US3769913A
(en)
*
|
1971-09-30 |
1973-11-06 |
Transyt Corp |
High mass flow transportation system
|
JPH0221740U
(ja)
*
|
1988-07-28 |
1990-02-14 |
|
|
US5536128A
(en)
*
|
1988-10-21 |
1996-07-16 |
Hitachi, Ltd. |
Method and apparatus for carrying a variety of products
|
DE4024973C2
(de)
*
|
1990-08-07 |
1994-11-03 |
Ibm |
Anordnung zum Lagern, Transportieren und Einschleusen von Substraten
|
CA2053028C
(en)
*
|
1990-10-23 |
1996-04-09 |
Hideichi Tanizawa |
Carriage running control system
|
JPH05181527A
(ja)
*
|
1991-12-27 |
1993-07-23 |
Mitsubishi Electric Corp |
自動搬送装置
|
JPH0616206A
(ja)
*
|
1992-07-03 |
1994-01-25 |
Shinko Electric Co Ltd |
クリーンルーム内搬送システム
|
EP0582017B1
(en)
*
|
1992-08-04 |
1995-10-18 |
International Business Machines Corporation |
Dispatching apparatus with a gas supply distribution system for handling and storing pressurized sealable transportable containers
|
EP0582019B1
(en)
*
|
1992-08-04 |
1995-10-18 |
International Business Machines Corporation |
Fully automated and computerized conveyor based manufacturing line architectures adapted to pressurized sealable transportable containers
|
FR2697004B1
(fr)
*
|
1992-10-16 |
1994-11-18 |
Commissariat Energie Atomique |
Système de stockage et de transport d'objets plats tels que des boîtes extra-plates et son ratelier portatif.
|
US5417537A
(en)
*
|
1993-05-07 |
1995-05-23 |
Miller; Kenneth C. |
Wafer transport device
|
DE69403890T2
(de)
*
|
1994-01-14 |
1998-01-08 |
Ibm |
Zusammenbau-/Ausbau-Einrichtung für abdichtbaren unter Druck stehenden Transportbehälter
|
US5511749A
(en)
*
|
1994-04-01 |
1996-04-30 |
Canac International, Inc. |
Remote control system for a locomotive
|
US5517924A
(en)
*
|
1994-07-27 |
1996-05-21 |
The United States Of America As Represented By The United States Department Of Energy |
Double row loop-coil configuration for high-speed electrodynamic maglev suspension, guidance, propulsion and guideway directional switching
|
US5653565A
(en)
*
|
1995-07-05 |
1997-08-05 |
Asyst Technologies, Inc. |
SMIF port interface adaptor
|
US5740845A
(en)
*
|
1995-07-07 |
1998-04-21 |
Asyst Technologies |
Sealable, transportable container having a breather assembly
|
US5833426A
(en)
*
|
1996-12-11 |
1998-11-10 |
Applied Materials, Inc. |
Magnetically coupled wafer extraction platform
|
US5980183A
(en)
*
|
1997-04-14 |
1999-11-09 |
Asyst Technologies, Inc. |
Integrated intrabay buffer, delivery, and stocker system
|
US5904101A
(en)
*
|
1997-04-22 |
1999-05-18 |
Power Superconductor Applications Co., Inc. |
Auxiliary propulsion for magnetically levitated vehicle
|
WO1998056676A1
(fr)
*
|
1997-06-13 |
1998-12-17 |
Kakizaki Manufacturing Co., Ltd. |
Recipient en feuille mince pourvu d'un couvercle
|
US6579052B1
(en)
*
|
1997-07-11 |
2003-06-17 |
Asyst Technologies, Inc. |
SMIF pod storage, delivery and retrieval system
|
EP2099061A3
(en)
*
|
1997-11-28 |
2013-06-12 |
Mattson Technology, Inc. |
Systems and methods for low contamination, high throughput handling of workpieces for vacuum processing
|
US6704998B1
(en)
*
|
1997-12-24 |
2004-03-16 |
Asyst Technologies, Inc. |
Port door removal and wafer handling robotic system
|
JP4100585B2
(ja)
*
|
1998-01-20 |
2008-06-11 |
株式会社石川製作所 |
半導体製造装置におけるポッド供給装置
|
US6223886B1
(en)
*
|
1998-06-24 |
2001-05-01 |
Asyst Technologies, Inc. |
Integrated roller transport pod and asynchronous conveyor
