JP2012229489A - 気化ゾーンへの粒子状材料の供給 - Google Patents
気化ゾーンへの粒子状材料の供給 Download PDFInfo
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- JP2012229489A JP2012229489A JP2012132817A JP2012132817A JP2012229489A JP 2012229489 A JP2012229489 A JP 2012229489A JP 2012132817 A JP2012132817 A JP 2012132817A JP 2012132817 A JP2012132817 A JP 2012132817A JP 2012229489 A JP2012229489 A JP 2012229489A
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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Abstract
【解決手段】粒子状材料を気化させて表面上に凝縮させることで層を形成する1つの方法では、ある量の粒子状材料を、その粒子状材料が自由に通過できるサイズの開口部を有する第1の容器50に供給する。その粒子状材料は、開口部を通じてスクリュー構造80の中に移される。そのスクリュー構造の少なくとも一部を回転させて粒子状材料を第1の容器から供給路60に沿って気化ゾーンに移し、その気化ゾーンでその粒子状材料の少なくとも1つの成分を気化させて表面に供給することで層を形成する。スクリュー構造のサイズは、粒子状材料が開口部を自由に通過するのが容易になるように選択されている。
【選択図】図3
Description
(a)ある量の粒子状材料を、その粒子状材料が自由に通過できるサイズの開口部を有する第1の容器に供給し;
(b)上記開口部を通じてその粒子状材料をスクリュー構造の中に移し;
(c)そのスクリュー構造の少なくとも一部を回転させて上記粒子状材料を第1の容器から供給路に沿って気化ゾーンに移し、その気化ゾーンでその粒子状材料の少なくとも1つの成分を気化させて表面に供給することで層を形成する操作を含んでおり、
上記スクリュー構造のサイズが、上記粒子状材料が上記開口部を自由に通過するのが容易になるように選択されている方法によって達成される。
R1とR2は、それぞれ独立に、水素原子、アリール基、アルキル基のいずれかを表わすか、R1とR2は、合わさって、シクロアルキル基を完成させる原子を表わし;
R3とR4は、それぞれ独立にアリール基を表わし、そのアリール基は、構造式(C):
R5とR6は、独立に、アリール基の中から選択される。一実施態様では、R5とR6のうちの少なくとも一方は、多環式縮合環構造(例えばナフタレン)を含んでいる。
それぞれのAreは、独立に、アリーレン基(例えばフェニレン部分またはアントラセン部分)の中から選択され;
nは1〜4の整数であり;
Ar、R7、R8、R9は、独立に、アリール基の中から選択される。
6 蒸発源
7 蒸発源
8 蒸発源
9 気柱
10 気化装置
15 基板
20 マニホールド
30 開口部
40 供給装置
50 第1の容器
60 供給路
70 第2の容器
80 スクリュー構造
85 オージェ・スクリュー
85a オージェ・スクリュー
85b オージェ・スクリュー
85c オージェ・スクリュー
90 モータ
95 スクリュー構造
100 有機粒子状材料
105 スクリュー構造
110 スクリーン
115 螺旋状のネジ山
120 スクリーン
125 中心部
130 ピエゾ電気構造
135 山なし部分
140 ピエゾ電気構造
150 ピエゾ電気構造
155 ピエゾ電気構造
160 有機粒子状材料
170 加熱素子
180 基部
190 底部
210 回転する螺旋式装置
220 ギア・ドライバ
230 開口部
240 モータ
250 第3の容器
260 第1の供給路
265 第2の供給路
270 真空に曝露するための開口部
275 負荷ロック
280 蒸着チェンバー
285 OLED基板
295 並進移動装置
300 真空源
310 OLEDデバイス
320 基板
330 アノード
335 正孔注入層
340 正孔輸送層
350 発光層
355 電子輸送層
360 電子注入層
370 有機層
390 カソード
Claims (41)
- 粒子状材料を気化させて表面上に凝縮させることで層を形成する方法であって、
(a)ある量の粒子状材料を、その粒子状材料が自由に通過できるサイズの開口部を有する第1の容器に供給し;
(b)上記開口部を通じてその粒子状材料をスクリュー構造の中に移し;
(c)そのスクリュー構造の少なくとも一部を回転させて上記粒子状材料を第1の容器から供給路に沿って気化ゾーンに移し、その気化ゾーンでその粒子状材料の少なくとも1つの成分を気化させて表面に供給することで層を形成する操作を含んでおり、
上記スクリュー構造のサイズが、上記粒子状材料が上記開口部を自由に通過するのが容易になるように選択されている方法。 - 上記粒子状材料が有機粒子状材料を含む、請求項1に記載の方法。
- 上記スクリュー構造が、そのスクリュー構造の軸に対して4〜15°の角度を有する螺旋状のネジ山を備える、請求項1に記載の方法。
- 上記スクリュー構造の表面を処理する、請求項1に記載の方法。
- 上記スクリュー構造の表面を窒化チタンでコーティングする、請求項4に記載の方法。
- 上記スクリュー構造の表面を電気研磨する、請求項4に記載の方法。
- 第1の容器を大気圧よりも低い圧力に維持する、請求項1に記載の方法。
- 上記スクリュー構造を回転させる上記操作が、増分方式でそのスクリュー構造を繰り返し回転させる操作を含む、請求項1に記載の方法。
- 上記気化ゾーンに加熱素子を含める、請求項1に記載の方法。
