JP2009231639A - 配線基板製造方法及び半導体装置製造方法 - Google Patents
配線基板製造方法及び半導体装置製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 58
- 239000000758 substrate Substances 0.000 claims description 170
- 238000000034 method Methods 0.000 claims description 45
- 239000004065 semiconductor Substances 0.000 claims description 43
- 230000003014 reinforcing effect Effects 0.000 claims description 14
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 229910010272 inorganic material Inorganic materials 0.000 claims description 3
- 239000011147 inorganic material Substances 0.000 claims description 3
- 239000011368 organic material Substances 0.000 claims description 3
- 238000000926 separation method Methods 0.000 claims 2
- 230000001737 promoting effect Effects 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 103
- 229910052710 silicon Inorganic materials 0.000 description 103
- 239000010703 silicon Substances 0.000 description 103
- 239000010949 copper Substances 0.000 description 21
- 229910052751 metal Inorganic materials 0.000 description 14
- 239000002184 metal Substances 0.000 description 14
- 229920005989 resin Polymers 0.000 description 12
- 239000011347 resin Substances 0.000 description 12
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 9
- 239000010931 gold Substances 0.000 description 8
- 238000007747 plating Methods 0.000 description 8
- 238000005530 etching Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 229910052738 indium Inorganic materials 0.000 description 6
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 238000002844 melting Methods 0.000 description 5
- 230000008018 melting Effects 0.000 description 5
- 238000007772 electroless plating Methods 0.000 description 4
- 238000009713 electroplating Methods 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229920001187 thermosetting polymer Polymers 0.000 description 3
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium persulfate Chemical compound [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 description 2
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910001870 ammonium persulfate Inorganic materials 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 229960003280 cupric chloride Drugs 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000006261 foam material Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000003351 stiffener Substances 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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- H05K3/241—Reinforcing the conductive pattern characterised by the electroplating method; means therefor, e.g. baths or apparatus
- H05K3/242—Reinforcing the conductive pattern characterised by the electroplating method; means therefor, e.g. baths or apparatus characterised by using temporary conductors on the printed circuit for electrically connecting areas which are to be electroplated
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- H—ELECTRICITY
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- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
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- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4682—Manufacture of core-less build-up multilayer circuits on a temporary carrier or on a metal foil
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- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
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- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
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- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
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- H05K3/22—Secondary treatment of printed circuits
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- H05K3/243—Reinforcing the conductive pattern characterised by selective plating, e.g. for finish plating of pads
