JP2016515222A5 - - Google Patents
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- Publication number
- JP2016515222A5 JP2016515222A5 JP2015562039A JP2015562039A JP2016515222A5 JP 2016515222 A5 JP2016515222 A5 JP 2016515222A5 JP 2015562039 A JP2015562039 A JP 2015562039A JP 2015562039 A JP2015562039 A JP 2015562039A JP 2016515222 A5 JP2016515222 A5 JP 2016515222A5
- Authority
- JP
- Japan
- Prior art keywords
- waveguide
- combined output
- output
- partial beam
- irradiation light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005286 illumination Methods 0.000 claims 10
- 230000003287 optical effect Effects 0.000 claims 9
- 238000001514 detection method Methods 0.000 claims 3
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 238000007689 inspection Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 238000009304 pastoral farming Methods 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361781123P | 2013-03-14 | 2013-03-14 | |
| DE102013204442.9A DE102013204442A1 (de) | 2013-03-14 | 2013-03-14 | Optischer Wellenleiter zur Führung von Beleuchtungslicht |
| DE102013204442.9 | 2013-03-14 | ||
| US61/781123 | 2013-03-14 | ||
| PCT/EP2014/054436 WO2014139881A1 (en) | 2013-03-14 | 2014-03-07 | Optical waveguide for guiding illumination light |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019012078A Division JP2019095799A (ja) | 2013-03-14 | 2019-01-28 | 照射光を案内するための光導波路 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016515222A JP2016515222A (ja) | 2016-05-26 |
| JP2016515222A5 true JP2016515222A5 (enExample) | 2017-04-13 |
| JP6473700B2 JP6473700B2 (ja) | 2019-02-20 |
Family
ID=51519699
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015562039A Active JP6473700B2 (ja) | 2013-03-14 | 2014-03-07 | 照射光を案内するための光導波路 |
| JP2019012078A Pending JP2019095799A (ja) | 2013-03-14 | 2019-01-28 | 照射光を案内するための光導波路 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019012078A Pending JP2019095799A (ja) | 2013-03-14 | 2019-01-28 | 照射光を案内するための光導波路 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US9671548B2 (enExample) |
| JP (2) | JP6473700B2 (enExample) |
| DE (1) | DE102013204442A1 (enExample) |
| WO (1) | WO2014139881A1 (enExample) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102013204442A1 (de) | 2013-03-14 | 2014-10-02 | Carl Zeiss Smt Gmbh | Optischer Wellenleiter zur Führung von Beleuchtungslicht |
| CN104181648B (zh) * | 2014-07-07 | 2015-10-28 | 中国科学院上海光学精密机械研究所 | 空心光子晶体光纤气体吸收池及其制作方法 |
| DE102014219112A1 (de) * | 2014-09-23 | 2016-03-24 | Carl Zeiss Smt Gmbh | Beleuchtungsoptik für die Projektionslithographie sowie Hohlwellenleiter-Komponente hierfür |
| WO2018017650A1 (en) * | 2016-07-22 | 2018-01-25 | Applied Materials, Inc. | Twisted kaleido |
| DE102016118471A1 (de) * | 2016-09-29 | 2018-03-29 | Valeo Schalter Und Sensoren Gmbh | Erfassungsvorrichtung für ein Kraftfahrzeug, Anbauteil sowie Kraftfahrzeug |
| DE102016225563A1 (de) * | 2016-12-20 | 2018-06-21 | Carl Zeiss Smt Gmbh | Hohlwellenleiter zur Führung von EUV-Licht mit einer Nutzwellenlänge |
| DE102017205548A1 (de) | 2017-03-31 | 2018-10-04 | Carl Zeiss Smt Gmbh | Optische Baugruppe zum Führen eines Ausgabestrahls eines Freie-Elektronen-Lasers |
| CZ309726B6 (cs) | 2017-11-01 | 2023-08-23 | PO LIGHTING CZECH s.r.o | Světlovodivý optický systém |
