JP2008232886A - 圧力センサ - Google Patents

圧力センサ Download PDF

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Publication number
JP2008232886A
JP2008232886A JP2007074098A JP2007074098A JP2008232886A JP 2008232886 A JP2008232886 A JP 2008232886A JP 2007074098 A JP2007074098 A JP 2007074098A JP 2007074098 A JP2007074098 A JP 2007074098A JP 2008232886 A JP2008232886 A JP 2008232886A
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JP
Japan
Prior art keywords
pressure
sensor
vibrating piece
diaphragm
pressure sensor
Prior art date
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Pending
Application number
JP2007074098A
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English (en)
Japanese (ja)
Other versions
JP2008232886A5 (enExample
Inventor
Hisao Motoyama
久雄 本山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Miyazaki Epson Corp
Original Assignee
Epson Toyocom Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Epson Toyocom Corp filed Critical Epson Toyocom Corp
Priority to JP2007074098A priority Critical patent/JP2008232886A/ja
Publication of JP2008232886A publication Critical patent/JP2008232886A/ja
Publication of JP2008232886A5 publication Critical patent/JP2008232886A5/ja
Pending legal-status Critical Current

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JP2007074098A 2007-03-22 2007-03-22 圧力センサ Pending JP2008232886A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007074098A JP2008232886A (ja) 2007-03-22 2007-03-22 圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007074098A JP2008232886A (ja) 2007-03-22 2007-03-22 圧力センサ

Publications (2)

Publication Number Publication Date
JP2008232886A true JP2008232886A (ja) 2008-10-02
JP2008232886A5 JP2008232886A5 (enExample) 2010-05-13

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ID=39905848

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007074098A Pending JP2008232886A (ja) 2007-03-22 2007-03-22 圧力センサ

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JP (1) JP2008232886A (enExample)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7779700B2 (en) 2008-06-11 2010-08-24 Epson Toyocom Corporation Pressure sensor
JP2010203977A (ja) * 2009-03-04 2010-09-16 Epson Toyocom Corp 圧力センサー
US7895896B2 (en) 2008-06-11 2011-03-01 Epson Toyocom Corporation Pressure sensor
JP2011141223A (ja) * 2010-01-08 2011-07-21 Seiko Epson Corp 圧力感知ユニット、及び圧力センサー
US8015881B2 (en) 2008-03-25 2011-09-13 Epson Toyocom Corporation Pressure sensor
CN102401716A (zh) * 2010-09-07 2012-04-04 精工爱普生株式会社 压力传感器
CN102435383A (zh) * 2010-09-29 2012-05-02 精工爱普生株式会社 压力传感器
US8297124B2 (en) 2008-07-22 2012-10-30 Seiko Epson Corporation Pressure sensor
US8312775B2 (en) 2008-06-11 2012-11-20 Seiko Epson Corporation Diaphragm for pressure sensor and pressure sensor
CN109883580A (zh) * 2019-03-19 2019-06-14 西安交通大学 一种全石英差动式谐振压力传感器芯片
EP3483578A4 (en) * 2016-07-09 2020-03-04 NGK Spark Plug Co., Ltd. PRESSURE SENSOR

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5420780A (en) * 1977-07-15 1979-02-16 Tomio Kotaki Crystal oscillation type force detector
JPS5679221A (en) * 1979-11-30 1981-06-29 Yokogawa Hokushin Electric Corp Force-frequency converting element
JPS6394128A (ja) * 1986-10-08 1988-04-25 Nippon Dempa Kogyo Co Ltd 音又型圧電センサ
JPH0281439U (enExample) * 1988-12-13 1990-06-22
JPH05223667A (ja) * 1992-02-13 1993-08-31 Yokogawa Electric Corp 振動式センサ
JP2001144581A (ja) * 1998-07-24 2001-05-25 Seiko Epson Corp 圧電振動子およびその製造方法
JP2001267588A (ja) * 2000-01-11 2001-09-28 Fuji Electric Co Ltd 静電容量型半導体センサおよびその製造方法
JP2003083829A (ja) * 2001-09-12 2003-03-19 Toyo Commun Equip Co Ltd 圧力センサ
JP2005241364A (ja) * 2004-02-25 2005-09-08 Omron Corp 圧力センサ

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5420780A (en) * 1977-07-15 1979-02-16 Tomio Kotaki Crystal oscillation type force detector
JPS5679221A (en) * 1979-11-30 1981-06-29 Yokogawa Hokushin Electric Corp Force-frequency converting element
JPS6394128A (ja) * 1986-10-08 1988-04-25 Nippon Dempa Kogyo Co Ltd 音又型圧電センサ
JPH0281439U (enExample) * 1988-12-13 1990-06-22
JPH05223667A (ja) * 1992-02-13 1993-08-31 Yokogawa Electric Corp 振動式センサ
JP2001144581A (ja) * 1998-07-24 2001-05-25 Seiko Epson Corp 圧電振動子およびその製造方法
JP2001267588A (ja) * 2000-01-11 2001-09-28 Fuji Electric Co Ltd 静電容量型半導体センサおよびその製造方法
JP2003083829A (ja) * 2001-09-12 2003-03-19 Toyo Commun Equip Co Ltd 圧力センサ
JP2005241364A (ja) * 2004-02-25 2005-09-08 Omron Corp 圧力センサ

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8015881B2 (en) 2008-03-25 2011-09-13 Epson Toyocom Corporation Pressure sensor
US7895896B2 (en) 2008-06-11 2011-03-01 Epson Toyocom Corporation Pressure sensor
US8091431B2 (en) 2008-06-11 2012-01-10 Seiko Epson Corporation Pressure sensor
US7779700B2 (en) 2008-06-11 2010-08-24 Epson Toyocom Corporation Pressure sensor
US8312775B2 (en) 2008-06-11 2012-11-20 Seiko Epson Corporation Diaphragm for pressure sensor and pressure sensor
CN102645301B (zh) * 2008-07-22 2015-09-23 精工爱普生株式会社 压力传感器
US8297124B2 (en) 2008-07-22 2012-10-30 Seiko Epson Corporation Pressure sensor
JP2010203977A (ja) * 2009-03-04 2010-09-16 Epson Toyocom Corp 圧力センサー
US8011252B2 (en) 2009-03-04 2011-09-06 Epson Toyocom Corporation Pressure sensor
JP2011141223A (ja) * 2010-01-08 2011-07-21 Seiko Epson Corp 圧力感知ユニット、及び圧力センサー
CN102401716A (zh) * 2010-09-07 2012-04-04 精工爱普生株式会社 压力传感器
CN102435383A (zh) * 2010-09-29 2012-05-02 精工爱普生株式会社 压力传感器
CN102435383B (zh) * 2010-09-29 2014-05-21 精工爱普生株式会社 压力传感器
US8667849B2 (en) 2010-09-29 2014-03-11 Seiko Epson Corporation Pressure sensor
EP3483578A4 (en) * 2016-07-09 2020-03-04 NGK Spark Plug Co., Ltd. PRESSURE SENSOR
CN109883580A (zh) * 2019-03-19 2019-06-14 西安交通大学 一种全石英差动式谐振压力传感器芯片
CN109883580B (zh) * 2019-03-19 2020-11-17 西安交通大学 一种全石英差动式谐振压力传感器芯片

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