすることによって基板表面に対して水素終端終了。HFエッチングは、Si(111)基板500の表面から酸化物505を除去して、一時的に不活性化した表面510を基板に提供する。好ましくは、少なくともいくらかの粗さを示すSi表面を製造するHFエッチング手順が利用される。Si(111)基板の不活性化された表面の粗さを制御するための手順は、HF水溶液のpHに依存する、そして当技術分野でよく知られている、例えば、ヒガシG.S.他「Si(111)表面の理想的な水素終端」,Applied Physics Letters 56,656-658(1990)が参照される。このような文脈において粗さは原子スケールであり、引用された工程で達成される粗さは0.3nmのオーダーであることに注意するべきである。また、用語「粗さ」は、基板表面をより酸化させがちである、基板表面が安定していなくて理想的でない水素終端について言うことに注意するべきである。
b"1):基板表面上に有機化合物の半透性薄膜を形成する。薄膜は、例えば、スピンコーティング、蒸着、および浸漬によって形成する。薄膜は、通常は、自己組立プロセスまたはパターニングプロセスのいずれでも基板表面に複数の残留物514を残す。
b"2)核形成成長期間を提供する。この期間の間、複数の分離した核形成成長位置516が基板表面に形成される。核形成成長の密度と各核形成成長位置の大きさは、有機薄膜の特性と核形成成長期間の間の条件の組合せに依存する。基板表面510の酸化は、核形成成長期間の間に起こる。酸化は、有機薄膜または有機薄膜の残留物によって誘導される。その手順は、複数の核形成成長位置516を画定する酸化物テンプレート515をもたらし、そこでは、酸化物テンプレートの構造は有機薄膜または有機薄膜の有機残留物の構造と相関関係を持つ。
c"):ナノワイヤの成長、エピタキシャル成長した垂直に立っている複数のナノワイヤ(125)が複数の核形成成長位置の少なくとも一部の基板表面上に形成される。
(i)Si+H2O→SiO+H2
(ii)SiO+H2O→SiO2+H2
である。
b":3)有機残留物の蒸発/ベーキング。手順は選ばれた有機物質に依存する。アリルアルコールでは、625℃での短い熱処理が実際的に全ての有機残留物を取り除くのに十分である。
Si(111)基板を使用した。ウェハーをさいの目に切断し、試料を超音波浴で洗浄した。有機物残留物を取り除くために、試料を紫外線照射+オゾン洗浄にさらした。試料は、次に、4%の水性フッ化水素酸中で30秒エッチングし、すすぎなしで除去した。
i:真空チャンバー中に1つまたは複数の基板を導入する。
ii:原子状水素を使用する水素終端、例えば、加熱した基板を水素プラズマに晒す。電圧とプラズマ組成物は表面粗度を決定するために使用する。
iii:基板上に有機薄膜を吹き付けるまたは蒸発させる。
iv:酸化性物質を暴露する。温度を、よりよく画定されたプロセスのために好ましく制御することができる。
v:同じ真空チャンバーを利用するまたは同じシステムの成長チャンバへ移送した後、ナノワイヤを成長する。
Claims (27)
- 基板の表面からエピタキシャル成長したナノワイヤを含むナノ構造のデバイスを製造する方法であって、
(a)一時的に不活性化した表面(110)を持つ基板(100)を提供するために前記基板の表面に対して水素終端する終端工程と、
(b)前記基板(100)の不活性化した表面(110)に酸化物テンプレート(115)を提供する提供工程であって、前記酸化物テンプレートがその後のナノワイヤの成長のための複数の核形成成長位置を画定する前記提供工程と、
(c)前記基板の表面(110)上の前記酸化物テンプレートによって画定された前記複数の核形成成長位置で複数のナノワイヤを成長させる成長工程と、
を有することを特徴とする方法。 - 前記酸化物テンプレート(115)の構造が自己組立することを特徴とする請求項1に記載の方法。
- 前記酸化物テンプレートが、前記複数の核形成成長位置を形成する前記マスク中の複数のホールまたは複数の弱い部分を持った、主に二酸化ケイ素の成長を禁止するマスクを形成することを特徴とする請求項1または請求項2に記載の方法。
- 前記成長工程では、前記成長を禁止するマスク中の複数のホールまたは複数の弱い部分中で複数のナノワイヤが核形成して成長することを特徴とする請求項3に記載の方法。
- 酸化物テンプレート(515)を提供する工程は、成長段階の前に前処理工程を含み、
前記前処理工程は、
(b":1)前記基板の表面上に有機薄膜を付ける工程と、
(b":2)核形成成長期間を提供する提供工程であって、前記基板の表面(510)で部分酸化が起こるように時間と環境に対する条件が制御されており、前記部分酸化は、前記付けられれた有機薄膜または前記有機薄膜の複数の残留物によって少なくとも部分的に誘導され、前記酸化物テンプレート(515)の構造と前記有機薄膜または前記有機薄膜の複数の残留物との間に相関関係を与える、前記提供工程と、
を有することを特徴とする請求項1乃至請求項4のいずれか1項に記載の方法。 - 前記有機薄膜は、透過性が増加した複数の局部領域を形成することを特徴とする請求項5に記載の方法。
- 前記有機薄膜中に複数のクラックが形成されることを特徴とする請求項5に記載の方法。
- 前記基板の表面の局所の酸化が、前記透過性が増加したまたは複数のクラックを有する複数の局所領域で生じることを特徴とする請求項6または請求項7に記載の方法。