|
US6281516B1
(en)
*
|
1998-07-13 |
2001-08-28 |
Newport Corporation |
FIMS transport box load interface
|
US6261044B1
(en)
*
|
1998-08-06 |
2001-07-17 |
Asyst Technologies, Inc. |
Pod to port door retention and evacuation system
|
US6604624B2
(en)
*
|
1998-09-22 |
2003-08-12 |
Hirata Corporation |
Work conveying system
|
US6283692B1
(en)
*
|
1998-12-01 |
2001-09-04 |
Applied Materials, Inc. |
Apparatus for storing and moving a cassette
|
US6481558B1
(en)
*
|
1998-12-18 |
2002-11-19 |
Asyst Technologies, Inc. |
Integrated load port-conveyor transfer system
|
JP2000188319A
(ja)
*
|
1998-12-22 |
2000-07-04 |
Toshiba Corp |
搬送装置
|
DE19921246C2
(de)
*
|
1999-05-07 |
2003-06-12 |
Infineon Technologies Ag |
Anlage zur Fertigung von Halbleiterprodukten
|
JP3193026B2
(ja)
*
|
1999-11-25 |
2001-07-30 |
株式会社半導体先端テクノロジーズ |
基板処理装置のロードポートシステム及び基板の処理方法
|
JP2001171970A
(ja)
*
|
1999-12-20 |
2001-06-26 |
Tsubakimoto Chain Co |
天井走行搬送車におけるワーク旋回方法
|
JP2001267395A
(ja)
*
|
2000-01-13 |
2001-09-28 |
Mitsubishi Electric Corp |
半導体ウエハキャリア及び半導体ウエハキャリア自動搬送システム並びに半導体装置の製造方法
|
TW514618B
(en)
*
|
2000-04-12 |
2002-12-21 |
Samsung Electronics Co Ltd |
A transfer system and apparatus for workpiece containers and method of transferring the workpiece containers using the same
|
KR20020019414A
(ko)
*
|
2000-09-05 |
2002-03-12 |
엔도 마코토 |
기판 처리 장치 및 기판 처리 장치를 이용한 반도체디바이스 제조 방법
|
US6419438B1
(en)
*
|
2000-11-28 |
2002-07-16 |
Asyst Technologies, Inc. |
FIMS interface without alignment pins
|
US6848876B2
(en)
*
|
2001-01-12 |
2005-02-01 |
Asyst Technologies, Inc. |
Workpiece sorter operating with modular bare workpiece stockers and/or closed container stockers
|
US6619903B2
(en)
*
|
2001-08-10 |
2003-09-16 |
Glenn M. Friedman |
System and method for reticle protection and transport
|
US6821082B2
(en)
*
|
2001-10-30 |
2004-11-23 |
Freescale Semiconductor, Inc. |
Wafer management system and methods for managing wafers
|
JP4389424B2
(ja)
*
|
2001-12-25 |
2009-12-24 |
東京エレクトロン株式会社 |
被処理体の搬送機構及び処理システム
|
JP4220173B2
(ja)
*
|
2002-03-26 |
2009-02-04 |
株式会社日立ハイテクノロジーズ |
基板の搬送方法
|
EP1350997B1
(en)
*
|
2002-04-05 |
2014-10-01 |
Ebara Corporation |
Method for operating a seal device
|
JP4354675B2
(ja)
*
|
2002-06-04 |
2009-10-28 |
ローツェ株式会社 |
薄板状電子部品クリーン移載装置および薄板状電子製品製造システム
|
WO2003105216A1
(ja)
|
2002-06-07 |
2003-12-18 |
平田機工株式会社 |
容器搬送システム
|
JP4831521B2
(ja)
*
|
2002-06-19 |
2011-12-07 |
村田機械株式会社 |
縦型輪状コンベヤ及びオーバーヘッドホイストを基にした半導体製造のためのマテリアルの自動化処理システム
|
US6871597B1
(en)
*
|
2002-07-17 |
2005-03-29 |
Lockheed Martin Corporation |
Magnetically levitated transporter
|
TWI304391B
(en)
*
|
2002-07-22 |
2008-12-21 |
Brooks Automation Inc |
Substrate processing apparatus
|
EP1573778B1
(en)
|
2002-10-11 |
2013-06-05 |
Murata Machinery, Ltd. |
Access to one or more levels of material storage shelves by an overhead hoist transport vehicle from a single track position
|
JP3991852B2
(ja)
*
|
2002-12-09 |
2007-10-17 |
村田機械株式会社 |
天井搬送車システム
|
US7077264B2
(en)
*
|
2003-01-27 |
2006-07-18 |
Applied Material, Inc. |
Methods and apparatus for transporting substrate carriers
|
US7221993B2
(en)
*
|
2003-01-27 |
2007-05-22 |
Applied Materials, Inc. |
Systems and methods for transferring small lot size substrate carriers between processing tools
|
TWI246501B
(en)
*
|
2003-02-03 |
2006-01-01 |
Murata Machinery Ltd |
Overhead traveling carriage system
|
US6990721B2
(en)
*
