JP2009026859A - 基板検査装置 - Google Patents

基板検査装置 Download PDF

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Publication number
JP2009026859A
JP2009026859A JP2007186867A JP2007186867A JP2009026859A JP 2009026859 A JP2009026859 A JP 2009026859A JP 2007186867 A JP2007186867 A JP 2007186867A JP 2007186867 A JP2007186867 A JP 2007186867A JP 2009026859 A JP2009026859 A JP 2009026859A
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JP
Japan
Prior art keywords
substrate
inspection apparatus
back surface
contact
suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007186867A
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English (en)
Japanese (ja)
Other versions
JP2009026859A5 (enrdf_load_stackoverflow
Inventor
Tomoo Kato
智生 加藤
Hiroyasu Hebiishi
廣康 蛇石
Kenichi Arai
研一 荒井
Toshihiro Mochizuki
才博 望月
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP2007186867A priority Critical patent/JP2009026859A/ja
Publication of JP2009026859A publication Critical patent/JP2009026859A/ja
Publication of JP2009026859A5 publication Critical patent/JP2009026859A5/ja
Pending legal-status Critical Current

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  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2007186867A 2007-07-18 2007-07-18 基板検査装置 Pending JP2009026859A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007186867A JP2009026859A (ja) 2007-07-18 2007-07-18 基板検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007186867A JP2009026859A (ja) 2007-07-18 2007-07-18 基板検査装置

Publications (2)

Publication Number Publication Date
JP2009026859A true JP2009026859A (ja) 2009-02-05
JP2009026859A5 JP2009026859A5 (enrdf_load_stackoverflow) 2010-09-02

Family

ID=40398417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007186867A Pending JP2009026859A (ja) 2007-07-18 2007-07-18 基板検査装置

Country Status (1)

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JP (1) JP2009026859A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013071186A (ja) * 2011-09-26 2013-04-22 Yaskawa Electric Corp ハンドおよびロボット
WO2013150607A1 (ja) * 2012-04-03 2013-10-10 株式会社島津製作所 基板搭載位置矯正装置及び基板搭載位置矯正方法
KR20130113812A (ko) * 2012-04-06 2013-10-16 엘지디스플레이 주식회사 평판표시장치용 세정장치
KR101381548B1 (ko) * 2011-07-04 2014-04-07 도쿄 오카 고교 가부시키가이샤 기판 반송 장치, 기판 반송 방법 및 도포 장치
JP2023092532A (ja) * 2016-12-06 2023-07-03 ジャビル インク エンドエフェクターを供給するための器具、システム、及び方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07306153A (ja) * 1994-05-12 1995-11-21 Olympus Optical Co Ltd 基板外観検査装置
JPH10209254A (ja) * 1997-01-24 1998-08-07 Tokyo Electron Ltd 回転処理装置
JP2003142554A (ja) * 2002-10-16 2003-05-16 Dainippon Screen Mfg Co Ltd 基板保持装置および基板搬送装置
JP2004115872A (ja) * 2002-09-26 2004-04-15 Dainippon Screen Mfg Co Ltd 基板処理装置および基板処理方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07306153A (ja) * 1994-05-12 1995-11-21 Olympus Optical Co Ltd 基板外観検査装置
JPH10209254A (ja) * 1997-01-24 1998-08-07 Tokyo Electron Ltd 回転処理装置
JP2004115872A (ja) * 2002-09-26 2004-04-15 Dainippon Screen Mfg Co Ltd 基板処理装置および基板処理方法
JP2003142554A (ja) * 2002-10-16 2003-05-16 Dainippon Screen Mfg Co Ltd 基板保持装置および基板搬送装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101381548B1 (ko) * 2011-07-04 2014-04-07 도쿄 오카 고교 가부시키가이샤 기판 반송 장치, 기판 반송 방법 및 도포 장치
JP2013071186A (ja) * 2011-09-26 2013-04-22 Yaskawa Electric Corp ハンドおよびロボット
US8720965B2 (en) 2011-09-26 2014-05-13 Kabushiki Kaisha Yaskawa Denki Robot hand and robot
WO2013150607A1 (ja) * 2012-04-03 2013-10-10 株式会社島津製作所 基板搭載位置矯正装置及び基板搭載位置矯正方法
KR20130113812A (ko) * 2012-04-06 2013-10-16 엘지디스플레이 주식회사 평판표시장치용 세정장치
KR101936815B1 (ko) * 2012-04-06 2019-04-04 엘지디스플레이 주식회사 평판표시장치용 세정장치
JP2023092532A (ja) * 2016-12-06 2023-07-03 ジャビル インク エンドエフェクターを供給するための器具、システム、及び方法
JP7663623B2 (ja) 2016-12-06 2025-04-16 ジャビル インク エンドエフェクターを供給するための器具、システム、及び方法

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