KR20070053286A - 미립자 물질의 증발 대역으로의 전달 - Google Patents

미립자 물질의 증발 대역으로의 전달 Download PDF

Info

Publication number
KR20070053286A
KR20070053286A KR1020077006394A KR20077006394A KR20070053286A KR 20070053286 A KR20070053286 A KR 20070053286A KR 1020077006394 A KR1020077006394 A KR 1020077006394A KR 20077006394 A KR20077006394 A KR 20077006394A KR 20070053286 A KR20070053286 A KR 20070053286A
Authority
KR
South Korea
Prior art keywords
particulate material
auger
container
organic
vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020077006394A
Other languages
English (en)
Korean (ko)
Inventor
마이클 롱
제레미 매튜 그레이스
브루스 에드워드 코페
Original Assignee
이스트맨 코닥 캄파니
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/945,940 external-priority patent/US7288285B2/en
Application filed by 이스트맨 코닥 캄파니 filed Critical 이스트맨 코닥 캄파니
Publication of KR20070053286A publication Critical patent/KR20070053286A/ko
Ceased legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
KR1020077006394A 2004-09-21 2005-09-16 미립자 물질의 증발 대역으로의 전달 Ceased KR20070053286A (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US10/945,940 2004-09-21
US10/945,940 US7288285B2 (en) 2004-09-21 2004-09-21 Delivering organic powder to a vaporization zone
US11/134,654 US7501152B2 (en) 2004-09-21 2005-05-20 Delivering particulate material to a vaporization zone
US11/134,654 2005-05-20

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020127010306A Division KR101348672B1 (ko) 2004-09-21 2005-09-16 미립자 물질을 증발시키고 이를 표면상에 응축시켜 층을 형성시키는 방법

Publications (1)

Publication Number Publication Date
KR20070053286A true KR20070053286A (ko) 2007-05-23

Family

ID=35759153

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020077006394A Ceased KR20070053286A (ko) 2004-09-21 2005-09-16 미립자 물질의 증발 대역으로의 전달
KR1020127010306A Expired - Lifetime KR101348672B1 (ko) 2004-09-21 2005-09-16 미립자 물질을 증발시키고 이를 표면상에 응축시켜 층을 형성시키는 방법

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020127010306A Expired - Lifetime KR101348672B1 (ko) 2004-09-21 2005-09-16 미립자 물질을 증발시키고 이를 표면상에 응축시켜 층을 형성시키는 방법

Country Status (5)

Country Link
US (1) US7501152B2 (enExample)
EP (2) EP2239352B1 (enExample)
JP (2) JP2008513964A (enExample)
KR (2) KR20070053286A (enExample)
WO (1) WO2006034019A2 (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7501151B2 (en) * 2004-09-21 2009-03-10 Eastman Kodak Company Delivering particulate material to a vaporization zone
US20060099344A1 (en) 2004-11-09 2006-05-11 Eastman Kodak Company Controlling the vaporization of organic material
US7213347B2 (en) * 2005-05-03 2007-05-08 Eastman Kodak Company Metering material to promote rapid vaporization
US7993459B2 (en) 2005-10-24 2011-08-09 Global Oled Technology Llc Delivering particulate material to a vaporization zone
WO2007135870A1 (ja) * 2006-05-19 2007-11-29 Ulvac, Inc. 有機蒸着材料用蒸着装置、有機薄膜の製造方法
US20080254217A1 (en) * 2007-04-16 2008-10-16 Boroson Michael L Fine control of vaporized organic material
JP4974832B2 (ja) * 2007-09-10 2012-07-11 株式会社アルバック 蒸着源、蒸着装置
JP4996452B2 (ja) * 2007-12-28 2012-08-08 株式会社アルバック 成膜源、成膜装置
JP4974877B2 (ja) * 2007-12-28 2012-07-11 株式会社アルバック 成膜源、成膜装置
US7883583B2 (en) * 2008-01-08 2011-02-08 Global Oled Technology Llc Vaporization apparatus with precise powder metering
US8048230B2 (en) * 2008-11-14 2011-11-01 Global Oled Technology Llc Metering and vaporizing particulate material
US8062427B2 (en) * 2008-11-14 2011-11-22 Global Oled Technology Llc Particulate material metering and vaporization
US7972443B2 (en) * 2008-11-14 2011-07-05 Global Oled Technology Llc Metering of particulate material and vaporization thereof
US20100206234A1 (en) * 2009-02-17 2010-08-19 Michael Long Simplified powder feeding and vaporization apparatus
CN101525743B (zh) * 2009-04-23 2011-06-15 浙江嘉远格隆能源股份有限公司 一种采用近空间升华技术在衬底沉积形成半导体薄膜的方法和装置
JP4974036B2 (ja) 2009-11-19 2012-07-11 株式会社ジャパンディスプレイセントラル 有機ｅｌ装置の製造方法
DE102011051263B4 (de) 2011-06-22 2022-08-11 Aixtron Se Vorrichtung zur Aerosolerzeugung und Abscheiden einer lichtemittierenden Schicht
DE102011051260A1 (de) 2011-06-22 2012-12-27 Aixtron Se Verfahren und Vorrichtung zum Abscheiden von OLEDs
DE102011051261A1 (de) 2011-06-22 2012-12-27 Aixtron Se Verfahren und Vorrichtung zum Abscheiden von OLEDs insbesondere Verdampfungsvorrichtung dazu
DE102011051931A1 (de) 2011-07-19 2013-01-24 Aixtron Se Vorrichtung und Verfahren zum Bestimmen des Dampfdrucks eines in einem Trägergasstrom verdampften Ausgangsstoffes
KR101450598B1 (ko) * 2012-01-04 2014-10-15 에스엔유 프리시젼 주식회사 연속박막증착장치
DE102020103822A1 (de) 2020-02-13 2021-08-19 Apeva Se Vorrichtung zum Verdampfen eines organischen Pulvers
DE102020116271A1 (de) 2020-06-19 2021-12-23 Apeva Se Vorrichtung und Verfahren zum Verdampfen eines organischen Pulvers
CN112359323B (zh) * 2020-10-28 2021-07-23 广西贝驰汽车科技有限公司 一种金属薄板表面处理用连续式真空镀膜装置

