JP2008513964A - 気化ゾーンへの粒子状材料の供給 - Google Patents

気化ゾーンへの粒子状材料の供給 Download PDF

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Publication number
JP2008513964A
JP2008513964A JP2007532493A JP2007532493A JP2008513964A JP 2008513964 A JP2008513964 A JP 2008513964A JP 2007532493 A JP2007532493 A JP 2007532493A JP 2007532493 A JP2007532493 A JP 2007532493A JP 2008513964 A JP2008513964 A JP 2008513964A
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Japan
Prior art keywords
particulate material
container
screw structure
organic
supply path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
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JP2007532493A
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English (en)
Japanese (ja)
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JP2008513964A5 (enExample
Inventor
ロング，マイケル
マシュー グレース，ジェレミー
エドワード コップ，ブルース
Original Assignee
イーストマン コダック カンパニー
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Priority claimed from US10/945,940 external-priority patent/US7288285B2/en
Application filed by イーストマン コダック カンパニー filed Critical イーストマン コダック カンパニー
Publication of JP2008513964A publication Critical patent/JP2008513964A/ja
Publication of JP2008513964A5 publication Critical patent/JP2008513964A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
JP2007532493A 2004-09-21 2005-09-16 気化ゾーンへの粒子状材料の供給 Pending JP2008513964A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/945,940 US7288285B2 (en) 2004-09-21 2004-09-21 Delivering organic powder to a vaporization zone
US11/134,654 US7501152B2 (en) 2004-09-21 2005-05-20 Delivering particulate material to a vaporization zone
PCT/US2005/033132 WO2006034019A2 (en) 2004-09-21 2005-09-16 Delivering particulate material to a vaporization zone

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2012132817A Division JP5480332B2 (ja) 2004-09-21 2012-06-12 気化ゾーンへの粒子状材料の供給

Publications (2)

Publication Number Publication Date
JP2008513964A true JP2008513964A (ja) 2008-05-01
JP2008513964A5 JP2008513964A5 (enExample) 2008-10-23

Family

ID=35759153

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2007532493A Pending JP2008513964A (ja) 2004-09-21 2005-09-16 気化ゾーンへの粒子状材料の供給
JP2012132817A Expired - Lifetime JP5480332B2 (ja) 2004-09-21 2012-06-12 気化ゾーンへの粒子状材料の供給

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2012132817A Expired - Lifetime JP5480332B2 (ja) 2004-09-21 2012-06-12 気化ゾーンへの粒子状材料の供給

Country Status (5)

Country Link
US (1) US7501152B2 (enExample)
EP (2) EP2239352B1 (enExample)
JP (2) JP2008513964A (enExample)
KR (2) KR20070053286A (enExample)
WO (1) WO2006034019A2 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009512786A (ja) * 2005-10-24 2009-03-26 イーストマン コダック カンパニー 気化ゾーンへの粒子状材料の供給
JP2009087869A (ja) * 2007-09-10 2009-04-23 Ulvac Japan Ltd 供給装置、蒸着装置
JP2013139637A (ja) * 2012-01-04 2013-07-18 Snu Precision Co Ltd 連続薄膜蒸着装置

