JP2009212153A5 - - Google Patents

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Publication number
JP2009212153A5
JP2009212153A5 JP2008051114A JP2008051114A JP2009212153A5 JP 2009212153 A5 JP2009212153 A5 JP 2009212153A5 JP 2008051114 A JP2008051114 A JP 2008051114A JP 2008051114 A JP2008051114 A JP 2008051114A JP 2009212153 A5 JP2009212153 A5 JP 2009212153A5
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Japan
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substrate
mark
correction value
scope
marks
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JP2008051114A
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English (en)
Japanese (ja)
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JP2009212153A (ja
JP5096965B2 (ja
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Priority claimed from JP2008051114A external-priority patent/JP5096965B2/ja
Priority to JP2008051114A priority Critical patent/JP5096965B2/ja
Application filed filed Critical
Priority to US12/370,827 priority patent/US8390809B2/en
Priority to TW098105140A priority patent/TWI401730B/zh
Priority to KR1020090017252A priority patent/KR101093388B1/ko
Publication of JP2009212153A publication Critical patent/JP2009212153A/ja
Publication of JP2009212153A5 publication Critical patent/JP2009212153A5/ja
Publication of JP5096965B2 publication Critical patent/JP5096965B2/ja
Application granted granted Critical
Priority to US13/759,319 priority patent/US8885164B2/en
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JP2008051114A 2008-02-29 2008-02-29 位置合わせ方法、位置合わせ装置、露光方法及びデバイス製造方法 Active JP5096965B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2008051114A JP5096965B2 (ja) 2008-02-29 2008-02-29 位置合わせ方法、位置合わせ装置、露光方法及びデバイス製造方法
US12/370,827 US8390809B2 (en) 2008-02-29 2009-02-13 Exposure method, exposure apparatus, and method of manufacturing device
TW098105140A TWI401730B (zh) 2008-02-29 2009-02-18 曝光方法、曝光設備及製造裝置之方法
KR1020090017252A KR101093388B1 (ko) 2008-02-29 2009-02-27 노광 방법, 노광 장치 및 디바이스 제조 방법
US13/759,319 US8885164B2 (en) 2008-02-29 2013-02-05 Exposure method, exposure apparatus, and method of manufacturing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008051114A JP5096965B2 (ja) 2008-02-29 2008-02-29 位置合わせ方法、位置合わせ装置、露光方法及びデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2009212153A JP2009212153A (ja) 2009-09-17
JP2009212153A5 true JP2009212153A5 (enExample) 2011-04-14
JP5096965B2 JP5096965B2 (ja) 2012-12-12

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JP2008051114A Active JP5096965B2 (ja) 2008-02-29 2008-02-29 位置合わせ方法、位置合わせ装置、露光方法及びデバイス製造方法

Country Status (4)

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US (2) US8390809B2 (enExample)
JP (1) JP5096965B2 (enExample)
KR (1) KR101093388B1 (enExample)
TW (1) TWI401730B (enExample)