Family Cites Families (61)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB502576A (en) 1937-10-14 1939-03-21 Daniel Gardner Improvements in or relating to electric furnaces
US2447789A (en) * 1945-03-23 1948-08-24 Polaroid Corp Evaporating crucible for coating apparatus
NL124075C (enExample) 1959-04-09
US3386853A (en) * 1965-12-28 1968-06-04 Paul E. Oberg Spiral vacuum deposition apparatus and method
US3567450A (en) 1968-02-20 1971-03-02 Eastman Kodak Co Photoconductive elements containing substituted triarylamine photoconductors
US3658520A (en) 1968-02-20 1972-04-25 Eastman Kodak Co Photoconductive elements containing as photoconductors triarylamines substituted by active hydrogen-containing groups
JPS5651570A (en) * 1979-09-29 1981-05-09 Clarion Co Ltd Vapor depositing method
US4356429A (en) 1980-07-17 1982-10-26 Eastman Kodak Company Organic electroluminescent cell
JPS57164978A (en) * 1981-04-02 1982-10-09 Mitsubishi Heavy Ind Ltd Wire rod for vapor deposition
US4539507A (en) 1983-03-25 1985-09-03 Eastman Kodak Company Organic electroluminescent devices having improved power conversion efficiencies
DE3518323A1 (de) 1985-05-22 1986-11-27 SEVAR Entsorgungsanlagen GmbH, 8590 Marktredwitz Verfahren und vorrichtung zum trocknen von klaerschlamm
US4885221A (en) 1986-12-06 1989-12-05 Kabushiki Kaisha Toshiba Electrophotography apparatus and electrophtographic process for developing positive image from positive or negative film
US4720432A (en) 1987-02-11 1988-01-19 Eastman Kodak Company Electroluminescent device with organic luminescent medium
US4885211A (en) * 1987-02-11 1989-12-05 Eastman Kodak Company Electroluminescent device with improved cathode
US4769292A (en) * 1987-03-02 1988-09-06 Eastman Kodak Company Electroluminescent device with modified thin film luminescent zone
KR920003591B1 (ko) 1988-04-11 1992-05-04 미쯔비시주우고오교오 가부시기가이샤 연속진공증착장치
US5263267A (en) * 1989-03-20 1993-11-23 Judco Manufacturing, Inc. Method and apparatus for reducing volatile content of sewage sludge and other feed materials
US5061569A (en) 1990-07-26 1991-10-29 Eastman Kodak Company Electroluminescent device with organic electroluminescent medium
US5059862A (en) 1990-07-26 1991-10-22 Eastman Kodak Company Electroluminescent device with improved cathode
US5059861A (en) 1990-07-26 1991-10-22 Eastman Kodak Company Organic electroluminescent device with stabilizing cathode capping layer
US5151629A (en) 1991-08-01 1992-09-29 Eastman Kodak Company Blue emitting internal junction organic electroluminescent device (I)
US5150006A (en) 1991-08-01 1992-09-22 Eastman Kodak Company Blue emitting internal junction organic electroluminescent device (II)
US5141671A (en) 1991-08-01 1992-08-25 Eastman Kodak Company Mixed ligand 8-quinolinolato aluminum chelate luminophors
US5294870A (en) 1991-12-30 1994-03-15 Eastman Kodak Company Organic electroluminescent multicolor image display device
US5276380A (en) 1991-12-30 1994-01-04 Eastman Kodak Company Organic electroluminescent image display device
EP0579151B1 (en) 1992-07-13 1996-10-09 Eastman Kodak Company An internal junction organic electroluminescent device with a novel composition
EP0585848A1 (de) * 1992-09-02 1994-03-09 Hoechst Aktiengesellschaft Verfahren und Vorrichtung zur chemischen Gasphasenabscheidung dünner Schichten
JPH06322521A (ja) * 1993-05-13 1994-11-22 Toyobo Co Ltd 連続蒸着方法およびその装置
US5405709A (en) 1993-09-13 1995-04-11 Eastman Kodak Company White light emitting internal junction organic electroluminescent device
