JP2009144250A5 - - Google Patents
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- JP2009144250A5 JP2009144250A5 JP2009016715A JP2009016715A JP2009144250A5 JP 2009144250 A5 JP2009144250 A5 JP 2009144250A5 JP 2009016715 A JP2009016715 A JP 2009016715A JP 2009016715 A JP2009016715 A JP 2009016715A JP 2009144250 A5 JP2009144250 A5 JP 2009144250A5
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- JP
- Japan
- Prior art keywords
- processing
- fluid
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- processing surface
- ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000012545 processing Methods 0.000 claims description 858
- 239000012530 fluid Substances 0.000 claims description 410
- 230000007246 mechanism Effects 0.000 claims description 126
- 239000010419 fine particle Substances 0.000 claims description 105
- 238000006243 chemical reaction Methods 0.000 claims description 94
- 239000002245 particle Substances 0.000 claims description 88
- 229910052751 metal Inorganic materials 0.000 claims description 67
- 239000002184 metal Substances 0.000 claims description 66
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 50
- 229910052709 silver Inorganic materials 0.000 claims description 47
- 239000004332 silver Substances 0.000 claims description 47
- 238000009826 distribution Methods 0.000 claims description 46
- 239000010409 thin film Substances 0.000 claims description 46
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 44
- 238000013459 approach Methods 0.000 claims description 40
- 238000004519 manufacturing process Methods 0.000 claims description 27
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 25
- 229910052802 copper Inorganic materials 0.000 claims description 25
- 239000010949 copper Substances 0.000 claims description 25
- 229910052697 platinum Inorganic materials 0.000 claims description 20
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 17
- 239000002270 dispersing agent Substances 0.000 claims description 15
- 239000002923 metal particle Substances 0.000 claims description 14
- 238000003825 pressing Methods 0.000 claims description 13
- 229910001111 Fine metal Inorganic materials 0.000 claims description 11
- 238000002156 mixing Methods 0.000 claims description 10
- 229910052763 palladium Inorganic materials 0.000 claims description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 5
- 229910052737 gold Inorganic materials 0.000 claims description 5
- 239000010931 gold Substances 0.000 claims description 5
- 239000007791 liquid phase Substances 0.000 claims description 5
- 150000002500 ions Chemical class 0.000 claims description 4
- 150000002739 metals Chemical class 0.000 claims description 4
- 229910000510 noble metal Inorganic materials 0.000 claims description 4
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 3
- 229910052741 iridium Inorganic materials 0.000 claims description 3
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims description 3
- 239000011859 microparticle Substances 0.000 claims description 3
- 229910052762 osmium Inorganic materials 0.000 claims description 3