- 前記核形成成長期間は、前記基板を湿気にさらす工程を含むことを特徴とする請求項1乃至請求項8のいずれか1項に記載の方法。
- 前記核形成成長期間は、前記基板を酸化物質にさらす工程を含むことを特徴とする請求項1乃至請求項8のいずれか1項に記載の方法。
- 前記有機薄膜が基板の表面(510)上で局所的に複数の残留物(514)を形成し、
酸化プロセスが、複数の有機残留物(514)によって被覆された酸化が少ないか全くない複数の領域を除いた、前記基板の表面を実質的に完全に酸化するように制御されており、それにより、続く前記複数のナノワイヤを成長させる成長工程で、複数のナノワイヤが前記複数の有機残留物によって前に被覆されている前記基板上の複数の位置で核形成して成長することを特徴とする請求項5に記載の方法。 - 前記酸化は、前記複数の有機残留物(514)によって被覆された複数の領域を除いた前記基板の表面を被覆する二酸化ケイ素の層をもたらすことを特徴とする請求項11に記載の方法。
- 前記複数の核形成成長位置の形成は、前記基板の表面上に複数のSiOxクラスタを形成する工程を含み、前記複数のSiOxは続く前記複数のナノワイヤを成長させる成長工程において複数の触媒粒子として機能することを特徴とする請求項5に記載の方法。
- 前記複数の核形成成長位置の形成は、前記基板の表面上に前記有機薄膜の複数の残留物を形成する工程を含み、前記複数の残留物は、続く前記複数のナノワイヤを成長させる成長工程における複数の触媒粒子として機能することを特徴とする請求項5に記載の方法。
- 前記複数の核形成成長位置の形成は、前記基板の表面上に前記有機薄膜の複数の残留物を形成する工程を含み、前記複数の残留物は前記基板の表面を局所的に変更し、前記局所的な変更が、続く前記複数のナノワイヤを成長させる成長工程における複数の核形成成長位置として作用することを特徴とする請求項5に記載の方法。
- 前記付着した有機薄膜がその後の複数のナノワイヤの成長におけるマスクとして作用し、複数のナノワイヤが前記核形成成長期間中に自然発生的に形成される前記マスク中の複数のホール中に配置されることを特徴とする請求項5に記載の方法。
- 前記酸化物テンプレート(115)を提供する工程は、
(b')前記基板に前記酸化物テンプレート(115)を形成する揮発性種の薄膜層を付ける工程と、
(c')成長段階の間、前記複数のナノワイヤの核形成が前記酸化物テンプレート(115)によって誘導されるのを確実にする時間、圧力、および温度に対する条件を提供する工程と、
を有することを特徴とする請求項1乃至請求項4のいずれか1項に記載の方法。 - 前記揮発性種の薄膜層は非金属酸化物からなることを特徴とする請求項17に記載の方法。
- 前記揮発性種の薄膜層は非金属窒化物からなることを特徴とする請求項17に記載の方法。
- 前記揮発性種の薄膜層は非金属リン化物からなることを特徴とする請求項17に記載の方法。
- 触媒層は、酸化けい素、窒化けい素またはリン化ケイ素の1つまたはその組合せを含むことを特徴とする請求項17乃至請求項20のいずれか1項に記載の方法。
- 前記触媒層は、SiOx(x≒1)を含むことを特徴とする請求項21に記載の方法。
- リトグラフの方法で触媒層をパターニングする工程をさらに含むことを特徴とする含むことを特徴とする請求項17乃至請求項21のいずれか1項に記載の方法。
- 前記成長段階では、前記触媒層が完全に蒸発する前にナノワイヤの成長が開始されるように、温度、時間、および圧力に関する最初の条件が提供されることを特徴とする請求項23に記載の方法。
- 前記ナノワイヤの成長のためのソースが前記触媒層の蒸発温度よりも低い基板温度で供給されることを特徴とする請求項24に記載の方法。
- 前記触媒層がSiOx(x≒1)で作られており、前記ナノワイヤが低圧有機金属気相エピタキシー(LP−MOVPE)によって成長し、前記ソースは510〜520℃で基板加熱期間の間にすでに活性化されていることを特徴とする請求項25に記載の方法。
- 前記基板の温度が前記複数のナノワイヤの成長を促進するために最適化されている第2条件を提供する工程であって、前記第2条件の温度が前記第1条件の間に使用される第1温度より高い前記工程を更に有することを特徴とする請求項17乃至請求項21のいずれか1項に記載の方法。
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Families Citing this family (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101595565B (zh) | 2006-09-18 | 2013-03-27 | 昆南诺股份有限公司 | 在垂直半导体结构上制造精密垂直和水平层的方法 |
US8227817B2 (en) | 2006-12-22 | 2012-07-24 | Qunano Ab | Elevated LED |
JP5453105B2 (ja) | 2006-12-22 | 2014-03-26 | クナノ アーベー | ナノ構造のled及びデバイス |
US8049203B2 (en) | 2006-12-22 | 2011-11-01 | Qunano Ab | Nanoelectronic structure and method of producing such |
