JP2009170666A5 - - Google Patents

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Publication number
JP2009170666A5
JP2009170666A5 JP2008007205A JP2008007205A JP2009170666A5 JP 2009170666 A5 JP2009170666 A5 JP 2009170666A5 JP 2008007205 A JP2008007205 A JP 2008007205A JP 2008007205 A JP2008007205 A JP 2008007205A JP 2009170666 A5 JP2009170666 A5 JP 2009170666A5
Authority
JP
Japan
Prior art keywords
light
slit
receiving units
optical system
light receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008007205A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009170666A (ja
JP5039578B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2008007205A priority Critical patent/JP5039578B2/ja
Priority claimed from JP2008007205A external-priority patent/JP5039578B2/ja
Priority to US12/353,541 priority patent/US8223313B2/en
Publication of JP2009170666A publication Critical patent/JP2009170666A/ja
Publication of JP2009170666A5 publication Critical patent/JP2009170666A5/ja
Application granted granted Critical
Publication of JP5039578B2 publication Critical patent/JP5039578B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2008007205A 2008-01-16 2008-01-16 計測装置及び光強度分布計測方法、露光装置 Expired - Fee Related JP5039578B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008007205A JP5039578B2 (ja) 2008-01-16 2008-01-16 計測装置及び光強度分布計測方法、露光装置
US12/353,541 US8223313B2 (en) 2008-01-16 2009-01-14 Light intensity distribution measurement apparatus and measurement method, and exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008007205A JP5039578B2 (ja) 2008-01-16 2008-01-16 計測装置及び光強度分布計測方法、露光装置

Publications (3)

Publication Number Publication Date
JP2009170666A JP2009170666A (ja) 2009-07-30
JP2009170666A5 true JP2009170666A5 (enExample) 2011-02-03
JP5039578B2 JP5039578B2 (ja) 2012-10-03

Family

ID=40850355

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008007205A Expired - Fee Related JP5039578B2 (ja) 2008-01-16 2008-01-16 計測装置及び光強度分布計測方法、露光装置

Country Status (2)

Country Link
US (1) US8223313B2 (enExample)
JP (1) JP5039578B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8199333B2 (en) 2005-05-27 2012-06-12 Carl Zeiss Smt Gmbh Optical scattering disk, use thereof, and wavefront measuring apparatus
JP5111225B2 (ja) * 2008-05-01 2013-01-09 キヤノン株式会社 計測装置、計測方法、露光装置及びデバイス製造方法
JP6321386B2 (ja) * 2014-01-29 2018-05-09 株式会社オーク製作所 露光装置および露光方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4136067B2 (ja) * 1997-05-02 2008-08-20 キヤノン株式会社 検出装置及びそれを用いた露光装置
JP2000097666A (ja) * 1998-09-22 2000-04-07 Nikon Corp 面形状計測用干渉計、波面収差測定機、前記干渉計及び前記波面収差測定機を用いた投影光学系の製造方法、及び前記干渉計の校正方法
JP2003197510A (ja) * 2001-12-27 2003-07-11 Nikon Corp 収差測定装置、収差測定方法、光学系、および、露光装置
JP2004241744A (ja) * 2003-02-10 2004-08-26 Nikon Corp 面位置検出装置、露光装置及び露光方法
JP2006080444A (ja) * 2004-09-13 2006-03-23 Canon Inc 測定装置、テストレチクル、露光装置及びデバイス製造方法
JP2006339448A (ja) * 2005-06-02 2006-12-14 Canon Inc 受光ユニットを有する露光装置
JP2007066926A (ja) * 2005-08-29 2007-03-15 Canon Inc 計測方法及び装置、露光装置、並びに、デバイス製造方法
JP4798353B2 (ja) * 2005-12-27 2011-10-19 株式会社ニコン 光学特性計測方法及びパターン誤差計測方法
JP2007329384A (ja) * 2006-06-09 2007-12-20 Nikon Corp 面位置検出装置、露光装置及びデバイスの製造方法
JP2008021830A (ja) * 2006-07-13 2008-01-31 Nikon Corp 計測方法及び装置、並びに露光方法及び装置
JP2008294019A (ja) * 2007-05-22 2008-12-04 Canon Inc 空中像計測方法および装置
JP4968335B2 (ja) * 2007-06-11 2012-07-04 株式会社ニコン 計測部材、センサ、計測方法、露光装置、露光方法、及びデバイス製造方法

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