JP2009283658A - キャパシタ素子用の絶縁膜、キャパシタ素子及び半導体装置 - Google Patents
キャパシタ素子用の絶縁膜、キャパシタ素子及び半導体装置 Download PDFInfo
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- 239000003990 capacitor Substances 0.000 title claims abstract description 83
- 239000004065 semiconductor Substances 0.000 title claims description 23
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Inorganic materials O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 claims abstract description 42
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 claims abstract description 42
- 229910052751 metal Inorganic materials 0.000 claims abstract description 13
- 239000002184 metal Substances 0.000 claims abstract description 13
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 4
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 4
- 229910052727 yttrium Inorganic materials 0.000 claims description 32
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims description 32
- 229910052715 tantalum Inorganic materials 0.000 claims description 21
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 21
- 239000010955 niobium Substances 0.000 claims description 16
- 229910052758 niobium Inorganic materials 0.000 claims description 11
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 11
- 229910052782 aluminium Inorganic materials 0.000 claims description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 8
- 229910052747 lanthanoid Inorganic materials 0.000 claims description 8
- 150000002602 lanthanoids Chemical class 0.000 claims description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- 238000003860 storage Methods 0.000 claims description 2
- 230000001629 suppression Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 23
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 16
- 239000000463 material Substances 0.000 description 15
- 239000010410 layer Substances 0.000 description 13
- 238000000137 annealing Methods 0.000 description 12
- 238000004544 sputter deposition Methods 0.000 description 10
- 239000000758 substrate Substances 0.000 description 9
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 8
- 238000009792 diffusion process Methods 0.000 description 7
- 229910052697 platinum Inorganic materials 0.000 description 7
- 239000000654 additive Substances 0.000 description 6
- 230000000996 additive effect Effects 0.000 description 6
- 238000011156 evaluation Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 239000011229 interlayer Substances 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- 230000014759 maintenance of location Effects 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 238000001420 photoelectron spectroscopy Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000005001 rutherford backscattering spectroscopy Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910052765 Lutetium Inorganic materials 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- OHSVLFRHMCKCQY-UHFFFAOYSA-N lutetium atom Chemical compound [Lu] OHSVLFRHMCKCQY-UHFFFAOYSA-N 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000010183 spectrum analysis Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000009279 wet oxidation reaction Methods 0.000 description 1
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Abstract
