JP2008542751A5 - - Google Patents
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- Publication number
- JP2008542751A5 JP2008542751A5 JP2008514618A JP2008514618A JP2008542751A5 JP 2008542751 A5 JP2008542751 A5 JP 2008542751A5 JP 2008514618 A JP2008514618 A JP 2008514618A JP 2008514618 A JP2008514618 A JP 2008514618A JP 2008542751 A5 JP2008542751 A5 JP 2008542751A5
- Authority
- JP
- Japan
- Prior art keywords
- dimensional
- collimation
- pair
- ray scattering
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/142,862 | 2005-05-31 | ||
| US11/142,862 US7139366B1 (en) | 2005-05-31 | 2005-05-31 | Two-dimensional small angle x-ray scattering camera |
| PCT/US2006/000290 WO2006130182A1 (en) | 2005-05-31 | 2006-01-04 | Two-dimensional small angle x-ray scattering camera |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008542751A JP2008542751A (ja) | 2008-11-27 |
| JP2008542751A5 true JP2008542751A5 (ko) | 2009-04-30 |
| JP5214442B2 JP5214442B2 (ja) | 2013-06-19 |
Family
ID=36143216
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008514618A Active JP5214442B2 (ja) | 2005-05-31 | 2006-01-04 | ２次元小角ｘ線散乱カメラ |
Country Status (5)
| Country | Link |
|---|---|
| US (3) | US7139366B1 (ko) |
| EP (1) | EP1886125B1 (ko) |
| JP (1) | JP5214442B2 (ko) |
| CA (1) | CA2610555C (ko) |
| WO (1) | WO2006130182A1 (ko) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10317677A1 (de) * | 2003-04-17 | 2004-11-18 | Bruker Axs Gmbh | Primärstrahlfänger |
| US7139366B1 (en) * | 2005-05-31 | 2006-11-21 | Osmic, Inc. | Two-dimensional small angle x-ray scattering camera |
| US7848483B2 (en) * | 2008-03-07 | 2010-12-07 | Rigaku Innovative Technologies | Magnesium silicide-based multilayer x-ray fluorescence analyzers |
| JP5237186B2 (ja) | 2009-04-30 | 2013-07-17 | 株式会社リガク | Ｘ線散乱測定装置およびｘ線散乱測定方法 |
| JP2013219601A (ja) * | 2012-04-10 | 2013-10-24 | Canon Inc | シリアルデータ送信システム |
| WO2013184999A1 (en) * | 2012-06-08 | 2013-12-12 | Rigaku Innovative Technologies, Inc. | Dual mode small angle scattering camera |
| EP2859336B1 (en) | 2012-06-08 | 2017-08-30 | Rigaku Innovative Technologies, Inc. | X-ray beam system offering 1d and 2d beams |
| US9024268B2 (en) * | 2013-03-15 | 2015-05-05 | Bruker Axs, Inc. | One-dimensional x-ray detector with curved readout strips |
| US9575017B2 (en) * | 2014-02-24 | 2017-02-21 | Rigaku Innovative Technologies, Inc. | High performance Kratky assembly |
| PL3364421T3 (pl) * | 2017-02-17 | 2019-08-30 | Rigaku Corporation | Rentgenowskie urządzenie optyczne |
| KR20210028276A (ko) * | 2018-07-31 | 2021-03-11 | 램 리써치 코포레이션 | 고 종횡비 구조체들의 패터닝된 어레이들 내의 틸팅 각도 결정 |
Family Cites Families (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4054402B2 (ja) | 1997-04-25 | 2008-02-27 | 株式会社東芝 | Ｘ線断層撮影装置 |
| JPS5816553U (ja) * | 1981-07-24 | 1983-02-01 | 理学電機株式会社 | Ｘ線小角散乱測定装置用試料加熱装置 |
| DE3406905A1 (de) | 1984-02-25 | 1985-09-05 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Roentgengeraet |
| GB8411731D0 (en) | 1984-05-09 | 1984-06-13 | Unilever Plc | Oral compositions |
| ATE89097T1 (de) | 1986-08-15 | 1993-05-15 | Commw Scient Ind Res Org | Instrumente zur konditionierung von roentgenoder neutronenstrahlen. |
| EP0311177B1 (de) | 1987-10-05 | 1993-12-15 | Philips Patentverwaltung GmbH | Anordnung zur Untersuchung eines Körpers mit einer Strahlenquelle |