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 claims description 3
- 229910052703 rhodium Inorganic materials 0.000 claims description 3
- 239000010948 rhodium Substances 0.000 claims description 3
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims description 3
- 229910052707 ruthenium Inorganic materials 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims description 2
- 239000000243 solution Substances 0.000 description 68
- 238000000034 method Methods 0.000 description 49
- 238000000926 separation method Methods 0.000 description 45
- 239000007864 aqueous solution Substances 0.000 description 39
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 36
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 31
- 230000002093 peripheral effect Effects 0.000 description 30
- 239000000047 product Substances 0.000 description 24
- 239000000084 colloidal system Substances 0.000 description 23
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 22
- 229910001252 Pd alloy Inorganic materials 0.000 description 19
- 229910052759 nickel Inorganic materials 0.000 description 18
- 230000008569 process Effects 0.000 description 18
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 description 18
- 239000012535 impurity Substances 0.000 description 16
- 239000000463 material Substances 0.000 description 16
- 229920000642 polymer Polymers 0.000 description 15
- 239000000843 powder Substances 0.000 description 15
- 150000002736 metal compounds Chemical class 0.000 description 13
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 12
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 12
- 230000006837 decompression Effects 0.000 description 12
- 239000010408 film Substances 0.000 description 12
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 11
- 239000007795 chemical reaction product Substances 0.000 description 11
- 238000001556 precipitation Methods 0.000 description 10
- 238000011144 upstream manufacturing Methods 0.000 description 10
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 9
- 239000003638 chemical reducing agent Substances 0.000 description 9
- 238000001816 cooling Methods 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 9
- 239000007788 liquid Substances 0.000 description 9
- 229910001961 silver nitrate Inorganic materials 0.000 description 9
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 8
- 235000011114 ammonium hydroxide Nutrition 0.000 description 8
- 230000007423 decrease Effects 0.000 description 8
- 238000006073 displacement reaction Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 8
- 239000012279 sodium borohydride Substances 0.000 description 8
- 229910000033 sodium borohydride Inorganic materials 0.000 description 8
- 238000003756 stirring Methods 0.000 description 8
- -1 tetrachlorogold (III) Chemical compound 0.000 description 8
- UEEJHVSXFDXPFK-UHFFFAOYSA-N N-dimethylaminoethanol Chemical compound CN(C)CCO UEEJHVSXFDXPFK-UHFFFAOYSA-N 0.000 description 7
- 229960002887 deanol Drugs 0.000 description 7
- 238000007667 floating Methods 0.000 description 7
- 238000006722 reduction reaction Methods 0.000 description 7
