JP2008513221A - フレキシブル回路のはんだ付け - Google Patents
フレキシブル回路のはんだ付け Download PDFInfo
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- 238000005476 soldering Methods 0.000 title description 3
- 229910000679 solder Inorganic materials 0.000 claims abstract description 118
- 238000000034 method Methods 0.000 claims abstract description 19
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 239000000463 material Substances 0.000 claims description 41
- 238000005086 pumping Methods 0.000 claims description 20
- 238000000151 deposition Methods 0.000 claims description 5
- 239000000155 melt Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000002844 melting Methods 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 abstract description 17
- 239000002184 metal Substances 0.000 abstract description 17
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 229910052718 tin Inorganic materials 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000011135 tin Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
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- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J2/01—Ink jet
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- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
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- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
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- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B41J2/16—Production of nozzles
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- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/36—Assembling printed circuits with other printed circuits
- H05K3/361—Assembling flexible printed circuits with other printed circuits
- H05K3/363—Assembling flexible printed circuits with other printed circuits by soldering
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14491—Electrical connection
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/20—Details of printed circuits not provided for in H05K2201/01 - H05K2201/10
- H05K2201/2081—Compound repelling a metal, e.g. solder
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/03—Metal processing
- H05K2203/0315—Oxidising metal
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3452—Solder masks
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
- Y10T29/49144—Assembling to base an electrical component, e.g., capacitor, etc. by metal fusion
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
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- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Multi-Conductor Connections (AREA)
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- Electric Connection Of Electric Components To Printed Circuits (AREA)
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Abstract
Description
一般に、1つの局面において、本発明は、第一の電極および第二の電極、ならびにこれらの電極の間に配置された圧電層を備える、アクチュエータを特徴とする。マスクが、この第一の電極上に形成され、このマスクは、この第一の電極の第一の部分に隣接する。はんだ材料が、この第一の電極によって支持され、そしてこの第一の電極の第二の部分に隣接する。この第一の電極の第一の部分は、この第一の電極の第二の部分と重ならず、そしてこのマスクは、このはんだ材料が融解する場合に、このはんだ材料によって実質的に濡らされない材料を含有する。
はんだがアクチュエータ上で融解される場合に、このはんだの位置を制御するための技術が提供される。この技術は、集積回路を微小電気機械的デバイス(例えば、インクジェットプリンター)のアクチュエータに接続するために使用される、はんだの流動を制御するために実施され得る。
Claims (18)
- アクチュエータであって、
第一の電極;
該第一の電極を支持している圧電材料を備える、支持基材;
該第一の電極上に形成されたマスクであって、該マスクは、該第一の電極の第一の部分に隣接している、マスク;および
はんだ材料であって、該はんだ材料は、該第一の電極によって支持されており、そして該第一の電極の第二の部分に隣接している、はんだ材料、
を備え、該第一の電極の該第一の部分は、該第一の電極の該第二の部分と重なっておらず、そして該マスクは、該はんだが融解する場合に、該はんだ材料によって実質的に濡らされない材料を含有する、アクチュエータ。 - 前記マスクが、酸化物材料を含有する、請求項1に記載のアクチュエータ。
- 第二の電極をさらに備え、前記はんだ材料は、前記第一の電極および第二の電極を集積回路に電気的に接続する、請求項1に記載のアクチュエータ。
- フレキシブル回路をさらに備え、前記はんだ材料は、該フレキシブル回路を前記第一の電極に電気的に接続する、請求項1に記載のアクチュエータ。