| US11520044B2 (en) * | 2018-09-25 | 2022-12-06 | Waymo Llc | Waveguide diffusers for LIDARs |
| US11499924B2 (en) | 2019-06-03 | 2022-11-15 | KLA Corp. | Determining one or more characteristics of light in an optical system |
| DE102019115146B4 (de) * | 2019-06-05 | 2021-01-14 | Schott Ag | Optisches Gerät, Verwendungen des optischen Gerätes, Fahrzeug oder Beobachtungsstation mit dem optischen Gerät sowie Verfahren zur hochauflösenden Bildübertragung |
| US11293880B2 (en) | 2020-02-20 | 2022-04-05 | Kla Corporation | Method and apparatus for beam stabilization and reference correction for EUV inspection |
| EP4116732A4 (en) * | 2020-03-02 | 2024-03-20 | Canon Kabushiki Kaisha | OPTICAL DEVICE, VEHICLE MOUNTED SYSTEM AND MOTION DEVICE |
| DE102021206203A1 (de) * | 2021-06-17 | 2022-12-22 | Carl Zeiss Smt Gmbh | Heizanordnung und Verfahren zum Heizen eines optischen Elements |
| DE102024203350B4 (de) * | 2024-04-11 | 2025-12-24 | Carl Zeiss Smt Gmbh | Energie-Detektions-Baugruppe für ein Beleuchtungssystem eines Maskeninspektionssystems zum Einsatz mit EUV-Beleuchtungslicht |
Family Cites Families (41)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2929186A1 (de) * | 1979-07-19 | 1981-02-05 | Licentia Gmbh | Einrichtung zur auskopplung eines definierten anteils eines lichtbuendels einer lichtleitfaser |
| JPS5814108A (ja) * | 1981-07-17 | 1983-01-26 | Nippon Telegr & Teleph Corp <Ntt> | マルチコア光フアイバ用光結合器 |
| JPS5879240A (ja) * | 1981-11-06 | 1983-05-13 | Nippon Kogaku Kk <Nikon> | 異物検出装置 |
| US4834497A (en) * | 1987-02-27 | 1989-05-30 | The United States Of American As Represented By The United States Department Of Energy | Fiber optic fluid detector |
| US4918583A (en) | 1988-04-25 | 1990-04-17 | Nikon Corporation | Illuminating optical device |
| JPH0210501U (enExample) * | 1988-07-04 | 1990-01-23 | ||
| US5059013A (en) | 1988-08-29 | 1991-10-22 | Kantilal Jain | Illumination system to produce self-luminous light beam of selected cross-section, uniform intensity and selected numerical aperture |
| DE4124311A1 (de) | 1991-07-23 | 1993-01-28 | Zeiss Carl Fa | Anordnung zur kohaerenzreduktion und strahlformung eines laserstrahls |
| US5224200A (en) | 1991-11-27 | 1993-06-29 | The United States Of America As Represented By The Department Of Energy | Coherence delay augmented laser beam homogenizer |
| US5601733A (en) | 1993-09-30 | 1997-02-11 | Cymer, Inc. | Full field mask illumination enhancement methods and apparatus |
| US5479543A (en) * | 1994-06-02 | 1995-12-26 | Reliant Technologies, Inc. | Precision light-guiding terminal for optical fibers |
| US5473408A (en) | 1994-07-01 | 1995-12-05 | Anvik Corporation | High-efficiency, energy-recycling exposure system |
| US5953477A (en) * | 1995-11-20 | 1999-09-14 | Visionex, Inc. | Method and apparatus for improved fiber optic light management |
| AU2534197A (en) | 1996-03-13 | 1997-10-01 | Visionex, Inc. | Method and apparatus for improved fiber optic light management |
| US5763930A (en) | 1997-05-12 | 1998-06-09 | Cymer, Inc. | Plasma focus high energy photon source |
| JP3517573B2 (ja) * | 1997-11-27 | 2004-04-12 | キヤノン株式会社 | 照明装置及びそれを用いた投影露光装置 |
| JP2001080308A (ja) | 1999-09-10 | 2001-03-27 | Ntn Corp | 車輪軸受装置 |
| JP2001091469A (ja) * | 1999-09-21 | 2001-04-06 | Olympus Optical Co Ltd | 表面欠陥検査装置 |