- 238000005406 washing Methods 0.000 description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 6
- 229910000881 Cu alloy Inorganic materials 0.000 description 6
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- NEIHULKJZQTQKJ-UHFFFAOYSA-N [Cu].[Ag] Chemical compound [Cu].[Ag] NEIHULKJZQTQKJ-UHFFFAOYSA-N 0.000 description 6
- 238000010521 absorption reaction Methods 0.000 description 6
- 239000002253 acid Substances 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 230000003247 decreasing effect Effects 0.000 description 6
- 239000002904 solvent Substances 0.000 description 6
- 150000001412 amines Chemical class 0.000 description 5
- 238000002425 crystallisation Methods 0.000 description 5
- 230000008025 crystallization Effects 0.000 description 5
- 238000000502 dialysis Methods 0.000 description 5
- 230000005484 gravity Effects 0.000 description 5
- 238000009775 high-speed stirring Methods 0.000 description 5
- 239000000376 reactant Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- XTVVROIMIGLXTD-UHFFFAOYSA-N copper(II) nitrate Chemical compound [Cu+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O XTVVROIMIGLXTD-UHFFFAOYSA-N 0.000 description 4
- 239000006185 dispersion Substances 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000003960 organic solvent Substances 0.000 description 4
- 229920000036 polyvinylpyrrolidone Polymers 0.000 description 4
- 239000001267 polyvinylpyrrolidone Substances 0.000 description 4
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 description 4
- 230000003746 surface roughness Effects 0.000 description 4
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- RWRDLPDLKQPQOW-UHFFFAOYSA-N Pyrrolidine Chemical compound C1CCNC1 RWRDLPDLKQPQOW-UHFFFAOYSA-N 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 238000013329 compounding Methods 0.000 description 3
- 229910001431 copper ion Inorganic materials 0.000 description 3
- 150000004687 hexahydrates Chemical class 0.000 description 3
- 230000000704 physical effect Effects 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- RXYPXQSKLGGKOL-UHFFFAOYSA-N 1,4-dimethylpiperazine Chemical compound CN1CCN(C)CC1 RXYPXQSKLGGKOL-UHFFFAOYSA-N 0.000 description 2
- PAMIQIKDUOTOBW-UHFFFAOYSA-N 1-methylpiperidine Chemical compound CN1CCCCC1 PAMIQIKDUOTOBW-UHFFFAOYSA-N 0.000 description 2
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 2
- PAYRUJLWNCNPSJ-UHFFFAOYSA-N Aniline Chemical compound NC1=CC=CC=C1 PAYRUJLWNCNPSJ-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- YNAVUWVOSKDBBP-UHFFFAOYSA-N Morpholine Chemical compound C1COCCN1 YNAVUWVOSKDBBP-UHFFFAOYSA-N 0.000 description 2
- JLTDJTHDQAWBAV-UHFFFAOYSA-N N,N-dimethylaniline Chemical compound CN(C)C1=CC=CC=C1 JLTDJTHDQAWBAV-UHFFFAOYSA-N 0.000 description 2
- AFBPFSWMIHJQDM-UHFFFAOYSA-N N-methylaniline Chemical compound CNC1=CC=CC=C1 AFBPFSWMIHJQDM-UHFFFAOYSA-N 0.000 description 2
- GLUUGHFHXGJENI-UHFFFAOYSA-N Piperazine Chemical compound C1CNCCN1 GLUUGHFHXGJENI-UHFFFAOYSA-N 0.000 description 2
- NQRYJNQNLNOLGT-UHFFFAOYSA-N Piperidine Chemical compound C1CCNCC1 NQRYJNQNLNOLGT-UHFFFAOYSA-N 0.000 description 2