US7829443B2 (en) | 2007-01-12 | 2010-11-09 | Qunano Ab | Nitride nanowires and method of producing such |
US20100186809A1 (en) | 2007-06-19 | 2010-07-29 | Lars Samuelson | Nanowire- based solar cell structure |
KR101541560B1 (ko) | 2007-10-26 | 2015-08-03 | 큐나노 에이비 | 이종 재료상의 나노와이어 성장 |
WO2010062644A2 (en) * | 2008-10-28 | 2010-06-03 | The Regents Of The University Of California | Vertical group iii-v nanowires on si, heterostructures, flexible arrays and fabrication |
KR101538742B1 (ko) | 2009-02-25 | 2015-07-30 | 삼성전자주식회사 | 나노와이어의 합성 방법 |
KR101633953B1 (ko) | 2009-04-15 | 2016-06-27 | 솔 발테익스 에이비 | 나노와이어를 가지는 다중-접합 광전지 |
KR101663200B1 (ko) * | 2009-09-30 | 2016-10-06 | 국립대학법인 홋가이도 다이가쿠 | 터널 전계 효과 트랜지스터 및 그 제조 방법 |
JP2013508966A (ja) | 2009-10-22 | 2013-03-07 | ソル ヴォルタイクス アーベー | ナノワイヤトンネルダイオードおよびその製造方法 |
CN102770367B (zh) | 2009-12-22 | 2015-08-19 | 昆南诺股份有限公司 | 用于制备纳米线结构的方法 |
JP6313975B2 (ja) | 2010-05-11 | 2018-04-18 | クナノ・アーベー | ワイヤーの気相合成 |
WO2011160051A2 (en) | 2010-06-18 | 2011-12-22 | Glo Ab | Nanowire led structure and method for manufacturing the same |
US9947829B2 (en) | 2010-06-24 | 2018-04-17 | Glo Ab | Substrate with buffer layer for oriented nanowire growth |
US9240328B2 (en) * | 2010-11-19 | 2016-01-19 | Alphabet Energy, Inc. | Arrays of long nanostructures in semiconductor materials and methods thereof |
US8350251B1 (en) | 2011-09-26 | 2013-01-08 | Glo Ab | Nanowire sized opto-electronic structure and method for manufacturing the same |
US9653286B2 (en) | 2012-02-14 | 2017-05-16 | Hexagem Ab | Gallium nitride nanowire based electronics |
EP2859588B1 (en) | 2012-06-07 | 2016-12-21 | QuNano AB | A method of manufacturing a structure comprising elongate nanostructures adapted to be transferred to a non-crystalline layer |
WO2014066371A1 (en) | 2012-10-26 | 2014-05-01 | Glo Ab | Nanowire sized opto-electronic structure and method for modifying selected portions of same |
JP6293157B2 (ja) | 2012-10-26 | 2018-03-14 | グロ アーベーGlo Ab | ナノワイヤサイズの光電構造及びその選択された部分を改質する方法 |
FR2997557B1 (fr) | 2012-10-26 | 2016-01-01 | Commissariat Energie Atomique | Dispositif electronique a nanofil(s) muni d'une couche tampon en metal de transition, procede de croissance d'au moins un nanofil, et procede de fabrication d'un dispositif |
JP6353845B2 (ja) | 2012-10-26 | 2018-07-04 | グロ アーベーGlo Ab | ナノワイヤled構造の製造方法 |
