JP2009510777A - 改善された収集のための光検出器及びn型層構造 - Google Patents
改善された収集のための光検出器及びn型層構造 Download PDFInfo
- Publication number
- JP2009510777A JP2009510777A JP2008533438A JP2008533438A JP2009510777A JP 2009510777 A JP2009510777 A JP 2009510777A JP 2008533438 A JP2008533438 A JP 2008533438A JP 2008533438 A JP2008533438 A JP 2008533438A JP 2009510777 A JP2009510777 A JP 2009510777A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- conductivity type
- image sensor
- photodetector
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims abstract description 18
- 239000000969 carrier Substances 0.000 claims description 7
- 238000009792 diffusion process Methods 0.000 description 14
- 238000005468 ion implantation Methods 0.000 description 5
- 238000003384 imaging method Methods 0.000 description 4
- 239000000872 buffer Substances 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 238000007373 indentation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000013590 bulk material Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000779 depleting effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/803—Pixels having integrated switching, control, storage or amplification elements
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/60—Noise processing, e.g. detecting, correcting, reducing or removing noise
- H04N25/62—Detection or reduction of noise due to excess charges produced by the exposure, e.g. smear, blooming, ghost image, crosstalk or leakage between pixels
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
- H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/802—Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/14—Shape of semiconductor bodies; Shapes, relative sizes or dispositions of semiconductor regions within semiconductor bodies
- H10F77/146—Superlattices; Multiple quantum well structures
Landscapes
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US72116805P | 2005-09-28 | 2005-09-28 | |
| US11/453,354 US7875916B2 (en) | 2005-09-28 | 2006-06-15 | Photodetector and n-layer structure for improved collection efficiency |
| PCT/US2006/036559 WO2007038107A2 (en) | 2005-09-28 | 2006-09-18 | Photodetector and n-layer structure for improved collection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009510777A true JP2009510777A (ja) | 2009-03-12 |
| JP2009510777A5 JP2009510777A5 (enExample) | 2009-11-05 |
Family
ID=37581418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008533438A Pending JP2009510777A (ja) | 2005-09-28 | 2006-09-18 | 改善された収集のための光検出器及びn型層構造 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US7875916B2 (enExample) |
| EP (1) | EP1938379A2 (enExample) |
| JP (1) | JP2009510777A (enExample) |
| KR (1) | KR20080050448A (enExample) |
| CN (1) | CN101273457B (enExample) |
| TW (1) | TWI382531B (enExample) |
| WO (1) | WO2007038107A2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9837460B2 (en) | 2015-12-28 | 2017-12-05 | Renesas Electronics Corporation | Semiconductor device and manufacturing method thereof |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7875916B2 (en) | 2005-09-28 | 2011-01-25 | Eastman Kodak Company | Photodetector and n-layer structure for improved collection efficiency |
| GB0725245D0 (en) | 2007-12-28 | 2008-02-06 | Cmosis Nv | Semiconductor detector for electromagnetic or particle radiation |
| US8357984B2 (en) * | 2008-02-08 | 2013-01-22 | Omnivision Technologies, Inc. | Image sensor with low electrical cross-talk |