- 229920002873 Polyethylenimine Polymers 0.000 description 2
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 229940008309 acetone / ethanol Drugs 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- WGQKYBSKWIADBV-UHFFFAOYSA-N benzylamine Chemical compound NCC1=CC=CC=C1 WGQKYBSKWIADBV-UHFFFAOYSA-N 0.000 description 2
- HQABUPZFAYXKJW-UHFFFAOYSA-N butan-1-amine Chemical compound CCCCN HQABUPZFAYXKJW-UHFFFAOYSA-N 0.000 description 2
- 238000005119 centrifugation Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- OPQARKPSCNTWTJ-UHFFFAOYSA-L copper(ii) acetate Chemical compound [Cu+2].CC([O-])=O.CC([O-])=O OPQARKPSCNTWTJ-UHFFFAOYSA-L 0.000 description 2
- 238000007872 degassing Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- RWSXRVCMGQZWBV-WDSKDSINSA-N glutathione Chemical compound OC(=O)[C@@H](N)CCC(=O)N[C@@H](CS)C(=O)NCC(O)=O RWSXRVCMGQZWBV-WDSKDSINSA-N 0.000 description 2
- 230000002706 hydrostatic effect Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000002082 metal nanoparticle Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- RRIWRJBSCGCBID-UHFFFAOYSA-L nickel sulfate hexahydrate Chemical compound O.O.O.O.O.O.[Ni+2].[O-]S([O-])(=O)=O RRIWRJBSCGCBID-UHFFFAOYSA-L 0.000 description 2
- 229940116202 nickel sulfate hexahydrate Drugs 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- YJVFFLUZDVXJQI-UHFFFAOYSA-L palladium(ii) acetate Chemical compound [Pd+2].CC([O-])=O.CC([O-])=O YJVFFLUZDVXJQI-UHFFFAOYSA-L 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
- 239000011591 potassium Substances 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- WGYKZJWCGVVSQN-UHFFFAOYSA-N propylamine Chemical compound CCCN WGYKZJWCGVVSQN-UHFFFAOYSA-N 0.000 description 2
- 230000036632 reaction speed Effects 0.000 description 2
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- 230000001105 regulatory effect Effects 0.000 description 2
- SONJTKJMTWTJCT-UHFFFAOYSA-K rhodium(iii) chloride Chemical compound [Cl-].[Cl-].[Cl-].[Rh+3] SONJTKJMTWTJCT-UHFFFAOYSA-K 0.000 description 2
- 238000013341 scale-up Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000001954 sterilising effect Effects 0.000 description 2
- 238000004659 sterilization and disinfection Methods 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- FBEIPJNQGITEBL-UHFFFAOYSA-J tetrachloroplatinum Chemical compound Cl[Pt](Cl)(Cl)Cl FBEIPJNQGITEBL-UHFFFAOYSA-J 0.000 description 2
- XFNJVJPLKCPIBV-UHFFFAOYSA-N trimethylenediamine Chemical compound NCCCN XFNJVJPLKCPIBV-UHFFFAOYSA-N 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 description 1
- SBSMXBFGGRDASE-UHFFFAOYSA-N 1-[2-[(dimethylamino)methyl]phenyl]-n,n-dimethylmethanamine Chemical compound CN(C)CC1=CC=CC=C1CN(C)C SBSMXBFGGRDASE-UHFFFAOYSA-N 0.000 description 1
- BMVXCPBXGZKUPN-UHFFFAOYSA-N 1-hexanamine Chemical compound CCCCCCN BMVXCPBXGZKUPN-UHFFFAOYSA-N 0.000 description 1
- AVFZOVWCLRSYKC-UHFFFAOYSA-N 1-methylpyrrolidine Chemical compound CN1CCCC1 AVFZOVWCLRSYKC-UHFFFAOYSA-N 0.000 description 1
- OWEGMIWEEQEYGQ-UHFFFAOYSA-N 100676-05-9 Natural products OC1C(O)C(O)C(CO)OC1OCC1C(O)C(O)C(O)C(OC2C(OC(O)C(O)C2O)CO)O1 OWEGMIWEEQEYGQ-UHFFFAOYSA-N 0.000 description 1
