JPS5651570A - Vapor depositing method - Google Patents
Vapor depositing methodInfo
- Publication number
- JPS5651570A JPS5651570A JP12478579A JP12478579A JPS5651570A JP S5651570 A JPS5651570 A JP S5651570A JP 12478579 A JP12478579 A JP 12478579A JP 12478579 A JP12478579 A JP 12478579A JP S5651570 A JPS5651570 A JP S5651570A
- Authority
- JP
- Japan
- Prior art keywords
- vapor depositing
- powder
- depositing material
- tantalum
- subliming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE:To heat vapor depositing material uniformly and to prevent the scattering of the material, by mixing powdered vapor depositing material with metallic powder which causes no chemical reaction at the subliming temp. of the vapor depositing material, and by heating the mixture contained in a boat for vapor depositing source. CONSTITUTION:Vapor depositing material 2 such as WO3, SiO2, ZnS of particle size not coarser than 400 mesh is mixed with high melting metal such as tantalum 3 of particle size of 150 mesh in a volume ratio 5:1, and is placed in a boat 1 for vapor depositing source. When the boad 1 is heated, the vapor depositing material powder 2 is heated uniformly because of the tantalum 3 powder having high heat conductivity. On the other hand the scattering of vapor depositing material powder 2 which does not attain the subliming temp. is prevented because the powder 2 is restrained by the weight of the tantalum powder 3.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12478579A JPS5651570A (en) | 1979-09-29 | 1979-09-29 | Vapor depositing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12478579A JPS5651570A (en) | 1979-09-29 | 1979-09-29 | Vapor depositing method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5651570A true JPS5651570A (en) | 1981-05-09 |
Family
ID=14894055
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12478579A Pending JPS5651570A (en) | 1979-09-29 | 1979-09-29 | Vapor depositing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5651570A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006034028A3 (en) * | 2004-09-21 | 2006-07-06 | Eastman Kodak Co | Delivering particulate material to a vaporization source |
WO2006034019A3 (en) * | 2004-09-21 | 2006-11-09 | Eastman Kodak Co | Delivering particulate material to a vaporization zone |
US7288285B2 (en) | 2004-09-21 | 2007-10-30 | Eastman Kodak Company | Delivering organic powder to a vaporization zone |
US7288286B2 (en) | 2004-09-21 | 2007-10-30 | Eastman Kodak Company | Delivering organic powder to a vaporization zone |
-
1979
- 1979-09-29 JP JP12478579A patent/JPS5651570A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006034028A3 (en) * | 2004-09-21 | 2006-07-06 | Eastman Kodak Co | Delivering particulate material to a vaporization source |
WO2006034019A3 (en) * | 2004-09-21 | 2006-11-09 | Eastman Kodak Co | Delivering particulate material to a vaporization zone |
US7288285B2 (en) | 2004-09-21 | 2007-10-30 | Eastman Kodak Company | Delivering organic powder to a vaporization zone |
US7288286B2 (en) | 2004-09-21 | 2007-10-30 | Eastman Kodak Company | Delivering organic powder to a vaporization zone |
EP2239352A3 (en) * | 2004-09-21 | 2011-06-08 | Global OLED Technology LLC | Delivering particulate material to a vaporization zone |
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