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7501151B2 (en) * 2004-09-21 2009-03-10 Eastman Kodak Company Delivering particulate material to a vaporization zone
US20060099344A1 (en) 2004-11-09 2006-05-11 Eastman Kodak Company Controlling the vaporization of organic material
US7213347B2 (en) * 2005-05-03 2007-05-08 Eastman Kodak Company Metering material to promote rapid vaporization
WO2007135870A1 (ja) * 2006-05-19 2007-11-29 Ulvac, Inc. 有機蒸着材料用蒸着装置、有機薄膜の製造方法
US20080254217A1 (en) * 2007-04-16 2008-10-16 Boroson Michael L Fine control of vaporized organic material
JP4996452B2 (ja) * 2007-12-28 2012-08-08 株式会社アルバック 成膜源、成膜装置
JP4974877B2 (ja) * 2007-12-28 2012-07-11 株式会社アルバック 成膜源、成膜装置
US7883583B2 (en) * 2008-01-08 2011-02-08 Global Oled Technology Llc Vaporization apparatus with precise powder metering
US8048230B2 (en) * 2008-11-14 2011-11-01 Global Oled Technology Llc Metering and vaporizing particulate material
US8062427B2 (en) * 2008-11-14 2011-11-22 Global Oled Technology Llc Particulate material metering and vaporization
US7972443B2 (en) * 2008-11-14 2011-07-05 Global Oled Technology Llc Metering of particulate material and vaporization thereof
US20100206234A1 (en) * 2009-02-17 2010-08-19 Michael Long Simplified powder feeding and vaporization apparatus
CN101525743B (zh) * 2009-04-23 2011-06-15 浙江嘉远格隆能源股份有限公司 一种采用近空间升华技术在衬底沉积形成半导体薄膜的方法和装置
JP4974036B2 (ja) 2009-11-19 2012-07-11 株式会社ジャパンディスプレイセントラル 有機ｅｌ装置の製造方法
DE102011051263B4 (de) 2011-06-22 2022-08-11 Aixtron Se Vorrichtung zur Aerosolerzeugung und Abscheiden einer lichtemittierenden Schicht
DE102011051260A1 (de) 2011-06-22 2012-12-27 Aixtron Se Verfahren und Vorrichtung zum Abscheiden von OLEDs
DE102011051261A1 (de) 2011-06-22 2012-12-27 Aixtron Se Verfahren und Vorrichtung zum Abscheiden von OLEDs insbesondere Verdampfungsvorrichtung dazu
DE102011051931A1 (de) 2011-07-19 2013-01-24 Aixtron Se Vorrichtung und Verfahren zum Bestimmen des Dampfdrucks eines in einem Trägergasstrom verdampften Ausgangsstoffes
DE102020103822A1 (de) 2020-02-13 2021-08-19 Apeva Se Vorrichtung zum Verdampfen eines organischen Pulvers
DE102020116271A1 (de) 2020-06-19 2021-12-23 Apeva Se Vorrichtung und Verfahren zum Verdampfen eines organischen Pulvers
CN112359323B (zh) * 2020-10-28 2021-07-23 广西贝驰汽车科技有限公司 一种金属薄板表面处理用连续式真空镀膜装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06158279A (ja) * 1992-09-02 1994-06-07 Hoechst Ag 薄層の化学物質気相蒸着のための方法および装置
JPH06322521A (ja) * 1993-05-13 1994-11-22 Toyobo Co Ltd 連続蒸着方法およびその装置
JPH11213463A (ja) * 1998-01-27 1999-08-06 Matsushita Electric Ind Co Ltd 光記録媒体の製造方法及び製造装置
JP2001291672A (ja) * 2000-04-07 2001-10-19 Denso Corp 成膜装置
JP2003089865A (ja) * 2001-09-18 2003-03-28 Cluster Ion Beam Technology Kk 真空蒸着用蒸着材料収納容器及び真空蒸着装置、並びに真空蒸着装置への蒸着材料供給方法
JP2003321765A (ja) * 2002-04-30 2003-11-14 Sanyo Shinku Kogyo Kk 有機物の蒸着方法及びこの方法に用いられる蒸着装置ならびに蒸発源