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- WGTASENVNYJZBK-UHFFFAOYSA-N 3,4,5-trimethoxyamphetamine Chemical compound COC1=CC(CC(C)N)=CC(OC)=C1OC WGTASENVNYJZBK-UHFFFAOYSA-N 0.000 description 1
- BLFRQYKZFKYQLO-UHFFFAOYSA-N 4-aminobutan-1-ol Chemical compound NCCCCO BLFRQYKZFKYQLO-UHFFFAOYSA-N 0.000 description 1
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- KWSLGOVYXMQPPX-UHFFFAOYSA-N 5-[3-(trifluoromethyl)phenyl]-2h-tetrazole Chemical compound FC(F)(F)C1=CC=CC(C2=NNN=N2)=C1 KWSLGOVYXMQPPX-UHFFFAOYSA-N 0.000 description 1
- RBWNDBNSJFCLBZ-UHFFFAOYSA-N 7-methyl-5,6,7,8-tetrahydro-3h-[1]benzothiolo[2,3-d]pyrimidine-4-thione Chemical compound N1=CNC(=S)C2=C1SC1=C2CCC(C)C1 RBWNDBNSJFCLBZ-UHFFFAOYSA-N 0.000 description 1
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- FBPFZTCFMRRESA-JGWLITMVSA-N D-glucitol Chemical compound OC[C@H](O)[C@@H](O)[C@H](O)[C@H](O)CO FBPFZTCFMRRESA-JGWLITMVSA-N 0.000 description 1
- WQZGKKKJIJFFOK-QTVWNMPRSA-N D-mannopyranose Chemical compound OC[C@H]1OC(O)[C@@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-QTVWNMPRSA-N 0.000 description 1
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 description 1
- IMROMDMJAWUWLK-UHFFFAOYSA-N Ethenol Chemical compound OC=C IMROMDMJAWUWLK-UHFFFAOYSA-N 0.000 description 1
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- 229930091371 Fructose Natural products 0.000 description 1
- 239000005715 Fructose Substances 0.000 description 1
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- WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 description 1
- 108010024636 Glutathione Proteins 0.000 description 1
- 229920005692 JONCRYL® Polymers 0.000 description 1
- GUBGYTABKSRVRQ-PICCSMPSSA-N Maltose Natural products O[C@@H]1[C@@H](O)[C@H](O)[C@@H](CO)O[C@@H]1O[C@@H]1[C@@H](CO)OC(O)[C@H](O)[C@H]1O GUBGYTABKSRVRQ-PICCSMPSSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- KWYHDKDOAIKMQN-UHFFFAOYSA-N N,N,N',N'-tetramethylethylenediamine Chemical compound CN(C)CCN(C)C KWYHDKDOAIKMQN-UHFFFAOYSA-N 0.000 description 1
- AHVYPIQETPWLSZ-UHFFFAOYSA-N N-methyl-pyrrolidine Natural products CN1CC=CC1 AHVYPIQETPWLSZ-UHFFFAOYSA-N 0.000 description 1
- OPKOKAMJFNKNAS-UHFFFAOYSA-N N-methylethanolamine Chemical compound CNCCO OPKOKAMJFNKNAS-UHFFFAOYSA-N 0.000 description 1
- OQMBBFQZGJFLBU-UHFFFAOYSA-N Oxyfluorfen Chemical compound C1=C([N+]([O-])=O)C(OCC)=CC(OC=2C(=CC(=CC=2)C(F)(F)F)Cl)=C1 OQMBBFQZGJFLBU-UHFFFAOYSA-N 0.000 description 1
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- WUGQZFFCHPXWKQ-UHFFFAOYSA-N Propanolamine Chemical compound NCCCO WUGQZFFCHPXWKQ-UHFFFAOYSA-N 0.000 description 1
- MUPFEKGTMRGPLJ-RMMQSMQOSA-N Raffinose Natural products O(C[C@H]1[C@@H](O)[C@H](O)[C@@H](O)[C@@H](O[C@@]2(CO)[C@H](O)[C@@H](O)[C@@H](CO)O2)O1)[C@@H]1[C@H](O)[C@@H](O)[C@@H](O)[C@@H](CO)O1 MUPFEKGTMRGPLJ-RMMQSMQOSA-N 0.000 description 1
- 229910021604 Rhodium(III) chloride Inorganic materials 0.000 description 1
- 229920002125 Sokalan® Polymers 0.000 description 1
