JP2009249236A - Iii族窒化物半導体素子及びエピタキシャルウエハ - Google Patents
Iii族窒化物半導体素子及びエピタキシャルウエハ Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 386
- 150000004767 nitrides Chemical class 0.000 title claims abstract description 63
- 229910002601 GaN Inorganic materials 0.000 claims abstract description 288
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims abstract description 225
- 239000000758 substrate Substances 0.000 claims abstract description 40
- 150000001875 compounds Chemical class 0.000 claims description 84
- 229910002704 AlGaN Inorganic materials 0.000 claims description 39
- 229910052594 sapphire Inorganic materials 0.000 claims description 13
- 239000010980 sapphire Substances 0.000 claims description 13
- 230000005540 biological transmission Effects 0.000 claims description 12
- 238000010894 electron beam technology Methods 0.000 claims description 9
- 238000002003 electron diffraction Methods 0.000 claims description 7
- 238000000103 photoluminescence spectrum Methods 0.000 claims description 5
- 229910003465 moissanite Inorganic materials 0.000 claims description 4
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 description 144
- 239000013078 crystal Substances 0.000 description 34
- 238000000034 method Methods 0.000 description 13
- 238000002441 X-ray diffraction Methods 0.000 description 10
- 238000005259 measurement Methods 0.000 description 10
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 9
- 230000004888 barrier function Effects 0.000 description 8
- 238000005253 cladding Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 238000013507 mapping Methods 0.000 description 6
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 230000001747 exhibiting effect Effects 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 238000005424 photoluminescence Methods 0.000 description 4
- IBEFSUTVZWZJEL-UHFFFAOYSA-N trimethylindium Chemical compound C[In](C)C IBEFSUTVZWZJEL-UHFFFAOYSA-N 0.000 description 4
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 3
- 239000013256 coordination polymer Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 229910052733 gallium Inorganic materials 0.000 description 3
- 229910052738 indium Inorganic materials 0.000 description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 3
- 238000003475 lamination Methods 0.000 description 3
- 239000011777 magnesium Substances 0.000 description 3
- 230000001629 suppression Effects 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 101100478627 Arabidopsis thaliana S-ACP-DES2 gene Proteins 0.000 description 2
- 101100257981 Arabidopsis thaliana S-ACP-DES3 gene Proteins 0.000 description 2
- 101150038966 SAD2 gene Proteins 0.000 description 2
- 101150093202 SAD3 gene Proteins 0.000 description 2
