JP2009135514A5 - - Google Patents

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Publication number
JP2009135514A5
JP2009135514A5 JP2009014769A JP2009014769A JP2009135514A5 JP 2009135514 A5 JP2009135514 A5 JP 2009135514A5 JP 2009014769 A JP2009014769 A JP 2009014769A JP 2009014769 A JP2009014769 A JP 2009014769A JP 2009135514 A5 JP2009135514 A5 JP 2009135514A5
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JP
Japan
Prior art keywords
light
optical fiber
projecting
receiving
side optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009014769A
Other languages
English (en)
Japanese (ja)
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JP2009135514A (ja
JP4835701B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2009014769A priority Critical patent/JP4835701B2/ja
Priority claimed from JP2009014769A external-priority patent/JP4835701B2/ja
Publication of JP2009135514A publication Critical patent/JP2009135514A/ja
Publication of JP2009135514A5 publication Critical patent/JP2009135514A5/ja
Application granted granted Critical
Publication of JP4835701B2 publication Critical patent/JP4835701B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2009014769A 2009-01-26 2009-01-26 ウェハ検出用センサ Expired - Lifetime JP4835701B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009014769A JP4835701B2 (ja) 2009-01-26 2009-01-26 ウェハ検出用センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009014769A JP4835701B2 (ja) 2009-01-26 2009-01-26 ウェハ検出用センサ

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2001085396A Division JP4277458B2 (ja) 2001-03-23 2001-03-23 ウェハ検出用センサ

Publications (3)

Publication Number Publication Date
JP2009135514A JP2009135514A (ja) 2009-06-18
JP2009135514A5 true JP2009135514A5 (enExample) 2009-10-08
JP4835701B2 JP4835701B2 (ja) 2011-12-14

Family

ID=40867025

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009014769A Expired - Lifetime JP4835701B2 (ja) 2009-01-26 2009-01-26 ウェハ検出用センサ

Country Status (1)

Country Link
JP (1) JP4835701B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9929034B2 (en) * 2015-09-03 2018-03-27 Kawasaki Jukogyo Kabushiki Kaisha Substrate transfer device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06338558A (ja) * 1993-05-28 1994-12-06 Tel Varian Ltd 検出装置及び処理装置
JP3249309B2 (ja) * 1994-09-13 2002-01-21 東京エレクトロン株式会社 基板の搬送装置及び基板の搬送方法並びに塗布現像処理装置
KR20000076325A (ko) * 1997-03-19 2000-12-26 타테이시 요시오 다연식 투과형 광전 센서
JP2874028B2 (ja) * 1997-05-23 1999-03-24 竹中電子工業株式会社 ウエハセンサ
JP3380147B2 (ja) * 1997-11-13 2003-02-24 大日本スクリーン製造株式会社 基板処理装置
JPH11204827A (ja) * 1998-01-13 1999-07-30 Sharp Corp 光結合装置
JP2000223555A (ja) * 1999-01-29 2000-08-11 Kokusai Electric Co Ltd 基板処理装置

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