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JP6188382B2 (ja) 2013-04-03 2017-08-30 キヤノン株式会社 インプリント装置および物品の製造方法
JP6465565B2 (ja) * 2014-05-19 2019-02-06 キヤノン株式会社 露光装置、位置合わせ方法およびデバイス製造方法
JP6426984B2 (ja) * 2014-11-18 2018-11-21 キヤノン株式会社 リソグラフィ装置および物品製造方法
US9928474B1 (en) 2014-12-12 2018-03-27 Amazon Technologies, Inc. Mobile base utilizing transportation units for delivering items
JP6521637B2 (ja) * 2015-01-09 2019-05-29 キヤノン株式会社 計測装置、リソグラフィ装置及び物品の製造方法
US9745130B1 (en) 2015-03-13 2017-08-29 Amazon Technologies, Inc. Pickup locations with modifiable storage compartment configurations
JP6353487B2 (ja) * 2016-05-26 2018-07-04 株式会社サーマプレシジョン 投影露光装置及びその投影露光方法
US10216188B2 (en) 2016-07-25 2019-02-26 Amazon Technologies, Inc. Autonomous ground vehicles based at delivery locations
US10248120B1 (en) 2016-09-16 2019-04-02 Amazon Technologies, Inc. Navigable path networks for autonomous vehicles
US10245993B1 (en) 2016-09-29 2019-04-02 Amazon Technologies, Inc. Modular autonomous ground vehicles
US10303171B1 (en) 2016-09-29 2019-05-28 Amazon Technologies, Inc. Autonomous ground vehicles providing ordered items in pickup areas
US10241516B1 (en) 2016-09-29 2019-03-26 Amazon Technologies, Inc. Autonomous ground vehicles deployed from facilities
US10222798B1 (en) 2016-09-29 2019-03-05 Amazon Technologies, Inc. Autonomous ground vehicles congregating in meeting areas
US10233021B1 (en) 2016-11-02 2019-03-19 Amazon Technologies, Inc. Autonomous vehicles for delivery and safety
US10514690B1 (en) 2016-11-15 2019-12-24 Amazon Technologies, Inc. Cooperative autonomous aerial and ground vehicles for item delivery
US11263579B1 (en) 2016-12-05 2022-03-01 Amazon Technologies, Inc. Autonomous vehicle networks
US10308430B1 (en) 2016-12-23 2019-06-04 Amazon Technologies, Inc. Distribution and retrieval of inventory and materials using autonomous vehicles
US10310499B1 (en) 2016-12-23 2019-06-04 Amazon Technologies, Inc. Distributed production of items from locally sourced materials using autonomous vehicles
US10310500B1 (en) 2016-12-23 2019-06-04 Amazon Technologies, Inc. Automated access to secure facilities using autonomous vehicles
US10573106B1 (en) 2017-03-22 2020-02-25 Amazon Technologies, Inc. Personal intermediary access device
US10147249B1 (en) 2017-03-22 2018-12-04 Amazon Technologies, Inc. Personal intermediary communication device
US11232391B1 (en) 2017-08-31 2022-01-25 Amazon Technologies, Inc. Customized indoor and outdoor navigation maps and routes for autonomous vehicles
JP6688273B2 (ja) * 2017-11-13 2020-04-28 キヤノン株式会社 リソグラフィ装置、リソグラフィ方法、決定方法及び物品の製造方法
US11392130B1 (en) 2018-12-12 2022-07-19 Amazon Technologies, Inc. Selecting delivery modes and delivery areas using autonomous ground vehicles
US11474530B1 (en) 2019-08-15 2022-10-18 Amazon Technologies, Inc. Semantic navigation of autonomous ground vehicles
US10796562B1 (en) 2019-09-26 2020-10-06 Amazon Technologies, Inc. Autonomous home security devices
US11260970B2 (en) 2019-09-26 2022-03-01 Amazon Technologies, Inc. Autonomous home security devices
JP7523904B2 (ja) * 2019-12-27 2024-07-29 キヤノン株式会社 検査装置および半導体装置の製造方法
JP2023083824A (ja) * 2021-12-06 2023-06-16 キヤノン株式会社 検出装置、基板処理装置、及び物品の製造方法
US12203773B1 (en) 2022-06-29 2025-01-21 Amazon Technologies, Inc. Visual localization for autonomous ground vehicles
US12280889B1 (en) 2022-06-30 2025-04-22 Amazon Technologies, Inc. Indoor navigation and obstacle avoidance for unmanned aerial vehicles
US12461228B1 (en) 2022-08-29 2025-11-04 Amazon Technologies, Inc. Radar-inertial odometry for autonomous ground vehicles
US12205072B1 (en) 2022-09-13 2025-01-21 Amazon Technologies, Inc. Fulfilling orders for multiple items from multiple sources via multimodal channels
US12346128B1 (en) 2022-09-30 2025-07-01 Amazon Technologies, Inc. Indoor altitude determination for aerial vehicles
US12479606B1 (en) 2023-03-30 2025-11-25 Amazon Technologies, Inc. Indoor aerial vehicles with advanced safety features
US12202634B1 (en) 2023-03-30 2025-01-21 Amazon Technologies, Inc. Indoor aerial vehicles with advanced safety features
US12205483B1 (en) * 2023-06-26 2025-01-21 Amazon Technologies, Inc. Selecting paths for indoor obstacle avoidance by unmanned aerial vehicles
US12227318B1 (en) 2023-09-28 2025-02-18 Amazon Technologies, Inc. Aerial vehicles with proximity sensors for safety
JP2025169629A (ja) * 2024-05-01 2025-11-14 キヤノン株式会社 基板処理方法、基板処理装置、および物品製造方法

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JP2756620B2 (ja) * 1992-01-10 1998-05-25 キヤノン株式会社 半導体露光方法およびその装置
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JP3516546B2 (ja) * 1995-12-22 2004-04-05 株式会社ルネサステクノロジ 重ね合せ誤差の低減方法
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JP2001135559A (ja) * 1999-11-02 2001-05-18 Nikon Corp 位置計測方法及び露光方法
JP4454773B2 (ja) 2000-03-21 2010-04-21 キヤノン株式会社 位置合わせ方法及び位置合わせ装置
JP2003092246A (ja) 2001-09-17 2003-03-28 Canon Inc アライメントマーク及びアライメント装置とその方法、及び露光装置、デバイスの製造方法
JP2003092248A (ja) * 2001-09-17 2003-03-28 Canon Inc 位置検出装置、位置決め装置及びそれらの方法並びに露光装置及びデバイスの製造方法
JP4366031B2 (ja) * 2001-09-17 2009-11-18 キヤノン株式会社 位置検出装置及び方法並びに露光装置、デバイスの製造方法
JP4165871B2 (ja) * 2002-03-15 2008-10-15 キヤノン株式会社 位置検出方法、位置検出装置及び露光装置
JP2004158741A (ja) * 2002-11-08 2004-06-03 Canon Inc 位置合わせ装置
JP2005217333A (ja) 2004-02-02 2005-08-11 Canon Inc 半導体露光方法及び半導体露光装置

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