JP2009080069A - 加速度センサ、荷重センサ - Google Patents

加速度センサ、荷重センサ Download PDF

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Publication number
JP2009080069A
JP2009080069A JP2007250785A JP2007250785A JP2009080069A JP 2009080069 A JP2009080069 A JP 2009080069A JP 2007250785 A JP2007250785 A JP 2007250785A JP 2007250785 A JP2007250785 A JP 2007250785A JP 2009080069 A JP2009080069 A JP 2009080069A
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Japan
Prior art keywords
vibrating
acceleration sensor
support
movable mass
base
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JP2007250785A
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English (en)
Japanese (ja)
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JP2009080069A5 (enExample
Inventor
Ryuta Nishizawa
竜太 西澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2007250785A priority Critical patent/JP2009080069A/ja
Publication of JP2009080069A publication Critical patent/JP2009080069A/ja
Publication of JP2009080069A5 publication Critical patent/JP2009080069A5/ja
Withdrawn legal-status Critical Current

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JP2007250785A 2007-09-27 2007-09-27 加速度センサ、荷重センサ Withdrawn JP2009080069A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007250785A JP2009080069A (ja) 2007-09-27 2007-09-27 加速度センサ、荷重センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007250785A JP2009080069A (ja) 2007-09-27 2007-09-27 加速度センサ、荷重センサ

Publications (2)

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JP2009080069A true JP2009080069A (ja) 2009-04-16
JP2009080069A5 JP2009080069A5 (enExample) 2010-10-14

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JP2007250785A Withdrawn JP2009080069A (ja) 2007-09-27 2007-09-27 加速度センサ、荷重センサ

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011203228A (ja) * 2010-03-26 2011-10-13 Toshiba Corp 加速度センサ
JP2018128438A (ja) * 2017-02-11 2018-08-16 新光電子株式会社 音叉振動子を備える荷重検出センサー
JP2022074658A (ja) * 2020-11-05 2022-05-18 株式会社東芝 センサ及び電子装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55149819A (en) * 1979-05-11 1980-11-21 Yokogawa Hokushin Electric Corp Power conversion mechanism
JPH01302166A (ja) * 1988-02-22 1989-12-06 Soc Appl Gen Electr Mec <Sagem> 振子型加速度計
JPH0763625A (ja) * 1993-08-20 1995-03-10 Mettler Toledo Ag 力測定用ストリング
JP2004251702A (ja) * 2003-02-19 2004-09-09 Matsushita Electric Ind Co Ltd 振動型圧電加速度センサ素子とこれを用いた振動型圧電加速度センサおよび振動型圧電加速度センサ装置
JP2005140516A (ja) * 2003-11-04 2005-06-02 Matsushita Electric Ind Co Ltd 振動型圧電加速度センサ素子とこれを用いた振動型圧電加速度センサ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55149819A (en) * 1979-05-11 1980-11-21 Yokogawa Hokushin Electric Corp Power conversion mechanism
JPH01302166A (ja) * 1988-02-22 1989-12-06 Soc Appl Gen Electr Mec <Sagem> 振子型加速度計
JPH0763625A (ja) * 1993-08-20 1995-03-10 Mettler Toledo Ag 力測定用ストリング
JP2004251702A (ja) * 2003-02-19 2004-09-09 Matsushita Electric Ind Co Ltd 振動型圧電加速度センサ素子とこれを用いた振動型圧電加速度センサおよび振動型圧電加速度センサ装置
JP2005140516A (ja) * 2003-11-04 2005-06-02 Matsushita Electric Ind Co Ltd 振動型圧電加速度センサ素子とこれを用いた振動型圧電加速度センサ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011203228A (ja) * 2010-03-26 2011-10-13 Toshiba Corp 加速度センサ
JP2018128438A (ja) * 2017-02-11 2018-08-16 新光電子株式会社 音叉振動子を備える荷重検出センサー
JP2022074658A (ja) * 2020-11-05 2022-05-18 株式会社東芝 センサ及び電子装置

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