| US5028352A (en) | 1989-07-11 | 1991-07-02 | University Of New Mexico | Low density/low surface area silica-alumina composition |
| EP0753140A1 (en) * | 1995-01-27 | 1997-01-15 | Koninklijke Philips Electronics N.V. | Method for ge-xrf x-ray analysis of materials, and apparatus for carrying out the method |
| JP3468623B2 (ja) * | 1995-08-08 | 2003-11-17 | 理学電機株式会社 | Ｘ線回折装置の光学系切換装置 |
| US5619548A (en) | 1995-08-11 | 1997-04-08 | Oryx Instruments And Materials Corp. | X-ray thickness gauge |
| JP3529065B2 (ja) * | 1995-08-14 | 2004-05-24 | 理学電機株式会社 | Ｘ線小角散乱装置 |
| US6054712A (en) | 1998-01-23 | 2000-04-25 | Quanta Vision, Inc. | Inspection equipment using small-angle topography in determining an object's internal structure and composition |
| JP3710023B2 (ja) * | 1997-08-27 | 2005-10-26 | 株式会社リガク | クラツキ型スリット装置 |
| US6175117B1 (en) | 1998-01-23 | 2001-01-16 | Quanta Vision, Inc. | Tissue analysis apparatus |
| US6041099A (en) * | 1998-02-19 | 2000-03-21 | Osmic, Inc. | Single corner kirkpatrick-baez beam conditioning optic assembly |
| US6014423A (en) | 1998-02-19 | 2000-01-11 | Osmic, Inc. | Multiple corner Kirkpatrick-Baez beam conditioning optic assembly |
| US6621888B2 (en) * | 1998-06-18 | 2003-09-16 | American Science And Engineering, Inc. | X-ray inspection by coherent-scattering from variably disposed scatterers identified as suspect objects |
| EP1120086A4 (en) | 1998-09-17 | 2003-05-21 | Quanta Vision Inc | DEVICE FOR REDUCED ANGLE MAMMOGRAPHY AND VARIANTS |
| DE19955848A1 (de) * | 1998-11-17 | 2000-05-18 | Ifg Inst Fuer Geraetebau Gmbh | Verfahren zur röntgenologischen Abbildung von Untersuchungsobjekten mit geringen Dichteunterschieden sowie röntgenoptische Systeme |
| NL1015740C1 (nl) * | 1999-07-23 | 2000-09-27 | Koninkl Philips Electronics Nv | Stralingsanalysetoestel voorzien van een regelbare collimator. |
| US6330301B1 (en) | 1999-12-17 | 2001-12-11 | Osmic, Inc. | Optical scheme for high flux low-background two-dimensional small angle x-ray scattering |
| US6459761B1 (en) * | 2000-02-10 | 2002-10-01 | American Science And Engineering, Inc. | Spectrally shaped x-ray inspection system |
| US6453006B1 (en) * | 2000-03-16 | 2002-09-17 | Therma-Wave, Inc. | Calibration and alignment of X-ray reflectometric systems |
| JP3759421B2 (ja) * | 2000-04-10 | 2006-03-22 | 株式会社リガク | 小角散乱測定用のｘ線光学装置と多層膜ミラー |
| JP4514982B2 (ja) * | 2001-04-11 | 2010-07-28 | 株式会社リガク | 小角散乱測定装置 |
| JP3762665B2 (ja) * | 2001-07-03 | 2006-04-05 | 株式会社リガク | Ｘ線分析装置およびｘ線供給装置 |
| US6956928B2 (en) | 2003-05-05 | 2005-10-18 | Bruker Axs, Inc. | Vertical small angle x-ray scattering system |
| US7139366B1 (en) * | 2005-05-31 | 2006-11-21 | Osmic, Inc. | Two-dimensional small angle x-ray scattering camera |
-
2005
- 2005-05-31 US US11/142,862 patent/US7139366B1/en active Active
-
2006
- 2006-01-04 JP JP2008514618A patent/JP5214442B2/ja active Active
- 2006-01-04 WO PCT/US2006/000290 patent/WO2006130182A1/en active Application Filing
- 2006-01-04 EP EP06717483.9A patent/EP1886125B1/en active Active
- 2006-01-04 CA CA2610555A patent/CA2610555C/en active Active
-
2007
- 2007-11-30 US US11/948,304 patent/US7734011B2/en active Active
-
2010
- 2010-04-05 US US12/753,989 patent/US8094780B2/en active Active
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