FR2997420B1 (fr) | 2012-10-26 | 2017-02-24 | Commissariat Energie Atomique | Procede de croissance d'au moins un nanofil a partir d'une couche d'un metal de transition nitrure obtenue en deux etapes |
WO2014151034A1 (en) | 2013-03-15 | 2014-09-25 | Glo Ab | High index dielectric film to increase extraction efficiency of nanowire leds |
EP2973756B1 (en) | 2013-03-15 | 2018-06-27 | Glo Ab | Nanowire led structure with decreased leakage and method of making same |
US9196787B2 (en) | 2013-06-07 | 2015-11-24 | Glo Ab | Nanowire LED structure with decreased leakage and method of making same |
TW201515269A (zh) | 2013-06-18 | 2015-04-16 | Glo Ab | 用於平整化及界定奈米線裝置之活化區的絕緣層 |
WO2015031179A1 (en) | 2013-08-27 | 2015-03-05 | Glo Ab | Molded led package and method of making same |
US9142745B2 (en) | 2013-08-27 | 2015-09-22 | Glo Ab | Packaged LED device with castellations |
US8999737B2 (en) | 2013-08-27 | 2015-04-07 | Glo Ab | Method of making molded LED package |
TW201525525A (zh) | 2013-12-09 | 2015-07-01 | Glo Ab | 光學顯示系統 |
TWI636952B (zh) | 2013-12-13 | 2018-10-01 | 瑞典商Glo公司 | 使用介電膜以減少奈米線發光二極體中之透明導電氧化物之電阻率 |
CN103824566B (zh) * | 2014-03-18 | 2016-08-24 | 清华大学 | 读写接触式硬盘的磁头、硬盘设备及转移方法 |
US10483319B2 (en) | 2014-08-08 | 2019-11-19 | Glo Ab | Pixilated display device based upon nanowire LEDs and method for making the same |
WO2016049507A1 (en) | 2014-09-26 | 2016-03-31 | Glo Ab | Monolithic image chip for near-to-eye display |
US10829605B2 (en) | 2015-07-02 | 2020-11-10 | Sabic Global Technologies B.V. | Process and material for growth of adsorbed compound via nanoscale-controlled resistive heating and uses thereof |
KR20180128464A (ko) | 2016-04-22 | 2018-12-03 | 글로 에이비 | 소형 피치 직시형 디스플레이 및 이의 제조 방법 |
US10535518B1 (en) * | 2017-03-26 | 2020-01-14 | Hrl Laboratories, Llc | In situ fabrication of horizontal nanowires and device using same |
WO2019145284A1 (en) * | 2018-01-23 | 2019-08-01 | Universite D'aix-Marseille | Process for forming an organized network of semi-conducting nanoparticles or nanowires onto a silicon substrate |
TWI716304B (zh) * | 2020-03-30 | 2021-01-11 | 環球晶圓股份有限公司 | 碳化矽晶片的表面加工方法 |
CN111430221B (zh) * | 2020-04-02 | 2022-08-05 | 中国科学院半导体研究所 | 锡自催化生长的锗锡合金硅基材料及定向异质外延方法 |
US11295983B2 (en) | 2020-05-27 | 2022-04-05 | International Business Machines Corporation | Transistor having source or drain formation assistance regions with improved bottom isolation |