- 前記第一の部分が、前記第二の電極がデバイスに結合される場合の該デバイスのチャンバの位置に対応する、請求項1に記載のアクチュエータ。
- 前記マスクが、約0.1ミクロンと約2ミクロンとの間の厚さである、請求項1に記載のアクチュエータ。
- 前記マスクが、約0.5ミクロンの厚さである、請求項6に記載のアクチュエータ。
- プリントヘッドであって、
内部に流路特徴が形成される基材であって、該流路特徴は、ポンプ送りチャンバおよびノズルを備える、基材;ならびに
該基材に結合されたアクチュエータであって、該アクチュエータは、
圧電層によって支持された第一の電極;
該第一の電極上に形成されたマスクであって、該マスクは、該第一の電極の第一の部分に隣接しており、そして該第一の電極の該第一の部分は、該ポンプ送りチャンバと実質的に重なっている、マスク;および
はんだ材料であって、該はんだ材料は、該第一の電極によって支持されており、そして該第一の電極の第二の部分に隣接している、はんだ材料、
を備え、該第一の電極の該第一の部分は、該第一の電極に該第二の部分と重なっておらず、そして該マスクは、該はんだ材料が融解する場合に、該はんだ材料によって実質的に濡らされない材料を含有する、アクチュエータ、
を備える、プリントヘッド。 - 第二の電極をさらに備え、前記基材は、前記第一の電極よりも該第二の電極に近い、請求項8に記載のプリントヘッド。
- 前記マスクが、約0.1ミクロンと約2ミクロンとの間の厚さである、請求項8に記載のプリントヘッド。
- 前記マスクが、約0.5ミクロンの厚さである、請求項10に記載のプリントヘッド。
- 前記マスクが、酸化物を含有する、請求項8に記載のプリントヘッド。
- 微小電気機械的デバイスを形成する方法であって、
アクチュエータを基材の上表面に形成する工程であって、該アクチュエータは、圧電層および第一の電極を備える、工程;
該第一の電極の第一の部分が、環境に対して露出し、そして該第一の電極の第二の部分が、はんだマスクによって覆われるように、該第一の電極上に該はんだマスクを形成する工程;
該第一の電極に、該第一の電極の該第一の部分において、はんだを塗布する工程;
フレキシブル回路を該はんだと接触させる工程;ならびに
該はんだを加熱して、該はんだに、該フレキシブル回路を該第一の電極に電気的に接触させる工程であって、該はんだマスクは、該はんだが加熱される場合に、該はんだが該第一の部分の上を流動することを防止する、工程、
を包含する、方法。 - はんだマスクを形成する工程が、前記はんだが融解する場合に該はんだによって実質的に濡らされない材料を塗布する工程を包含する、請求項13に記載の方法。
- 前記はんだマスクを形成する工程が、酸化物を堆積させる工程を包含する、請求項13に記載の方法。
- 前記基材を提供する工程において、該基材が、ポンプ送りチャンバを備え;そして
はんだマスクを形成する工程が、前記はんだの融解温度以下では融解しないはんだマスクを形成する工程を包含し、そして該ポンプ送りチャンバの実質的に上方に位置し、その結果、該はんだが加熱される場合、該はんだマスクは、該はんだが、該ポンプ送りチャンバ上を流動することを防止する、
請求項15に記載の方法。 - 前記はんだマスクを形成する工程が、該はんだマスクを約0.1ミクロンと約2ミクロのとの間の厚さに形成する工程を包含する、請求項16に記載の方法。
- 前記はんだマスクを形成する工程が、約0.5ミクロンの厚さに形成する工程を包含する、請求項17に記載の方法。
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Application Number | Priority Date | Filing Date | Title |
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US10/950,284 US7249826B2 (en) | 2004-09-23 | 2004-09-23 | Soldering a flexible circuit |
PCT/US2005/034181 WO2006034457A1 (en) | 2004-09-23 | 2005-09-22 | Soldering a flexible circuit |
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JP2008513221A true JP2008513221A (ja) | 2008-05-01 |
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JP2007532690A Pending JP2008513221A (ja) | 2004-09-23 | 2005-09-22 | フレキシブル回路のはんだ付け |
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US (2) | US7249826B2 (ja) |
EP (1) | EP1808059A1 (ja) |
JP (1) | JP2008513221A (ja) |
KR (1) | KR101224045B1 (ja) |
CN (1) | CN101066002B (ja) |
WO (1) | WO2006034457A1 (ja) |
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KR100968850B1 (ko) * | 2007-01-29 | 2010-07-09 | (주)울텍 | 마이크로 인젝팅 디바이스 |
US7919714B2 (en) * | 2007-05-09 | 2011-04-05 | General Electric Company | System and a method for controlling flow of solder |
JP4994968B2 (ja) * | 2007-06-21 | 2012-08-08 | キヤノン株式会社 | インクジェットプリントヘッドの製造方法 |
TW201034129A (en) * | 2009-03-11 | 2010-09-16 | High Conduction Scient Co Ltd | Frame-type copper- clad ceramic substrate and the manufacturing method thereof |
CN106000753A (zh) * | 2016-07-12 | 2016-10-12 | 佛山市科日压电器件有限公司 | 复合式雾化片及其应用的雾化器 |
CN111216452B (zh) * | 2018-11-27 | 2021-08-17 | 西安增材制造国家研究院有限公司 | 一种压电式mems喷墨打印头及制作方法 |
CN109365205A (zh) * | 2018-12-13 | 2019-02-22 | 佛山市科日压电器件有限公司 | 新型超声雾化片及其应用的雾化装置 |
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Also Published As
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CN101066002B (zh) | 2012-01-04 |
US7249826B2 (en) | 2007-07-31 |
EP1808059A1 (en) | 2007-07-18 |
US7681307B2 (en) | 2010-03-23 |
KR20070057226A (ko) | 2007-06-04 |
KR101224045B1 (ko) | 2013-01-18 |
WO2006034457A1 (en) | 2006-03-30 |
US20080010820A1 (en) | 2008-01-17 |
CN101066002A (zh) | 2007-10-31 |
US20060061630A1 (en) | 2006-03-23 |
WO2006034457B1 (en) | 2006-05-11 |
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