JP2009528682A - 金属間ナノフレーク粒子による高処理能力の半導体前駆体層印刷 - Google Patents
金属間ナノフレーク粒子による高処理能力の半導体前駆体層印刷 Download PDFInfo
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- JP2009528682A JP2009528682A JP2008556573A JP2008556573A JP2009528682A JP 2009528682 A JP2009528682 A JP 2009528682A JP 2008556573 A JP2008556573 A JP 2008556573A JP 2008556573 A JP2008556573 A JP 2008556573A JP 2009528682 A JP2009528682 A JP 2009528682A
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
- C23C18/125—Process of deposition of the inorganic material
- C23C18/1262—Process of deposition of the inorganic material involving particles, e.g. carbon nanotubes [CNT], flakes
- C23C18/127—Preformed particles
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
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- C23C18/1283—Control of temperature, e.g. gradual temperature increase, modulation of temperature
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
- H10F10/16—Photovoltaic cells having only PN heterojunction potential barriers
- H10F10/167—Photovoltaic cells having only PN heterojunction potential barriers comprising Group I-III-VI materials, e.g. CdS/CuInSe2 [CIS] heterojunction photovoltaic cells
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/12—Active materials
- H10F77/126—Active materials comprising only Group I-III-VI chalcopyrite materials, e.g. CuInSe2, CuGaSe2 or CuInGaSe2 [CIGS]
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/541—CuInSe2 material PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
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- General Chemical & Material Sciences (AREA)
- Thermal Sciences (AREA)
- Inorganic Chemistry (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Nanotechnology (AREA)
- Composite Materials (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Photovoltaic Devices (AREA)
- Powder Metallurgy (AREA)
- Manufacture Of Metal Powder And Suspensions Thereof (AREA)
Applications Claiming Priority (10)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/361,433 US7700464B2 (en) | 2004-02-19 | 2006-02-23 | High-throughput printing of semiconductor precursor layer from nanoflake particles |
| US11/361,521 US20070163383A1 (en) | 2004-02-19 | 2006-02-23 | High-throughput printing of nanostructured semiconductor precursor layer |
| US11/361,515 US20070163640A1 (en) | 2004-02-19 | 2006-02-23 | High-throughput printing of semiconductor precursor layer by use of chalcogen-rich chalcogenides |
| US11/361,497 US20070163638A1 (en) | 2004-02-19 | 2006-02-23 | Photovoltaic devices printed from nanostructured particles |
| US11/361,522 US20070166453A1 (en) | 2004-02-19 | 2006-02-23 | High-throughput printing of chalcogen layer |
| US11/361,103 US20070169809A1 (en) | 2004-02-19 | 2006-02-23 | High-throughput printing of semiconductor precursor layer by use of low-melting chalcogenides |
| US11/395,668 US8309163B2 (en) | 2004-02-19 | 2006-03-30 | High-throughput printing of semiconductor precursor layer by use of chalcogen-containing vapor and inter-metallic material |
| US11/395,438 US20070163643A1 (en) | 2004-02-19 | 2006-03-30 | High-throughput printing of chalcogen layer and the use of an inter-metallic material |
| US11/394,849 US20070163641A1 (en) | 2004-02-19 | 2006-03-30 | High-throughput printing of semiconductor precursor layer from inter-metallic nanoflake particles |
| PCT/US2007/062766 WO2007101138A2 (en) | 2006-02-23 | 2007-02-23 | High-throughput printing of semiconductor precursor layer from inter-metallic nanoflake particles |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013501381A (ja) * | 2009-08-04 | 2013-01-10 | プリカーサー エナジェティクス, インコーポレイテッド | 制御された化学量論を有する光起電性アブソーバーのための方法 |
| JP2013538893A (ja) * | 2010-08-26 | 2013-10-17 | コミサリア ア レネルジィ アトミーク エ オ ゼネ ルジイ アルテアナティーフ | 液体金属エマルジョン |
| KR101610382B1 (ko) * | 2009-10-30 | 2016-04-08 | 엘지이노텍 주식회사 | 태양전지 및 이의 제조방법 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US8354294B2 (en) * | 2006-01-24 | 2013-01-15 | De Rochemont L Pierre | Liquid chemical deposition apparatus and process and products therefrom |