- UQZIYBXSHAGNOE-USOSMYMVSA-N Stachyose Natural products O(C[C@H]1[C@@H](O)[C@H](O)[C@H](O)[C@@H](O[C@@]2(CO)[C@H](O)[C@@H](O)[C@@H](CO)O2)O1)[C@@H]1[C@H](O)[C@@H](O)[C@@H](O)[C@H](CO[C@@H]2[C@@H](O)[C@@H](O)[C@@H](O)[C@H](CO)O2)O1 UQZIYBXSHAGNOE-USOSMYMVSA-N 0.000 description 1
- CZMRCDWAGMRECN-UGDNZRGBSA-N Sucrose Chemical compound O[C@H]1[C@H](O)[C@@H](CO)O[C@@]1(CO)O[C@@H]1[C@H](O)[C@@H](O)[C@H](O)[C@@H](CO)O1 CZMRCDWAGMRECN-UGDNZRGBSA-N 0.000 description 1
- 229930006000 Sucrose Natural products 0.000 description 1
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| MX2012001189A (es) * | 2009-07-29 | 2012-03-07 | Kogakuin University | Coloide de metal aleado. |
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| CN102781569B (zh) * | 2010-04-08 | 2016-02-10 | M技术株式会社 | 流体处理装置及处理方法 |
| KR101892948B1 (ko) | 2010-11-24 | 2018-08-29 | 엠. 테크닉 가부시키가이샤 | 고용체 안료 나노 입자 및 고용비가 제어된 고용체 안료 나노 입자의 제조 방법 |
| KR101876767B1 (ko) * | 2011-03-14 | 2018-07-10 | 엠. 테크닉 가부시키가이샤 | 금속 미립자의 제조 방법 |
| JP5502793B2 (ja) * | 2011-03-31 | 2014-05-28 | トヨタ自動車株式会社 | 高耐久性燃料電池触媒とその製造方法 |
| WO2012165000A1 (ja) * | 2011-05-28 | 2012-12-06 | エム・テクニック株式会社 | 強制薄膜式流体処理装置を用いた処理物の付着防止方法 |
| US9492763B2 (en) * | 2011-07-13 | 2016-11-15 | M. Technique Co., Ltd. | Method for producing microparticles having controlled crystallite diameter |
| WO2013073068A1 (ja) | 2011-11-16 | 2013-05-23 | エム・テクニック株式会社 | 銀銅合金粒子の製造方法 |
| CN103945959B (zh) * | 2011-11-16 | 2016-10-12 | M技术株式会社 | 固体金属合金 |
| CN102528070B (zh) * | 2012-01-09 | 2014-01-01 | 苏州银瑞光电材料科技有限公司 | 利用高速射流生产纳米银粉的方法和装置 |
| DE102013001012B4 (de) | 2012-02-08 | 2018-09-13 | Technische Universität Ilmenau | Verfahren zur Herstellung von Metallnanopartikel-haltigen Polymer-Sensorpartikeln und daraus erzeugbare Sensorpartikel |
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| EP2821133B1 (en) * | 2012-02-29 | 2024-03-20 | M. Technique Co., Ltd. | Microparticle manufacturing method |
| WO2013133792A1 (en) * | 2012-03-05 | 2013-09-12 | Empire Technology Development Llc | Flexible circuits |
| EP2826575B1 (en) * | 2012-03-16 | 2024-08-07 | M Technique Co., Ltd. | Production method of solid gold-nickel alloy nanoparticles |
| EP2845643A4 (en) * | 2012-05-01 | 2016-04-27 | M Tech Co Ltd | PROCESS FOR MANUFACTURING FINE GRAINS |
| JP2014023997A (ja) * | 2012-07-26 | 2014-02-06 | M Technique Co Ltd | 微粒子の製造方法 |
| WO2014041706A1 (ja) | 2012-09-12 | 2014-03-20 | エム・テクニック株式会社 | ニッケル微粒子の製造方法 |
| EP2896476B1 (en) * | 2012-09-12 | 2019-05-01 | M. Technique Co., Ltd. | Method for manufacturing metal microparticles |
| WO2014041705A1 (ja) | 2012-09-12 | 2014-03-20 | エム・テクニック株式会社 | 金属微粒子の製造方法 |
| EP2919238B1 (en) * | 2012-11-08 | 2019-09-11 | M Technique Co., Ltd. | Fine metal particles provided with projections |
| CN105764635B (zh) | 2013-09-24 | 2019-11-12 | 贺利氏德国有限两合公司 | 在低温下制造光泽层压结构的方法 |
| US20170129008A1 (en) * | 2015-05-15 | 2017-05-11 | M. Technique Co., Ltd. | Method for modifying nickel microparticles and method for producing nickel microparticles |
| KR102424543B1 (ko) | 2017-01-31 | 2022-07-25 | 엠. 테크닉 가부시키가이샤 | 고결정 은 미립자의 제조 방법 |
