JP4835701B2 - ウェハ検出用センサ - Google Patents

ウェハ検出用センサ Download PDF

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Publication number
JP4835701B2
JP4835701B2 JP2009014769A JP2009014769A JP4835701B2 JP 4835701 B2 JP4835701 B2 JP 4835701B2 JP 2009014769 A JP2009014769 A JP 2009014769A JP 2009014769 A JP2009014769 A JP 2009014769A JP 4835701 B2 JP4835701 B2 JP 4835701B2
Authority
JP
Japan
Prior art keywords
light
wafer
unit
light receiving
optical fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2009014769A
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English (en)
Japanese (ja)
Other versions
JP2009135514A5 (enExample
JP2009135514A (ja
Inventor
哲幸 片山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp filed Critical Omron Corp
Priority to JP2009014769A priority Critical patent/JP4835701B2/ja
Publication of JP2009135514A publication Critical patent/JP2009135514A/ja
Publication of JP2009135514A5 publication Critical patent/JP2009135514A5/ja
Application granted granted Critical
Publication of JP4835701B2 publication Critical patent/JP4835701B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
JP2009014769A 2009-01-26 2009-01-26 ウェハ検出用センサ Expired - Lifetime JP4835701B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009014769A JP4835701B2 (ja) 2009-01-26 2009-01-26 ウェハ検出用センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009014769A JP4835701B2 (ja) 2009-01-26 2009-01-26 ウェハ検出用センサ

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2001085396A Division JP4277458B2 (ja) 2001-03-23 2001-03-23 ウェハ検出用センサ

Publications (3)

Publication Number Publication Date
JP2009135514A JP2009135514A (ja) 2009-06-18
JP2009135514A5 JP2009135514A5 (enExample) 2009-10-08
JP4835701B2 true JP4835701B2 (ja) 2011-12-14

Family

ID=40867025

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009014769A Expired - Lifetime JP4835701B2 (ja) 2009-01-26 2009-01-26 ウェハ検出用センサ

Country Status (1)

Country Link
JP (1) JP4835701B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9929034B2 (en) * 2015-09-03 2018-03-27 Kawasaki Jukogyo Kabushiki Kaisha Substrate transfer device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06338558A (ja) * 1993-05-28 1994-12-06 Tel Varian Ltd 検出装置及び処理装置
JP3249309B2 (ja) * 1994-09-13 2002-01-21 東京エレクトロン株式会社 基板の搬送装置及び基板の搬送方法並びに塗布現像処理装置
KR20000076325A (ko) * 1997-03-19 2000-12-26 타테이시 요시오 다연식 투과형 광전 센서
JP2874028B2 (ja) * 1997-05-23 1999-03-24 竹中電子工業株式会社 ウエハセンサ
JP3380147B2 (ja) * 1997-11-13 2003-02-24 大日本スクリーン製造株式会社 基板処理装置
JPH11204827A (ja) * 1998-01-13 1999-07-30 Sharp Corp 光結合装置
JP2000223555A (ja) * 1999-01-29 2000-08-11 Kokusai Electric Co Ltd 基板処理装置

Also Published As

Publication number Publication date
JP2009135514A (ja) 2009-06-18

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