Family Cites Families (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB502576A (en) 1937-10-14 1939-03-21 Daniel Gardner Improvements in or relating to electric furnaces
US2447789A (en) * 1945-03-23 1948-08-24 Polaroid Corp Evaporating crucible for coating apparatus
NL124075C (enExample) 1959-04-09
US3386853A (en) * 1965-12-28 1968-06-04 Paul E. Oberg Spiral vacuum deposition apparatus and method
US3567450A (en) 1968-02-20 1971-03-02 Eastman Kodak Co Photoconductive elements containing substituted triarylamine photoconductors
US3658520A (en) 1968-02-20 1972-04-25 Eastman Kodak Co Photoconductive elements containing as photoconductors triarylamines substituted by active hydrogen-containing groups
JPS5651570A (en) * 1979-09-29 1981-05-09 Clarion Co Ltd Vapor depositing method
US4356429A (en) 1980-07-17 1982-10-26 Eastman Kodak Company Organic electroluminescent cell
JPS57164978A (en) * 1981-04-02 1982-10-09 Mitsubishi Heavy Ind Ltd Wire rod for vapor deposition
US4539507A (en) 1983-03-25 1985-09-03 Eastman Kodak Company Organic electroluminescent devices having improved power conversion efficiencies
DE3518323A1 (de) 1985-05-22 1986-11-27 SEVAR Entsorgungsanlagen GmbH, 8590 Marktredwitz Verfahren und vorrichtung zum trocknen von klaerschlamm
US4885221A (en) 1986-12-06 1989-12-05 Kabushiki Kaisha Toshiba Electrophotography apparatus and electrophtographic process for developing positive image from positive or negative film
US4720432A (en) 1987-02-11 1988-01-19 Eastman Kodak Company Electroluminescent device with organic luminescent medium
US4885211A (en) * 1987-02-11 1989-12-05 Eastman Kodak Company Electroluminescent device with improved cathode
US4769292A (en) * 1987-03-02 1988-09-06 Eastman Kodak Company Electroluminescent device with modified thin film luminescent zone
KR920003591B1 (ko) 1988-04-11 1992-05-04 미쯔비시주우고오교오 가부시기가이샤 연속진공증착장치
US5263267A (en) * 1989-03-20 1993-11-23 Judco Manufacturing, Inc. Method and apparatus for reducing volatile content of sewage sludge and other feed materials
US5061569A (en) 1990-07-26 1991-10-29 Eastman Kodak Company Electroluminescent device with organic electroluminescent medium
US5059862A (en) 1990-07-26 1991-10-22 Eastman Kodak Company Electroluminescent device with improved cathode
US5059861A (en) 1990-07-26 1991-10-22 Eastman Kodak Company Organic electroluminescent device with stabilizing cathode capping layer
US5151629A (en) 1991-08-01 1992-09-29 Eastman Kodak Company Blue emitting internal junction organic electroluminescent device (I)
US5150006A (en) 1991-08-01 1992-09-22 Eastman Kodak Company Blue emitting internal junction organic electroluminescent device (II)
US5141671A (en) 1991-08-01 1992-08-25 Eastman Kodak Company Mixed ligand 8-quinolinolato aluminum chelate luminophors
US5294870A (en) 1991-12-30 1994-03-15 Eastman Kodak Company Organic electroluminescent multicolor image display device
US5276380A (en) 1991-12-30 1994-01-04 Eastman Kodak Company Organic electroluminescent image display device
EP0579151B1 (en) 1992-07-13 1996-10-09 Eastman Kodak Company An internal junction organic electroluminescent device with a novel composition
US5405709A (en) 1993-09-13 1995-04-11 Eastman Kodak Company White light emitting internal junction organic electroluminescent device
JP3813217B2 (ja) 1995-03-13 2006-08-23 パイオニア株式会社 有機エレクトロルミネッセンスディスプレイパネルの製造方法
US5475144A (en) * 1994-06-08 1995-12-12 The University Of Delaware Catalyst and process for synthesis of ketenes from carboxylic acids
US5593788A (en) 1996-04-25 1997-01-14 Eastman Kodak Company Organic electroluminescent devices with high operational stability
JPH0995775A (ja) * 1995-10-02 1997-04-08 Chugai Ro Co Ltd 連続真空蒸着装置のるつぼ機構
US5683823A (en) 1996-01-26 1997-11-04 Eastman Kodak Company White light-emitting organic electroluminescent devices
US5677572A (en) 1996-07-29 1997-10-14 Eastman Kodak Company Bilayer electrode on a n-type semiconductor
US5776623A (en) 1996-07-29 1998-07-07 Eastman Kodak Company Transparent electron-injecting electrode for use in an electroluminescent device
US5645948A (en) 1996-08-20 1997-07-08 Eastman Kodak Company Blue organic electroluminescent devices
WO1998030071A1 (en) 1996-12-28 1998-07-09 Tdk Corporation Organic electroluminescent elements
JP3189038B2 (ja) * 1997-01-14 2001-07-16 住友重機械工業株式会社 真空成膜装置の材料供給装置
US5935720A (en) 1997-04-07 1999-08-10 Eastman Kodak Company Red organic electroluminescent devices
US5928802A (en) 1997-05-16 1999-07-27 Eastman Kodak Company Efficient blue organic electroluminescent devices
US5755999A (en) 1997-05-16 1998-05-26 Eastman Kodak Company Blue luminescent materials for organic electroluminescent devices
GB9711237D0 (en) 1997-06-02 1997-07-23 Isis Innovation Organomettallic Complexes
US5945163A (en) * 1998-02-19 1999-08-31 First Solar, Llc Apparatus and method for depositing a material on a substrate
US5935721A (en) 1998-03-20 1999-08-10 Eastman Kodak Company Organic electroluminescent elements for stable electroluminescent
US6140763A (en) 1998-07-28 2000-10-31 Eastman Kodak Company Interfacial electron-injecting layer formed from a doped cathode for organic light-emitting structure
JP2000068055A (ja) 1998-08-26 2000-03-03 Tdk Corp 有機ｅｌ素子用蒸発源、この有機ｅｌ素子用蒸発源を用いた有機ｅｌ素子の製造装置および製造方法
EP1029909A4 (en) 1998-09-09 2007-01-10 Idemitsu Kosan Co ORGANIC ELECTROLUMINESCENT DEVICE AND PHENYLENEDIAMINE DERIVATIVE
GB9820805D0 (en) 1998-09-25 1998-11-18 Isis Innovation Divalent lanthanide metal complexes
US6208075B1 (en) 1998-11-05 2001-03-27 Eastman Kodak Company Conductive fluorocarbon polymer and method of making same
US6361886B2 (en) 1998-12-09 2002-03-26 Eastman Kodak Company Electroluminescent device with improved hole transport layer
US6020078A (en) 1998-12-18 2000-02-01 Eastman Kodak Company Green organic electroluminescent devices
US6114088A (en) 1999-01-15 2000-09-05 3M Innovative Properties Company Thermal transfer element for forming multilayer devices
BRPI0009215B1 (pt) 1999-03-23 2017-05-09 Univ Southern California complexos metálicos ciclometalizados como dopantes fosforescentes em diodos emissores de luz orgânicos
EP2306495B1 (en) 1999-05-13 2017-04-19 The Trustees of Princeton University Very high efficiency organic light emitting devices based on electrophosphorescence
JP2003293121A (ja) * 2002-04-05 2003-10-15 Cluster Ion Beam Technology Kk 蒸着材料供給手段を備えた蒸着用坩堝
US7501151B2 (en) * 2004-09-21 2009-03-10 Eastman Kodak Company Delivering particulate material to a vaporization zone