| US20090243025A1 (en) * | 2008-03-25 | 2009-10-01 | Stevens Eric G | Pixel structure with a photodetector having an extended depletion depth |
| US7948018B2 (en) * | 2008-04-24 | 2011-05-24 | Omnivision Technologies, Inc. | Multilayer image sensor structure for reducing crosstalk |
| US20100109060A1 (en) * | 2008-11-06 | 2010-05-06 | Omnivision Technologies Inc. | Image sensor with backside photodiode implant |
| US8329499B2 (en) | 2008-12-10 | 2012-12-11 | Truesense Imaging, Inc. | Method of forming lateral overflow drain and channel stop regions in image sensors |
| US7875918B2 (en) * | 2009-04-24 | 2011-01-25 | Omnivision Technologies, Inc. | Multilayer image sensor pixel structure for reducing crosstalk |
| JP5971565B2 (ja) * | 2011-06-22 | 2016-08-17 | パナソニックIpマネジメント株式会社 | 固体撮像装置 |
| US8889461B2 (en) | 2012-05-29 | 2014-11-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | CIS image sensors with epitaxy layers and methods for forming the same |
| EP2816601B1 (en) * | 2013-06-20 | 2017-03-01 | IMEC vzw | Improvements in or relating to pinned photodiodes for use in image sensors |
| CN113851501A (zh) * | 2021-10-20 | 2021-12-28 | 华虹半导体(无锡)有限公司 | 防串扰图像传感器 |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0316263A (ja) * | 1989-06-14 | 1991-01-24 | Hitachi Ltd | 固体撮像素子 |
| JPH04245479A (ja) * | 1991-01-30 | 1992-09-02 | Sony Corp | 固体撮像装置 |
| JPH1070262A (ja) * | 1996-05-22 | 1998-03-10 | Eastman Kodak Co | パンチスルーリセットとクロストーク抑制を持つ能動画素センサー |
| JP2002134731A (ja) * | 2000-10-20 | 2002-05-10 | Nec Corp | 光電変換素子および固体撮像素子 |
| JP2002176161A (ja) * | 2000-02-22 | 2002-06-21 | Innotech Corp | 固体撮像装置の光信号の蓄積方法 |
| JP2004247407A (ja) * | 2003-02-12 | 2004-09-02 | Sharp Corp | 固体撮像素子およびその製造方法、携帯型電子機器 |
| JP2004319683A (ja) * | 2003-04-15 | 2004-11-11 | Sharp Corp | 固体撮像装置およびその駆動方法 |
| JP2005085999A (ja) * | 2003-09-09 | 2005-03-31 | Seiko Epson Corp | 固体撮像装置及びその駆動方法 |
| JP2005209695A (ja) * | 2004-01-20 | 2005-08-04 | Toshiba Corp | 固体撮像装置およびその製造方法 |
Family Cites Families (38)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4142195A (en) * | 1976-03-22 | 1979-02-27 | Rca Corporation | Schottky barrier semiconductor device and method of making same |
| EP0048480B1 (en) * | 1980-09-19 | 1985-01-16 | Nec Corporation | Semiconductor photoelectric converter |
| JPS6157181A (ja) | 1984-08-28 | 1986-03-24 | Sharp Corp | 固体撮像装置 |
| JPS62124771A (ja) | 1985-11-25 | 1987-06-06 | Sharp Corp | 固体撮像装置 |
| US5238864A (en) | 1990-12-21 | 1993-08-24 | Mitsubishi Denki Kabushiki Kaisha | Method of making solid-state imaging device |
| DE4209536C3 (de) * | 1992-03-24 | 2000-10-05 | Stuttgart Mikroelektronik | Bildzelle für einen Bildaufnehmer-Chip |
| JPH09246514A (ja) * | 1996-03-12 | 1997-09-19 | Sharp Corp | 増幅型固体撮像装置 |
| US6297070B1 (en) * | 1996-12-20 | 2001-10-02 | Eastman Kodak Company | Active pixel sensor integrated with a pinned photodiode |
| EP0883187A1 (en) * | 1997-06-04 | 1998-12-09 | Interuniversitair Micro-Elektronica Centrum Vzw | A detector for electromagnetic radiation, pixel structure with high sensitivity using such detector and method of manufacturing such detector |
| JP3359258B2 (ja) * | 1997-05-30 | 2002-12-24 | キヤノン株式会社 | 光電変換装置及びそれを用いたイメージセンサ、画像読取装置 |
| US6107655A (en) * | 1997-08-15 | 2000-08-22 | Eastman Kodak Company | Active pixel image sensor with shared amplifier read-out |