- 上記供給路内の上記粒子状材料の温度を望ましい気化温度よりも低い温度に維持する、請求項1に記載の方法。
- 上記粒子状材料を制御された体積速度または圧力で計量して上記気化ゾーンに入れる操作をさらに含む、請求項1に記載の方法。
- 粒子状材料を収容するための第2の容器を用意し、その第2の容器から第1の容器に粒子状材料を移す操作をさらに含む、請求項1に記載の方法。
- 第2の容器から第1の容器に移される上記粒子状材料を計量し、その第1の容器の中にある粒子状材料の体積を実質的に一定にする操作をさらに含む、請求項12に記載の方法。
- 第1の容器の中にある粒子状材料の量を検知する操作をさらに含む、請求項13に記載の方法。
- 上記スクリュー構造が第1の容器の内部を貫通している、請求項1に記載の方法。
- 開口部を通じて粒子状材料を移す上記ステップが、振動装置を用いてその粒子状材料を振動させる操作をさらに含む、請求項1に記載の方法。
- 上記振動装置が、ピエゾ電気構造または回転する螺旋式装置を備える、請求項16に記載の方法。
- 上記粒子状材料を加熱し、吸着したガスまたは不純物を除去するステップをさらに含む、請求項1に記載の方法。
- 上記加熱ステップを、上記粒子状材料を上記気化ゾーンに移しながら実施する、請求項18に記載の方法。
- 脱ガスされた上記粒子状材料を一体化する操作をさらに含む、請求項19に記載の方法。
- 上記粒子状材料を上記気化ゾーンに供給する速度が、気化した粒子状材料の堆積速度を規定している、請求項1に記載の方法。
- 上記粒子状材料が、2種類以上の異なる有機材料成分を含む、請求項1に記載の方法。
- 上記粒子状材料が不活性な担体を含む、請求項1に記載の方法。
- 粒子状材料を気化させて表面上に凝縮させることで層を形成する方法であって、
(a)ある量の粒子状材料を、その粒子状材料が自由に通過できるサイズの開口部を有する第1の容器に供給し;
(b)上記開口部を通じてその粒子状材料を第1の供給路に移し;
(c)その第1の供給路内の粒子状材料がその第1の供給路に沿って移動するときにあらかじめ処理して吸着したガスまたは不純物を除去し;
(d)そのあらかじめ処理した粒子状材料を第1の供給路から移動させて第2の供給路に沿って気化ゾーンに供給し、そこでそのあらかじめ処理した粒子状材料を気化させて表面上に凝縮させることで層を形成する操作を含む方法。 - 粒子状材料を収容するための第2の容器を用意し、その第2の容器から第1の容器に粒子状材料を移す操作をさらに含む、請求項24に記載の方法。
- 第2の容器から第1の容器に移される上記粒子状材料を計量し、その第1の容器の中にある粒子状材料の体積を実質的に一定にする操作をさらに含む、請求項25に記載の方法。
- 上記粒子状材料を第1の容器から第1の供給路に移すためにその第1の容器に取り付けるスクリュー構造を用意する操作をさらに含む、請求項24に記載の方法。
- 上記スクリュー構造が第1の容器の内部を貫通している、請求項27に記載の方法。
- 第1の供給路からあらかじめ処理した上記粒子状材料を収容するための第3の容器を用意し、そのあらかじめ処理した粒子状材料を第2の供給路に供給するために第3の容器に取り付けるスクリュー構造を用意する操作をさらに含む、請求項25に記載の方法。
- 第2の供給路が上記スクリュー構造によって規定される、請求項29に記載の方法。
- 上記スクリュー構造が第3の容器の内部を貫通している、請求項29に記載の方法。
- 振動装置を用いて上記粒子状材料を振動させる操作をさらに含む、請求項24に記載の方法。
- 上記振動装置が、ピエゾ電気構造または回転する螺旋式装置を備える、請求項32に記載の方法。
- 上記粒子状材料を上記気化ゾーンに供給する速度が、気化した粒子状材料の堆積速度を規定している、請求項24に記載の方法。
- 上記粒子状材料が、2種類以上の異なる有機材料成分を含む、請求項24に記載の方法。
- 粒子状材料をあらかじめ処理する上記ステップが、その粒子状材料を真空に曝露するステップを含む、請求項24に記載の方法。
- 上記粒子状材料を加熱するステップをさらに含む、請求項36に記載の方法。
- 上記スクリュー構造によって移される上記粒子状材料が、上記気化ゾーンと第1の容器の間の真空シールの少なくとも一部を提供する、請求項1に記載の方法。
- 第1の容器内の上記粒子状材料を不活性ガスの中に維持する、請求項1に記載の方法。
- 上記粒子状材料が不活性な担体を含む、請求項24に記載の方法。
- 上記粒子状材料が有機材料を含む、請求項24に記載の方法。
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US7501152B2 (en) | 2009-03-10 |
EP2239352A3 (en) | 2011-06-08 |
KR101348672B1 (ko) | 2014-01-08 |
KR20070053286A (ko) | 2007-05-23 |
EP1794345A2 (en) | 2007-06-13 |
EP2239352B1 (en) | 2013-06-05 |
EP1794345B1 (en) | 2015-11-18 |
EP2239352A2 (en) | 2010-10-13 |
JP5480332B2 (ja) | 2014-04-23 |
WO2006034019A2 (en) | 2006-03-30 |
KR20120059628A (ko) | 2012-06-08 |
JP2008513964A (ja) | 2008-05-01 |
WO2006034019A3 (en) | 2006-11-09 |
US20060062920A1 (en) | 2006-03-23 |
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