JP2009234143A - 液体移送装置 - Google Patents
液体移送装置 Download PDFInfo
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- JP2009234143A JP2009234143A JP2008085355A JP2008085355A JP2009234143A JP 2009234143 A JP2009234143 A JP 2009234143A JP 2008085355 A JP2008085355 A JP 2008085355A JP 2008085355 A JP2008085355 A JP 2008085355A JP 2009234143 A JP2009234143 A JP 2009234143A
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- 239000007788 liquid Substances 0.000 title claims abstract description 62
- 238000002955 isolation Methods 0.000 claims abstract description 147
- 239000000463 material Substances 0.000 claims abstract description 30
- 239000011347 resin Substances 0.000 claims abstract description 21
- 229920005989 resin Polymers 0.000 claims abstract description 21
- 238000010438 heat treatment Methods 0.000 claims description 28
- 238000001514 detection method Methods 0.000 claims description 27
- 239000004020 conductor Substances 0.000 claims description 8
- 230000020169 heat generation Effects 0.000 claims description 2
- 230000008595 infiltration Effects 0.000 abstract 1
- 238000001764 infiltration Methods 0.000 abstract 1
- 239000000976 ink Substances 0.000 description 109
- 239000010410 layer Substances 0.000 description 87
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- 230000000149 penetrating effect Effects 0.000 description 9
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
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- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 2
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- 229910000570 Cupronickel Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
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- 239000004760 aramid Substances 0.000 description 1
- 229920003235 aromatic polyamide Polymers 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- YXTPWUNVHCYOSP-UHFFFAOYSA-N bis($l^{2}-silanylidene)molybdenum Chemical compound [Si]=[Mo]=[Si] YXTPWUNVHCYOSP-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000000788 chromium alloy Substances 0.000 description 1
- UPHIPHFJVNKLMR-UHFFFAOYSA-N chromium iron Chemical compound [Cr].[Fe] UPHIPHFJVNKLMR-UHFFFAOYSA-N 0.000 description 1
- YOCUPQPZWBBYIX-UHFFFAOYSA-N copper nickel Chemical compound [Ni].[Cu] YOCUPQPZWBBYIX-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
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- 238000005530 etching Methods 0.000 description 1
- 230000005621 ferroelectricity Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910021344 molybdenum silicide Inorganic materials 0.000 description 1
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/055—Devices for absorbing or preventing back-pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B41J2/16—Production of nozzles
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- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
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- B41J2002/14258—Multi layer thin film type piezoelectric element
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
- B41J2002/14266—Sheet-like thin film type piezoelectric element
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2002/14306—Flow passage between manifold and chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
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- B41J2002/14419—Manifold
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
【解決手段】圧電アクチュエータ32は、流路ユニット31の一表面に圧力室53を覆うように配置される圧電層70〜74と、圧電層70〜74の圧力室53と対向する領域に配置された個別電極75及び共通電極76と、圧力室53と対向する領域において、圧電層70〜74と流路ユニット31の前記一表面との間に介在する隔離膜77とを有する。さらに、隔離膜77は、樹脂材料からなる第1隔離膜78と、この第1隔離膜78よりも圧電層70〜74側に配置されるとともに、前記第1隔離膜78よりもインクを通しにくい材料で形成された第2隔離膜79とを含んでいる。
【選択図】図5
Description
前記圧電アクチュエータは、前記流路ユニットの一表面に前記圧力室を覆うように配置される圧電層と、前記圧電層の前記圧力室と対向する領域に配置された電極と、少なくとも前記圧力室と対向する領域において、前記圧電層と前記流路ユニットの前記一表面との間に介在する隔離膜とを有し、