JP3813217B2 (ja) 1995-03-13 2006-08-23 パイオニア株式会社 有機エレクトロルミネッセンスディスプレイパネルの製造方法
US5475144A (en) * 1994-06-08 1995-12-12 The University Of Delaware Catalyst and process for synthesis of ketenes from carboxylic acids
US5593788A (en) 1996-04-25 1997-01-14 Eastman Kodak Company Organic electroluminescent devices with high operational stability
JPH0995775A (ja) * 1995-10-02 1997-04-08 Chugai Ro Co Ltd 連続真空蒸着装置のるつぼ機構
US5683823A (en) 1996-01-26 1997-11-04 Eastman Kodak Company White light-emitting organic electroluminescent devices
US5677572A (en) 1996-07-29 1997-10-14 Eastman Kodak Company Bilayer electrode on a n-type semiconductor
US5776623A (en) 1996-07-29 1998-07-07 Eastman Kodak Company Transparent electron-injecting electrode for use in an electroluminescent device
US5645948A (en) 1996-08-20 1997-07-08 Eastman Kodak Company Blue organic electroluminescent devices
WO1998030071A1 (en) 1996-12-28 1998-07-09 Tdk Corporation Organic electroluminescent elements
JP3189038B2 (ja) * 1997-01-14 2001-07-16 住友重機械工業株式会社 真空成膜装置の材料供給装置
US5935720A (en) 1997-04-07 1999-08-10 Eastman Kodak Company Red organic electroluminescent devices
US5928802A (en) 1997-05-16 1999-07-27 Eastman Kodak Company Efficient blue organic electroluminescent devices
US5755999A (en) 1997-05-16 1998-05-26 Eastman Kodak Company Blue luminescent materials for organic electroluminescent devices
GB9711237D0 (en) 1997-06-02 1997-07-23 Isis Innovation Organomettallic Complexes
JP3586551B2 (ja) * 1998-01-27 2004-11-10 松下電器産業株式会社 光記録媒体の製造方法及び製造装置
US5945163A (en) * 1998-02-19 1999-08-31 First Solar, Llc Apparatus and method for depositing a material on a substrate
US5935721A (en) 1998-03-20 1999-08-10 Eastman Kodak Company Organic electroluminescent elements for stable electroluminescent
US6140763A (en) 1998-07-28 2000-10-31 Eastman Kodak Company Interfacial electron-injecting layer formed from a doped cathode for organic light-emitting structure
JP2000068055A (ja) 1998-08-26 2000-03-03 Tdk Corp 有機ｅｌ素子用蒸発源、この有機ｅｌ素子用蒸発源を用いた有機ｅｌ素子の製造装置および製造方法
EP1029909A4 (en) 1998-09-09 2007-01-10 Idemitsu Kosan Co ORGANIC ELECTROLUMINESCENT DEVICE AND PHENYLENEDIAMINE DERIVATIVE
GB9820805D0 (en) 1998-09-25 1998-11-18 Isis Innovation Divalent lanthanide metal complexes
US6208075B1 (en) 1998-11-05 2001-03-27 Eastman Kodak Company Conductive fluorocarbon polymer and method of making same
US6361886B2 (en) 1998-12-09 2002-03-26 Eastman Kodak Company Electroluminescent device with improved hole transport layer
US6020078A (en) 1998-12-18 2000-02-01 Eastman Kodak Company Green organic electroluminescent devices
US6114088A (en) 1999-01-15 2000-09-05 3M Innovative Properties Company Thermal transfer element for forming multilayer devices
BRPI0009215B1 (pt) 1999-03-23 2017-05-09 Univ Southern California complexos metálicos ciclometalizados como dopantes fosforescentes em diodos emissores de luz orgânicos
EP2306495B1 (en) 1999-05-13 2017-04-19 The Trustees of Princeton University Very high efficiency organic light emitting devices based on electrophosphorescence
JP3567851B2 (ja) * 2000-04-07 2004-09-22 株式会社デンソー 成膜装置
JP2003089865A (ja) * 2001-09-18 2003-03-28 Cluster Ion Beam Technology Kk 真空蒸着用蒸着材料収納容器及び真空蒸着装置、並びに真空蒸着装置への蒸着材料供給方法
JP2003293121A (ja) * 2002-04-05 2003-10-15 Cluster Ion Beam Technology Kk 蒸着材料供給手段を備えた蒸着用坩堝
JP2003321765A (ja) * 2002-04-30 2003-11-14 Sanyo Shinku Kogyo Kk 有機物の蒸着方法及びこの方法に用いられる蒸着装置ならびに蒸発源
US7501151B2 (en) * 2004-09-21 2009-03-10 Eastman Kodak Company Delivering particulate material to a vaporization zone

