JP2009074651A5 - - Google Patents
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- Publication number
- JP2009074651A5 JP2009074651A5 JP2007246021A JP2007246021A JP2009074651A5 JP 2009074651 A5 JP2009074651 A5 JP 2009074651A5 JP 2007246021 A JP2007246021 A JP 2007246021A JP 2007246021 A JP2007246021 A JP 2007246021A JP 2009074651 A5 JP2009074651 A5 JP 2009074651A5
- Authority
- JP
- Japan
- Prior art keywords
- wire
- flow path
- fluid flow
- block
- structure according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims 37
- 238000004519 manufacturing process Methods 0.000 claims 7
- 229910052751 metal Inorganic materials 0.000 claims 6
- 239000002184 metal Substances 0.000 claims 6
- 229910000838 Al alloy Inorganic materials 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
- 238000005219 brazing Methods 0.000 claims 2
- 238000009792 diffusion process Methods 0.000 claims 2
- 239000007788 liquid Substances 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 229910001092 metal group alloy Inorganic materials 0.000 claims 2
- 239000010935 stainless steel Substances 0.000 claims 2
- 229910001220 stainless steel Inorganic materials 0.000 claims 2
- 229920003002 synthetic resin Polymers 0.000 claims 2
- 239000000057 synthetic resin Substances 0.000 claims 2
- 239000007769 metal material Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000003825 pressing Methods 0.000 claims 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007246021A JP5417638B2 (ja) | 2007-09-21 | 2007-09-21 | 流体の流路構造を備える流体圧機器及びその製造方法 |
| US12/208,679 US8109296B2 (en) | 2007-09-21 | 2008-09-11 | Fluid flow passage structure and manufacturing method thereof |
| DE102008048147.5A DE102008048147B4 (de) | 2007-09-21 | 2008-09-19 | Fluiddurchgangsstruktur und Herstellungsverfahren hierfür |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007246021A JP5417638B2 (ja) | 2007-09-21 | 2007-09-21 | 流体の流路構造を備える流体圧機器及びその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009074651A JP2009074651A (ja) | 2009-04-09 |
| JP2009074651A5 true JP2009074651A5 (https=) | 2010-11-04 |
| JP5417638B2 JP5417638B2 (ja) | 2014-02-19 |
Family
ID=40470380
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007246021A Active JP5417638B2 (ja) | 2007-09-21 | 2007-09-21 | 流体の流路構造を備える流体圧機器及びその製造方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US8109296B2 (https=) |
| JP (1) | JP5417638B2 (https=) |
| DE (1) | DE102008048147B4 (https=) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110097488A1 (en) * | 2009-10-27 | 2011-04-28 | Kerr Roger S | Fluid distribution manifold including mirrored finish plate |
| JP5715969B2 (ja) * | 2012-01-24 | 2015-05-13 | 株式会社堀場エステック | 流体抵抗デバイス |
| DE102013219300A1 (de) * | 2013-09-25 | 2015-03-26 | Elringklinger Ag | Zwischenplatte und Steuereinheit |
| US11144075B2 (en) | 2016-06-30 | 2021-10-12 | Ichor Systems, Inc. | Flow control system, method, and apparatus |
| US11585444B2 (en) | 2019-08-05 | 2023-02-21 | Ichor Systems, Inc. | Seal for a flow restrictor |