前記隔離膜は、樹脂材料からなる第1隔離膜と、この第1隔離膜よりも前記圧電層側に配置されるとともに、前記第1隔離膜よりも前記液体を通しにくい材料で形成された第2隔離膜とを含むことを特徴とするものである。
3 インクジェットヘッド
31 流路ユニット
32 圧電アクチュエータ
53 圧力室
70〜74 圧電層
75 個別電極
76 共通電極
77 隔離膜
78 第1隔離膜
79 第2隔離膜
79a インク加熱部
82 抵抗検出回路
90 通電回路
91 温度検出部
92 加熱制御部
Claims (8)
- 圧力室を含む液体流路が形成された流路ユニットと、前記圧力室内の液体に圧力を付与する圧電アクチュエータとを備えた液体移送装置であって、
前記圧電アクチュエータは、
前記流路ユニットの一表面に前記圧力室を覆うように配置される圧電層と、
前記圧電層の前記圧力室と対向する領域に配置された電極と、
少なくとも前記圧力室と対向する領域において、前記圧電層と前記流路ユニットの前記一表面との間に介在する隔離膜とを有し、
前記隔離膜は、
樹脂材料からなる第1隔離膜と、
この第1隔離膜よりも前記圧電層側に配置されるとともに、前記第1隔離膜よりも前記液体を通しにくい材料で形成された第2隔離膜と、
を含むことを特徴とする液体移送装置。 - 前記第2隔離膜が導電性材料からなることを特徴とする請求項1に記載の液体移送装置。
- 前記流路ユニットの前記一表面が導電性を有する面であることを特徴とする請求項1に記載の液体移送装置。
- 前記第1隔離膜を挟むように位置する、前記流路ユニットの前記一表面と前記第2隔離膜との間の電気抵抗を検出する抵抗検出手段を有することを特徴とする請求項3に記載の液体移送装置。
- 導電性の前記第2隔離膜に通電する通電手段と、
前記通電手段による前記第2隔離膜への通電を制御して、前記第2隔離膜の発熱により前記圧力室内の液体を加熱する加熱制御手段とを有することを特徴とする請求項1〜4の何れかに記載の液体移送装置。 - 前記圧力室周囲の温度を検出する温度検出手段をさらに備え、
前記加熱制御手段は、前記温度検出手段の検出値に基づいて、前記通電手段を制御することを特徴とする請求項5に記載の液体移送装置。 - 前記流路ユニットは複数の前記圧力室を有し、
前記第2隔離膜は、前記複数の圧力室にそれぞれ対向した複数の液体加熱部を含んでおり、
前記複数の液体加熱部が直列的に接続されていることを特徴とする請求項5又は6に記載の液体移送装置。 - 導電性を有する前記第2隔離膜が、前記圧電層の、前記流路ユニットの一表面と対向する面のほぼ全域に配置されていることを特徴とする請求項2〜6の何れかに記載の液体移送装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008085355A JP4582173B2 (ja) | 2008-03-28 | 2008-03-28 | 液体移送装置 |
US12/412,294 US7926921B2 (en) | 2008-03-28 | 2009-03-26 | Liquid transporting apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008085355A JP4582173B2 (ja) | 2008-03-28 | 2008-03-28 | 液体移送装置 |
Publications (2)
Publication Number | Publication Date |
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JP2009234143A true JP2009234143A (ja) | 2009-10-15 |
JP4582173B2 JP4582173B2 (ja) | 2010-11-17 |
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Application Number | Title | Priority Date | Filing Date |
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JP2008085355A Active JP4582173B2 (ja) | 2008-03-28 | 2008-03-28 | 液体移送装置 |
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US (1) | US7926921B2 (ja) |
JP (1) | JP4582173B2 (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011156682A (ja) * | 2010-01-29 | 2011-08-18 | Brother Industries Ltd | 液滴噴射ヘッド及び液滴噴射ヘッドの製造方法 |
JP2012061697A (ja) * | 2010-09-15 | 2012-03-29 | Ricoh Co Ltd | 液体吐出ヘッド及び画像形成装置 |
WO2013002263A1 (ja) * | 2011-06-28 | 2013-01-03 | 京セラ株式会社 | 液体吐出ヘッド、およびそれを用いた記録装置 |
JP2013154500A (ja) * | 2012-01-27 | 2013-08-15 | Kyocera Corp | 液体吐出ヘッド、およびそれを用いた記録装置 |
US8678561B2 (en) | 2010-09-30 | 2014-03-25 | Brother Kogyo Kabushiki Kaisha | Liquid discharging head and method for producing the same |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102448727B (zh) * | 2009-05-27 | 2014-09-17 | 京瓷株式会社 | 液体喷出头及使用其的记录装置 |
JP7419677B2 (ja) * | 2019-06-05 | 2024-01-23 | ブラザー工業株式会社 | 液体吐出ヘッド |
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JPH081950A (ja) * | 1994-06-22 | 1996-01-09 | Ricoh Co Ltd | インクジェットヘッドの製造方法 |
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JP2003127367A (ja) * | 2001-10-26 | 2003-05-08 | Fuji Xerox Co Ltd | インクジェット式プリンタヘッドの圧電アクチュエータおよびその製造方法 |
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JPH04235050A (ja) | 1991-01-09 | 1992-08-24 | Seiko Epson Corp | インクジェット記録ヘッドの製造方法 |
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US8678561B2 (en) | 2010-09-30 | 2014-03-25 | Brother Kogyo Kabushiki Kaisha | Liquid discharging head and method for producing the same |
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US8944572B2 (en) | 2011-06-28 | 2015-02-03 | Kyocera Corporation | Liquid discharge head and recording device using same |
JPWO2013002263A1 (ja) * | 2011-06-28 | 2015-02-23 | 京セラ株式会社 | 液体吐出ヘッド、およびそれを用いた記録装置 |
JP2013154500A (ja) * | 2012-01-27 | 2013-08-15 | Kyocera Corp | 液体吐出ヘッド、およびそれを用いた記録装置 |
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US20090244211A1 (en) | 2009-10-01 |
US7926921B2 (en) | 2011-04-19 |
JP4582173B2 (ja) | 2010-11-17 |
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