| JP2012507872A (ja) * | 2008-10-30 | 2012-03-29 | フェイ プーン、ハク | ハイブリッド透明導電性電極 |
| JP2010129648A (ja) * | 2008-11-26 | 2010-06-10 | Kyocera Corp | 薄膜太陽電池の製法 |
| JP5383162B2 (ja) * | 2008-11-26 | 2014-01-08 | 京セラ株式会社 | 薄膜太陽電池の製法 |
| JP5137794B2 (ja) * | 2008-11-26 | 2013-02-06 | 京セラ株式会社 | 薄膜太陽電池の製法 |
| JP5317648B2 (ja) * | 2008-11-26 | 2013-10-16 | 京セラ株式会社 | 薄膜太陽電池の製法 |
| WO2010085553A1 (en) * | 2009-01-21 | 2010-07-29 | Purdue Research Foundation | Selenization of precursor layer containing culns2 nanoparticles |
| JP2010225985A (ja) * | 2009-03-25 | 2010-10-07 | Fujifilm Corp | 光電変換半導体層とその製造方法、光電変換素子、及び太陽電池 |
| KR20130143031A (ko) * | 2010-09-15 | 2013-12-30 | 프리커서 에너제틱스, 인코퍼레이티드. | 광기전체를 위한 어닐링 방법 |
| TWI538235B (zh) * | 2011-04-19 | 2016-06-11 | 弗里松股份有限公司 | 薄膜光伏打裝置及製造方法 |
| EP3001439B1 (en) | 2012-07-20 | 2021-11-03 | Asahi Kasei Kabushiki Kaisha | Semiconductor film and application liquid for its fabrication |
| KR101723062B1 (ko) * | 2014-11-18 | 2017-04-04 | 주식회사 엘지화학 | 태양전지 광흡수층 제조용 금속 칼코게나이드 나노 입자 및 이의 제조방법 |
| CN109830549B (zh) * | 2018-12-13 | 2021-01-05 | 广东工业大学 | 一种硫化铟/石墨烯复合薄膜及其制备方法和应用 |
| CN113324970B (zh) * | 2021-04-25 | 2023-04-21 | 中国科学技术大学 | 一种结构可调的高热点三维网筛纳米拉曼基底及其制备、应用 |
| CN117866484B (zh) * | 2024-03-12 | 2024-06-04 | 成都先进金属材料产业技术研究院股份有限公司 | 一种液态金属油墨及其制备方法 |
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| US20040219730A1 (en) * | 2001-04-16 | 2004-11-04 | Basol Bulent M. | Method of forming semiconductor compound film for fabrication of electronic device and film produced by same |
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| EP0743686A3 (en) * | 1995-05-15 | 1998-12-02 | Matsushita Electric Industrial Co., Ltd | Precursor for semiconductor thin films and method for producing semiconductor thin films |
| US6127202A (en) * | 1998-07-02 | 2000-10-03 | International Solar Electronic Technology, Inc. | Oxide-based method of making compound semiconductor films and making related electronic devices |
| JP2001044464A (ja) * | 1999-07-28 | 2001-02-16 | Asahi Chem Ind Co Ltd | Ib―IIIb―VIb2族化合物半導体層の形成方法、薄膜太陽電池の製造方法 |
| JP4341124B2 (ja) * | 1999-11-25 | 2009-10-07 | ソニー株式会社 | 半導体装置の製造方法 |
| US20030041893A1 (en) * | 2001-08-31 | 2003-03-06 | Matsushita Electric Industrial Co. Ltd. | Solar cell, method for manufacturing the same, and apparatus for manufacturing the same |
| JP2004087535A (ja) * | 2002-08-22 | 2004-03-18 | Sony Corp | 結晶質半導体材料の製造方法および半導体装置の製造方法 |
| CN100411195C (zh) * | 2003-04-11 | 2008-08-13 | 索尼株式会社 | 光电转换器件的制作方法 |
| CN1295765C (zh) * | 2004-03-04 | 2007-01-17 | 上海交通大学 | 光伏半导体薄膜渡液及光伏半导体薄膜的制备方法 |
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- 2007-02-23 CN CN200780014617.7A patent/CN101443919B/zh not_active Expired - Fee Related
- 2007-02-23 CN CN201410025475.6A patent/CN103824896A/zh active Pending
- 2007-02-23 EP EP07757448A patent/EP1997150A2/en not_active Withdrawn
- 2007-02-23 JP JP2008556573A patent/JP2009528682A/ja active Pending
- 2007-02-23 WO PCT/US2007/062766 patent/WO2007101138A2/en not_active Ceased
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2012
- 2012-10-03 JP JP2012220990A patent/JP2013033987A/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040219730A1 (en) * | 2001-04-16 | 2004-11-04 | Basol Bulent M. | Method of forming semiconductor compound film for fabrication of electronic device and film produced by same |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013501381A (ja) * | 2009-08-04 | 2013-01-10 | プリカーサー エナジェティクス, インコーポレイテッド | 制御された化学量論を有する光起電性アブソーバーのための方法 |
| KR101610382B1 (ko) * | 2009-10-30 | 2016-04-08 | 엘지이노텍 주식회사 | 태양전지 및 이의 제조방법 |
| JP2013538893A (ja) * | 2010-08-26 | 2013-10-17 | コミサリア ア レネルジィ アトミーク エ オ ゼネ ルジイ アルテアナティーフ | 液体金属エマルジョン |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103824896A (zh) | 2014-05-28 |
| WO2007101138A2 (en) | 2007-09-07 |
| CN101443919A (zh) | 2009-05-27 |
| CN101443919B (zh) | 2014-03-05 |
| JP2013033987A (ja) | 2013-02-14 |
| EP1997150A2 (en) | 2008-12-03 |
| WO2007101138A3 (en) | 2008-10-23 |
| WO2007101138A9 (en) | 2008-12-31 |
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