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- Y10T29/49126—Assembling bases
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Abstract
【解決手段】支持基板10-1を用意する第1の工程と、該支持基板10-1の第1の主面上にビルドアップ配線構造体90-1を形成する第2の工程と、該ビルドアップ配線構造体90-1を前記支持基板10-1から分離し、配線基板100-1を得る第3の工程とを有し、前記支持基板10-1として、基板本体に貫通電極20-1が形成され、前記支持基板10-1の、前記第1の主面と反対側の第2の主面に、前記貫通電極20-1と接続された引き出し配線32-1が形成された構造のものを用い、前記第2の工程では、前記支持基板10-1に形成された貫通電極20-1を給電配線として前記配線層を形成し、前記第3の工程では、前記ビルドアップ配線構造体90-1を前記支持基板10-1から剥離することにより前記配線基板100-1を得る。
【選択図】図2
Description
10 シリコン基板
30 パッド
32 配線層
40 電極
50 剥離層
60 第1絶縁層
70 第1配線層
90 ビルドアップ配線構造体
100 配線基板
110 バンプ
120 半導体チップ
Claims (7)
- 支持基板を用意する第1の工程と、
該支持基板の第1の主面上に配線層と絶縁層を交互に形成してビルドアップ配線構造体を形成する第2の工程と、
形成された該ビルドアップ配線構造体を前記支持基板から分離することにより配線基板を得る第3の工程とを有する配線基板製造方法であって、
前記支持基板として、基板本体に貫通電極が形成され、
前記支持基板の、前記第1の主面と反対側の第2の主面に、前記貫通電極と接続された引き出し配線が形成された構造のものを用い、
前記第2の工程では、前記支持基板に形成された貫通電極を給電配線として前記配線層を形成し、
前記第3の工程では、前記ビルドアップ配線構造体を前記支持基板から剥離することにより前記配線基板を得ることを特徴とする配線基板製造方法。 - 前記基板本体は、有機材料又は無機材料よりなることを特徴とする請求項1に記載の配線基板製造方法。
- 前記支持基板は、熱膨張率が1ppm/℃以上、10ppm/℃以下であることを特徴とする請求項1又は2に記載の配線基板製造方法。
- 前記支持基板は、第1の主面に半導体チップ搭載部を形成するための凹部又は凸部を有することを特徴とする請求項1乃至3のいずれか一項に記載の配線基板製造方法。
- 前記第2の工程における前記配線層の形成と同時に、前記配線基板を補強する補強層を形成することを特徴とする請求項1乃至4のいずれか一項に記載の配線基板製造方法。
- 前記第1の工程では、
前記貫通電極の前記支持基板の第1の主面上に露出した部位に、前記第3の工程において前記ビルドアップ配線構造体と前記支持基板との剥離を促進させる剥離促進部材を配設することを特徴とする請求項1乃至5のいずれか一項に記載の配線基板製造方法。 - 請求項1乃至6のいずれか一項に記載の配線基板製造方法を用いて配線基板を製造する工程と、
製造された前記配線基板に半導体チップを実装する工程とを有することを特徴とする半導体装置製造方法。
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JP2008076823A JP4837696B2 (ja) | 2008-03-24 | 2008-03-24 | 配線基板の製造方法及び半導体装置の製造方法 |
US12/403,456 US8108993B2 (en) | 2008-03-24 | 2009-03-13 | Method of manufacturing wiring substrate, and method of manufacturing semiconductor device |
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JP2008076823A JP4837696B2 (ja) | 2008-03-24 | 2008-03-24 | 配線基板の製造方法及び半導体装置の製造方法 |
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JP2009231639A true JP2009231639A (ja) | 2009-10-08 |
JP2009231639A5 JP2009231639A5 (ja) | 2011-02-17 |
JP4837696B2 JP4837696B2 (ja) | 2011-12-14 |
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US8865525B2 (en) | 2010-11-22 | 2014-10-21 | Bridge Semiconductor Corporation | Method of making cavity substrate with built-in stiffener and cavity substrate manufactured thereby |
US8895380B2 (en) | 2010-11-22 | 2014-11-25 | Bridge Semiconductor Corporation | Method of making semiconductor assembly with built-in stiffener and semiconductor assembly manufactured thereby |
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Citations (5)
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JPH1025593A (ja) * | 1996-03-26 | 1998-01-27 | Commiss Energ Atom | 分離可能な支持体上に析出体を製造する方法および支持体上に製造された析出体 |
JP2003309215A (ja) * | 2002-02-15 | 2003-10-31 | Nec Electronics Corp | 半導体装置及びその製造方法 |
JP2005159268A (ja) * | 2003-10-29 | 2005-06-16 | Kyocera Corp | 配線基板及びその製造方法 |
JP2006269994A (ja) * | 2005-03-25 | 2006-10-05 | Fujitsu Ltd | 配線基板の製造方法 |
JP2008004862A (ja) * | 2006-06-26 | 2008-01-10 | Cmk Corp | プリント配線板及びその製造方法 |
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JP3635219B2 (ja) | 1999-03-11 | 2005-04-06 | 新光電気工業株式会社 | 半導体装置用多層基板及びその製造方法 |
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Publication number | Priority date | Publication date | Assignee | Title |
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JPH1025593A (ja) * | 1996-03-26 | 1998-01-27 | Commiss Energ Atom | 分離可能な支持体上に析出体を製造する方法および支持体上に製造された析出体 |
JP2003309215A (ja) * | 2002-02-15 | 2003-10-31 | Nec Electronics Corp | 半導体装置及びその製造方法 |
JP2005159268A (ja) * | 2003-10-29 | 2005-06-16 | Kyocera Corp | 配線基板及びその製造方法 |
JP2006269994A (ja) * | 2005-03-25 | 2006-10-05 | Fujitsu Ltd | 配線基板の製造方法 |
JP2008004862A (ja) * | 2006-06-26 | 2008-01-10 | Cmk Corp | プリント配線板及びその製造方法 |
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