JP2009054444A5 - - Google Patents
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- Publication number
- JP2009054444A5 JP2009054444A5 JP2007220813A JP2007220813A JP2009054444A5 JP 2009054444 A5 JP2009054444 A5 JP 2009054444A5 JP 2007220813 A JP2007220813 A JP 2007220813A JP 2007220813 A JP2007220813 A JP 2007220813A JP 2009054444 A5 JP2009054444 A5 JP 2009054444A5
- Authority
- JP
- Japan
- Prior art keywords
- organic
- passivation layer
- layer
- forming
- compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010410 layer Substances 0.000 claims 17
- 238000002161 passivation Methods 0.000 claims 13
- 229910052792 caesium Inorganic materials 0.000 claims 4
- 229910052739 hydrogen Inorganic materials 0.000 claims 4
- 239000001257 hydrogen Substances 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 4
- 150000004767 nitrides Chemical class 0.000 claims 4
- 150000002894 organic compounds Chemical class 0.000 claims 4
- 229910052710 silicon Inorganic materials 0.000 claims 4
- 239000010703 silicon Substances 0.000 claims 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 3
- 229910052783 alkali metal Inorganic materials 0.000 claims 3
- 150000001340 alkali metals Chemical class 0.000 claims 3
- 239000000463 material Substances 0.000 claims 3
- 150000001339 alkali metal compounds Chemical class 0.000 claims 2
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 claims 2
- FJDQFPXHSGXQBY-UHFFFAOYSA-L caesium carbonate Chemical compound [Cs+].[Cs+].[O-]C([O-])=O FJDQFPXHSGXQBY-UHFFFAOYSA-L 0.000 claims 2
- 229910000024 caesium carbonate Inorganic materials 0.000 claims 2
- -1 cesium compound Chemical class 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 239000002356 single layer Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 150000002431 hydrogen Chemical class 0.000 claims 1
- 238000010030 laminating Methods 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007220813A JP5241173B2 (ja) | 2007-08-28 | 2007-08-28 | 有機ｅｌ素子の製造方法 |
| US12/193,620 US7994707B2 (en) | 2007-08-28 | 2008-08-18 | Organic el device and method of producing the device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007220813A JP5241173B2 (ja) | 2007-08-28 | 2007-08-28 | 有機ｅｌ素子の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009054444A JP2009054444A (ja) | 2009-03-12 |
| JP2009054444A5 true JP2009054444A5 (enExample) | 2010-10-14 |
| JP5241173B2 JP5241173B2 (ja) | 2013-07-17 |
Family
ID=40406365
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007220813A Expired - Fee Related JP5241173B2 (ja) | 2007-08-28 | 2007-08-28 | 有機ｅｌ素子の製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US7994707B2 (enExample) |
| JP (1) | JP5241173B2 (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100999779B1 (ko) * | 2010-02-01 | 2010-12-08 | 엘지이노텍 주식회사 | 발광소자, 발광소자의 제조방법 및 발광소자 패키지 |
| TWI515936B (zh) * | 2011-12-15 | 2016-01-01 | 友達光電股份有限公司 | 發光裝置及其製作方法 |
| KR101980231B1 (ko) * | 2012-09-18 | 2019-05-21 | 삼성디스플레이 주식회사 | 박막봉지를 구비한 평판 표시 장치 및 그 제조방법 |
| JP2014141714A (ja) * | 2013-01-24 | 2014-08-07 | Kaneka Corp | 真空蒸着装置及び有機ｅｌ装置の製造方法 |
| US9954045B2 (en) | 2014-05-07 | 2018-04-24 | Sharp Kabushiki Kaisha | Electroluminescence device and method for producing same |
| JP6586328B2 (ja) * | 2015-09-04 | 2019-10-02 | 東京エレクトロン株式会社 | 被処理体を処理する方法 |
| CN105552247B (zh) * | 2015-12-08 | 2018-10-26 | 上海天马微电子有限公司 | 复合基板、柔性显示装置及其制备方法 |
| KR102125204B1 (ko) * | 2018-10-05 | 2020-06-22 | 경희대학교 산학협력단 | 전자 수송층을 포함하는 박막형 발광소자 및 그 제조 방법 |
| EP4131446A4 (en) * | 2020-03-27 | 2023-05-03 | BOE Technology Group Co., Ltd. | Display substrate, preparation method therefor, and display device |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000077183A (ja) | 1998-08-31 | 2000-03-14 | Pioneer Electronic Corp | 有機エレクトロルミネセンス素子の製造方法 |
| JP3817081B2 (ja) * | 1999-01-29 | 2006-08-30 | パイオニア株式会社 | 有機ｅｌ素子の製造方法 |
| US7339317B2 (en) * | 2000-06-05 | 2008-03-04 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device having triplet and singlet compound in light-emitting layers |
| JP4600857B2 (ja) | 2000-10-27 | 2010-12-22 | Ｔｄｋ株式会社 | 有機ｅｌ素子の製造方法および有機ｅｌ素子 |
| JP3705282B2 (ja) | 2002-10-03 | 2005-10-12 | セイコーエプソン株式会社 | 表示パネル及びその表示パネルを備えた電子機器並びに表示パネルの製造方法 |
| JP4588312B2 (ja) * | 2003-12-02 | 2010-12-01 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
| JP2005203321A (ja) * | 2004-01-19 | 2005-07-28 | Pioneer Electronic Corp | 保護膜および有機ｅｌ素子 |
| KR100699988B1 (ko) * | 2004-03-19 | 2007-03-26 | 삼성에스디아이 주식회사 | 평판표시장치 |
| JP2005322464A (ja) * | 2004-05-07 | 2005-11-17 | Canon Inc | 有機ｅｌ素子 |
| JP5268249B2 (ja) * | 2005-12-14 | 2013-08-21 | キヤノン株式会社 | 有機発光素子の製造方法 |
-
2007
- 2007-08-28 JP JP2007220813A patent/JP5241173B2/ja not_active Expired - Fee Related
-
2008
- 2008-08-18 US US12/193,620 patent/US7994707B2/en active Active
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