JP2009070894A5 - - Google Patents

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Publication number
JP2009070894A5
JP2009070894A5 JP2007235278A JP2007235278A JP2009070894A5 JP 2009070894 A5 JP2009070894 A5 JP 2009070894A5 JP 2007235278 A JP2007235278 A JP 2007235278A JP 2007235278 A JP2007235278 A JP 2007235278A JP 2009070894 A5 JP2009070894 A5 JP 2009070894A5
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JP
Japan
Prior art keywords
semiconductor device
sensor element
sealing layer
resin sealing
support frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007235278A
Other languages
English (en)
Japanese (ja)
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JP5172254B2 (ja
JP2009070894A (ja
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Publication date
Application filed filed Critical
Priority to JP2007235278A priority Critical patent/JP5172254B2/ja
Priority claimed from JP2007235278A external-priority patent/JP5172254B2/ja
Publication of JP2009070894A publication Critical patent/JP2009070894A/ja
Publication of JP2009070894A5 publication Critical patent/JP2009070894A5/ja
Application granted granted Critical
Publication of JP5172254B2 publication Critical patent/JP5172254B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2007235278A 2007-09-11 2007-09-11 半導体装置 Expired - Fee Related JP5172254B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007235278A JP5172254B2 (ja) 2007-09-11 2007-09-11 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007235278A JP5172254B2 (ja) 2007-09-11 2007-09-11 半導体装置

Publications (3)

Publication Number Publication Date
JP2009070894A JP2009070894A (ja) 2009-04-02
JP2009070894A5 true JP2009070894A5 (https=) 2010-10-14
JP5172254B2 JP5172254B2 (ja) 2013-03-27

Family

ID=40606870

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007235278A Expired - Fee Related JP5172254B2 (ja) 2007-09-11 2007-09-11 半導体装置

Country Status (1)

Country Link
JP (1) JP5172254B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5493767B2 (ja) * 2009-11-25 2014-05-14 大日本印刷株式会社 センサーユニットおよびその製造方法
US8659167B1 (en) * 2012-08-29 2014-02-25 Freescale Semiconductor, Inc. Sensor packaging method and sensor packages

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2807944B2 (ja) * 1992-04-08 1998-10-08 三菱電機株式会社 混成集積回路装置及びその製造方法
JPH07254624A (ja) * 1994-03-16 1995-10-03 Hitachi Ltd 半導体装置の製造方法並びにそれに使用されるリードフレームおよび成形装置
JP2001024139A (ja) * 1999-07-05 2001-01-26 Hitachi Ltd 半導体装置およびその製造方法
JP2002261196A (ja) * 2001-03-02 2002-09-13 Ngk Insulators Ltd 素子パッケージ
JP4165360B2 (ja) * 2002-11-07 2008-10-15 株式会社デンソー 力学量センサ
JP2006080350A (ja) * 2004-09-10 2006-03-23 Denso Corp 半導体装置およびその実装構造
JP2006119042A (ja) * 2004-10-22 2006-05-11 Oki Electric Ind Co Ltd 加速度センサチップパッケージ及びその製造方法
JP4553720B2 (ja) * 2004-12-21 2010-09-29 Okiセミコンダクタ株式会社 半導体装置及びその製造方法
WO2007020701A1 (ja) * 2005-08-18 2007-02-22 C & N Inc 加速度センサ装置
JP4715503B2 (ja) * 2005-12-22 2011-07-06 パナソニック電工株式会社 センサモジュールの製造方法

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