| JP6352993B2 (ja) * | 2016-08-10 | 2018-07-04 | 株式会社東芝 | 流路構造及び処理装置 |
| US11841036B2 (en) | 2019-08-05 | 2023-12-12 | Ichor Systems, Inc. | Laminar flow restrictor and seal for same |
| MY206481A (en) | 2019-08-05 | 2024-12-18 | Ichor Systems Inc | Laminar flow restrictor |
| TW202422751A (zh) * | 2022-10-26 | 2024-06-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | 閥歧管及半導體系統 |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2871886A (en) * | 1955-04-26 | 1959-02-03 | Monarch Machine Tool Co | Manifold |
| DE1127924B (de) | 1959-08-21 | 1962-04-19 | Daimler Benz Ag | Kreuzstrom-Plattenwaermetauscher mit Zwischengliedern als Abstandshalter fuer die Platten |
| US3407846A (en) * | 1966-07-14 | 1968-10-29 | Aro Corp | Circuit board and control module for fluid logic circuit mechanism |
| GB1171025A (en) | 1967-02-25 | 1969-11-19 | Sperry Rand Ltd | Improvements in or relating to the Manufacture of Fluid Flow Manifold Blocks. |
| DE1917727C3 (de) * | 1969-04-05 | 1974-08-01 | Samson Apparatebau Ag, 6000 Frankfurt | Leitungssystem für hydraulisch oder pneumatisch arbeitende Schalt-, Steuer- oder Regeleinrichtungen |
| GB1255896A (en) | 1970-02-18 | 1971-12-01 | Honeywell Inc | Fluidic oscillators |
| DE2156929A1 (de) | 1970-11-17 | 1972-05-31 | Bekaert Sa Nv | Fluidisches Schaltungselement |
| NL150557B (nl) * | 1971-09-15 | 1976-08-16 | Samson Apparatebau Ag | Leidingsysteem voor met gasvormig of vloeibaar drukmiddel werkende regel-, stuur- of meetinrichtingen. |
| US4509553A (en) * | 1983-09-02 | 1985-04-09 | General Motors Corporation | Fluid flow selector valve |
| JPS63220987A (ja) | 1987-03-06 | 1988-09-14 | Natl Res Inst For Metals | アルミニウム及びアルミナセラミツクスの拡散接合法 |
| JPH0562034A (ja) | 1991-08-30 | 1993-03-12 | Toshiba Corp | 定期券発行機 |
| JP2698543B2 (ja) * | 1993-11-30 | 1998-01-19 | 株式会社本山製作所 | ガス多分岐ユニット |
| ZA943085B (en) | 1994-05-04 | 1995-01-13 | Hwu Chyn Herng | Forced flow-guding device having perforated mesh surface branch guiding tubes |
| JPH0835506A (ja) | 1994-07-26 | 1996-02-06 | Nitsukooshi Prod Kk | 流体素子または流体制御器と、その製造方法 |
| JP2996904B2 (ja) | 1995-09-19 | 2000-01-11 | 川崎重工業株式会社 | 配管接続用ブロックの製作方法 |
| JPH11125378A (ja) | 1997-10-20 | 1999-05-11 | Ihara Science Corp | 流体圧マニホールドおよびその製造方法 |
| JP2001201275A (ja) | 2000-01-21 | 2001-07-27 | Daikin Ind Ltd | 二重管式熱交換器 |
| JP4750258B2 (ja) | 2000-10-24 | 2011-08-17 | 古河スカイ株式会社 | 流体回路部材の製造方法 |
| JP2003062671A (ja) * | 2001-08-24 | 2003-03-05 | Suwa Netsukogyo Kk | マニホールドの製造方法 |
| JP2006266576A (ja) * | 2005-03-23 | 2006-10-05 | Calsonic Kansei Corp | 積層型熱交換器及びその製造方法 |
| JP2006264163A (ja) * | 2005-03-24 | 2006-10-05 | Sekiso Kanagata Kenkyusho:Kk | 真空成形金型及びその製造方法 |
| EP1950569A4 (en) * | 2005-10-25 | 2009-05-06 | Shimadzu Corp | FLOW CELL AND METHOD FOR THE PRODUCTION THEREOF |
-
2007
- 2007-09-21 JP JP2007246021A patent/JP5417638B2/ja active Active
-
2008
- 2008-09-11 US US12/208,679 patent/US8109296B2/en active Active
- 2008-09-19 DE DE102008048147.5A patent/DE102008048147B4/de active Active
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