【解決手段】一対の電極と、前記一対の電極に挟まれた絶縁膜とを有するキャパシタ素子に用いられる前記絶縁膜であって、五酸化ニオブに対してバンドギャップが大きな金属酸化物をなす金属元素が、五酸化ニオブに添加されてなることを特徴とするキャパシタ素子用の絶縁膜を採用する。
【選択図】なし
Description
本発明のキャパシタ素子用の絶縁膜は、一対の電極と、前記一対の電極に挟まれた絶縁膜とを有するキャパシタ素子に用いられる前記絶縁膜であって、五酸化ニオブに対してバンドギャップが大きな金属酸化物をなす金属元素が、五酸化ニオブに添加されてなることを特徴とする。
また、本発明のキャパシタ素子用の絶縁膜においては、前記金属元素が、イットリウム、アルミニウム、タンタル、ランタノイド元素から選ばれた少なくとも1種以上の元素であることが好ましい。
また、本発明のキャパシタ素子用の絶縁膜においては、添加元素としてタンタルを選択した場合に、五酸化ニオブに対するタンタルの添加比率を40%〜80%の範囲とすることが好ましい。
次に、本発明の半導体装置は、キャパシタ素子を備えた半導体装置であって、前記キャパシタ素子は、一対の電極と、前記一対の電極に挟まれた絶縁膜とから構成され、前記絶縁膜として、先の何れかに記載の絶縁膜が備えられていることを特徴とする。
図1には、本発明の絶縁膜を用いて形成したキャパシタ素子の断面図を示す。図1に示すキャパシタ素子は、窒化チタン(TiN)からなる下部電極1及び上部電極2(一対の電極)の間に絶縁膜3が挟まれて構成されている。下部電極1及び上部電極2の構成材料は、窒化チタンを使用しているが、この材料に特に限定されるものではなく、多結晶シリコン膜や、白金(Pt)、ルテニウム(Ru)、イリジウム(Ir)等の金属膜も使用可能である。また、下部電極1と上部電極2が異なる材料で形成されていてもよい。
本発明に係る絶縁膜3は、完全には結晶化していない状態でも、キャパシタ素子に必要な電気特性を満たすことができる。
図1において、窒化チタン等で下部電極1を形成してから、スパッタ装置のチャンバー内に、Nb2O5ターゲットと、Y2O3ターゲットを配置する。次いで、各ターゲットと対向する位置に配置された下部電極1の表面(絶縁膜の被形成面)を自転させながら、各ターゲットに対してそれぞれRF(高周波)パワーを供給して放電させる。これにより、イットリウム(Y)が添加された五酸化ニオブからなる絶縁膜が下部電極1上に形成される。
また、Y2O3以外のイットリウムを含んだ材料から形成されたターゲットを用いて、同様にイットリウムの添加量を制御してもよい。
各活性領域204の中央部には、コンタクトプラグ207が設けられ、活性領域204表面のN型拡散層領域と接触している。また、各活性領域204の両端には、コンタクトプラグ208、209が設けられ、活性領域204表面のN型拡散層領域と接触している。コンタクトプラグ207、208、209は、同時に形成することが可能である。
10、200…半導体基板、11…酸化膜、201…MOSトランジスタ、203…素子分離領域、204…活性領域、205…拡散領域、206…ゲート電極、207、208、209、211、214、215…コンタクトプラグ、210、213、216、218…層間絶縁膜、212、214、219…配線層、217…キャパシタ素子、220…保護膜。
Claims (7)
- 一対の電極と、前記一対の電極に挟まれた絶縁膜とを有するキャパシタ素子に用いられる前記絶縁膜であって、
五酸化ニオブに対してバンドギャップが大きな金属酸化物をなす金属元素が、五酸化ニオブに添加されてなることを特徴とするキャパシタ素子用の絶縁膜。 - 前記金属元素が、イットリウム、アルミニウム、タンタル、ランタノイド元素から選ばれた少なくとも1種以上の元素であることを特徴とする請求項1記載のキャパシタ素子用の絶縁膜。
- 一対の電極と、前記一対の電極に挟まれた絶縁膜とを有するキャパシタ素子に用いられる前記絶縁膜であって、
イットリウム、アルミニウム、タンタル、ランタノイド元素から選ばれた少なくとも1種以上の元素と、ニオブ及び酸素が含まれており、エネルギー準位におけるバンドギャップ幅が4.2eV以上であることを特徴とするキャパシタ素子用の絶縁膜。 - 少なくとも一部に非晶質組織が含まれていることを特徴とする請求項1乃至請求項3の何れか一項に記載のキャパシタ素子用の絶縁膜。
- 一対の電極と、前記一対の電極に挟まれた絶縁膜とを有するキャパシタ素子であって、前記絶縁膜として、請求項1乃至請求項4の何れか一項に記載の絶縁膜が備えられていることを特徴とするキャパシタ素子。
- メモリセルを備えた半導体装置であって、
前記メモリセルは、一対の電極と、前記一対の電極に挟まれた絶縁膜とを有するキャパシタ素子とトランジスタを有し、
前記絶縁膜として、請求項1乃至請求項4の何れか一項に記載の絶縁膜が備えられ、
前記キャパシタ素子に蓄積した電荷の有無によって情報の記憶動作を行うことを特徴とする半導体装置。 - キャパシタ素子を備えた半導体装置であって、
前記キャパシタ素子は、一対の電極と、前記一対の電極に挟まれた絶縁膜とから構成され、前記絶縁膜として、請求項1乃至請求項4の何れか一項に記載の絶縁膜が備えられていることを特徴とする半導体装置。
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KR20150031380A (ko) * | 2013-09-13 | 2015-03-24 | 삼성전자주식회사 | 캐패시터를 포함하는 반도체 소자 및 그 제조 방법 |
CN106575806B (zh) | 2014-06-16 | 2020-11-10 | 加利福尼亚大学董事会 | 混合电化学电池 |
WO2016081638A1 (en) | 2014-11-18 | 2016-05-26 | The Regents Of The University Of California | Porous interconnected corrugated carbon-based network (iccn) composite |
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CN108475590B (zh) | 2016-01-22 | 2021-01-26 | 加利福尼亚大学董事会 | 高电压装置 |
US11062855B2 (en) | 2016-03-23 | 2021-07-13 | The Regents Of The University Of California | Devices and methods for high voltage and solar applications |
CA3017238A1 (en) | 2016-04-01 | 2017-10-05 | The Regents Of The University Of California | Direct growth of polyaniline nanotubes on carbon cloth for flexible and high-performance supercapacitors |
US11097951B2 (en) | 2016-06-24 | 2021-08-24 | The Regents Of The University Of California | Production of carbon-based oxide and reduced carbon-based oxide on a large scale |
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