JP2009155111A5 - - Google Patents
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- Publication number
- JP2009155111A5 JP2009155111A5 JP2007328744A JP2007328744A JP2009155111A5 JP 2009155111 A5 JP2009155111 A5 JP 2009155111A5 JP 2007328744 A JP2007328744 A JP 2007328744A JP 2007328744 A JP2007328744 A JP 2007328744A JP 2009155111 A5 JP2009155111 A5 JP 2009155111A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- nanoparticles
- recess
- catalyst
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 37
- 238000000034 method Methods 0.000 claims 36
- 239000002105 nanoparticle Substances 0.000 claims 26
- 239000003054 catalyst Substances 0.000 claims 16
- 239000000463 material Substances 0.000 claims 15
- 239000002086 nanomaterial Substances 0.000 claims 9
- 239000002904 solvent Substances 0.000 claims 6
- 238000000151 deposition Methods 0.000 claims 5
- 238000005530 etching Methods 0.000 claims 2
- 230000008020 evaporation Effects 0.000 claims 2
- 238000001704 evaporation Methods 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 2
- 239000012535 impurity Substances 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 238000004140 cleaning Methods 0.000 claims 1
- 238000001459 lithography Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US87623406P | 2006-12-21 | 2006-12-21 | |
| US60/876,234 | 2006-12-21 | ||
| EP07006228.6 | 2007-03-27 | ||
| EP07006228A EP1946833A1 (en) | 2006-12-21 | 2007-03-27 | Catalyst nanoparticles for obtaining carbon nanotubes |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009155111A JP2009155111A (ja) | 2009-07-16 |
| JP2009155111A5 true JP2009155111A5 (enExample) | 2011-02-10 |
| JP5329800B2 JP5329800B2 (ja) | 2013-10-30 |
Family
ID=38236488
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007328744A Expired - Fee Related JP5329800B2 (ja) | 2006-12-21 | 2007-12-20 | 触媒ナノ粒子の制御および選択的な形成 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20090131245A1 (enExample) |
| EP (1) | EP1946833A1 (enExample) |
| JP (1) | JP5329800B2 (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7736979B2 (en) * | 2007-06-20 | 2010-06-15 | New Jersey Institute Of Technology | Method of forming nanotube vertical field effect transistor |
| US8668833B2 (en) * | 2008-05-21 | 2014-03-11 | Globalfoundries Singapore Pte. Ltd. | Method of forming a nanostructure |
| US20100206367A1 (en) * | 2009-02-18 | 2010-08-19 | Korea Institute Of Industrial Technology | Method for fabricating silicon nano wire, solar cell including silicon nano wire and method for fabricating solar cell |
| FR2943850B1 (fr) | 2009-03-27 | 2011-06-10 | Commissariat Energie Atomique | Procede de realisation d'interconnexions electriques a nanotubes de carbone |
| JP2011178631A (ja) * | 2010-03-02 | 2011-09-15 | Nagoya Univ | カーボンナノチューブの製造方法，カーボンナノチューブ製造用の単結晶基板，およびカーボンナノチューブ |
| JP5660804B2 (ja) | 2010-04-30 | 2015-01-28 | 東京エレクトロン株式会社 | カーボンナノチューブの形成方法及びカーボンナノチューブ成膜装置 |
| KR101414096B1 (ko) * | 2011-11-28 | 2014-07-02 | 한국과학기술연구원 | 유연성 소자용 부재 및 그 제조방법 |
| US9913603B2 (en) * | 2014-02-12 | 2018-03-13 | California Institute Of Technology | Reflowed gold nanostructures for surface enhanced raman spectroscopy |
| WO2016036410A1 (en) | 2014-09-05 | 2016-03-10 | California Institute Of Technology | Multiplexed surface enhanced raman sensors for early disease detection and in-situ bacterial monitoring |
| US9512000B2 (en) | 2014-12-09 | 2016-12-06 | California Institute Of Technology | Fabrication and self-aligned local functionalization of nanocups and various plasmonic nanostructures on flexible substrates for implantable and sensing applications |
| KR102251999B1 (ko) | 2015-01-09 | 2021-05-17 | 삼성전자주식회사 | 펠리클 및 이의 제조 방법 |
| KR101798283B1 (ko) | 2015-06-08 | 2017-11-16 | 단국대학교 산학협력단 | 탄소 나노튜브의 수직 성장을 위한 촉매의 증착 방법 |
| US10501851B2 (en) * | 2016-05-12 | 2019-12-10 | Fei Company | Attachment of nano-objects to beam-deposited structures |
| US9859157B1 (en) | 2016-07-14 | 2018-01-02 | International Business Machines Corporation | Method for forming improved liner layer and semiconductor device including the same |
| JP2022014145A (ja) * | 2020-07-06 | 2022-01-19 | 東レエンジニアリング株式会社 | ナノワイヤ付きフィルム及びナノワイヤの製造方法 |
| NO346078B1 (en) * | 2020-10-15 | 2022-02-07 | Univ Of South Eastern Norway | Direct growth cross-linked carbon nanotubes on microstructured metal substrate for supercapacitor application |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7115305B2 (en) * | 2002-02-01 | 2006-10-03 | California Institute Of Technology | Method of producing regular arrays of nano-scale objects using nano-structured block-copolymeric materials |
| TW568883B (en) * | 2002-12-27 | 2004-01-01 | Univ Nat Chiao Tung | Method to control the magnetic alloy-encapsulated carbon-base nanostructures |
| JP3869394B2 (ja) * | 2003-06-30 | 2007-01-17 | 富士通株式会社 | 微粒子の堆積方法及びカーボンナノチューブの形成方法 |
| US7208094B2 (en) * | 2003-12-17 | 2007-04-24 | Hewlett-Packard Development Company, L.P. | Methods of bridging lateral nanowires and device using same |
| US20070084346A1 (en) * | 2005-09-30 | 2007-04-19 | Paul Boyle | Nanostructures containing carbon nanotubes and methods of their synthesis and use |
| WO2007074506A1 (ja) * | 2005-12-26 | 2007-07-05 | Fujitsu Limited | カーボンナノチューブの成長方法及び成長システム |
-
2007
- 2007-03-27 EP EP07006228A patent/EP1946833A1/en not_active Withdrawn
- 2007-11-06 US US11/935,998 patent/US20090131245A1/en not_active Abandoned
- 2007-12-20 JP JP2007328744A patent/JP5329800B2/ja not_active Expired - Fee Related
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