| JP2001110713A (ja) | 1999-10-12 | 2001-04-20 | Nikon Corp | 反射型光学素子及び該光学素子を備える照明光学装置、投影露光装置、デバイス製造方法 |
| JP2001174410A (ja) * | 1999-12-21 | 2001-06-29 | Nkk Corp | 照明装置 |
| JP2001307523A (ja) * | 2000-04-19 | 2001-11-02 | Mitsubishi Rayon Co Ltd | 照明装置 |
| TWI240788B (en) | 2000-05-04 | 2005-10-01 | Koninkl Philips Electronics Nv | Illumination system, light mixing chamber and display device |
| US7070280B2 (en) | 2001-07-04 | 2006-07-04 | Unaxis Balzers Aktiengesellschaft | Method for the generation of light of a given polarization state |
| KR100433211B1 (ko) | 2001-08-10 | 2004-05-28 | 엘지전자 주식회사 | 광량 및 편광 균일화 광학소자를 이용한 프로젝터의 조명 광학계 |
| EP1432948B1 (en) | 2001-09-26 | 2009-11-11 | Koninklijke Philips Electronics N.V. | Micro-structured illumination system for providing polarized light |
| CN1322345C (zh) * | 2002-01-15 | 2007-06-20 | 住友电气工业株式会社 | 光波导路模块 |
| JPWO2003079067A1 (ja) * | 2002-03-18 | 2005-07-14 | エヌティティエレクトロニクス株式会社 | 裸光ファイバの製造方法及びその製造装置 |
| DE10220815A1 (de) | 2002-05-10 | 2003-11-20 | Zeiss Carl Microelectronic Sys | Reflektives Röntgenmikroskop und Inspektionssystem zur Untersuchung von Objekten mit Wellenlängen 100 nm |
| US6888988B2 (en) | 2003-03-14 | 2005-05-03 | Agilent Technologies, Inc. | Small form factor all-polymer optical device with integrated dual beam path based on total internal reflection optical turn |
| JP2005195348A (ja) * | 2003-12-26 | 2005-07-21 | Nikon Corp | 照明光学装置 |
| JP2005241290A (ja) * | 2004-02-24 | 2005-09-08 | Toshiba Corp | 画像入力装置及び検査装置 |
| US7387954B2 (en) | 2004-10-04 | 2008-06-17 | Semiconductor Energy Laboratory Co., Ltd. | Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device |
| US20060082888A1 (en) | 2004-10-19 | 2006-04-20 | Andrew Huibers | Optically reconfigurable light integrator in display systems using spatial light modulators |
| DE602006015785D1 (de) * | 2005-02-25 | 2010-09-09 | Nanometrics Inc | L-dimension-scatterometrie |
| WO2007071413A1 (en) | 2005-12-23 | 2007-06-28 | Carl Zeiss Laser Optics Gmbh | Optical system and method for shaping a profile of a laser beam |
| JP5108490B2 (ja) * | 2007-12-19 | 2012-12-26 | オリンパス株式会社 | 細胞解析装置用照明装置 |
| TWI337267B (en) * | 2008-12-10 | 2011-02-11 | Ind Tech Res Inst | Fiber laser device |
| NL2004094A (en) * | 2009-02-11 | 2010-08-12 | Asml Netherlands Bv | Inspection apparatus, lithographic apparatus, lithographic processing cell and inspection method. |
| DE102010061505B4 (de) | 2010-12-22 | 2012-10-31 | Kla-Tencor Mie Gmbh | Verfahren zur Inspektion und Detektion von Defekten auf Oberflächen von scheibenförmigen Objekten |
| JPWO2012137842A1 (ja) * | 2011-04-04 | 2014-07-28 | 株式会社ニコン | 照明装置、露光装置、デバイス製造方法、導光光学素子及び導光光学素子の製造方法 |
| DE102013204442A1 (de) | 2013-03-14 | 2014-10-02 | Carl Zeiss Smt Gmbh | Optischer Wellenleiter zur Führung von Beleuchtungslicht |
-
2013
- 2013-03-14 DE DE102013204442.9A patent/DE102013204442A1/de not_active Ceased
-
2014
- 2014-03-07 JP JP2015562039A patent/JP6473700B2/ja active Active
- 2014-03-07 WO PCT/EP2014/054436 patent/WO2014139881A1/en not_active Ceased
-
2015
- 2015-08-24 US US14/833,954 patent/US9671548B2/en active Active
-
2017
- 2017-05-30 US US15/608,390 patent/US10254466B2/en active Active
-
2019
- 2019-01-28 JP JP2019012078A patent/JP2019095799A/ja active Pending
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