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06158279A (ja) * 1992-09-02 1994-06-07 Hoechst Ag 薄層の化学物質気相蒸着のための方法および装置
JPH06322521A (ja) * 1993-05-13 1994-11-22 Toyobo Co Ltd 連続蒸着方法およびその装置
JPH11213463A (ja) * 1998-01-27 1999-08-06 Matsushita Electric Ind Co Ltd 光記録媒体の製造方法及び製造装置
JP2001291672A (ja) * 2000-04-07 2001-10-19 Denso Corp 成膜装置
JP2003089865A (ja) * 2001-09-18 2003-03-28 Cluster Ion Beam Technology Kk 真空蒸着用蒸着材料収納容器及び真空蒸着装置、並びに真空蒸着装置への蒸着材料供給方法
JP2003321765A (ja) * 2002-04-30 2003-11-14 Sanyo Shinku Kogyo Kk 有機物の蒸着方法及びこの方法に用いられる蒸着装置ならびに蒸発源

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009512786A (ja) * 2005-10-24 2009-03-26 イーストマン コダック カンパニー 気化ゾーンへの粒子状材料の供給
JP2009087869A (ja) * 2007-09-10 2009-04-23 Ulvac Japan Ltd 供給装置、蒸着装置
JP2013139637A (ja) * 2012-01-04 2013-07-18 Snu Precision Co Ltd 連続薄膜蒸着装置

Also Published As

Publication number Publication date
US20060062920A1 (en) 2006-03-23
KR20120059628A (ko) 2012-06-08
JP2012229489A (ja) 2012-11-22
EP2239352A3 (en) 2011-06-08
KR20070053286A (ko) 2007-05-23
US7501152B2 (en) 2009-03-10
KR101348672B1 (ko) 2014-01-08
EP1794345A2 (en) 2007-06-13
EP2239352B1 (en) 2013-06-05
WO2006034019A3 (en) 2006-11-09
EP2239352A2 (en) 2010-10-13
JP5480332B2 (ja) 2014-04-23
EP1794345B1 (en) 2015-11-18
WO2006034019A2 (en) 2006-03-30

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