| US5898196A (en) * | 1997-10-10 | 1999-04-27 | International Business Machines Corporation | Dual EPI active pixel cell design and method of making the same |
| US6023081A (en) * | 1997-11-14 | 2000-02-08 | Motorola, Inc. | Semiconductor image sensor |
| US6127697A (en) | 1997-11-14 | 2000-10-03 | Eastman Kodak Company | CMOS image sensor |
| US5952686A (en) | 1997-12-03 | 1999-09-14 | Hewlett-Packard Company | Salient integration mode active pixel sensor |
| US6051857A (en) * | 1998-01-07 | 2000-04-18 | Innovision, Inc. | Solid-state imaging device and method of detecting optical signals using the same |
| US5880495A (en) * | 1998-01-08 | 1999-03-09 | Omnivision Technologies, Inc. | Active pixel with a pinned photodiode |
| US6130422A (en) | 1998-06-29 | 2000-10-10 | Intel Corporation | Embedded dielectric film for quantum efficiency enhancement in a CMOS imaging device |
| JP2000082839A (ja) * | 1998-06-29 | 2000-03-21 | Hyundai Electronics Ind Co Ltd | フォトダイオ―ド、これを用いたイメ―ジセンサの単位画素及びこれからデ―タを得る方法 |
| JP3457551B2 (ja) | 1998-11-09 | 2003-10-20 | 株式会社東芝 | 固体撮像装置 |
| JP4604296B2 (ja) | 1999-02-09 | 2011-01-05 | ソニー株式会社 | 固体撮像装置及びその製造方法 |
| DE19933162B4 (de) | 1999-07-20 | 2004-11-11 | Institut für Mikroelektronik Stuttgart Stiftung des öffentlichen Rechts | Bildzelle, Bildsensor und Herstellungsverfahren hierfür |
| US6593607B1 (en) * | 1999-09-30 | 2003-07-15 | Pictos Technologies, Inc. | Image sensor with enhanced blue response and signal cross-talk suppression |
| JP4419238B2 (ja) | 1999-12-27 | 2010-02-24 | ソニー株式会社 | 固体撮像素子及びその製造方法 |
| US6950134B2 (en) * | 2000-02-22 | 2005-09-27 | Innotech Corporation | Method of preventing transfer and storage of non-optically generated charges in solid state imaging device |
| US6504196B1 (en) * | 2001-08-30 | 2003-01-07 | Micron Technology, Inc. | CMOS imager and method of formation |
| KR100436067B1 (ko) * | 2001-11-16 | 2004-06-12 | 주식회사 하이닉스반도체 | 이미지센서 및 그 제조 방법 |
| FR2844398A1 (fr) * | 2002-09-11 | 2004-03-12 | St Microelectronics Sa | Photodetecteur d'un capteur d'images |
| US7091536B2 (en) * | 2002-11-14 | 2006-08-15 | Micron Technology, Inc. | Isolation process and structure for CMOS imagers |
| US7087944B2 (en) * | 2003-01-16 | 2006-08-08 | Micron Technology, Inc. | Image sensor having a charge storage region provided within an implant region |
| JP3891126B2 (ja) * | 2003-02-21 | 2007-03-14 | セイコーエプソン株式会社 | 固体撮像装置 |
| KR20060022709A (ko) | 2003-06-30 | 2006-03-10 | 로무 가부시키가이샤 | 이미지 센서 및 포토 다이오드의 분리 구조의 형성 방법 |
| JP2006294871A (ja) | 2005-04-11 | 2006-10-26 | Matsushita Electric Ind Co Ltd | 固体撮像装置 |
| KR100690884B1 (ko) | 2005-04-28 | 2007-03-09 | 삼성전자주식회사 | 이미지 센서 및 그 제조 방법 |
| US7253461B2 (en) * | 2005-05-27 | 2007-08-07 | Dialog Imaging Systems Gmbh | Snapshot CMOS image sensor with high shutter rejection ratio |
| US7875916B2 (en) | 2005-09-28 | 2011-01-25 | Eastman Kodak Company | Photodetector and n-layer structure for improved collection efficiency |
| US20070069260A1 (en) | 2005-09-28 | 2007-03-29 | Eastman Kodak Company | Photodetector structure for improved collection efficiency |
| US7728277B2 (en) | 2005-11-16 | 2010-06-01 | Eastman Kodak Company | PMOS pixel structure with low cross talk for active pixel image sensors |
-
2006
- 2006-06-15 US US11/453,354 patent/US7875916B2/en active Active
- 2006-09-18 KR KR1020087007484A patent/KR20080050448A/ko not_active Ceased
- 2006-09-18 JP JP2008533438A patent/JP2009510777A/ja active Pending