CN112736173B (zh) * | 2021-04-06 | 2021-06-29 | 至芯半导体(杭州)有限公司 | 一种复合衬底、其制备方法及半导体器件 |
CN112802930B (zh) * | 2021-04-15 | 2021-07-06 | 至芯半导体(杭州)有限公司 | Iii族氮化物衬底制备方法和半导体器件 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006130647A (ja) * | 2004-10-29 | 2006-05-25 | Sharp Corp | パターニングされたALDZnOシード層を用いたZnOのナノ構造の選択的な成長 |
JP2007216369A (ja) * | 2006-02-20 | 2007-08-30 | Univ Of Tsukuba | シリコンナノ結晶材料の製造方法及び該製造方法で製造されたシリコンナノ結晶材料 |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4341605A (en) * | 1981-01-16 | 1982-07-27 | E. I. Du Pont De Nemours And Company | Process for cation permeable membrane with reinforcement fabric embedded therein and product thereof |
GB2210728B (en) * | 1987-10-07 | 1991-11-13 | Stc Plc | Isolation trenches for semiconductors |
US5976957A (en) | 1996-10-28 | 1999-11-02 | Sony Corporation | Method of making silicon quantum wires on a substrate |
CA2311132C (en) | 1997-10-30 | 2004-12-07 | Sumitomo Electric Industries, Ltd. | Gan single crystalline substrate and method of producing the same |
US6596377B1 (en) | 2000-03-27 | 2003-07-22 | Science & Technology Corporation @ Unm | Thin film product and method of forming |
EP1374309A1 (en) | 2001-03-30 | 2004-01-02 | The Regents Of The University Of California | Methods of fabricating nanostructures and nanowires and devices fabricated therefrom |
US6709929B2 (en) | 2001-06-25 | 2004-03-23 | North Carolina State University | Methods of forming nano-scale electronic and optoelectronic devices using non-photolithographically defined nano-channel templates |
US7335908B2 (en) | 2002-07-08 | 2008-02-26 | Qunano Ab | Nanostructures and methods for manufacturing the same |
US7355216B2 (en) | 2002-12-09 | 2008-04-08 | The Regents Of The University Of California | Fluidic nanotubes and devices |
JP4428921B2 (ja) | 2002-12-13 | 2010-03-10 | キヤノン株式会社 | ナノ構造体、電子デバイス、及びその製造方法 |
CN1187153C (zh) * | 2002-12-16 | 2005-02-02 | 同济大学 | 以气凝胶为模板制备银纳米线的方法 |
US7608147B2 (en) | 2003-04-04 | 2009-10-27 | Qunano Ab | Precisely positioned nanowhiskers and nanowhisker arrays and method for preparing them |
US7445742B2 (en) | 2003-08-15 | 2008-11-04 | Hewlett-Packard Development Company, L.P. | Imprinting nanoscale patterns for catalysis and fuel cells |
US7354850B2 (en) | 2004-02-06 | 2008-04-08 | Qunano Ab | Directionally controlled growth of nanowhiskers |
US7528002B2 (en) | 2004-06-25 | 2009-05-05 | Qunano Ab | Formation of nanowhiskers on a substrate of dissimilar material |
