JP2008232886A5 - - Google Patents

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Publication number
JP2008232886A5
JP2008232886A5 JP2007074098A JP2007074098A JP2008232886A5 JP 2008232886 A5 JP2008232886 A5 JP 2008232886A5 JP 2007074098 A JP2007074098 A JP 2007074098A JP 2007074098 A JP2007074098 A JP 2007074098A JP 2008232886 A5 JP2008232886 A5 JP 2008232886A5
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JP
Japan
Prior art keywords
sensor
vibrating piece
pressure
diaphragm
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007074098A
Other languages
English (en)
Japanese (ja)
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JP2008232886A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007074098A priority Critical patent/JP2008232886A/ja
Priority claimed from JP2007074098A external-priority patent/JP2008232886A/ja
Publication of JP2008232886A publication Critical patent/JP2008232886A/ja
Publication of JP2008232886A5 publication Critical patent/JP2008232886A5/ja
Pending legal-status Critical Current

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JP2007074098A 2007-03-22 2007-03-22 圧力センサ Pending JP2008232886A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007074098A JP2008232886A (ja) 2007-03-22 2007-03-22 圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007074098A JP2008232886A (ja) 2007-03-22 2007-03-22 圧力センサ

Publications (2)

Publication Number Publication Date
JP2008232886A JP2008232886A (ja) 2008-10-02
JP2008232886A5 true JP2008232886A5 (enExample) 2010-05-13

Family

ID=39905848

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007074098A Pending JP2008232886A (ja) 2007-03-22 2007-03-22 圧力センサ

Country Status (1)

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JP (1) JP2008232886A (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010019826A (ja) 2008-03-25 2010-01-28 Epson Toyocom Corp 圧力センサ
JP2010019829A (ja) 2008-06-11 2010-01-28 Epson Toyocom Corp 圧力センサー
JP2010019827A (ja) 2008-06-11 2010-01-28 Epson Toyocom Corp 圧力センサー
JP2010019828A (ja) 2008-06-11 2010-01-28 Epson Toyocom Corp 圧力センサー用ダイアフラムおよび圧力センサー
JP5187529B2 (ja) * 2008-07-22 2013-04-24 セイコーエプソン株式会社 圧力センサー
JP4756394B2 (ja) * 2009-03-04 2011-08-24 セイコーエプソン株式会社 圧力センサー
JP2011141223A (ja) * 2010-01-08 2011-07-21 Seiko Epson Corp 圧力感知ユニット、及び圧力センサー
JP2012058024A (ja) * 2010-09-07 2012-03-22 Seiko Epson Corp 圧力センサー
JP2012073163A (ja) * 2010-09-29 2012-04-12 Seiko Epson Corp 圧力センサー
JP6143926B1 (ja) * 2016-07-09 2017-06-07 日本特殊陶業株式会社 圧力センサ
CN109883580B (zh) * 2019-03-19 2020-11-17 西安交通大学 一种全石英差动式谐振压力传感器芯片

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5420780A (en) * 1977-07-15 1979-02-16 Tomio Kotaki Crystal oscillation type force detector
JPS5679221A (en) * 1979-11-30 1981-06-29 Yokogawa Hokushin Electric Corp Force-frequency converting element
JPS6394128A (ja) * 1986-10-08 1988-04-25 Nippon Dempa Kogyo Co Ltd 音又型圧電センサ
JPH0629705Y2 (ja) * 1988-12-13 1994-08-10 横河電機株式会社 複合音叉式圧力センサ
JPH05223667A (ja) * 1992-02-13 1993-08-31 Yokogawa Electric Corp 振動式センサ
JP2001144581A (ja) * 1998-07-24 2001-05-25 Seiko Epson Corp 圧電振動子およびその製造方法
JP4586239B2 (ja) * 2000-01-11 2010-11-24 富士電機ホールディングス株式会社 静電容量型半導体センサおよびその製造方法
JP2003083829A (ja) * 2001-09-12 2003-03-19 Toyo Commun Equip Co Ltd 圧力センサ
JP2005241364A (ja) * 2004-02-25 2005-09-08 Omron Corp 圧力センサ

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