JP2009200450A5 - - Google Patents

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Publication number
JP2009200450A5
JP2009200450A5 JP2008046901A JP2008046901A JP2009200450A5 JP 2009200450 A5 JP2009200450 A5 JP 2009200450A5 JP 2008046901 A JP2008046901 A JP 2008046901A JP 2008046901 A JP2008046901 A JP 2008046901A JP 2009200450 A5 JP2009200450 A5 JP 2009200450A5
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JP
Japan
Prior art keywords
information
unit
processing
statistical processing
device information
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JP2008046901A
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English (en)
Japanese (ja)
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JP2009200450A (ja
JP5127507B2 (ja
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Application filed filed Critical
Priority to JP2008046901A priority Critical patent/JP5127507B2/ja
Priority claimed from JP2008046901A external-priority patent/JP5127507B2/ja
Priority to TW098101236A priority patent/TWI421706B/zh
Priority to US12/356,251 priority patent/US9057966B2/en
Priority to KR1020090004757A priority patent/KR101067209B1/ko
Publication of JP2009200450A publication Critical patent/JP2009200450A/ja
Publication of JP2009200450A5 publication Critical patent/JP2009200450A5/ja
Application granted granted Critical
Publication of JP5127507B2 publication Critical patent/JP5127507B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2008046901A 2007-02-27 2008-02-27 情報処理装置、情報処理方法、プログラムおよび露光システム Expired - Fee Related JP5127507B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2008046901A JP5127507B2 (ja) 2007-02-27 2008-02-27 情報処理装置、情報処理方法、プログラムおよび露光システム
TW098101236A TWI421706B (zh) 2008-01-21 2009-01-14 資訊處理裝置、資訊處理方法和記憶媒體
US12/356,251 US9057966B2 (en) 2008-01-21 2009-01-20 Information processing apparatus, information processing method, and memory medium
KR1020090004757A KR101067209B1 (ko) 2008-01-21 2009-01-20 정보 처리 장치, 정보 처리 방법 및 메모리 매체

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2007047881 2007-02-27
JP2007047881 2007-02-27
JP2008010997 2008-01-21
JP2008010997 2008-01-21
JP2008046901A JP5127507B2 (ja) 2007-02-27 2008-02-27 情報処理装置、情報処理方法、プログラムおよび露光システム

Publications (3)

Publication Number Publication Date
JP2009200450A JP2009200450A (ja) 2009-09-03
JP2009200450A5 true JP2009200450A5 (OSRAM) 2011-04-07
JP5127507B2 JP5127507B2 (ja) 2013-01-23

Family

ID=40877129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008046901A Expired - Fee Related JP5127507B2 (ja) 2007-02-27 2008-02-27 情報処理装置、情報処理方法、プログラムおよび露光システム

Country Status (4)

Country Link
US (1) US9057966B2 (OSRAM)
JP (1) JP5127507B2 (OSRAM)
KR (1) KR101067209B1 (OSRAM)
TW (1) TWI421706B (OSRAM)

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* Cited by examiner, † Cited by third party
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US8239152B2 (en) * 2007-02-27 2012-08-07 Canon Kabushiki Kaisha Information processing apparatus, information processing method, and computer program product
JP5127507B2 (ja) 2007-02-27 2013-01-23 キヤノン株式会社 情報処理装置、情報処理方法、プログラムおよび露光システム
JP5503564B2 (ja) * 2011-01-18 2014-05-28 東京エレクトロン株式会社 処理装置の異常判定システム及びその異常判定方法
US10295993B2 (en) * 2011-09-01 2019-05-21 Kla-Tencor Corporation Method and system for detecting and correcting problematic advanced process control parameters
CN107278279B (zh) 2015-02-23 2020-07-03 株式会社尼康 基板处理系统及基板处理方法、以及组件制造方法
CN107250717B (zh) 2015-02-23 2020-09-29 株式会社尼康 测量装置、光刻系统及曝光装置、以及组件制造方法
WO2016136690A1 (ja) * 2015-02-23 2016-09-01 株式会社ニコン 計測装置、リソグラフィシステム及び露光装置、並びに管理方法、重ね合わせ計測方法及びデバイス製造方法
US12309346B2 (en) * 2016-07-26 2025-05-20 Qcify Inc. Product target quality control system with intelligent sorting
JPWO2018146768A1 (ja) * 2017-02-09 2019-04-25 三菱電機株式会社 不良要因推定装置および不良要因推定方法
KR102781701B1 (ko) * 2019-07-10 2025-03-18 소니 세미컨덕터 솔루션즈 가부시키가이샤 이상 검출 장치와 이상 검출 방법 및 프로그램과 정보 처리 시스템
US20220011678A1 (en) * 2020-07-13 2022-01-13 Changxin Memory Technologies, Inc. Processing method and processing system for measurement data of semiconductor device, computer device and computer readable storage medium
CN114003597B (zh) * 2020-07-13 2025-04-04 长鑫存储技术有限公司 半导体器件测量数据的处理方法、处理系统及计算机设备

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JP5127507B2 (ja) 2007-02-27 2013-01-23 キヤノン株式会社 情報処理装置、情報処理方法、プログラムおよび露光システム
US8239152B2 (en) * 2007-02-27 2012-08-07 Canon Kabushiki Kaisha Information processing apparatus, information processing method, and computer program product

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