| WO2018181568A1 (ja) * | 2017-03-28 | 2018-10-04 | 宇部興産株式会社 | 金属複合粒子及びその製造方法、金属複合粒子担持体及びその製造方法、並びに粒子組成物 |
| JP6442715B2 (ja) * | 2017-04-28 | 2018-12-26 | エム・テクニック株式会社 | 微粒子の製造方法 |
| KR102260904B1 (ko) * | 2019-09-16 | 2021-06-07 | 성균관대학교산학협력단 | 금속 나노 입자의 합성 방법 |
| US20230001482A1 (en) | 2019-11-28 | 2023-01-05 | M. Technique Co., Ltd. | Method of producing silver fine particles |
| CN111229321A (zh) * | 2020-01-16 | 2020-06-05 | 吉林大学 | 一种具有强催化功能的谷胱甘肽保护的铂金合金纳米簇、制备方法及其应用 |
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| KR102294406B1 (ko) * | 2020-12-08 | 2021-08-27 | (주)엔오엔그리드 | 금속 나노분말 제조장치 |
| WO2026079991A1 (ru) * | 2024-10-09 | 2026-04-16 | Виктор Андреевич КОПЫЛОВ | Способ получения коллоидных растворов металлов |
Family Cites Families (25)
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| GB2377661B (en) * | 2001-07-20 | 2005-04-20 | Univ Newcastle | Methods of manufacturing particles |
| DE60210794T2 (de) * | 2001-10-17 | 2007-05-10 | E.I. Dupont De Nemours And Co., Wilmington | Rotor-stator apparat und verfahren zur bildung von partikeln |
| CN1180911C (zh) * | 2002-06-24 | 2004-12-22 | 中国科学院大连化学物理研究所 | 一种纳米贵金属的制备方法 |
| JP2004033901A (ja) | 2002-07-03 | 2004-02-05 | Nippon Paint Co Ltd | 金属コロイド溶液の製造方法 |
| CN1483515B (zh) | 2002-07-16 | 2010-07-28 | M技术株式会社 | 流动体的处理装置、流动体的处理方法及带有微细化装置的脱气机 |
| JP3955254B2 (ja) | 2002-11-25 | 2007-08-08 | エム・テクニック株式会社 | 微細化装置付脱気機及び微細化による脱気方法 |
| JP4038083B2 (ja) | 2002-07-16 | 2008-01-23 | エム・テクニック株式会社 | 分散乳化装置及び分散乳化方法 |
| JP3864131B2 (ja) | 2002-11-05 | 2006-12-27 | エム・テクニック株式会社 | 磨砕機 |
| JP2004211156A (ja) | 2002-12-27 | 2004-07-29 | Tamura Kaken Co Ltd | 金属微粒子の製造方法、金属微粒子含有物及び導電性塗布組成物 |
| US7125527B2 (en) * | 2003-09-05 | 2006-10-24 | Kinetichem, Inc. | Methods of operating surface reactors and reactors employing such methods |
| JP2005081501A (ja) * | 2003-09-09 | 2005-03-31 | Ulvac Japan Ltd | 金属ナノ粒子及びその製造方法、金属ナノ粒子分散液及びその製造方法、並びに金属細線及び金属膜及びその形成方法 |
| JP2005131492A (ja) * | 2003-10-29 | 2005-05-26 | Fuji Photo Film Co Ltd | 気液分離方法及び装置 |
| JP4131225B2 (ja) | 2003-10-29 | 2008-08-13 | 富士フイルム株式会社 | 金属微粒子の連続製造方法及び装置 |
| JP4679888B2 (ja) * | 2004-11-26 | 2011-05-11 | 日揮触媒化成株式会社 | 金属微粒子および金属微粒子の製造方法 |
| JP4844805B2 (ja) | 2005-05-20 | 2011-12-28 | 住友電気工業株式会社 | 金属被膜の形成方法 |
| JP2006341232A (ja) | 2005-06-10 | 2006-12-21 | Canon Inc | 流体処理装置および流体処理方法 |
| CN100431749C (zh) * | 2005-07-29 | 2008-11-12 | 江征平 | 高浓度纳米金属粒子及制备方法 |
| JP4590561B2 (ja) * | 2005-08-19 | 2010-12-01 | 国立大学法人宇都宮大学 | 傾斜ベッドを用いた養液栽培システム |
-
2008
- 2008-07-04 WO PCT/JP2008/062233 patent/WO2009008390A1/ja not_active Ceased
- 2008-07-04 CN CN201110295448.7A patent/CN102343442B/zh active Active
- 2008-07-04 EP EP08790913.1A patent/EP2177294B1/en active Active
- 2008-07-04 KR KR1020107002722A patent/KR101378048B1/ko active Active
- 2008-07-04 US US12/668,017 patent/US8747699B2/en active Active
- 2008-07-04 CN CN2008801041637A patent/CN101790430B/zh active Active
- 2008-07-04 JP JP2008544685A patent/JP4335968B2/ja active Active
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2009
- 2009-01-28 JP JP2009016715A patent/JP4534098B2/ja active Active
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