Also Published As

Publication number Publication date
US20060062920A1 (en) 2006-03-23
JP2008513964A (ja) 2008-05-01
KR20120059628A (ko) 2012-06-08
JP2012229489A (ja) 2012-11-22
EP2239352A3 (en) 2011-06-08
US7501152B2 (en) 2009-03-10
KR101348672B1 (ko) 2014-01-08
EP1794345A2 (en) 2007-06-13
EP2239352B1 (en) 2013-06-05
WO2006034019A3 (en) 2006-11-09
EP2239352A2 (en) 2010-10-13
JP5480332B2 (ja) 2014-04-23
EP1794345B1 (en) 2015-11-18
WO2006034019A2 (en) 2006-03-30

Similar Documents

Publication Publication Date Title
KR101348672B1 (ko) 미립자 물질을 증발시키고 이를 표면상에 응축시켜 층을 형성시키는 방법
US7288285B2 (en) Delivering organic powder to a vaporization zone
US7288286B2 (en) Delivering organic powder to a vaporization zone
KR101174296B1 (ko) 미립자 물질의 증발 소스로의 전달
JP5054020B2 (ja) シールされた補充容器を用いた堆積システム
JP5189658B2 (ja) 粉末を精密に計量する気化装置
US7993459B2 (en) Delivering particulate material to a vaporization zone

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20070320

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
N231 Notification of change of applicant
PN2301 Change of applicant

Patent event date: 20100405

Comment text: Notification of Change of Applicant

Patent event code: PN23011R01D

A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20100629

Comment text: Request for Examination of Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20110728

Patent event code: PE09021S01D

AMND Amendment
E601 Decision to refuse application
PE0601 Decision on rejection of patent

Patent event date: 20120326

Comment text: Decision to Refuse Application

Patent event code: PE06012S01D

Patent event date: 20110728

Comment text: Notification of reason for refusal

Patent event code: PE06011S01I

A107 Divisional application of patent
AMND Amendment
J201 Request for trial against refusal decision
PA0104 Divisional application for international application

Comment text: Divisional Application for International Patent

Patent event code: PA01041R01D

Patent event date: 20120420

PJ0201 Trial against decision of rejection

Patent event date: 20120420

Comment text: Request for Trial against Decision on Refusal

Patent event code: PJ02012R01D

Patent event date: 20120326

Comment text: Decision to Refuse Application

Patent event code: PJ02011S01I

Appeal kind category: Appeal against decision to decline refusal

Decision date: 20131125

Appeal identifier: 2012101003728

Request date: 20120420

PB0901 Examination by re-examination before a trial

Comment text: Amendment to Specification, etc.

Patent event date: 20120420

Patent event code: PB09011R02I

Comment text: Request for Trial against Decision on Refusal

Patent event date: 20120420

Patent event code: PB09011R01I

Comment text: Amendment to Specification, etc.

Patent event date: 20110923

Patent event code: PB09011R02I

B601 Maintenance of original decision after re-examination before a trial
PB0601 Maintenance of original decision after re-examination before a trial

Comment text: Report of Result of Re-examination before a Trial

Patent event code: PB06011S01D

Patent event date: 20120612

J301 Trial decision

Free format text: TRIAL DECISION FOR APPEAL AGAINST DECISION TO DECLINE REFUSAL REQUESTED 20120420

Effective date: 20131125

Free format text: TRIAL NUMBER: 2012101003728; TRIAL DECISION FOR APPEAL AGAINST DECISION TO DECLINE REFUSAL REQUESTED 20120420

Effective date: 20131125

PJ1301 Trial decision

Patent event code: PJ13011S01D

Patent event date: 20131129

Comment text: Trial Decision on Objection to Decision on Refusal

Appeal kind category: Appeal against decision to decline refusal

Request date: 20120420

Decision date: 20131125

Appeal identifier: 2012101003728