- 101100325615 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) MEC1 gene Proteins 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- QHGSGZLLHBKSAH-UHFFFAOYSA-N hydridosilicon Chemical compound [SiH] QHGSGZLLHBKSAH-UHFFFAOYSA-N 0.000 description 2
- 238000001000 micrograph Methods 0.000 description 2
- 238000005121 nitriding Methods 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 229940095676 wafer product Drugs 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000002524 electron diffraction data Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- QBJCZLXULXFYCK-UHFFFAOYSA-N magnesium;cyclopenta-1,3-diene Chemical compound [Mg+2].C1C=CC=[C-]1.C1C=CC=[C-]1 QBJCZLXULXFYCK-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000035755 proliferation Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 230000007847 structural defect Effects 0.000 description 1
- 238000004627 transmission electron microscopy Methods 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
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Abstract
【解決手段】発光ダイオード21aの支持基体23の主面23aは、c面に対して10度より大きく80度未満のオフ角で傾斜する。半導体積層25aは、400nm以上550nm以下の波長範囲内の発光ピークを有する活性層27を含む。GaN支持基体の(0001)面(図5において示された参照面SR3)とバッファ層33aの(0001)面との傾斜角Aは0.05度以上であり、傾斜角Aは2度以下である。また、GaN支持基体の(0001)面(図5において示された参照面SR4)と井戸層37aの(0001)面との傾斜角Bは0.05度以上であり、傾斜角Bは2度以下である。傾斜角A及び傾斜角Bは、GaN支持基体のc面に対して互いに逆方向に傾斜している。
【選択図】図5
Description
支持基体23:n型GaN基板
バッファ層33a:Si添加n型Al0.06Ga0.94N、50nm
n型GaN層33b:Si添加n型GaN、2μm
井戸層37a:アンドープIn0.18Ga0.82N層、5nm、3層
障壁層37b:アンドープGaN層、13nm
電子ブロック層35a:Mg添加p型Al0.08Ga0.92N層、20nm
コンタクト層35b:Mg添加p型GaN、50nm。
支持基体23:n型GaN基板
n型クラッド層43:Si添加n型Al0.03Ga0.97N層、2μm
n側光ガイド層47b:アンドープIn0.02Ga0.98N層、100nm
井戸層49a:アンドープIn0.08Ga0.92N層、5nm、3層
障壁層49b:アンドープGaN層、15nm
p側光ガイド層47c:アンドープIn0.02Ga0.98N層、100nm
電子ブロック層53a:Mg添加p型Al0.18Ga0.82N層、20nm
p型クラッド層53b:Mg添加p型Al0.06Ga0.94N層、400nm
コンタクト層53c:Mg添加p型GaN、50nm。
有機金属気相成長法により発光ダイオードを作製した。図7及び図8は、発光ダイオードの作製方法の主要な工程を含む工程フローを示す図面である。原料にはトリメチルガリウム(TMG)、トリメチルアルミニウム(TMA)、トリメチルインジウム(TMI)、アンモニア(NH3)、シラン(SiH4)、ビスシクロペンタジエニルマグネシウム(CP2Mg)を用いた。
GaNウエハ、 m軸方向オフ角、 a軸方向オフ角
m16、 16.4度、 0.2度
m26、 26.4度、 0.1度
オフ角はX線回折法により決定された。
Claims (23)
- 六方晶系化合物のc面に対して10度より大きく80度未満のオフ角で傾斜しており該六方晶系化合物からなる主面を有する支持基体と、
前記支持基体の前記主面上に設けられており、前記六方晶系化合物と異なる六方晶系窒化ガリウム系半導体からなる半導体層を含む半導体領域と
を備え、
前記支持基体の前記六方晶系化合物の(0001)面と前記半導体層の前記六方晶系窒化ガリウム系半導体の(0001)面との傾斜角は+0.05度以上+2度以下、−0.05度以下−2度以上であり、
前記半導体層の前記六方晶系窒化ガリウム系半導体はAlGaN及びInGaNのいずれかである、ことを特徴とするIII族窒化物半導体素子。 - 前記半導体領域は、六方晶系窒化ガリウム系半導体からなる活性層を含み、
前記活性層は、前記活性層からの光のピーク波長が400nm以上550nm以下の波長範囲内に含まれるように設けられており、
前記活性層は、InGaN井戸層を含み、
当該III族窒化物半導体素子は、発光ダイオード又は半導体レーザである、ことを特徴とする請求項1に記載されたIII族窒化物半導体素子。 - 前記支持基体は、サファイア、SiC及びGaNのいずれかからなる、ことを特徴とする請求項1又は請求項2に記載されたIII族窒化物半導体素子。
- 前記支持基体は、窒化ガリウム系半導体からなり、
前記主面は半極性を示す、ことを特徴とする請求項1〜請求項3のいずれか一項に記載されたIII族窒化物半導体素子。 - 前記支持基体は、貫通転位密度1×107cm−2以下の窒化ガリウム系半導体領域を有する、ことを特徴とする請求項1〜請求項4のいずれか一項に記載されたIII族窒化物半導体素子。