US7407872B2 (en) | 2004-08-20 | 2008-08-05 | Yale University | Epitaxial growth of aligned AlGalnN nanowires by metal-organic chemical vapor deposition |
WO2006025793A1 (en) * | 2004-08-31 | 2006-03-09 | Agency For Science, Technology And Research | Nanostructures and method of making the same |
US7345296B2 (en) | 2004-09-16 | 2008-03-18 | Atomate Corporation | Nanotube transistor and rectifying devices |
US20060223211A1 (en) | 2004-12-02 | 2006-10-05 | The Regents Of The University Of California | Semiconductor devices based on coalesced nano-rod arrays |
US7309621B2 (en) | 2005-04-26 | 2007-12-18 | Sharp Laboratories Of America, Inc. | Method to fabricate a nanowire CHEMFET sensor device using selective nanowire deposition |
KR100623271B1 (ko) | 2005-06-24 | 2006-09-12 | 한국과학기술연구원 | 갈륨망간나이트라이드 단결정 나노선의 제조방법 |
KR101264673B1 (ko) * | 2005-06-24 | 2013-05-20 | 엘지디스플레이 주식회사 | 소프트 몰드를 이용한 미세 패턴 형성방법 |
US20070257264A1 (en) | 2005-11-10 | 2007-11-08 | Hersee Stephen D | CATALYST-FREE GROWTH OF GaN NANOSCALE NEEDLES AND APPLICATION IN InGaN/GaN VISIBLE LEDS |
US7349613B2 (en) | 2006-01-24 | 2008-03-25 | Hewlett-Packard Development Company, L.P. | Photonic crystal devices including gain material and methods for using the same |
WO2008048704A2 (en) | 2006-03-10 | 2008-04-24 | Stc.Unm | Pulsed growth of gan nanowires and applications in group iii nitride semiconductor substrate materials and devices |
DE102006013245A1 (de) | 2006-03-22 | 2007-10-04 | Infineon Technologies Ag | Verfahren zur Ausbildung von Öffnungen in einer Matrizenschicht und zur Herstellung von Kondensatoren |
US20080149946A1 (en) | 2006-12-22 | 2008-06-26 | Philips Lumileds Lighting Company, Llc | Semiconductor Light Emitting Device Configured To Emit Multiple Wavelengths Of Light |
-
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Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006130647A (ja) * | 2004-10-29 | 2006-05-25 | Sharp Corp | パターニングされたALDZnOシード層を用いたZnOのナノ構造の選択的な成長 |
JP2007216369A (ja) * | 2006-02-20 | 2007-08-30 | Univ Of Tsukuba | シリコンナノ結晶材料の製造方法及び該製造方法で製造されたシリコンナノ結晶材料 |
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CN101443265B (zh) | 2014-03-26 |
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JP5483887B2 (ja) | 2014-05-07 |
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