- 2006-09-18 CN CN2006800359431A patent/CN101273457B/zh active Active
- 2006-09-18 WO PCT/US2006/036559 patent/WO2007038107A2/en not_active Ceased
- 2006-09-18 EP EP06814985A patent/EP1938379A2/en not_active Withdrawn
- 2006-09-27 TW TW095135693A patent/TWI382531B/zh active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0316263A (ja) * | 1989-06-14 | 1991-01-24 | Hitachi Ltd | 固体撮像素子 |
| JPH04245479A (ja) * | 1991-01-30 | 1992-09-02 | Sony Corp | 固体撮像装置 |
| JPH1070262A (ja) * | 1996-05-22 | 1998-03-10 | Eastman Kodak Co | パンチスルーリセットとクロストーク抑制を持つ能動画素センサー |
| JP2002176161A (ja) * | 2000-02-22 | 2002-06-21 | Innotech Corp | 固体撮像装置の光信号の蓄積方法 |
| JP2002134731A (ja) * | 2000-10-20 | 2002-05-10 | Nec Corp | 光電変換素子および固体撮像素子 |
| JP2004247407A (ja) * | 2003-02-12 | 2004-09-02 | Sharp Corp | 固体撮像素子およびその製造方法、携帯型電子機器 |
| JP2004319683A (ja) * | 2003-04-15 | 2004-11-11 | Sharp Corp | 固体撮像装置およびその駆動方法 |
| JP2005085999A (ja) * | 2003-09-09 | 2005-03-31 | Seiko Epson Corp | 固体撮像装置及びその駆動方法 |
| JP2005209695A (ja) * | 2004-01-20 | 2005-08-04 | Toshiba Corp | 固体撮像装置およびその製造方法 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9837460B2 (en) | 2015-12-28 | 2017-12-05 | Renesas Electronics Corporation | Semiconductor device and manufacturing method thereof |
| US10134796B2 (en) | 2015-12-28 | 2018-11-20 | Renesas Electronics Corporation | Semiconductor device and manufacturing method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20080050448A (ko) | 2008-06-05 |
| WO2007038107A3 (en) | 2007-10-04 |
| US7875916B2 (en) | 2011-01-25 |
| CN101273457B (zh) | 2011-11-16 |
| TW200721474A (en) | 2007-06-01 |
| EP1938379A2 (en) | 2008-07-02 |
| US20070069315A1 (en) | 2007-03-29 |
| WO2007038107A2 (en) | 2007-04-05 |
| CN101273457A (zh) | 2008-09-24 |
| TWI382531B (zh) | 2013-01-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP2030240B1 (en) | Pmos pixel structure with low cross talk | |
| US7157754B2 (en) | Solid-state imaging device and interline transfer CCD image sensor | |
| JP4802520B2 (ja) | 固体撮像装置及びその製造方法 | |
| KR101426329B1 (ko) | 고체 이미지 센서, 이의 제조 방법 및 카메라 | |
| JP3584196B2 (ja) | 受光素子及びそれを有する光電変換装置 | |
| US10367029B2 (en) | Image sensors having a separation impurity layer | |
| JP6406585B2 (ja) | 撮像装置 | |
| JP3727639B2 (ja) | 固体撮像装置 | |
| US11581360B2 (en) | Complementary metal-oxide-semiconductor image sensor and method of making | |
| JP5100988B2 (ja) | イメージセンサー及びその製造方法 | |
| JP2019145619A (ja) | 撮像装置およびカメラ | |
| JP2009510777A (ja) | 改善された収集のための光検出器及びn型層構造 | |
| JP4241527B2 (ja) | 光電変換素子 | |
| US20070069260A1 (en) | Photodetector structure for improved collection efficiency | |
| JP5030323B2 (ja) | 固体撮像素子 | |
| KR100769563B1 (ko) | 누설 전류를 감소시킨 이미지 센서 | |
| JP2007518283A (ja) | 高感度cmosイメージセンサーの画素構造 | |
| JP2018139328A (ja) | 固体撮像装置および撮像システム | |
| JP2007273518A (ja) | 固体撮像装置及びそれを用いたカメラ |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090908 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20090908 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100906 |
|
| A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20110530 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20111125 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20111129 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120214 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120904 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20130219 |