- 前記支持基体の前記六方晶系化合物はGaNであり、
前記傾斜角は、前記支持基体のGaNの(0001)面と前記半導体層の前記六方晶系窒化ガリウム系半導体の(0001)面とによって規定される、ことを特徴とする請求項1〜請求項5のいずれか一項に記載されたIII族窒化物半導体素子。 - 前記半導体層の前記六方晶系窒化ガリウム系半導体はInGaNであり、
前記傾斜角は、前記支持基体のGaNの(0001)面と前記半導体層のInGaNの(0001)面とによって規定される、ことを特徴とする請求項6に記載されたIII族窒化物半導体素子。 - 前記半導体層の前記六方晶系窒化ガリウム系半導体はAlGaNであり、
前記傾斜角は、前記支持基体のGaNの(0001)面と前記半導体層のAlGaNの(0001)面とによって規定される、ことを特徴とする請求項6に記載されたIII族窒化物半導体素子。 - 透過型電子線回折像において、前記支持基体の前記GaNの<0001>方向は、前記六方晶系窒化ガリウム系半導体の<0001>方向と異なる、ことを特徴とする請求項6〜請求項8のいずれか一項に記載されたIII族窒化物半導体素子。
- 前記六方晶系窒化ガリウム系半導体は前記支持基体の前記主面に平行な面内で弾性的に歪んでいる、ことを特徴とする請求項1〜請求項9のいずれか一項に記載されたIII族窒化物半導体素子。
- 前記支持基体は、A面のサファイア基板と、該サファイア基板上に成長されたGaN層とを含む、ことを特徴とする請求項1〜請求項10のいずれか一項に記載されたIII族窒化物半導体素子。
- 六方晶系化合物のc面に対して10度より大きく80度未満のオフ角で傾斜しており該六方晶系化合物からなる主面を有するウエハと、
前記ウエハの前記主面上に設けられており、前記六方晶系化合物と異なる六方晶系窒化ガリウム系半導体からなる半導体層を含む半導体領域と
を備え、
前記ウエハの前記六方晶系化合物の(0001)面と前記半導体層の前記六方晶系窒化ガリウム系半導体の(0001)面との傾斜角は+0.05度以上+2度以下、−0.05度以下−2度以上であり、
前記半導体層の前記六方晶系窒化ガリウム系半導体はAlGaN及びInGaNのいずれかである、ことを特徴とするエピタキシャルウエハ。 - 前記半導体領域は、六方晶系窒化ガリウム系半導体からなる活性層を含み、
前記活性層のフォトルミネッセンススペクトルのピーク波長は、400nm以上550nm以下の波長範囲内にある、ことを特徴とする請求項12に記載されたエピタキシャルウエハ。 - 前記ウエハは、サファイア、SiC及びGaNのいずれかからなる、ことを特徴とする請求項12又は請求項13に記載されたエピタキシャルウエハ。
- 前記ウエハは窒化ガリウム系半導体からなり、
前記主面は半極性を示す、ことを特徴とする請求項12〜請求項14のいずれか一項に記載されたエピタキシャルウエハ。 - 前記ウエハは、貫通転位密度1×107cm−2以下の窒化ガリウム系半導体領域を有する、ことを特徴とする請求項12〜請求項15のいずれか一項に記載されたエピタキシャルウエハ。
- 前記ウエハのエッジ上の2点間の距離の最大値は45mm以上であり、
前記ウエハの前記六方晶系化合物はGaNであり、
前記傾斜角は、前記ウエハのGaNの(0001)面と前記半導体層の前記六方晶系窒化ガリウム系半導体の(0001)面とによって規定される、ことを特徴とする請求項12〜請求項16のいずれか一項に記載されたエピタキシャルウエハ。 - 前記半導体層の前記六方晶系窒化ガリウム系半導体はInGaNであり、
前記傾斜角は、前記ウエハのGaNの(0001)面と前記半導体層のInGaNの(0001)面とによって規定される、ことを特徴とする請求項17に記載されたエピタキシャルウエハ。 - 前記半導体層の前記六方晶系窒化ガリウム系半導体はAlGaNであり、
前記傾斜角は、前記ウエハのGaNの(0001)面と前記半導体層のAlGaNの(0001)面とによって規定される、ことを特徴とする請求項17に記載されたエピタキシャルウエハ。 - 透過型電子線回折像において、前記ウエハの前記GaNの<0001>方向は前記六方晶系窒化ガリウム系半導体の<0001>方向と異なる、ことを特徴とする請求項17〜請求項19のいずれか一項に記載されたエピタキシャルウエハ。
- 前記六方晶系窒化ガリウム系半導体は前記ウエハの前記主面に平行な面内で弾性的に歪んでいる、ことを特徴とする請求項12〜請求項20のいずれか一項に記載されたエピタキシャルウエハ。
- 六方晶系化合物のc面に対して10度より大きく80度未満のオフ角で傾斜しており該六方晶系化合物からなる主面を有する支持基体と、
前記支持基体の前記主面上に設けられており、前記六方晶系化合物と異なる六方晶系窒化ガリウム系半導体からなる半導体層を含む半導体領域と
を備え、
透過型電子線回折像において、前記六方晶系化合物の<0001>方向を示す第1の軸は、前記六方晶系窒化ガリウム系半導体の<0001>方向を示す第2の軸と異なる方向に延びている、ことを特徴とするIII族窒化物半導体素子。 - 六方晶系化合物のc面と10度より大きく80度未満のオフ角で傾斜しており該六方晶系化合物からなる主面を有するウエハと、
前記ウエハの前記主面上に設けられており、前記六方晶系化合物と異なる六方晶系窒化ガリウム系半導体からなる半導体層を含む半導体領域と
を備え、
透過型電子線回折像において、前記六方晶系化合物の<0001>方向を示す第1の軸は、前記六方晶系窒化ガリウム系半導体の<0001>方向を示す第2の軸と異なる方向に延びている、ことを特徴とするエピタキシャルウエハ。
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JP2013001624A (ja) * | 2011-06-21 | 2013-01-07 | Sumitomo Electric Ind Ltd | Iii族窒化物複合基板およびその評価方法 |
JPWO2020017207A1 (ja) * | 2018-07-20 | 2021-08-02 | ソニーセミコンダクタソリューションズ株式会社 | 半導体発光素子 |
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