|
2003-03-21 |
2006-01-31 |
Brooks Automation, Inc. |
Growth model automated material handling system
|
US6745102B1
(en)
*
|
2003-04-10 |
2004-06-01 |
Powerchip Semiconductor Corp. |
Automatic transporting system and method for operating the same
|
JP4470576B2
(ja)
*
|
2003-05-20 |
2010-06-02 |
ムラテックオートメーション株式会社 |
搬送システム
|
US20050008467A1
(en)
*
|
2003-07-11 |
2005-01-13 |
Rich Huang |
Load port transfer device
|
KR100514181B1
(ko)
*
|
2003-09-03 |
2005-09-13 |
삼성에스디아이 주식회사 |
시리즈 박막트랜지스터, 그를 이용한 능동 매트릭스유기전계발광소자 및 상기 능동 매트릭스유기전계발광소자의 제조방법
|
US7145157B2
(en)
*
|
2003-09-11 |
2006-12-05 |
Applied Materials, Inc. |
Kinematic ion implanter electrode mounting
|
US7325667B1
(en)
*
|
2003-10-10 |
2008-02-05 |
Damick Keith D |
Systems and methods for feeding articles to and removing articles from an automatic washer
|
US20050095087A1
(en)
*
|
2003-10-30 |
2005-05-05 |
Sullivan Robert P. |
Automated material handling system
|
JP2005136294A
(ja)
*
|
2003-10-31 |
2005-05-26 |
Murata Mach Ltd |
移載装置
|
US7101138B2
(en)
*
|
2003-12-03 |
2006-09-05 |
Brooks Automation, Inc. |
Extractor/buffer
|
JP4045451B2
(ja)
*
|
2003-12-26 |
2008-02-13 |
村田機械株式会社 |
天井走行車システム
|
JP4702693B2
(ja)
*
|
2004-02-12 |
2011-06-15 |
ムラテックオートメーション株式会社 |
搬送台車及び搬送装置
|
JP2005243729A
(ja)
*
|
2004-02-24 |
2005-09-08 |
Asyst Shinko Inc |
搬送システム
|
US7379779B2
(en)
*
|
2004-03-31 |
2008-05-27 |
Gregg O Ekberg |
Method and system for manufacturing
|
EP1786710A4
(en)
*
|
2004-08-19 |
2011-10-12 |
Brooks Automation Inc |
REDUCED CAPACITY SUPPORT AND METHOD OF USE
|
EP1803151B1
(en)
*
|
2004-08-23 |
2011-10-05 |
Murata Machinery, Ltd. |
Elevator-based tool loading and buffering system
|
JP2008510673A
(ja)
*
|
2004-08-24 |
2008-04-10 |
ブルックス オートメーション インコーポレイテッド |
搬送システム
|
JP2006096427A
(ja)
*
|
2004-09-28 |
2006-04-13 |
Murata Mach Ltd |
物品保管設備
|
JP4475136B2
(ja)
*
|
2005-02-18 |
2010-06-09 |
東京エレクトロン株式会社 |
処理システム、前処理装置及び記憶媒体
|
US7228218B2
(en)
*
|
2005-05-02 |
2007-06-05 |
Hbb Assets, Ltd. |
Power collection switching for automated driverless vehicles
|
US7771151B2
(en)
*
|
2005-05-16 |
2010-08-10 |
Muratec Automation Co., Ltd. |
Interface between conveyor and semiconductor process tool load port
|
US7677180B2
(en)
*
|
2005-06-09 |
2010-03-16 |
International Business Machines Corporation |
Apparatus and method for steering transport vehicles in semiconductor processing
|
US7604449B1
(en)
*
|
2005-06-27 |
2009-10-20 |
Kla-Tencor Technologies Corporation |
Equipment front end module
|
CN101208606B
(zh)
*
|
2005-08-31 |
2011-07-13 |
平田机工株式会社 |
工件装卸装置
|
US20080107507A1
(en)
*
|
2005-11-07 |
2008-05-08 |
Bufano Michael L |
Reduced capacity carrier, transport, load port, buffer system
|
US8267634B2
(en)
*
|
2005-11-07 |
2012-09-18 |
Brooks Automation, Inc. |
Reduced capacity carrier, transport, load port, buffer system
|
KR20140091768A
(ko)
*
|
2005-11-07 |
2014-07-22 |
브룩스 오토메이션 인코퍼레이티드 |
반도체 작업대상물 공정처리 시스템
|
US7281623B1
(en)
*
|
2006-04-18 |
2007-10-16 |
Aquest Systems Corporation |
Transport system including vertical rollers
|
FR2902235B1
(fr)
*
|
2006-06-09 |
2008-10-31 |
Alcatel Sa |
Dispositif de transport, de stockage et de transfert de substrats
|
KR101841753B1
(ko)
*
|
2006-08-18 |
2018-03-23 |
브룩스 오토메이션 인코퍼레이티드 |
용량이 축소된 캐리어, 이송, 로드 포트, 버퍼 시스템
|
US20080191155A1
(en)
*
|
2007-02-09 |
2008-08-14 |
Intevac, Inc. |
Magnetically coupled valve actuator
|